摘要:
A processing system includes a transfer chamber, a plurality of chambers connected to the transfer chamber, a transfer apparatus disposed in the transfer chamber, and a control section configured to control the transfer apparatus. The transfer apparatus includes a base and transfer arm configured to perform a slide motion and a swing motion, respectively. The control section includes a storage portion and an operational controller. The storage portion stores pattern model data concerning a plurality of motion patterns each indicative of a composite motion of the slide motion and the swing motion, and track model data concerning time-based motion tracks respectively corresponding to the motion patterns. The operational controller is configured to retrieve necessary data from the pattern model data and the track model data and control the transfer apparatus in accordance therewith.
摘要:
A fluid supply apparatus with a plurality of flow lines branching out from one pressure regulator with the flow lines arranged in parallel and constructed so that opening or closing one flow passage will have no transient effect on the steady flow of the other flow passages. Each flow passage is provided with a time delay-type mass flow controller MFC so that when one closed fluid passage is opened, the mass flow controller on that flow passage reaches a set flow rate Qs in a specific delay time Δt from the starting point.The invention includes a method and an apparatus in which a plurality of gas types can be controlled in flow rate with high precision by one pressure-type flow control system.
摘要:
A fluid supply apparatus with a plurality of flow lines branching out from one pressure regulator with the flow lines arranged in parallel and constructed so that opening or closing one flow passage will have no transient effect on the steady flow of the other flow passages. Each flow passage is provided with a time delay-type mass flow controller MFC so that when one closed fluid passage is opened, the mass flow controller on that flow passage reaches a set flow rate Qs in a specific delay time At from the starting point. The invention includes a method and an apparatus in which a plurality of gas types can be controlled in flow rate with high precision by one pressure-type flow control system.
摘要:
A fluid supply apparatus with a plurality of flow lines branching out from one pressure regulator with the flow lines arranged in parallel and constructed so that opening or closing one flow passage will have no transient effect on the steady flow of the other flow passages. Each flow passage is provided with a time delay-type mass flow controller MFC so that when one closed fluid passage is opened, the mass flow controller on that flow passage reaches a set flow rate Qs in a specific delay time &Dgr;t from the starting point. The invention includes a method and an apparatus in which a plurality of gas types can be controlled in flow rate with high precision by one pressure-type flow control system.
摘要:
A method and apparatus for affixing a functional film on a panel surface having a curvature in three dimensional directions with at least one pushing roller. A pressing roller which is elastic has a shaft inside the roller. The shaft has a varied diameter of concave curvature with the largest portions at the ends of the shaft. The inner portion of the elastic roller is separated from the shaft by a clearance which is greater in the middle of the shaft. When the roller is pressed upon a three dimensional panel, the elastic roller is deformed into the clearance area and against the shaft. This permits even pressure to be applied across the panel. In a second embodiment, a main pushing roller unit may travel along the direction while pushing the functional film against the panel surface, followed by the two follow-up displacement pushing roller units which are displayed in response to the travel of the main pushing roller unit while pushing the functional film against the panel surface.
摘要:
The present invention relates to a laser light-source apparatus and a method of producing a laser beam, and particularly to a laser light-source apparatus capable of generating intermittent pulse light having a predetermined flickering time and emphasizing the brightness of its peak by a Bartley effect. A timing circuit forms a timing signal so as to allow an excitation type laser light source to produce the intermittent pulse light having the predetermined flickering time. A pumping laser pumps the excitation type laser light source based on the signal outputted from the timing circuit. The intermittent pulse light is flickering slower than a flicker value of a normal person in cycle. The time required to put out the intermittent pulse light is set to a time or so required to restore the sensitivity of each of human eyes to the maximum sensitivity after the human eyes have felt brightness since light has been launched into the human eyes.
摘要:
A laser apparatus employing a semiconductor laser or the like, and a method of controlling the laser apparatus capable of controlling an driving a temperature control unit on the basis of the sum of the respective power consumptions of the temperature control unit and a driving means so that the laser apparatus operates at a minimum power consumption. The temperature control unit included in a laser oscillator heats or cools a nonlinear optical medium, a temperature detecting means detects the temperature of the nonlinear optical medium, a power consumption detecting unit detects the respective power consumptions of the temperature control unit and the driving means, and a processing means controls and drives the temperature control unit on the basis of the sum of the respective power consumptions of the temperature control unit and the driving means.
摘要:
The present invention relates to a laser oscillating apparatus using a semiconductor laser or the like and a method of driving a laser beam source. The present invention relates particularly to a laser oscillating apparatus or the like having a nonlinear optical medium for generating a second harmonic and capable of by-pulse driving a laser beam source with high efficiency. In the laser oscillating apparatus, a optical resonator is composed of at least a laser crystal and an output mirror. The nonlinear optical medium for generating the second harmonic is inserted into the optical resonator. The laser beam source can effect pumping on the optical resonator so that the period T of a drive pulse produced from a pulse driving means satisfies a relation in .tau..sub.FL >T-.tau. with respect to .tau..sub.FL (fluorescence lifetime). Further, a first pulse can drive the laser beam source with the degree of not leading to the emission of a laser beam and a second pulse can drive the laser beam source so that the laser beam source produces the laser beam.
摘要:
In a television receiver having a pair of speakers provided at the right and left sides of its image display portion, respectively, for reproducing the stereo audio signal by the speakers, one of the pair of speakers is constituted by the speaker unit for reproducing the middle and high frequency range of the stereo audio signal, and the other of the pair of speakers is constituted by the speaker unit for reproducing all frequency range of the stereo audio signal which is superior in reproduction characteristics of the low frequency range audio signal than that of the speaker unit for reproducing the middle and high frequency range.