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公开(公告)号:US20180083076A1
公开(公告)日:2018-03-22
申请号:US15686781
申请日:2017-08-25
Applicant: Japan Display Inc.
Inventor: Akihiro HANADA
IPC: H01L27/32 , H01L27/12 , H01L29/786 , G09G3/3225 , G09G3/36 , G02F1/1362 , G02F1/1368
CPC classification number: H01L27/3244 , G02F1/136209 , G02F1/136227 , G02F1/1368 , G09G3/3225 , G09G3/3648 , G09G2300/0426 , G09G2300/0842 , G09G2320/0247 , H01L27/1214 , H01L27/1225 , H01L27/124 , H01L27/1248 , H01L29/78633 , H01L29/7869
Abstract: The purpose of the present invention is to form both LTPS TFT and semiconductor TFT in a same substrate. The feature of the display device to realize the above purpose is that: a display device having a display area containing a pixel comprising: the pixel includes a first TFT having an oxide semiconductor, a gate insulating film is formed on the oxide semiconductor, a first gate electrode is formed on the gate insulating film, a first source/drain electrode formed by a metal or an alloy contacts a source or a drain of the semiconductor the first gate electrode and the first source/drain electrode are formed by the same material.
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公开(公告)号:US20170358606A1
公开(公告)日:2017-12-14
申请号:US15617547
申请日:2017-06-08
Applicant: Japan Display Inc.
Inventor: Akihiro HANADA , Masayoshi FUCHI
IPC: H01L27/12 , H01L23/532 , H01L21/02 , H01L23/522 , H01L29/786 , H01L21/768
CPC classification number: H01L27/124 , H01L21/02063 , H01L21/76802 , H01L21/76843 , H01L21/76877 , H01L23/5226 , H01L23/53223 , H01L23/53266 , H01L27/1218 , H01L27/1222 , H01L27/1225 , H01L27/1262 , H01L29/78603 , H01L29/78675 , H01L29/7869
Abstract: According to one embodiment, a semiconductor device includes an insulating substrate, a first semiconductor layer located above the insulating substrate, a second semiconductor layer located above the insulating substrate, an insulating layer which covers the first semiconductor layer and the second semiconductor layer, and includes a first contact hole reaching the first semiconductor layer and a second contact hole reaching the second semiconductor layer, a barrier layer which covers one of the first semiconductor layer inside the first contact hole and the second semiconductor layer inside the second contact hole, and a first conductive layer which is in contact with the barrier layer.
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公开(公告)号:US20170207245A1
公开(公告)日:2017-07-20
申请号:US15405511
申请日:2017-01-13
Applicant: Japan Display Inc.
Inventor: Akihiro HANADA , Hajime WATAKABE , Kazufumi WATABE
IPC: H01L27/12
CPC classification number: H01L27/1225 , H01L27/1237 , H01L27/1248 , H01L27/1251 , H01L29/42384 , H01L29/513 , H01L29/517 , H01L29/518 , H01L29/78606 , H01L29/78633 , H01L29/78675 , H01L29/7869 , H01L2029/42388
Abstract: According to one embodiment, a semiconductor device includes an insulating substrate, a first semiconductor layer formed of silicon and positioned above the insulating substrate, a second semiconductor layer formed of a metal oxide and positioned above the first semiconductor layer, a first insulating film formed of a silicon nitride and positioned between the first semiconductor layer and the second semiconductor layer, and a block layer positioned between the first semiconductor film and the second semiconductor layer, the block layer hydrogen diffusion of which is lower than that of the first insulating film.
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