中科微点-全球专利检索

  1. Login
  2. Sign Up

Search Results

120 records (took 0.01 seconds)

    Partial pressure gauge using a cold-cathode ion source for leak detection in vacuum systems
    71.
    发明授权
    Partial pressure gauge using a cold-cathode ion source for leak detection in vacuum systems 失效
    在真空系统中使用冷阴离子源进行泄漏检测的部分压力计

    公开(公告)号：US5210413A

    公开(公告)日：1993-05-11

    申请号：US741457

    申请日：1991-08-08

    Applicant: Richard Balzer

    Inventor： Richard Balzer

    IPC: G01M3/20 ,  H01J41/06

    CPC classification number: H01J41/06 ,  G01M3/202

    Abstract: The partial pressure gauge consists of a combination of a magnetically confined cold-cathode discharge for the ionization of the residual gas in a vacuum system (ion source) and the magnetic separation of the ion masses (mass spectrometer). A suitable inhomogenous magnetic field configuration is instrumental in producing such a discharge that the energy spread of the ions is sufficiently small, which in turn guarantees the resolution required for mass separation in partial pressure measurements (for purposes of leak detection). The ions are accelerated solely within the electric field of the discharge. The special shape of the cold-cathode discharge influences the electric field in such a manner that the energy of the emitted ions is low and remains virtually independent of the potential applied to sustain the discharge. Due to the low ion energy a moderate magnetic field suffices for the mass separation. Hence, the mass spectrometer and the ion source can be integrated within the same magnetic field assembly.

    Abstract translation: PCT No.PCT / CH90 / 00272 Sec。 371日期1991年8月8日 102（e）日期1991年8月8日PCT 1990年11月27日PCT PCT。 出版物WO91 / 09413 日期：1991年6月27日。分压计包括用于真空系统（离子源）中残留气体电离的磁约束冷阴极放电和离子质量（质谱仪）的磁分离的组合， 。 合适的不均匀磁场结构有助于产生这样的放电，使得离子的能量扩散足够小，这又保证了分压测量（为了泄漏检测的目的）质量分离所需的分辨率。 离子仅在放电的电场内加速。 冷阴极放电的特殊形状以这样的方式影响电场，使得发射的离子的能量低，并且几乎不依赖于施加以维持放电的电位。 由于低离子能量，适度的磁场足以进行质量分离。 因此，质谱仪和离子源可以集成在相同的磁场组件内。

    Cold cathode magnetron ionization gauge with cathodes forming pole pieces for cylindrical magnet
    73.
    发明授权
    Cold cathode magnetron ionization gauge with cathodes forming pole pieces for cylindrical magnet 失效
    冷阴极电磁离子测量仪，阴极形成圆柱形电极

    公开(公告)号：US3555411A

    公开(公告)日：1971-01-12

    申请号：US3555411D

    申请日：1969-02-14

    Applicant: ATOMIC ENERGY COMMISSION

    Inventor： WOODS ROBERT O

    IPC: H01J41/06 ,  G01N27/62

    CPC classification number: H01J41/06

    Abstract: A COLD CATHODE MAGNETRON IONIZATION GAUGE FOR MEASURING VERY LOW PRESSURES, PARTICULARLY IN ENVIRONMENTS SUBJECT TO HIGH ACCELERATION AND VIBRATION CONDITIONS. MAGNETIC FLUX FOR INFLUENCING THE PATH OF ELECTRONS IS PROVIDED BY MEANS OF A HOLLOW MAGNET ENTIRELY ENCLOSED WITHIN THE GAUGE CAVITY. THE LOCATION OF THE MAGNET AND THE POSITION AND CONFIGURATION OF A PAIR OF CATHODES IS SUCH THAT A MAXIMUM PORTION OF THE AVAILABLE FLUX IS CONFINED TO THE USEFUL INTERNAL VOLUME OF THE GAUGE. THIS CONSTRUCTION ENSURES THAT MAGNETIC FLUX CLOSING OUTSIDE THE GAUGE IS HELD TO A MINIMUM.

Patent Agency Ranking