FILM FORMING SYSTEM AND METHOD FOR FORMING FILM
    82.
    发明申请
    FILM FORMING SYSTEM AND METHOD FOR FORMING FILM 审中-公开
    电影制作系统及其制作方法

    公开(公告)号:US20080095936A1

    公开(公告)日:2008-04-24

    申请号:US11771908

    申请日:2007-06-29

    CPC classification number: C23C16/4486 C23C16/45523

    Abstract: An obstruct of this invention is to downsize a chamber, consequently a film forming system, to improve a film thickness distribution and to improve throughput of film forming by increasing the amount of the vaporized liquid precursor. The film forming system 1 is to form a film by vaporizing a liquid precursor and then depositing the vaporized liquid precursor on a substrate W, and comprises a chamber 2 inside of which the substrate W is held and multiple injection valves 3 that are arranged at different positions in the chamber 2 and that directly inject the identical liquid precursor in the chamber 2, vaporize the identical liquid precursor by flash boiling and then supply the vaporized liquid precursor.

    Abstract translation: 本发明的阻碍是通过增加蒸发的液体前体的量来减小室的尺寸,从而缩小成膜系统以改善膜厚度分布并提高成膜的生产量。 成膜系统1是通过蒸发液体前体而形成膜,然后将蒸发的液体前体沉积在基板W上,并且包括在其内保持基板W的腔室2和布置在不同的多个喷射阀3 在腔室2中的位置,并且将相同的液体前体直接注入到腔室2中,通过闪蒸来蒸发相同的液体前体,然后供应蒸发的液体前体。

    Process for producing aqueous fluoropolymer dispersion and aqueous fluoropolymer dispersion
    83.
    发明申请
    Process for producing aqueous fluoropolymer dispersion and aqueous fluoropolymer dispersion 有权
    制备含氟聚合物含水分散体和含氟聚合物含水分散体的方法

    公开(公告)号:US20070135558A1

    公开(公告)日:2007-06-14

    申请号:US10577424

    申请日:2004-10-29

    Abstract: The present invention provides a method of producing a fluoropolymer aqueous dispersion by which the fluorine-containing emulsifier contained in the fluoropolymer aqueous dispersion as obtained after polymerization can be efficiently removed as well as a fluoropolymer aqueous dispersion low in fluorine-containing emulsifier concentration. The present invention is a method of producing a fluoropolymer aqueous dispersion which comprises carrying out a concentration treatment comprising a concentration operation of a pretreatment fluoropolymer aqueous dispersion, wherein the pretreatment fluoropolymer aqueous dispersion is obtained by carrying out a polymerization in an aqueous medium in the presence of a fluorine-containing surfactant (A), the fluorine-containing surfactant (A) is a fluorine-containing surfactant having an octanol/water partition coefficient of 1.5 to 3.5.

    Abstract translation: 本发明提供一种含氟聚合物水性分散体的制造方法,其中可以有效地除去聚合后得到的含氟聚合物水分散体中所含的含氟乳化剂以及含氟乳化剂浓度低的含氟聚合物水分散体。 本发明是一种含氟聚合物水性分散体的制造方法,其特征在于,进行包含预处理含氟聚合物水分散液的浓缩操作的浓缩处理,其中,所述预处理含氟聚合物水分散体是通过在水性介质中进行聚合而得到的 含氟表面活性剂(A)的含氟表面活性剂(A)为辛醇/水分配系数为1.5〜3.5的含氟表面活性剂。

    Tetrafluoroethylene based resin molding material excellent in high frequency electric characteristics
    84.
    发明授权
    Tetrafluoroethylene based resin molding material excellent in high frequency electric characteristics 有权
    四氟乙烯基树脂成型材料具有优异的高频电特性

    公开(公告)号:US07129298B2

    公开(公告)日:2006-10-31

    申请号:US10333821

    申请日:2001-08-02

    Abstract: The present invention provides a TFE resin molding material which has electric characteristics, particularly low dielectric dissipation factor, in a microwave area, can also lower extrusion pressure as the material is of low molecular weight and can provide a molded article excellent in surface smoothness. The material is especially useful as a coating material for a coaxial cable for equipment in which microwave is used, including satellite transmitting equipment and a cell phone base station. A tetrafluoroethylene resin molding material excellent in high frequency electric characteristics, which provides a molded article having a dielectric constant of at most 2.2 and a dielectric dissipation factor of at most 1.60×10−4 under 12 GHz, and a standard specific gravity of at least 2.192 and less than 2.3 is provided. As the tetrafluoroethylene resin, a tetrafluoroethylene homopolymer or a copolymer of 99.9 to 99.9999% by mole of tetrafluoroethylene and 0.0001 to 0.1% by mole of a specific fluoromonomer is used.

    Abstract translation: 本发明提供一种在微波区域具有电特性,特别是低介电损耗因数的TFE树脂成型材料,还可以降低挤出压力,因为该材料具有低分子量,并且可提供表面平滑性优异的成型体。 该材料作为用于其中使用微波的设备的同轴电缆的涂层材料是特别有用的,包括卫星发射设备和蜂窝电话基站。 一种高频电特性优异的四氟乙烯树脂成型材料,其提供介电常数为2.2以下的介电损耗因数和12GHz以下的1.60×10 -4以下的介电损耗因数, 提供了至少2.192和小于2.3的标准比重。 作为四氟乙烯树脂,使用四氟乙烯均聚物或99.9〜99.9999摩尔%的四氟乙烯和0.0001〜0.1摩尔%的特定含氟单体的共聚物。

    Fluorine-containing resin material lowly permeable to liquid chemical
    86.
    发明授权
    Fluorine-containing resin material lowly permeable to liquid chemical 有权
    含氟树脂材料对液体化学品渗透性低

    公开(公告)号:US06998454B2

    公开(公告)日:2006-02-14

    申请号:US10465643

    申请日:2003-06-20

    CPC classification number: C08F214/262 C08L27/18 Y10T428/3154

    Abstract: To provide a suitable material having improved impermeability to liquid chemicals and cracking resistance while retaining excellent heat resistance and processability inherent in FEP-based fluororesins, a molded article of which is useful in the field of semiconductor production apparatus and the like. The present invention provides a fluorine-containing resin material comprising a fluorine-containing copolymer comprising 85 to 95.5% by mole of a repeating unit derived from tetrafluoroethylene, 5 to 10% by mole of a repeating unit derived from hexafluoropropylene and 0.1 to 5% by mole of a repeating unit derived from at least one higher perfluoro(vinyl ether) represented by the formula (1): CF2═CF—O—Rf1  (1) wherein Rf1 is a perfluoroalkyl group having 5 to 10 carbon atoms or a perfluoro(alkoxyalkyl) group having 4 to 17 carbon atoms, and molded article thereof.

    Abstract translation: 为了提供对液体化学品具有改进的不渗透性和耐开裂性的合适的材料,同时保持了基于FEP的氟树脂固有的优异的耐热性和加工性,其成型制品可用于半导体制造装置等领域。 本发明提供一种含氟树脂材料,其含有含有85〜95.5摩尔%的来自四氟乙烯的重复单元,5〜10摩尔%的来自六氟丙烯的重复单元和0.1〜5重量% 摩尔衍生自由式表示的至少一种较高全氟(乙烯基醚)的重复单元

    Novel fluorine-containing polymer having acid-reactive group and chemically amplifying type photoresist composition prepared from same
    87.
    发明申请
    Novel fluorine-containing polymer having acid-reactive group and chemically amplifying type photoresist composition prepared from same 审中-公开
    具有酸反应性基团的新型含氟聚合物和由其制备的化学放大型光致抗蚀剂组合物

    公开(公告)号:US20050287471A1

    公开(公告)日:2005-12-29

    申请号:US11033954

    申请日:2005-01-13

    Abstract: There is provided a novel fluorine-containing polymer having an acid-reactive group which has a high transparency against energy rays (radioactive rays) in a vacuum ultraviolet region (157 nm), and further there are provided a material for fluorine-containing base polymer prepared from the polymer and suitable for a photoresist and a chemically amplifying type resist composition obtained therefrom. The polymer has a number average molecular weight of from 1,000 to 1,000,000 and represented by the formula: -(M1)-(M2)-(A)-, wherein M1 is a structural unit having an acid-labile or acid-degradable functional group, M2 is a structural unit of fluorine-containing acryl ester, A is a structural unit derived from other copolymerizable monomer, the percent by mole ratio M1/M2 is 1 to 99/99 to 1 and the polymer comprises from 1 to 99% by mole of the structural unit M1, from 1 to 99% by mole of the structural unit M2 and from 0 to 98% by mole of the structural unit A1. The material for fluorine-containing base polymer comprises a fluorine-containing polymer having an acid-reactive group such as the above-mentioned polymer and is suitable for a photoresist, and the chemically amplifying type resist composition is obtained from those polymer and material.

    Abstract translation: 提供了一种具有酸反应性基团的新型含氟聚合物,其具有对真空紫外区域(157nm)中的能量射线(放射线)的高透明性,并且还提供了含氟基础聚合物 由聚合物制备并适用于由其获得的光致抗蚀剂和化学放大型抗蚀剂组合物。 聚合物的数均分子量为1,000〜1,000,000,由下式表示: - (M1) - (M2) - (A) - ,其中M1是具有酸不稳定性或酸可降解官能团的结构单元 M2是含氟丙烯酸酯的结构单元,A是来自其它可共聚单体的结构单元,M1 / M2的摩尔比为1〜99/99〜1,聚合物的含量为1〜99% 结构单元M1的摩尔数,结构单元M2的1〜99摩尔%和结构单元A1的0〜98摩尔%。 含氟基础聚合物的材料包括具有酸反应性基团的含氟聚合物如上述聚合物,并且适用于光致抗蚀剂,化学放大型抗蚀剂组合物由那些聚合物和材料获得。

    Layered resin molding and multilayered molded article
    88.
    发明授权
    Layered resin molding and multilayered molded article 有权
    层状树脂成形体及多层成形品

    公开(公告)号:US06893729B2

    公开(公告)日:2005-05-17

    申请号:US10203967

    申请日:2001-02-19

    Abstract: The present invention is to provide a laminated resin molding comprising a polyamide-based resin composition as an outer layer and being excellent in interlayer adhesion strength, in particular a laminated resin molding comprising a fluorine-containing resin as an inner layer.The present invention is a laminated resin molding which comprises a layer (A) comprising a polyamide-based resin composition and a layer (B) laminated to said layer (A), said layer (B) comprising a fluorine-containing ethylenic polymer having a carbonyl group, and said polyamide-based resin composition having a functional group, in addition to an amide group, selected from the group consisting of hydroxyl group, carboxyl group, ester group and sulfonamide group in a total amount of 0.05 to 80 equivalent percent relative to the amide group.

    Abstract translation: 本发明提供一种层叠树脂成型体,其包含聚酰胺类树脂组合物作为外层,层间粘合强度优异,特别是包含含氟树脂作为内层的层叠树脂成型体。 本发明是一种层叠树脂成型体,其包含层叠在所述层(A)上的层叠体(B)的聚酰胺系树脂组合物层(A)和所述层(B)的层(B),所述层(B)含有含氟乙烯系聚合物, 羰基,所述具有官能团的所述聚酰胺类树脂组合物除了选自羟基,羧基,酯基和磺酰胺基的酰胺基外,其总量相对于0.05〜80当量的总量 到酰胺基。

    Fluorocopolymer and fluororesin composition lowly permeable to liquid chemical
    89.
    发明授权
    Fluorocopolymer and fluororesin composition lowly permeable to liquid chemical 有权
    含氟共聚物和氟树脂组合物对液体化学品渗透性低

    公开(公告)号:US06774196B1

    公开(公告)日:2004-08-10

    申请号:US10148230

    申请日:2002-05-28

    CPC classification number: C08L27/18 C08F214/262

    Abstract: To provide a novel PFA-based fluorine-containing copolymer having improved impermeability to liquid chemicals while retaining the excellent heat resistance, stress cracking resistance and processability inherent in PFA-based fluororesins, a material and a molded article useful in the field of semiconductor production apparatus and the like, using the copolymer. The present invention provides a fluorine-containing copolymer comprising 90 to 99.4% by mole of a repeating unit derived from tetrafluoroethylene, 0.5 to 5% by mole of a repeating unit derived from at least one lower perfluoro(alkyl vinyl ether) represented by the formula (1): CF2═CF—O—Rf1  (1) in which Rf1 is a perfluoroalkyl group having 2 to 4 carbon atoms, and 0.1 to 5% by mole of a repeating unit derived from at least one higher perfluoro(vinyl ether) represented by the formula (2): CF2═CF—O—Rf2  (2) in which Rf2 is a perfluoroalkyl group having 5 to 10 carbon atoms or a perfluoro(alkoxy alkyl) group having 4 to 17 carbon atoms, wherein the fluorine-containing copolymer has a melt flow rate of 0.1 g/10 minutes to 100 g/10 minutes and melting point of 290° to 325° C., and a resin composition using the same.

    Abstract translation: 提供一种具有改善的对液体化学品的不渗透性的新型PFA基含氟共聚物,同时保持了PFA类氟树脂中固有的优异的耐热性,抗应力开裂性和加工性,可用于半导体制造装置领域的材料和模塑制品 等等,使用该共聚物。 本发明提供一种含有90〜99.4摩尔%的来自四氟乙烯的重复单元的含氟共聚物,0.5〜5摩尔%的由式(1)表示的至少一种以下的低级全氟(烷基乙烯基醚)的重复单元, (1)表示的化合物:其中Rf 1为碳原子数2〜4的全氟烷基,0.1〜5摩尔%的由式(2)表示的至少一种以上的全氟(乙烯基醚)的重复单元, :其中Rf 2为碳原子数5〜10的全氟烷基或碳原子数4〜17的全氟(烷氧基烷基),其中,所述含氟共聚物的熔体流动速率为0.1g / 10分钟〜 100g / 10分钟,熔点为290〜325℃,使用该树脂组合物。

    Composite material having sliding property
    90.
    发明授权
    Composite material having sliding property 失效
    具有滑动性的复合材料

    公开(公告)号:US06677044B2

    公开(公告)日:2004-01-13

    申请号:US09423895

    申请日:1999-11-16

    Abstract: A composite material having sliding property is produced by applying, to a substrate, a material comprising a fluorine-containing ethylenic polymer having functional group which is prepared by copolymerizing (a) 0.05 to 30% by mole of at least one of fluorine-containing ethylenic monomers having at least one functional group selected from the group consisting of hydroxyl, carboxyl, a carboxylic salt group, a carboxylic ester group and epoxy, and (b) 70 to 99.95% by mole of at least one of fluorine-containing ethylenic monomers having no functional group mentioned above. The composite material having sliding property which is produced by applying, to the substrate, the material comprising the fluorine-containing polymer having an excellent adhesive property to the substrate without necessitating complicated steps.

    Abstract translation: 通过向基材施加含有具有官能团的含氟乙烯性聚合物的材料,制造具有滑动性的复合材料,该材料通过(a)将0.05〜30摩尔%的含氟乙烯性聚合物 具有选自羟基,羧基,羧酸盐基,羧酸酯基和环氧基中的至少一种官能团的单体,和(b)70〜99.95摩尔%的至少一种含氟乙烯性单体, 没有上述功能组。 具有滑动性的复合材料,其通过向基材施加包含具有优异的粘附性的含氟聚合物的材料而不需要复杂的步骤而制备。

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