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公开(公告)号：US20060158036A1
公开(公告)日：2006-07-20
申请号：US10563580
申请日：2003-09-18
IPC分类号： H02J9/00
CPC分类号： G11C5/141 , G11C5/143 , H02J7/345 , H02J9/061 , Y10T307/615
摘要： A backup circuit that can be fabricated by the standard CMOS process and has a small circuit scale. The backup circuit (10) is disposed between a digital circuit (20) including a storage circuit and a power supply terminal (TIN, TGND) for supplying power to the digital circuit. MOS transistors (MOS1, MOS2) connected in series are disposed between the power supply terminal (TIN, TGND) and a backup capacitor (C1). The MOS transistors (MOS1, MOS2) serve as resistors when the power is normally supplied to the power supply terminal, and as diodes each operating with its backward direction defined as the direction from the digital circuit toward the power supply terminal when the power is cut off.
摘要翻译： 一种备用电路，可以通过标准的CMOS工艺制造，并具有小的电路规模。 备用电路（10）设置在包括存储电路的数字电路（20）和电源端子（T INI IN，T SUB GND）之间，用于向 数字电路。 串联连接的MOS晶体管（MOS1，MOS2）配置在电源端子（T SUB，GND）与备用电容器（C 1）之间。 MOS晶体管（MOS1，MOS2）当电源正常地供给到电源端子时用作电阻器，并且当功率被定义为从数字电路朝向电源端子的方向时，其反向方向的二极管被定义为电源 被切断
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公开(公告)号：US20050109121A1
公开(公告)日：2005-05-26
申请号：US10986145
申请日：2004-11-12
CPC分类号： G01F1/6965 , G01F1/6845 , G01F1/696 , G01F1/72
摘要： In a thermal-type airflow meter that measures an intake airflow rate in an internal combustion engine of an automobile or the like, there has been a problem that pulsation errors caused by external fluctuations under the environment including a large pulsation and reverse flow in the intake valve are difficult to be reduced. In order to solve this problem, the invention provides a flowmeter comprising a detection element that outputs a non-linear signal corresponding to a flow rate, and a regulation means that regulates an output signal of the detection element for controlling. With this construction, the regulation means executes output regulation processing that regulates irregularities of the detection element in the output signal, and inequality linearization processing that regulates an average value of the output signal after the output regulation processing by means of regulating parameters.
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公开(公告)号：US06839643B2
公开(公告)日：2005-01-04
申请号：US10253542
申请日：2002-09-25
CPC分类号： G01F1/6965 , G01F1/6845 , G01F1/696 , G01F1/72
摘要： In a thermal-type airflow meter that measures an intake airflow rate in an internal combustion engine of an automobile or the like, there has been a problem that pulsation errors caused by external fluctuations under the environment including a large pulsation and reverse flow in the intake valve are difficult to be reduced. In order to solve this problem, the invention provides a flowmeter comprising a detection element that outputs a non-linear signal corresponding to a flow rate, and a regulation means that regulates an output signal of the detection element for controlling. With this construction, the regulation means executes output regulation processing that regulates irregularities of the detection element in the output signal, and inequality linearization processing that regulates an average value of the output signal after the output regulation processing by means of regulating parameters.
摘要翻译： 在测量汽车等的内燃机中的进气量的热式气流计中，存在由于在进气中具有大的脉动和反向流动的环境下的外部波动引起的脉动误差的问题 阀门难以减少。 为了解决这个问题，本发明提供了一种流量计，其包括：输出对应于流量的非线性信号的检测元件;以及调节装置，用于调节用于控制的检测元件的输出信号。 利用这种结构，调节装置执行调节输出信号中的检测元件的不规则性的输出调节处理，以及通过调节参数来调节输出调节处理之后的输出信号的平均值的不等式线性化处理。
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公开(公告)号：US06539322B1
公开(公告)日：2003-03-25
申请号：US09583770
申请日：2000-05-31
申请人： Masahiro Matsumoto , Kohei Sakurai , Fumio Murabayashi , Hiromichi Yamada , Tatsumi Yamauchi , Atsushi Miyazaki , Keiji Hanzawa
发明人： Masahiro Matsumoto , Kohei Sakurai , Fumio Murabayashi , Hiromichi Yamada , Tatsumi Yamauchi , Atsushi Miyazaki , Keiji Hanzawa
IPC分类号： G06M1102
CPC分类号： G01D3/08 , G01D3/022 , Y10T436/11
摘要： A sensor device is provided which included a digital arithmetic processing unit which performs arithmetic processing through a program stored therein in advance, a pulse generator for generating pulses through the program, and a unit for causing the output voltage of the sensor device to stay at either a power source voltage concerned or the ground voltage, when the pulses from the pulse generator are interrupted, thereby, a sensor device using digital arithmetic processing and outputting analogue voltages is provided allowing the host system to judge easily whether the sensor device is operating normally or is failing.
摘要翻译： 提供了一种传感器装置，其包括：数字运算处理单元，其预先通过存储在其中的程序执行算术处理;脉冲发生器，用于通过程序产生脉冲;以及单元，用于使传感器装置的输出电压停留在任一个 当来自脉冲发生器的脉冲被中断时，提供有关的电源电压或接地电压，由此提供使用数字运算处理和输出模拟电压的传感器装置，允许主机系统容易地判断传感器装置是否正常运行，或者 失败了
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公开(公告)号：US09766106B2
公开(公告)日：2017-09-19
申请号：US14355104
申请日：2011-11-28
申请人： Norio Ishitsuka , Keiji Hanzawa , Yasuo Onose , Noriyuki Sakuma
发明人： Norio Ishitsuka , Keiji Hanzawa , Yasuo Onose , Noriyuki Sakuma
摘要： A thermal air flow sensor that produces less measurement error is provided. The thermal air flow sensor includes: a semiconductor substrate; a heating resistor, resistance temperature detectors, and an electrical insulator that includes a silicon oxide film, wherein the heating resistor, the resistance temperature detectors, and the electrical insulator are formed on the semiconductor substrate; and a diaphragm portion formed by removing a portion of the semiconductor substrate. The heating resistor and the resistance temperature detectors are formed on the diaphragm portion. The thermal air flow sensor further includes a silicon nitride film formed as the electrical insulator above the heating resistor and the resistance temperature detectors. The silicon nitride film has steps conforming to the patterns of the heating resistor and the resistance temperature detectors. The silicon nitride film has a multilayer structure.
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76.发明授权Flow sensor, method for manufacturing flow sensor and flow sensor module 有权流量传感器，流量传感器和流量传感器模块的制造方法公开(公告)号：US08969977B2
公开(公告)日：2015-03-03
申请号：US12964935
申请日：2010-12-10
申请人： Tsutomu Kono , Yuuki Okamoto , Takeshi Morino , Keiji Hanzawa
发明人： Tsutomu Kono , Yuuki Okamoto , Takeshi Morino , Keiji Hanzawa
CPC分类号： G01F15/16 , G01F1/684 , G01F1/6842 , G01F1/692 , H01L23/495 , H01L29/84 , H01L2224/45144 , H01L2224/48091 , H01L2224/48227 , H01L2224/49171 , H01L2224/73265 , H01L2924/00014 , H01L2924/00
摘要： The invention provides a flow sensor structure for sealing the surface of an electric control circuit and a part of a semiconductor device via a manufacturing method capable of preventing occurrence of flash or chip crack when clamping the semiconductor device via a mold. The invention provides a flow sensor structure comprising a semiconductor device having an air flow sensing unit and a diaphragm formed thereto, and a board or a lead frame having an electric control circuit for controlling the semiconductor device disposed thereto, wherein a surface of the electric control circuit and a part of a surface of the semiconductor device is covered with resin while having the air flow sensing unit portion exposed. The invention further provides flow sensor structure in which surfaces of a resin mold, a board or a pre-mold component surrounding the semiconductor device are continuously not in contact with three walls of the semiconductor device orthogonal to a side on which the air flow sensing unit portion is disposed, or a manufacturing method for absorbing the dimensional variation of the semiconductor device by the deformation of springs or deformation of an elastic film in the thickness direction.
摘要翻译： 本发明提供了一种流量传感器结构，用于经由模具夹紧半导体器件时能够防止发生闪光或芯片裂纹的制造方法来密封电气控制电路和半导体器件的一部分的表面。 本发明提供了一种流量传感器结构，其包括具有气流检测单元和形成于其上的隔膜的半导体器件，以及具有用于控制设置在其上的半导体器件的电气控制电路的电路板或引线框架，其中， 电路和半导体器件的表面的一部分被树脂覆盖，同时使空气流感测单元部分暴露。 本发明还提供了一种流量传感器结构，其中围绕半导体器件的树脂模具，板或预模具部件的表面不连续地与半导体器件的三个壁接触，该壁与空气流量检测单元 或者通过弹簧的变形或弹性膜在厚度方向的变形来吸收半导体器件的尺寸变化的制造方法。
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公开(公告)号：USD674300S1
公开(公告)日：2013-01-15
申请号：US29397275
申请日：2011-07-14
申请人： Takayuki Saito , Hiromu Kikawa , Keiji Hanzawa
设计人： Takayuki Saito , Hiromu Kikawa , Keiji Hanzawa
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公开(公告)号：US20120055245A1
公开(公告)日：2012-03-08
申请号：US13209883
申请日：2011-08-15
申请人： Ryosuke DOI , Keiji Hanzawa
发明人： Ryosuke DOI , Keiji Hanzawa
IPC分类号： G01F1/68
CPC分类号： G01F1/6845 , G01F1/6842 , G01F1/692 , G01F5/00 , G01F15/10 , G01F15/105
摘要： In a thermal air flow sensor according to the invention, a hollow formed in a detecting element is communicated with a circuit chamber, in which driving circuit parts of the detecting element are mounted, or an intake duct exterior. Thereby, pressure in the hollow balances with pressure on the outside. Also, since the circuit chamber is provided to be isolated from a detection chamber, in which a detecting part of the detecting element is arranged, that is, a passage chamber, through which air being a measuring object flows, air flowing in the passage chamber can be restrained from flowing into the hollow to have an influence on flow output characteristics.
摘要翻译： 在根据本发明的热空气流量传感器中，形成在检测元件中的中空与安装有检测元件的驱动电路部分的电路室或进气管外部连通。 因此，空心中的压力与外部的压力平衡。 此外，由于电路室被设置为与检测元件的检测部分配置的检测室隔离，即，作为测量对象的空气流过的通道室，在通道室中流动的空气 可以抑制流入中空部分以对流量输出特性产生影响。
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79.发明申请Thermal Gas Flow Sensor and Control Device for Internal-Combustion Engine Using the Same 失效用于内燃机的热气流量传感器和控制装置公开(公告)号：US20080047341A1
公开(公告)日：2008-02-28
申请号：US11781569
申请日：2007-07-23
申请人： Yasuhiro KANAMARU , Keiji Hanzawa
发明人： Yasuhiro KANAMARU , Keiji Hanzawa
IPC分类号： G01F1/692
CPC分类号： G01F1/6845 , G01F1/688 , G01F15/006
摘要： An object of the invention is to realize a thermal gas flow sensor capable of reducing time fluctuation of a heating resistor. A heating resistor 3 and thermometric resistors 4 and 14 are formed on a surface of a thin-wall portion 2. Electrode drawn wires 18 to 23 and pad portions 8 to 13 are formed so as to draw signal lines from the heating resistor 3 and the thermometric resistors 4 and 14. Contact portions 24 to 29 are formed to come in contact with the heating resistor 3, the thermometric resistors 4 and 14, and the electrode drawn wires 18 to 23. The heating resistor 3 and the thermometric resistors 4 and 14 are covered with protective films 30a, 30b, and 31a and insulating films 31b and 30c. The protective films 31a and 31b are formed of a dense film formed of nitride or the like. A part coming in contact with a drawn wire portion 34 and the heating resistor 3 is covered with a contact barrier metal film 36 (titanium-based electrical conductor such as titanium nitride, titanium tungsten, and titanium). The titanium-based electrical conductor is a dense film and resistant to hydrogen. Therefore, it is possible to reduce a time fluctuation of the heating resistor.
摘要翻译： 本发明的目的是实现能够减少加热电阻器的时间波动的热气流量传感器。 在薄壁部分2的表面上形成一个加热电阻器3和测温电阻器4和14。 形成电极拉丝18〜23以及焊盘部8〜13，从加热电阻体3和测温电阻体4,14取出信号线。 形成接触部分24至29与加热电阻器3，测温电阻器4和14以及电极拉丝18至23接触。 加热电阻器3和温度测量电阻器4和14被保护膜30a，30b和31a以及绝缘膜31b和30c覆盖。 保护膜31a和31b由氮化物等形成的致密膜形成。 与拉丝部分34和加热电阻器3接触的部分被接触阻挡金属膜36（钛基电导体，例如氮化钛，钛钨和钛）覆盖。 钛基电导体是致密膜并且耐氢。 因此，可以减少加热电阻器的时间波动。
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公开(公告)号：US09784605B2
公开(公告)日：2017-10-10
申请号：US14407730
申请日：2012-06-15
申请人： Noboru Tokuyasu , Shinobu Tashiro , Keiji Hanzawa , Takeshi Morino , Ryosuke Doi , Akira Uenodan
发明人： Noboru Tokuyasu , Shinobu Tashiro , Keiji Hanzawa , Takeshi Morino , Ryosuke Doi , Akira Uenodan
CPC分类号： G01F1/684 , G01F1/6842 , G01F1/6845 , G01F1/6965 , G01F15/14
摘要： The present invention has been made to improve measurement accuracy of a thermal flow meter. In the thermal flowmeter according to the invention, a circuit package (400) that measures a flow rate is molded in a first resin molding process. In a second resin molding process, a housing (302) having an inlet trench (351), a bypass passage trench on frontside (332), an outlet trench (353), and the like are formed through resin molding, and an outer circumferential surface of the circuit package (400) produced in the first resin molding process is enveloped by a resin in the second resin molding process to fix the circuit package (400) to the housing (302).
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