公开(公告)号：US08536889B2

公开(公告)日：2013-09-17

申请号：US12721039

申请日：2010-03-10

申请人： John E. Nelson ,  Jeffrey C. Sherry ,  Patrick J. Alladio ,  Russell F. Oberg ,  Brian Warwick ,  Gary W. Michalko

发明人： John E. Nelson ,  Jeffrey C. Sherry ,  Patrick J. Alladio ,  Russell F. Oberg ,  Brian Warwick ,  Gary W. Michalko

IPC分类号： G01R31/20 ,  G01R31/00

CPC分类号： G01R1/0416 ,  G01R1/0466 ,  G01R1/0483 ,  G01R1/0735 ,  G01R1/07371 ,  H01H13/702 ,  H01H2203/04 ,  H01H2205/006 ,  H01H2207/028 ,  H01H2209/052 ,  H01R12/7082 ,  H01R13/2414

摘要： The terminals of a device under test are temporarily electrically connected to corresponding contact pads on a load board by a series of electrically conductive pin pairs. The pin pairs are held in place by an interposer membrane that includes a top contact plate facing the device under test, a bottom contact plate facing the load board, and a vertically resilient, non-conductive member between the top and bottom contact plates. Each pin pair includes a top and bottom pin, which extend beyond the top and bottom contact plates, respectively, toward the device under test and the load board, respectively. The top and bottom pins contact each other at an interface that is inclined with respect to the membrane surface normal. When compressed longitudinally, the pins translate toward each other by sliding along the interface. The sliding is largely longitudinal, with a small and desirable lateral component determined by the inclination of the interface.

摘要翻译： 被测器件的端子通过一系列导电引脚对临时电连接到负载板上的对应接触焊盘。 销对通过插入器膜保持在适当的位置，该插入器膜包括面向被测器件的顶部接触板，面向负载板的底部接触板以及位于顶部和底部接触板之间的垂直弹性的非导电部件。 每个销对包括顶部和底部销，其分别延伸超过顶部和底部接触板，朝向被测设备和负载板。 顶部和底部销在相对于膜表面正常倾斜的界面处彼此接触。 当纵向压缩时，销沿着界面滑动朝向彼此平移。 滑动主要是纵向的，具有通过界面的倾斜度确定的小且期望的侧向分量。

公开(公告)号：US08519731B1

公开(公告)日：2013-08-27

申请号：US12942526

申请日：2010-11-09

申请人： Cathal N. McAuley ,  Fergal W. Keating

发明人： Cathal N. McAuley ,  Fergal W. Keating

IPC分类号： G01R31/02 ,  G01R31/20

CPC分类号： G01R31/2898 ,  G01R31/31717

摘要： Method and apparatus for electrically charactering an integrated circuit (IC) are described. In an example, a data line in conductive interconnect of the IC is identified that is failing. First and second vertical trenches are milled in the IC along the data line to expose respective first and second cross-sections of the conductive interconnect having the data line. First and second probes are placed in contact with the data line in the first and second vertical trenches, respectively. A determination is made whether the data line is open or shorted between the first and second vertical trenches using an electrical measurement device coupled to the first and second probes.

摘要翻译： 描述用于电特性集成电路（IC）的方法和装置。 在一个示例中，识别IC的导电互连中的数据线是失败的。 沿着数据线在IC中铣削第一和第二垂直沟槽，以暴露具有数据线的导电互连的相应的第一和第二横截面。 第一和第二探针分别与第一和第二垂直沟槽中的数据线接触。 使用耦合到第一和第二探针的电测量装置确定数据线是在第一和第二垂直沟槽之间是开放还是短路。

公开(公告)号：US08513965B2

公开(公告)日：2013-08-20

申请号：US12938164

申请日：2010-11-02

申请人： Keith J. Breinlinger

发明人： Keith J. Breinlinger

IPC分类号： G01R31/20

CPC分类号： G01R31/2891

摘要： A probe card assembly can comprise a first source of compliance and a second source of compliance. The probe card assembly can further comprise a controller, which can be configured to apportion a total compliance demand placed on the probe card assembly between the first source of compliance and the second source of compliance.

摘要翻译： 探针卡组件可以包括第一顺应源和第二顺应源。 探针卡组件还可以包括控制器，其可以被配置为在第一合格源和第二符合源之间分配放置在探针卡组件上的总顺从性要求。

公开(公告)号：US20130207684A1

公开(公告)日：2013-08-15

申请号：US13370713

申请日：2012-02-10

申请人： Yui Kin TANG ,  Chak Tong SZE ,  Pei Wei TSAI ,  Cho Hin CHEUK ,  Kut LAM

发明人： Yui Kin TANG ,  Chak Tong SZE ,  Pei Wei TSAI ,  Cho Hin CHEUK ,  Kut LAM

IPC分类号： G01R31/20

CPC分类号： G01R3/00 ,  G01R31/2601 ,  G01R31/2635

摘要： An apparatus for maintaining a conductivity of electrical contacts of a test contactor for testing electronic devices comprises a rotary turret disk having a plurality of test stands operative to hold respective electronic devices, the electronic devices being rotatable by the rotary turret disk to a position of the test contactor to be contacted by the electrical contacts during testing. At least one contactor maintenance stand comprising a maintenance component is located between adjacent test stands on the rotary turret disk, wherein the electrical contacts of the test contactor are adapted to engage the maintenance component so as to automatically clean the electrical contacts and/or verify the conductivity thereof.

摘要翻译： 用于维持用于测试电子设备的测试接触器的电触点的导电性的装置包括具有多个测试台的旋转转盘盘，其可操作以保持相应的电子设备，电子设备可由旋转转盘盘旋转到 试验接触器在测试期间由电气触点接触。 包括维护部件的至少一个接触器维护支架位于旋转转盘盘上的相邻测试台之间，其中测试接触器的电触点适于接合维护部件，以便自动清洁电触点和/或验证 电导率。

公开(公告)号：US20130200916A1

公开(公告)日：2013-08-08

申请号：US13474262

申请日：2012-05-17

申请人： Peter G. Panagas

发明人： Peter G. Panagas

IPC分类号： G01R31/20

CPC分类号： G01R1/0441 ,  G01R31/01 ,  G01R31/2893 ,  G06F3/044 ,  G06F2203/04103 ,  H01L21/67727 ,  H01L2924/0002 ,  H04M1/24 ,  H01L2924/00

摘要： A test system may be provided in which devices under test undergo various types of testing. A first test location may have test equipment for testing input/output devices in the devices under test. A second test location may have test equipment for testing wireless communications circuitry in the devices under test. A mobile storage cart having shelves may be used to store the devices under test and to convey the devices under test between test locations. The storage cart may be configured to engage with a stationary frame structure at a test location. Actuators underneath the storage cart may be used to position the storage cart in a desired location. Distance sensors may be used to obtain status information about each shelf in the storage cart. A computer-controlled loading structure may be used to load the devices under test from the storage cart into test enclosures.

摘要翻译： 可以提供一种测试系统，其中被测设备进行各种类型的测试。 第一个测试位置可能有测试设备用于测试被测设备中的输入/输出设备。 第二个测试位置可以具有用于测试被测设备中的无线通信电路的测试设备。 可以使用具有搁板的移动存储推车来存储被测设备并且在测试位置之间传送被测设备。 存储车可以被配置为在测试位置与固定框架结构接合。 存储推车下面的致动器可用于将存储推车放置在期望的位置。 可以使用距离传感器来获取有关存储车中每个搁架的状态信息。 可以使用计算机控制的装载结构将被测设备从存储车载入测试机箱。

公开(公告)号：US20130200915A1

公开(公告)日：2013-08-08

申请号：US13464898

申请日：2012-05-04

申请人： Peter G. Panagas

发明人： Peter G. Panagas

IPC分类号： G01R31/20

CPC分类号： G01R1/0441 ,  G01R31/01 ,  G01R31/2893 ,  G06F3/044 ,  G06F2203/04103 ,  H01L21/67727 ,  H01L2924/0002 ,  H04M1/24 ,  H01L2924/00

摘要： A test system may be provided in which devices under test (DUTs) are loaded into test trays. Test trays may be tested at test stations. Test trays may be moved between test stations using a conveyor belt system. Each test station may include test equipment for testing DUTs and automated loading equipment for latching incoming test trays moving along the conveyor belt. The automated loading equipment may include a first movable arm configured to pick up a test tray from the conveyor belt and a second movable arm. The first arm may hand off (transfer) the test tray to the second arm. The second arm may move the test tray towards associated test equipment for testing. Upon completion of testing, the second arm may drop off the test tray onto the conveyor belt. Multiple layers of test stations may be stacked on top of each other for improved test throughput.

摘要翻译： 可以提供一种测试系统，其中被测设备（DUT）被装载到测试盘中。 测试台可以在测试台进行测试。 测试台可以使用传送带系统在测试台之间移动。 每个测试台可以包括用于测试DUT的测试设备和用于锁定沿传送带移动的进入测试盘的自动加载设备。 自动装载设备可以包括第一可移动臂，其构造成从传送带拾取测试托盘和第二可移动臂。 第一臂可以将测试托盘切换（转移）到第二臂。 第二臂可以将测试盘移动到相关的测试设备进行测试。 在完成测试之后，第二臂可以将测试托盘掉落到传送带上。 可以将多层测试站堆叠在一起，以提高测试吞吐量。

公开(公告)号：USRE44407E1

公开(公告)日：2013-08-06

申请号：US12646661

申请日：2009-12-23

申请人： January Kister

发明人： January Kister

IPC分类号： G01R31/20

CPC分类号： G01R1/07378 ,  G01R1/07357

摘要： Method and apparatus for electrical testing of a device under test (DUT) that employs a connection board with signal contacts for applying test signals and a space transformer that has low pitch contacts arranged on one or more circumferential shelves that define an enclosure in the space transformer. The apparatus has a substrate with fine pitch contacts positioned such that these are within the enclosure. A set of wire bonds is used for pitch reduction by interconnecting the fine pitch contacts with the low pitch contacts arranged on the shelves. The probes are connected to the fine pitch contacts and are used to apply the test signals to a DUT by contacting its pads. In some embodiments, the fine pitch contacts may be embodied by plugs or by blind metal vias.

摘要翻译： 一种用于对被测设备（DUT）进行电气测试的方法和装置，该设备采用具有用于施加测试信号的信号触点的连接板和具有低间距触点的空间变压器，所述空间变压器布置在定义空间变压器中的外壳的一个或多个周向架上 。 该装置具有定位为使得它们在外壳内的细间距触点的基板。 通过将细间距触点与布置在搁架上的低音调触点相互连接，一组引线键被用于降低音调。 探头连接到细间距触点，并用于通过接触其焊盘将测试信号施加到DUT。 在一些实施例中，细间距触点可以由插头或盲金属通孔来实现。

公开(公告)号：US08487641B2

公开(公告)日：2013-07-16

申请号：US12792533

申请日：2010-06-02

申请人： Qiang Guo ,  Bin Gong

发明人： Qiang Guo ,  Bin Gong

IPC分类号： G01R31/20

CPC分类号： G01R31/2884

摘要： The present invention discloses a pad structure and a method for testing a integrated circuit. The structure includes the first pads and the second pads, where the first pads are distributed over a peripheral portion of the integrated circuit and connected with lead-out wires of the integrated circuit, and the second pads are connected with a metal line at a circuit portion in the integrated circuit and are sized larger than the minimum characteristic dimension of the metal line and of the integrated circuit and smaller than the size of the first pads. The pad structure and method can position a test portion with improved efficiency. Correspondingly, a probe can be used to position the test portion with improved accuracy as well.

摘要翻译： 本发明公开了一种用于测试集成电路的焊盘结构和方法。 该结构包括第一焊盘和第二焊盘，其中第一焊盘分布在集成电路的周边部分上并与集成电路的引出线连接，第二焊盘与电路的金属线连接 并且其尺寸大于金属线和集成电路的最小特征尺寸，并且小于第一焊盘的尺寸。 衬垫结构和方法可以以改进的效率来定位测试部分。 相应地，可以使用探头来提高测量部分的准确度。

公开(公告)号：US08471578B2

公开(公告)日：2013-06-25

申请号：US12870895

申请日：2010-08-30

申请人： Koki Sato ,  Yasuyuki Miki ,  Keita Harada ,  Mitsuru Kobayashi ,  Hideo Miyazawa ,  Koki Takahashi

发明人： Koki Sato ,  Yasuyuki Miki ,  Keita Harada ,  Mitsuru Kobayashi ,  Hideo Miyazawa ,  Koki Takahashi

IPC分类号： G01R31/20

CPC分类号： H05K13/00 ,  G01R1/067 ,  G01R1/06722 ,  G01R3/00 ,  H01L21/67005 ,  Y10T29/49002 ,  Y10T29/49204

摘要： A probe is made to contact an electrode terminal in an electric circuit or an electronic part for an electric measurement of the electric circuit or the electronic part. The probe includes a terminal portion which is brought in contact with the electrode terminal at one end of the probe, a spring portion in which U-shaped unit portions are arrayed in a zigzag formation, and a housing portion which surrounds the spring portion. The probe is formed of a sheet of a sheet-metal plate which is bent multiple times, the sheet-metal plate having a predetermined configuration in which a portion corresponding to the terminal portion, a portion corresponding to the spring portion, and a portion corresponding to the housing portion are continuously linked together.

摘要翻译： 探针用于接触电路或电子部件中的电极端子，用于电路或电子部件的电测量。 探针包括在探针的一端与电极端子接触的端子部分，其中U形单元部分以锯齿形阵列排列的弹簧部分和围绕弹簧部分的壳体部分。 探针由多次弯曲的片状金属板形成，片状金属板具有预定的构造，其中对应于端子部分的部分，对应于弹簧部分的部分和对应于该部分的部分 连接到壳体部分。

公开(公告)号：US20130102091A1

公开(公告)日：2013-04-25

申请号：US13281148

申请日：2011-10-25

申请人： Jason D. King ,  Richard Pye ,  Randall B. Stimson ,  Steven R. Shirk

发明人： Jason D. King ,  Richard Pye ,  Randall B. Stimson ,  Steven R. Shirk

IPC分类号： H01L21/66 ,  G06F19/00 ,  G01R31/20

CPC分类号： G01R31/01 ,  G01R31/2834 ,  H01L22/20 ,  H01L2924/0002 ,  H01L2924/00

摘要： Techniques for configuring a test system that enable simple specification of a degree of concurrency in testing separate functional portions of a semiconductor device. For a test flow with multiple sub-flows; the pins accessed in connection with each sub-flow may define a flow domain. Site regions, each associated with a flow domain, may be defined. Tester sites may be associated with each of these flow domain specific site regions and independently operating resources may be assigned to these tester sites. A second portion of the defined site regions may be associated with tester sites, but resources assigned to these site regions may be accessed from multiple flow domains. Test blocks, even if not developed for concurrent execution, may be executed concurrently using resources in the flow domain specific site regions. Flexibility is provided to share resources through the use of the second portion of the site regions.

摘要翻译： 用于配置测试系统的技术，其能够在测试半导体器件的单独功能部分中简化规格的并发度。 对于具有多个子流的测试流程; 与每个子流程相关联的引脚可以定义流域。 可以定义每个与流域相关联的站点区域。 测试者站点可以与这些流域特定站点区域中的每一个相关联，并且可以将独立操作的资源分配给这些测试者站点。 定义的站点区域的第二部分可以与测试者站点相关联，但是可以从多个流域访问分配给这些站点区域的资源。 测试块即使不是用于并发执行的，也可以使用流域特定站点区域中的资源同时执行。 提供灵活性，通过使用第二部分网站区域来共享资源。