摘要:
A chemically amplified resist contains the following components: a polymer with carboxylic acid anhydride groups and tert-butylester, tert-butoxycarbonyloxy, tetrahydrofuranyl, or tetrahydropyranyl groups; a photoreactive compound which, when exposed or electron-irradiated, releases a sulfonic acid having a pKa value>0.5 (acid former); a compound that can enter into a reversible chemical reaction with the sulfonic acid (buffer compound); and a solvent.
摘要:
A chemically amplified resist for electron beam lithography contains the following components: a polymer with dissolution-inhibiting groups that can be cleaved with acid catalysis, a photo-reactive compound, which upon electron irradiation releases a sulfonic acid with a pKa value ≦2.5 (photo acid generator), an electron-beam-sensitive sensitizer enhancing the exposure sensitivity of the resist, such as a fluorene derivative, and a solvent.
摘要:
In a process for photolithographic generation of structures in the sub-200 nm range, a layer of amorphous hydrogen-containing carbon (a-C:H) with an optical energy gap of
摘要:
A system and a method for forming a packaged MEMS device are disclosed. In one embodiment a packaged MEMS device includes a MEMS device having a first main surface with a first area along a first direction and a second direction, a membrane disposed on the first main surface of the MEMS device and a backplate adjacent to the membrane. The packaged MEMS device further includes an encapsulation material that encapsulates the MEMS device and that defines a back volume, the back volume having a second area along the first direction and the second direction, wherein the first area is smaller than the second area.
摘要:
A thermally-assisted MRAM structure which is programmable at a writing mode operating temperature is presented and includes an anti-ferromagnet, an artificial anti-ferromagnet, a barrier layer, and a free magnetic layer. The anti-ferromagnet is composed of a material having a blocking temperature Tb which is lower than the writing mode operating temperature of the magnetic random access memory structure. The artificial anti-ferromagnet is magnetically coupled to the anti-ferromagnet, and includes first and second magnetic layers, and a coupling layer interposed therebetween, the first and second magnetic layers having different Curie point temperatures. The barrier layer is positioned to be between the second magnetic layer and the free magnetic layer.
摘要:
According to one embodiment of the present invention, an integrated circuit includes a plurality of thermal selectable memory cells, each memory cell being connected to a conductive line, the conductive line having a first portion for applying a heating current, and a second portion for applying a programming current. The integrated circuit is configured such that the heating current and the programming current can be routed respectively to the first and the second portion of the conductive line independently from each other.
摘要:
According to an embodiment, a method of manufacturing an integrated circuit including a plurality of resistivity changing memory cells is provided. The method includes: forming a stack of layers including a resistivity changing layer, a first conductive layer, a second conductive layer, and a patterned masking layer which are stacked above each other in this order; patterning the second conductive layer using the masking layer as a patterning mask; patterning the first conductive layer using the second conductive layer as a patterning mask; and patterning the resistivity changing layer using the first conductive layer as a patterning mask.
摘要:
Embodiment of the invention provide a method for programming an integrated circuit, methods for programming a plurality of cells, an integrated circuit, and a cell arrangement. An embodiment of the invention provides a method for programming an integrated circuit having a plurality of cells. The method includes grouping the plurality of cells into a first group of cells and a second group of cells depending on the cell state the cells should be programmed with. The first group of cells and the second group of cells each having a plurality of cells. The method further includes concurrently programming the cells of the first group of cells with a first cell state. After having programmed the cells of the first group of cells, the cells of the second group of cells are concurrently programmed with a second cell state, which is different from the first cell state.
摘要:
An integrated circuit having a magnetic device is disclosed. In one embodiment, the integrated circuit includes a reference structure having a first blocking temperature. A storage structure is provided made of a ferromagnetic material. An antiferromagnetic structure is provided having a second blocking temperature lower than the first blocking temperature.
摘要:
A magnetic random access memory cell includes a free layer structure and a reference layer structure including an anti-ferromagnetic layer structure pinning the magnetization orientation of the reference layer structure, the reference layer structure having a higher magnetic coercivity and being magnetically polarizable bidirectional and parallel to more than one axes by a magnetic field applied during a writing procedure so as to store information in the reference layer structure while heating the anti-ferromagnetic layer structure above its blocking temperature.