公开(公告)号：US20090226604A1

公开(公告)日：2009-09-10

申请号：US11991475

申请日：2006-09-05

申请人： Tadahiro Ohmi ,  Takaaki Matsuoka ,  Shozo Nakayama ,  Hironori Ito

发明人： Tadahiro Ohmi ,  Takaaki Matsuoka ,  Shozo Nakayama ,  Hironori Ito

IPC分类号： B05D5/06 ,  B05C9/06 ,  B05D1/36

CPC分类号： H01L51/001 ,  C23C14/12 ,  C23C14/243 ,  C23C14/568 ,  H01L51/56

摘要： To provide a film forming apparatus capable of using an expensive organic EL raw material without waste and uniformly forming an organic EL film over a long period of time and a jig therefor.A plurality of ejection vessels are provided for a single raw material container section. A switcher is provided for carrying out switching from a piping system, which evaporates an organic EL raw material in the raw material container section and supplies it along with a carrier gas to one of the ejection vessels, to a piping system for another ejection vessel. In this manner, by supplying the organic EL raw material from the single raw material container section to the plurality of ejection vessels by switching, the use efficiency of the organic EL raw material can be improved.

摘要翻译： 本发明提供能够在不浪费的情况下使用昂贵的有机EL原料并且能够长时间均匀地形成有机EL膜的成膜装置及其夹具。 为单个原料容器部提供多个喷射容器。 提供了一种用于从管道系统进行切换的切换器，其蒸发原料容器部分中的有机EL原料并将其与载气一起供应到其中一个排出容器，用于另一个喷射容器的管道系统。 以这种方式，通过将单一原料容器部分的有机EL原料通过切换提供给多个喷射容器，可以提高有机EL原料的使用效率。

公开(公告)号：US20090107521A1

公开(公告)日：2009-04-30

申请号：US12296989

申请日：2007-04-11

申请人： Tadahiro Ohmi ,  Akinobu Teramoto ,  Jiro Yamanaka ,  Nobutaka Mizutani ,  Osamu Nakamura ,  Takaaki Matsuoka ,  Ryoichi Ohkura

发明人： Tadahiro Ohmi ,  Akinobu Teramoto ,  Jiro Yamanaka ,  Nobutaka Mizutani ,  Osamu Nakamura ,  Takaaki Matsuoka ,  Ryoichi Ohkura

IPC分类号： B08B3/00 ,  F16L11/04 ,  F16L11/20

CPC分类号： H01L21/67051 ,  H01L21/6708

摘要： By adding a perfluoromonomer to PVDF being a fluororesin to soften it, the oxygen permeability can be significantly reduced and a flexible fluororesin tube can be obtained. The oxygen permeability can also be reduced by providing a nylon tube as an outer layer. The tube is used between a chemical solution or ultrapure water feeder and a chemical solution or ultrapure water utilizing apparatus such as a cleaning apparatus or a wet etching apparatus.

摘要翻译： 通过向作为氟树脂的PVDF添加全氟单体使其软化，可以显着降低透氧性，并且可以获得柔性的氟树脂管。 也可以通过提供尼龙管作为外层来降低透氧性。 该管用于化学溶液或超纯水给水器和化学溶液或超纯水利用设备如清洁设备或湿蚀刻设备。

公开(公告)号：US20090087545A1

公开(公告)日：2009-04-02

申请号：US11992229

申请日：2006-09-19

申请人： Tadahiro Ohmi ,  Takaaki Matsuoka ,  Shozo Nakayama ,  Hironori Ito

发明人： Tadahiro Ohmi ,  Takaaki Matsuoka ,  Shozo Nakayama ,  Hironori Ito

IPC分类号： C23C16/00 ,  B05D5/12 ,  B05B7/00 ,  B05B7/16 ,  G01N33/00 ,  G06F19/00

CPC分类号： C23C14/12 ,  C23C14/243 ,  C23C14/246

摘要： Provided are an evaporating jig by which a thin film, especially an organic EL film, can be uniformly formed over a long time, and a film forming apparatus including the evaporating jig. The evaporating jig is provided with an evaporating pan, having a bottom plane and side planes arranged to stand from the bottom plane, for defining a material containing space opened inside the side planes; and partitioning plates for partitioning the material containing space into a plurality of partial spaces. The partitioning plates are provided with locking pieces having a height which permits the partial spaces to be continuous on a bottom plane side of the evaporating pan.

摘要翻译： 提供了一种蒸发夹具，通过该蒸发夹具可以长时间均匀地形成薄膜，特别是有机EL膜，以及包括蒸发夹具的成膜设备。 蒸发夹具设置有蒸发盘，其具有布置成从底平面放置的底平面和侧平面，用于限定在侧平面内开口的材料容纳空间; 以及用于将包含空间的材料分隔成多个部分空间的分隔板。 分隔板设置有具有允许部分空间在蒸发盘的底平面侧上连续的高度的锁定件。

公开(公告)号：US20080254641A1

公开(公告)日：2008-10-16

申请号：US10585994

申请日：2005-01-13

申请人： Yasuo Kobayashi ,  Kenichi Nishizawa ,  Takatoshi Kameshima ,  Takaaki Matsuoka

发明人： Yasuo Kobayashi ,  Kenichi Nishizawa ,  Takatoshi Kameshima ,  Takaaki Matsuoka

IPC分类号： H01L21/31 ,  C23C16/513

CPC分类号： H01L21/76835 ,  H01L21/02118 ,  H01L21/02126 ,  H01L21/02167 ,  H01L21/02274 ,  H01L21/31144 ,  H01L21/3127 ,  H01L21/3143 ,  H01L21/31633 ,  H01L21/76811 ,  H01L21/76832

摘要： A dielectric film (91) made of CF is deposited on a substrate. A protective layer comprising an SiCN film (93) is formed on the dielectric film (91). A film (94) serving as a hardmask made of SiCO is deposited on the protective layer by a plasma containing active species of silicon, carbon, and oxygen. When the protective layer is formed, an SiC film (92) is deposited on the dielectric film (91) by a plasma containing active species of silicon and carbon, and thereafter the SiCN film (93) is deposited on the SiC film (92) by a plasma containing active species of silicon, carbon, and nitrogen.

摘要翻译： 由CF制成的电介质膜（91）沉积在基板上。 在绝缘膜（91）上形成包含SiCN膜（93）的保护层。 作为由SiCO制成的硬掩模的膜（94）通过含有活性物质的硅，碳和氧的等离子体沉积在保护层上。 当形成保护层时，通过含有活性物质的硅和碳的等离子体在电介质膜（91）上沉积SiC膜（92），然后将SiCN膜（93）沉积在SiC膜（92）上， 通过含有硅，碳和氮的活性物质的等离子体。

公开(公告)号：US06285102B1

公开(公告)日：2001-09-04

申请号：US09541720

申请日：2000-04-03

申请人： Takaaki Matsuoka ,  Teruo Asakawa

发明人： Takaaki Matsuoka ,  Teruo Asakawa

IPC分类号： B65G4907

CPC分类号： F16C29/025 ,  F16C32/06 ,  H01L21/67742 ,  H01L21/67745

摘要： A drive mechanism provides a friction free movement of a movable member operated under a negative pressure environment. A gas bearing arrangement movably supports the movable element relative to a stationary element. The gas bearing arrangement is configured to be operated under the negative pressure environment inside the chamber. A drive arrangement drives the movable element from outside the chamber.

摘要翻译： 驱动机构提供在负压环境下操作的可动构件的无摩擦运动。 气体轴承装置相对于静止元件可移动地支撑可移动元件。 气体轴承装置构造成在室内的负压环境下操作。 驱动装置从室外驱动可移动元件。