Liquid Chemical for Forming Protective Film
    81.
    发明申请
    Liquid Chemical for Forming Protective Film 审中-公开
    用于形成保护膜的液体化学品

    公开(公告)号:US20150270123A1

    公开(公告)日:2015-09-24

    申请号:US14430783

    申请日:2013-09-12

    IPC分类号: H01L21/02 C09D7/12 B08B3/04

    摘要: A liquid chemical for forming a water-repellent protective film, containing: a water-repellent protective film forming agent for forming a water-repellent protective film on a wafer having at its surface an uneven pattern and containing at least one kind of element selected from titanium, tungsten, aluminum, copper, tin, tantalum and ruthenium at surfaces of recessed portions of the uneven pattern, the protective film being formed at least on the surfaces of the recessed portions by retaining the liquid chemical at least on the recessed portions of the wafer before a rinsing treatment step of rinsing the wafer surface with a rinsing liquid consisting only of a protic polar solvent or a rinsing liquid containing a protic polar solvent as the principal component; and a solvent. The water-repellent protective film forming agent is at least one kind of compound represented by the following general formulas [1] to [3].

    摘要翻译: 一种用于形成防水保护膜的液体化学品,包括:在晶片上形成防水保护膜的防水保护膜形成剂,其表面具有不均匀图案并且含有至少一种选自 钛,钨,铝,铜,锡,钽和钌在凹凸图案的凹部的表面上形成,保护膜至少在凹部的表面上形成,至少在液体化学品的凹部 在仅用质子极性溶剂或含有质子极性溶剂作为主要成分的漂洗液的冲洗液冲洗晶片表面的冲洗处理步骤之前, 和溶剂。 防水保护膜形成剂是由以下通式[1]〜[3]表示的至少一种化合物。

    Electrolyte for Non-Aqueous Electrolyte Battery, and Non-Aqueous Electrolyte Battery Using Same
    82.
    发明申请
    Electrolyte for Non-Aqueous Electrolyte Battery, and Non-Aqueous Electrolyte Battery Using Same 审中-公开
    用于非水电解质电池的电解质和使用其的非水电解质电池

    公开(公告)号:US20150171475A1

    公开(公告)日:2015-06-18

    申请号:US14407801

    申请日:2013-06-10

    IPC分类号: H01M10/0568 H01M10/0569

    摘要: An electrolyte for non-aqueous electrolyte battery containing at least one compound selected from the group consisting of lithium difluoro(bis(oxalato))phosphate, lithium tetrafluoro(oxalato)phosphate and lithium difluoro(oxalato)borate as a first compound and at least one siloxane compound represented by the general formula (1) or the general formula (2) as a second compound in the electrolyte is disclosed. In addition to the improvement of initial characteristic, this electrolyte shows a tendency that storage stability, low temperature characteristic, etc. are superior, and exhibits well-balanced, superior, performances as a whole battery.

    摘要翻译: 一种含有至少一种选自二氟(双(草酸))磷酸锂,四氟(草酸)磷酸锂和二氟(草酸)二硼酸锂作为第一化合物的化合物和至少一种 公开了由通式(1)或通式(2)表示的硅氧烷化合物作为电解质中的第二化合物。 除了提高初始特性之外,该电解质显示出储能稳定性,低温特性等优异的趋势,并且表现出整体电池的良好平衡,优异的性能。

    Production method for 1-chloro-3,3,3-trifluoropropene
    83.
    发明授权
    Production method for 1-chloro-3,3,3-trifluoropropene 有权
    1-氯-3,3,3-三氟丙烯的制备方法

    公开(公告)号:US08987533B2

    公开(公告)日:2015-03-24

    申请号:US14369076

    申请日:2012-11-22

    摘要: A production method of 1-chloro-3,3,3-trifluoropropene according to the present invention includes reaction of 1,1,1,3,3-pentachloropropane with hydrogen fluoride, characterized in that the concentrations of respective catalytic components in the 1,1,1,3,3-pentachloropropane as the raw material is controlled to a predetermined level or less. By controlling the concentrations of the respective catalytic components in the 1,1,1,3,3-pentachloropropane to the predetermined level or less, it is possible to improve the problems of shortening of catalyst life, retardation of reaction and scaling or corrosion of equipment in the production of the 1-chloro-3,3,3-trifluoropropene. In addition, the 1,1,1,3,3-pentachloropropane can be obtained selectively with high yield by telomerization reaction of carbon tetrachloride and vinyl chloride. The present invention is thus useful as the method for industrially advantageous, high-yield production of the 1-chloro-3,3,3-trifluoropropene.

    摘要翻译: 根据本发明的1-氯-3,3,3-三氟丙烯的制备方法包括1,1,1,3,3-五氯丙烷与氟化氢的反应,其特征在于所述催化剂组分在1 作为原料的1,1,3,3-五氯丙烷被控制在预定水平以下。 通过将1,1,1,3,3-五氯丙烷中的各催化剂组分的浓度控制在预定水平或更低水平,可以改善催化剂寿命缩短,反应延迟和结垢或腐蚀的问题 设备生产的1-氯-3,3,3-三氟丙烯。 另外,通过四氯化碳和氯乙烯的调聚反应可以选择性地获得1,1,1,3,3-五氯丙烷。 因此,本发明可用作工业上有利的高产率生产1-氯-3,3,3-三氟丙烯的方法。

    Process for producing 1,2-dichloro-3,3,3-trifluoropropene
    84.
    发明授权
    Process for producing 1,2-dichloro-3,3,3-trifluoropropene 有权
    1,2-二氯-3,3,3-三氟丙烯的制备方法

    公开(公告)号:US08987532B2

    公开(公告)日:2015-03-24

    申请号:US14242309

    申请日:2014-04-01

    IPC分类号: C07C17/04

    CPC分类号: C07C17/04 C07C17/10 C07C25/18

    摘要: Disclosed is a process for producing 1,2-dichloro-3,3,3-trifluoropropene, which is characterized by that 1-halogeno-3,3,3-trifluoropropene represented by the general formula [1]: (In the formula, X represents a fluorine atom, chlorine atom or bromine atom.) is reacted with chlorine in a gas phase in the presence of a catalyst. It is possible by this process to produce 1,2-dichloro-3,3,3-trifluoropropene in an industrial scale with good yield by using 1-halogeno-3,3,3-trifluoropropene, which is available with a low price, as the raw material.

    摘要翻译: 公开了一种1,2-二氯-3,3,3-三氟丙烯的制备方法,其特征在于由通式[1]表示的1-卤代-3,3,3-三氟丙烯:(式中, X表示氟原子,氯原子或溴原子)在气相中在催化剂存在下与氯反应。 通过该方法可以通过使用以低价格提供的1-卤代-3,3,3-三氟丙烯,以工业规模生产出良好的产率的1,2-二氯-3,3,3-三氟丙烯, 作为原料。

    Method for Producing CIS-1,3,3,3-Tetrafluoropropene
    85.
    发明申请
    Method for Producing CIS-1,3,3,3-Tetrafluoropropene 有权
    制备CIS-1,3,3,3-四氟丙烯的方法

    公开(公告)号:US20150080618A1

    公开(公告)日:2015-03-19

    申请号:US14394219

    申请日:2013-04-02

    IPC分类号: C07C17/23

    摘要: A production method of cis-1,3,3,3-tetrafluoropropene according to the present invention includes the steps of: subjecting 1,1,1,3,3-pentafluoropropane to dehydrofluorination to form a reaction mixture (A) containing cis-1,3,3,3-tetrafluoropropene, trans-1,3,3,3-tetrafluoropropene and unreacted 1,1,1,3,3-pentafluoropropane; distilling the reaction mixture (A) to separate the trans-1,3,3,3-tetrafluoropropene from the reaction mixture (A) and collect a reaction mixture (B) containing the cis-1,3,3,3-tetrafluoropropene and the 1,1,1,3,3-pentafluoropropane; and reacting the reaction mixture (B) with a base and thereby obtaining the cis-1,3,3,3-tetrafluoropropene from the reaction mixture (B). This production method enables efficient production of high-purity cis-1,3,3,3-tetrafluoropropene and thus has industrial advantages.

    摘要翻译: 根据本发明的顺式-1,3,3,3-四氟丙烯的制备方法包括以下步骤:使1,1,1,3,3-五氟丙烷脱氟化氢,形成含有顺式-1,3,3,3-四氟丙烯的反应混合物(A) 1,3,3,3-四氟丙烯,反式-1,3,3,3-四氟丙烯和未反应的1,1,1,3,3-五氟丙烷; 蒸馏反应混合物(A)以从反应混合物(A)中分离反式-1,3,3,3-四氟丙烯,并收集含有顺式-1,3,3,3-四氟丙烯的反应混合物(B)和 1,1,1,3,3-五氟丙烷; 并使反应混合物(B)与碱反应,从反应混合物(B)得到顺式-1,3,3,3-四氟丙烯。 该制造方法能够高效地制造高纯度顺式-1,3,3,3-四氟丙烯,因此具有工业上的优点。

    Process for Producing 2-Chloro-1,3,3,3-Tetrafluoropropene
    86.
    发明申请
    Process for Producing 2-Chloro-1,3,3,3-Tetrafluoropropene 有权
    2-氯-1,3,3,3-四氟丙烯的制备方法

    公开(公告)号:US20150038749A1

    公开(公告)日:2015-02-05

    申请号:US14273113

    申请日:2014-05-08

    IPC分类号: C07C17/383 C07C17/23

    摘要: Disclosed is a process for producing 2-chloro-1,3,3,3-tetrafluoropropene (1224), including a first step of separating 2,3-dichloro-1,1,1,3-tetrafluoropropane 234da) into erythro form and threo form, and a second step of bringing the separated erythro form or threo form in contact with a base to obtain 2-chloro-1,3,3,3-tetrafluoropropene (1224). The first step is a step of separating 234da by distillation to achieve a separation into a fraction containing mainly erythro form and a fraction containing mainly threo form. In the second step, 1224 cis form is obtained from the erythro form, and 1224 trans form is obtained from the threo form. By this process, it is possible to selectively and efficiently produce cis form or trans form of 2-chloro-1,3,3,3-tetrafluoropropene (1224).

    摘要翻译: 公开了一种生产2-氯-1,3,3,3-四氟丙烯(1224)的方法,包括将2,3-二氯-1,1,1,3-四氟丙烷234da)分离成赤式的第一步骤和 苏打形式,和使分离的赤式或苏式与碱接触的第二步,得到2-氯-1,3,3,3-四氟丙烯(1224)。 第一步是通过蒸馏分离234da以实现分离成主要含有赤藓形态的馏分和主要包含苏式的馏分的步骤。 在第二步中,从赤式获得1224顺式,由苏式形成1224反式。 通过该方法,可以选择性地和有效地产生2-氯-1,3,3,3-四氟丙烯(1224)的顺式或反式。

    Method for Production of 1-Chloro-3,3,3-Trifluoropropene
    87.
    发明申请
    Method for Production of 1-Chloro-3,3,3-Trifluoropropene 审中-公开
    1-氯-3,3,3-三氟丙烯的制备方法

    公开(公告)号:US20140005447A1

    公开(公告)日:2014-01-02

    申请号:US13929219

    申请日:2013-06-27

    IPC分类号: C07C17/20 C07C17/23

    摘要: A production method of 1-chloro-3,3,3-trifluoropropene according to the present invention includes bringing a raw material composition containing 1,3,3,3-tetrafluoropropene and an acid composition containing hydrogen chloride into contact with each other in gas phase in the presence of a catalyst. This production method allows not only use of hydrogen chloride containing hydrogen fluoride, which has been generated during a preceding step (production of 1,1,1,3,3-pentafluoropropane as a raw material or analogues thereof), but also use of any of trans and cis isomers of the 1,1,1,3,3-pentafluoropropane for production of the 1-chloro-3,3,3-trifluoropropene. It is thus possible to efficiently produce the 1-chloro-3,3,3-trifluoropropene, which is known as an environment-adaptive chlorofluorocarbon. As the catalyst, preferred is an alumina catalyst treated by contact with hydrogen fluoride.

    摘要翻译: 根据本发明的1-氯-3,3,3-三氟丙烯的制备方法包括将含有1,3,3,3-四氟丙烯的原料组合物和含有氯化氢的酸组合物彼此接触在气体中 在催化剂存在下进行。 该制造方法不仅可以使用在前一步骤中产生的含氟化氢的氯化氢(以1,1,1,3,3-五氟丙烷为原料或其类似物的制备),而且还可以使用任何 的用于制备1-氯-3,3,3-三氟丙烯的1,1,1,3,3-五氟丙烷的反式和顺式异构体。 因此可以有效地生产被称为环境适应性氯氟烃的1-氯-3,3,3-三氟丙烯。 作为催化剂,优选通过与氟化氢接触而处理的氧化铝催化剂。

    Method of Preparing Liquid Chemical for Forming Protective Film
    88.
    发明申请
    Method of Preparing Liquid Chemical for Forming Protective Film 审中-公开
    制备液体化学品形成保护膜的方法

    公开(公告)号:US20130255534A1

    公开(公告)日:2013-10-03

    申请号:US13688856

    申请日:2012-11-29

    IPC分类号: H01L23/29

    摘要: Disclosed herein is a method for preparing a liquid chemical for forming a water-repellent protective film, the liquid chemical being for forming the water-repellent protective film at the time of cleaning a wafer having at its surface an uneven pattern and containing silicon element at least at a part of the uneven pattern at least on surfaces of recessed portions of the uneven pattern, the liquid chemical containing a nonaqueous organic solvent, a silylation agent, and an acid or a base. The method includes (i) adjusting a water content of the nonaqueous organic solvent to 200 mass ppm or less by dehydration; and (ii) mixing the nonaqueous organic solvent, the silylation agent, and the acid or the base after the adjusting step.

    摘要翻译: 本文公开了一种制备用于形成防水保护膜的液体化学品的方法,该液体化学品用于在其表面上清洁具有不均匀图案并且含有硅元素的晶片时形成防水保护膜 至少在不均匀图案的凹陷部分的至少在表面上的凹凸图案的一部分,液体化学品含有非水有机溶剂,甲硅烷基化剂和酸或碱。 该方法包括(i)通过脱水将非水有机溶剂的水分调节至200质量ppm以下; 和(ii)在调整步骤之后混合非水有机溶剂,甲硅烷基化剂和酸或碱。

    Silicon Compound, Condensation Product, Resist Compostion and Pattern Formation Method
    89.
    发明申请
    Silicon Compound, Condensation Product, Resist Compostion and Pattern Formation Method 审中-公开
    硅化合物,缩合产物,抗蚀剂组合和图案形成方法

    公开(公告)号:US20130137037A1

    公开(公告)日:2013-05-30

    申请号:US13678283

    申请日:2012-11-15

    IPC分类号: G03F7/075 G03F7/20 C07F7/18

    摘要: A silicon compound according to the present invention is represented by the general formula (1). This silicon compound can be easily synthesized by using a hydrolysable silicon compound such as alkoxysilane and has, in its molecule, a hydrolysable group e.g. alkoxy group and a photoacid generating group capable of being dissociated to generate an acid by irradiation with a high-energy ray. R1nAmSiB4-(n+m)  (1) where R1 is each independently a hydrogen atom, a C1-C20 straight or C3-C20 branched or cyclic hydrocarbon group; a carbon atom of the hydrocarbon group may be replaced by an oxygen atom; and the hydrocarbon group may contain a fluorine atom; A is an acid decomposable group; B is a hydrolysable group; n is an integer of 0 to 2; m is an integer of 1 to 3; and n+m is an integer of 1 to 3.

    摘要翻译: 根据本发明的硅化合物由通式(1)表示。 该硅化合物可以通过使用可水解硅化合物如烷氧基硅烷容易地合成,并且在其分子中具有可水解基团,例如, 烷氧基和能够通过高能射线照射而分解产生酸的光致酸产生基团。 R1nAmSiB4-(n + m)(1)其中R1各自独立地为氢原子,C1-C20直链或C3-C20支链或环状烃基; 烃基的碳原子可以被氧原子代替; 并且所述烃基可以含有氟原子; A是酸分解基团; B是可水解基团; n为0〜2的整数, m为1〜3的整数。 n + m为1〜3的整数。

    Gas for removing deposit and removal method using same

    公开(公告)号:US20040097091A1

    公开(公告)日:2004-05-20

    申请号:US10705532

    申请日:2003-11-12

    IPC分类号: H01L021/302 H01L021/461

    摘要: The invention relates to a gas for removing deposits by a gas-solid reaction. This gas includes a hypofluorite that is defined as being a compound having at least one OF group in the molecule. Various deposits can be removed by the gas, and the gas can easily be made unharmful on the global environment after the removal of the deposits, due to the use of a hypofluorite. The gas may be a cleaning gas for cleaning, for example, the inside of an apparatus for producing semiconductor devices. This cleaning gas comprises 1-100 volume % of the hypofluorite. Alternatively, the gas of the invention may be an etching gas for removing an unwanted portion of a film deposited on a substrate. The unwanted portion can be removed by this etching gas as precisely as originally designed, due to the use of a hypofluorite. The invention further relates to a method for removing a deposit by the gas. This method includes the step (a) bringing the gas into contact with the deposit, thereby to remove the deposit by a gas-solid reaction.