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81.发明授权公开(公告)号：US06909507B2
公开(公告)日：2005-06-21
申请号：US10857223
申请日：2004-05-28
IPC分类号： G01N21/21 , G01N21/25 , G01N21/47 , G01N21/956 , G01J4/00
CPC分类号： G01B11/02 , G01J3/02 , G01J3/0294 , G01N21/211 , G01N21/25 , G01N21/474 , G01N21/9501 , G01N21/956 , G01N2021/213
摘要： An optical measurement system for evaluating a sample has a motor-driven rotating mechanism coupled to an azimuthally rotatable measurement head, allowing the optics to rotate with respect to the sample. A polarimetric scatterometer, having optics directing a polarized illumination beam at non-normal incidence onto a periodic structure on a sample, can measure optical properties of the periodic structure. An E-O modulator in the illumination path can modulate the polarization. The head optics collect light reflected from the periodic structure and feed that light to a spectrometer for measurement. A beamsplitter in the collection path can ensure both S and P polarization from the sample are separately measured. The measurement head can be mounted for rotation of the plane of incidence to different azimuthal directions relative to the periodic structures. The instrument can be integrated within a wafer process tool in which wafers may be provided at arbitrary orientation.
摘要翻译： 用于评估样品的光学测量系统具有耦合到方位角可旋转测量头的电动机旋转机构，允许光学器件相对于样品旋转。 具有将非正常入射的偏振照明光束引导到样品上的周期性结构上的光学偏振散射仪可以测量周期性结构的光学性质。 照明路径中的E-O调制器可以调制偏振。 头部光学器件收集从周期性结构反射的光并将光馈送到光谱仪进行测量。 收集路径中的分束器可以确保来自样品的S和P极化分别测量。 测量头可以安装成相对于周期性结构使入射平面旋转到不同的方位角方向。 仪器可以集成在晶片工艺工具中，其中晶片可以以任意取向提供。
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公开(公告)号：US06870617B2
公开(公告)日：2005-03-22
申请号：US10796322
申请日：2004-03-09
CPC分类号： G01J3/02 , G01J3/0218 , G01J3/08 , G01J3/42 , G01N21/55
摘要： The invention is a method and apparatus for determining characteristics of a sample. The system and method provide for detecting a monitor beam reflected off a mirror, where the monitor beam corresponds to the intensity of light incident upon the sample. The system and method also provide for detecting a measurement beam, where the measurement beam has been reflected off the sample being characterized. Both the monitor beam and the measurement beam are transmitted through the same transmission path, and detected by the same detector. Thus, potential sources of variations between the monitor beam and the measurement beam which are not due to the characteristics of the sample are minimized. Reflectivity information for the sample can be determined by comparing data corresponding to the measurement beam relative to data corresponding the monitor beam.
摘要翻译： 本发明是用于确定样品特性的方法和装置。 该系统和方法提供用于检测从反射镜反射的监视光束，其中监视光束对应于入射在样本上的光的强度。 该系统和方法还提供了用于检测测量光束，其中测量光束已经从被表征的样品反射出来。 监测光束和测量光束都通过相同的传输路径传输，并由相同的检测器检测。 因此，监测光束和测量光束之间不是由于样品特性引起的变化的潜在来源被最小化。 可以通过将与测量光束相对应的数据相对于监视光束对应的数据进行比较来确定样本的反射率信息。
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公开(公告)号：US20050012928A1
公开(公告)日：2005-01-20
申请号：US10858587
申请日：2004-06-02
CPC分类号： G03F7/70633 , G01B11/26 , G01J3/2823
摘要： A method for measuring overlay in a sample includes obtaining an image of an overlay target that includes a series of grating stacks each having an upper and lower grating, each grating stack having a unique offset between its upper and lower grating. The image is obtained with a set of illumination and collection optics where the numerical aperture of the collection optics is larger than the numerical aperture of the illumination optics and with the numerical apertures of the illumination and collection optics are selected so that the unit cells of gratings are not resolved, the grating stacks are resolved and they appear to have a uniform color within the image of the overlay target.
摘要翻译： 用于测量样本中覆盖层的方法包括获得包括一系列具有上和下光栅的一系列光栅堆叠的覆盖目标的图像，每个光栅堆叠在其上和下光栅之间具有唯一的偏移。 利用一组照明和收集光学器件获得图像，其中收集光学器件的数值孔径大于照明光学器件的数值孔径，并且选择照明和收集光学器件的数值孔径，使得光栅的单元电池 没有解决，光栅堆栈被解决，并且它们在覆盖目标的图像内看起来具有均匀的颜色。
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公开(公告)号：US06819426B2
公开(公告)日：2004-11-16
申请号：US10074561
申请日：2002-02-12
IPC分类号： G01B1100
CPC分类号： G03F7/70633 , H01L22/34 , H01L2223/54453
摘要： Alignment accuracy between two or more patterned layers is measured using a metrology target comprising substantially overlapping diffraction gratings formed in a test area of the layers being tested. An optical instrument illuminates all or part of the target area and measures the optical response. The instrument can measure transmission, reflectance, and/or ellipsometric parameters as a function of wavelength, polar angle of incidence, azimuthal angle of incidence, and/or polarization of the illumination and detected light. Overlay error or offset between those layers containing the test gratings is determined by a processor programmed to calculate an optical response for a set of parameters that include overlay error, using a model that accounts for diffraction by the gratings and interaction of the gratings with each others' diffracted field. The model parameters might also take account of manufactured asymmetries. The calculation may involve interpolation of pre-computed entries from a database accessible to the processor. The calculated and measured responses are iteratively compared and the model parameters changed to minimize the difference.
摘要翻译： 使用包括在被测试层的测试区域中形成的基本上重叠的衍射光栅的测量目标来测量两个或更多个图案化层之间的对准精度。 光学仪器照亮目标区域的全部或部分，并测量光学响应。 仪器可以测量作为波长，极角入射角，入射方位角和/或照明和检测光的偏振的函数的透射率，反射率和/或椭偏参数。 包含测试光栅的那些层之间的叠加误差或偏移量被编程为使用考虑光栅衍射的模型和光栅与彼此的相互作用计算包括重叠误差的一组参数的光学响应的处理器来确定 '衍射场 模型参数也可能考虑到制造的不对称性。 该计算可以包括从处理器可访问的数据库插入预先计算的条目。 迭代比较计算和测量的响应，改变模型参数以最小化差异。
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公开(公告)号：US06781371B2
公开(公告)日：2004-08-24
申请号：US10064994
申请日：2002-09-06
申请人： Reza Taherian , Boqin Sun , Abdurrahman Sezginer
发明人： Reza Taherian , Boqin Sun , Abdurrahman Sezginer
IPC分类号： G01V300
CPC分类号： G01N24/081 , G01V3/32
摘要： A high vertical resolution antenna design is provided for use in an NMR measurement apparatus. Multiple coils are situated along the length of a magnet. A primary coil is energized to cause an oscillating magnetic field in a portion of earth formation surrounding a borehole. A secondary coil having smaller dimensions than the primary coil is operated to receive spin echoes from a depth of investigation associated with the secondary coil. A distance sufficient to minimize electrical coupling separates the coils. The separation distance can be reduced by selecting a secondary coil with orthogonal polarization to the primary coil. Alternatively, a cross coil configuration can be implemented where the orthogonal secondary coil at least partially overlaps the primary coil, thereby reducing the overall length necessary for the polarizing magnet.
摘要翻译： 提供了用于NMR测量装置的高垂直分辨率天线设计。 多个线圈沿着磁体的长度设置。 初级线圈被通电以在围绕钻孔的地层的一部分中产生振荡磁场。 操作具有小于初级线圈的尺寸的次级线圈以从与次级线圈相关联的调查深度接收自旋回波。 足以使电耦合最小化的距离分离线圈。 可以通过选择具有与初级线圈的正交极化的次级线圈来减小间隔距离。 或者，可以实现交叉线圈配置，其中正交次级线圈至少部分地与初级线圈重叠，从而减小极化磁体所需的总长度。
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86.发明授权公开(公告)号：US06778273B2
公开(公告)日：2004-08-17
申请号：US10112138
申请日：2002-03-29
IPC分类号： G01J400
CPC分类号： G01B11/02 , G01J3/02 , G01J3/0294 , G01N21/211 , G01N21/25 , G01N21/474 , G01N21/9501 , G01N21/956 , G01N2021/213
摘要： An optical measurement system for evaluating a sample has a azimuthally rotatable measurement head. A motor-driven rotating mechanism is coupled to the measurement head to allow the optics to rotate with respect to the sample. In particular, a preferred embodiment is a polarimetric scatterometer (FIG. 1) for measuring optical properties of a periodic structure on a wafer sample (12). This scatterometer has optics (30) directing a polarized illumination beam at non-normal incidence onto the periodic structure. In addition to a polarizer (8), the illumination path can also be provided with an E-O modulator for modulating the polarization. The measurement head optics also collect light reflected from the periodic structure and feed that light to a spectrometer (17) for measurement. A polarization beamsplitter (18) is provided in the collection path so that both S and P polarization from the sample can be separately measured. The entire measurement head can be mounted for rotation of the plane of incidence to different azimuthal directions relative to the periodic structures on the wafer. The instrument can be integrated within a wafer process tool in which wafers may be provided at arbitrary orientation.
摘要翻译： 用于评估样品的光学测量系统具有方位角可旋转的测量头。 马达驱动的旋转机构耦合到测量头以允许光学器件相对于样品旋转。 特别地，优选的实施例是用于测量晶片样品（12）上的周期性结构的光学性质的偏振散射仪（图1）。 该散射仪具有将非正常入射的偏振照明光束引导到周期性结构上的光学器件（30）。 除了偏振器（8）之外，照明路径还可以设置有用于调制偏振的E-O调制器。 测量头光学器件还收集从周期性结构反射的光并将该光馈送到用于测量的光谱仪（17）。 偏振分束器（18）设置在收集路径中，从而可以分别测量来自样本的S和P极化。 可以将整个测量头安装成相对于晶片上的周期性结构使入射平面旋转到不同的方位角方向。 仪器可以集成在晶片工艺工具中，其中可以以任意取向提供晶片。
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87.发明授权
公开(公告)号：US5796252A
公开(公告)日：1998-08-18
申请号：US783778
申请日：1997-01-15
IPC分类号： G01V3/32
CPC分类号： G01V3/32
摘要： A nuclear magnetic resonance (NMR) logging technique reveals the volume of hydrocarbons in an earth formation. The differences in viscosity among gas, oil and water are used to distinguish among these three fluids. During NMR logging, a parameter of a sequence of magnetic field pulses is altered, causing echo signal strengths to vary due to the diffusion of the fluids in the formation. The volume of hydrocarbons in the formation is determined from detected spin echo strengths. The invention applies to wireline NMR logging and NMR logging-while-drilling techniques.
摘要翻译： 核磁共振（NMR）测井技术揭示了地层中碳氢化合物的体积。 气体，油和水之间的粘度差异用于区分这三种流体。 在NMR记录期间，改变了磁场脉冲序列的参数，导致回波信号强度由于流体在地层中的扩散而变化。 从检测到的自旋回波强度确定地层中烃的体积。 本发明适用于电缆NMR测井和核磁共振测井同时钻井技术。
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公开(公告)号：US5486761A
公开(公告)日：1996-01-23
申请号：US259999
申请日：1994-06-15
申请人： Abdurrahman Sezginer
发明人： Abdurrahman Sezginer
CPC分类号： G01R33/3808 , G01R33/34 , G01V3/32
摘要： The disclosure invention is directed to a nuclear magnetic resonance measurement apparatus that can be utilized in a logging device which operates generally centrally in a borehole, and has a generally circumferential region of investigation, but which permits usage of relatively powerful permanent magnets, such as rare-earth magnets, that are not permeable to the RF magnetic field. This is achieved by employing side-by-side spaced apart elongated magnets, and an RF current loop in the region between the magnets. In a disclosed embodiment, the magnets are each in the shape of a segment of a cylinder, and the respective axes of elongation of the magnets are parallel. The magnets have respective casings with electrically conductive surfaces, and the RF current loop includes at least a portion of the conductive surfaces of the magnet casings.
摘要翻译： 本发明涉及一种核磁共振测量装置，其可以用于通常在钻孔中心操作的测井装置中，并且具有大致圆周的调查区域，但是允许使用相对强大的永磁体，例如罕见的 - 磁场不能被射频磁场渗透。 这通过采用并排分开的细长磁体和在磁体之间的区域中的RF电流回路来实现。 在公开的实施例中，磁体各自为圆柱体的形状，并且磁体的相应的伸长轴线是平行的。 磁体具有带导电表面的各自的壳体，并且RF电流回路包括磁体壳体的至少一部分导电表面。
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89.发明授权Method, system, and program product for routing an integrated circuit to be manufactured by doubled patterning 有权用于布线要通过双重图案化制造的集成电路的方法，系统和程序产品公开(公告)号：US08782586B2
公开(公告)日：2014-07-15
申请号：US12582366
申请日：2009-10-20
IPC分类号： G06F17/50
CPC分类号： G06F17/5077 , G06F2217/12 , Y02P90/265
摘要： Disclosed are a method, apparatus, and program product for routing an electronic design using double patterning that is correct by construction. The layout that has been routed will by construction be designed to allow successful manufacturing with double patterning, since the router will not allow a routing configuration in the layout that cannot be successfully manufactured with double patterning.
摘要翻译： 公开了一种使用通过构造正确的双重图案化来布线电子设计的方法，装置和程序产品。 已经布线的布局将通过结构设计，以允许双重图案化的成功制造，因为路由器将不允许布局中的路由配置不能用双重图案化成功制造。
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公开(公告)号：US08572517B2
公开(公告)日：2013-10-29
申请号：US12136277
申请日：2008-06-10
IPC分类号： G06F17/50
摘要： The present invention provides a method for compensating infidelities of a process that transfers a pattern to a layer of an integrated circuit, by minimizing, with respect to a photomask pattern, a cost function that quantifies the deviation between designed and simulated values of circuit parameters of the pattern formed on a semiconductor wafer.
摘要翻译： 本发明提供了一种用于补偿将图案转移到集成电路层的不完备性的方法，通过使关于光掩模图案最小化成本函数，该成本函数量化电路参数的设计值和模拟值之间的偏差 形成在半导体晶片上的图案。
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