Illumination optical system, projection/exposure device, micro device manufacturing method, illumination device manufacturing method, projection/exposure device adjustment method, and projection/exposure device manufacturing method
    81.
    发明申请
    Illumination optical system, projection/exposure device, micro device manufacturing method, illumination device manufacturing method, projection/exposure device adjustment method, and projection/exposure device manufacturing method 有权
    照明光学系统,投影/曝光装置,微型装置制造方法,照明装置制造方法,投影/曝光装置调整方法以及投影/曝光装置的制造方法

    公开(公告)号:US20070041004A1

    公开(公告)日:2007-02-22

    申请号:US10556712

    申请日:2004-05-06

    申请人: Kenji Suzuki

    发明人: Kenji Suzuki

    IPC分类号: G03B27/54

    摘要: An object of this invention is to reduce even slight irregularities in illumination that occur after assembly of an optical system. To this end, in an exemplary illumination-optical system, a light source that emits extreme ultraviolet (EUV) light, a collimator, a fly's-eye mirror, and a condenser are positioned, in this stated order. A prescribed illumination area on the emission side of the condenser is irradiated with Köhler illumination. At least one unit mirror, among multiple unit mirrors of the fly's-eye mirror, is a correction mirror that has reflectivity irregularities. The reflectivity irregularities correct a portion of, or all, the illumination irregularities in the illumination area.

    摘要翻译: 本发明的一个目的是减少在组装光学系统之后发生的照明中的均匀轻微的不规则性。 为此,在示例性照明光学系统中,按照该顺序定位发射极紫外(EUV)光的光源,准直仪,飞眼镜和冷凝器。 用Köhler照明照射冷凝器出射侧的规定照明区域。 在飞眼镜的多个单元反射镜中,至少有一个单元镜是具有反射率不均匀性的校正镜。 反射率不规则校正照明区域中的照明不规则部分或全部。

    Light-emitting device and method for manufacturing the same
    82.
    发明授权
    Light-emitting device and method for manufacturing the same 有权
    发光装置及其制造方法

    公开(公告)号:US07179672B2

    公开(公告)日:2007-02-20

    申请号:US10976987

    申请日:2004-11-01

    IPC分类号: H01L21/00

    CPC分类号: H01L33/22 H01L21/0271

    摘要: A nanometer size roughened structure is formed on a surface of a light-emitting element, and luminous efficiency is improved.The roughened structure on the surface of the light-emitting element of the invention is formed into the following shape such that the refractive index smoothly changes: (1) the mean diameter of projections on the roughened surface is smaller than the light wavelength; (2) a pitch of the roughened surface is irregular; and (3) positions of the top and bottom of the roughened surface are distributed from their mean values within the light wavelength in order to give a smooth gradient of the refractive index. The surface of such light-emitting element is obtained by forming a thin film on the surface of the light-emitting element using a resin composition which contains a block copolymer or graft copolymer and forms a micophase-separated structure in a self-organization manner; selectively removing at least one phase of the microphase-separated structure of the thin film formed on the surface; and etching the surface of the light-emitting element using the remaining phase as an etching mask.

    摘要翻译: 在发光元件的表面上形成纳米尺寸的粗糙结构,并提高发光效率。 本发明的发光元件表面上的粗糙结构形成为以下形状,使得折射率平滑地变化:(1)粗糙面上的突起的平均直径小于光波长; (2)粗糙表面的间距不规则; 和(3)粗糙表面的顶部和底部的位置从其在光波长内的平均值分布,以便给出折射率的平滑梯度。 这种发光元件的表面通过使用含有嵌段共聚物或接枝共聚物的树脂组合物在发光元件的表面上形成薄膜而以自组织形式形成微晶相分离结构而获得; 选择性地除去形成在表面上的薄膜的微相分离结构的至少一个相; 并使用剩余的相作为蚀刻掩模蚀刻发光元件的表面。

    Inorganic separation membrane and method for manufacturing the same
    84.
    发明申请
    Inorganic separation membrane and method for manufacturing the same 审中-公开
    无机分离膜及其制造方法

    公开(公告)号:US20060266696A1

    公开(公告)日:2006-11-30

    申请号:US11289763

    申请日:2005-11-29

    IPC分类号: B01D71/04

    摘要: The present invention provides an inorganic separation membrane including a silicalite nanocrystalline layer formed on a porous ceramic substrate, and a porous inorganic protective layer is formed on the nanocrystalline layer. The crystal grain diameter of the silicalite nanocrystal is preferably 150 nm or less, and the thickness of the silicalite nanocrystalline layer is preferably 1.0 to 4.0 μm. The separation membrane may be manufactured by: immersing a porous ceramic substrate in a dispersion solution of silicalite nanocrystals; laminating the silicalite nanocrystals on the surface of the porous ceramic substrate by evacuating the insider of the porous ceramic substrate; forming a porous inorganic protective layer on the silicalite nanocrystalline layer by a hydrothermal synthesis by heating after immersing the porous substrate in a zeolite synthesis solution containing a silica source; and removing organic components in the silicalite nanocrystal by liquid phase oxidation.

    摘要翻译: 本发明提供一种无机分离膜,其包括在多孔陶瓷基板上形成的硅沸石纳米晶层,在纳米晶层上形成多孔无机保护层。 硅沸石纳米晶体的晶粒直径优选为150nm以下,并且硅沸石纳米晶层的厚度优选为1.0〜4.0μm。 分离膜可以通过以下步骤制造:将多孔陶瓷基材浸渍在硅沸石纳米晶体的分散溶液中; 通过抽真空多孔陶瓷基板的内部,在多孔陶瓷基板的表面层叠硅沸石纳米晶体; 在将多孔基材浸入含有二氧化硅源的沸石合成溶液中之后通过加热通过水热合成在硅沸石纳米晶层上形成多孔无机保护层; 并通过液相氧化除去硅沸石纳米晶体中的有机成分。

    Control method for error detection & correction apparatus, error detection & correction apparatus, and control program for error detection & correction apparatus
    85.
    发明申请
    Control method for error detection & correction apparatus, error detection & correction apparatus, and control program for error detection & correction apparatus 有权
    用于错误检测和校正装置的控制方法,错误检测和校正装置以及用于错误检测和校正装置的控制程序

    公开(公告)号:US20060236213A1

    公开(公告)日:2006-10-19

    申请号:US11237765

    申请日:2005-09-29

    IPC分类号: H03M13/00

    CPC分类号: G06F11/1044

    摘要: The present invention provides a control method for an error detection & correction apparatus, comprising a plurality of data processing apparatuses which reside in a data communications path and partake in exchanging data by the unit of error correcting code, and a plurality of information exchange paths which are installed between the plurality of data processing apparatuses; and generating a true syndrome by exchanging a partial syndrome relating to a part of the data partaken by each of the data processing apparatuses by way of the information exchange paths, comprising the step of exchanging renewal information relating to a part of the data partaken by each of the data processing apparatuses with the other data processing apparatus by way of the information exchange path.

    摘要翻译: 本发明提供了一种用于错误检测和校正装置的控制方法,包括驻留在数据通信路径中的多个数据处理装置,并且通过纠错码单元交换数据,以及多个信息交换路径, 安装在所述多个数据处理装置之间; 以及通过与信息交换路径中的每一个数据处理装置所共享的数据的一部分相关的部分综合信息产生真正的综合征,其中包括以下步骤:交换与每个 的数据处理装置与其他数据处理装置通过信息交换路径。

    Fluid pressure booster
    86.
    发明申请

    公开(公告)号:US20060230757A1

    公开(公告)日:2006-10-19

    申请号:US11389501

    申请日:2006-03-27

    IPC分类号: B60T13/00

    CPC分类号: B60T11/224

    摘要: A fluid pressure booster includes: a control piston in which brake operation input acts in an advancing direction, and reaction based on fluid pressure of a booster fluid pressure generation chamber that generates fluid pressure for actuating a master piston acts in a retracting direction; a pressure increasing valve provided between the booster fluid pressure generation chamber and a fluid pressure generation source so as to open at the time of advance of the control piston and close at the time of retraction of the control piston; and a pressure reducing valve provided between a release chamber and the booster fluid pressure generation chamber so as to close at the time of the advance of the control piston and open at the time of the retraction of the control piston. The pressure increasing valve includes first valve means and second valve means that sequentially open according to an increase in the brake operation input, and a seal diameter of the second valve means is larger than that of the first valve means. Thus, it is possible to enhance initial response of the pressure increasing valve, and also enhance response of the pressure increasing valve when a brake operation member is strongly operated.

    Method for forming a barrier/seed layer for copper metallization
    87.
    发明申请
    Method for forming a barrier/seed layer for copper metallization 有权
    用于形成用于铜金属化的阻挡层/晶种层的方法

    公开(公告)号:US20060223310A1

    公开(公告)日:2006-10-05

    申请号:US11096095

    申请日:2005-03-31

    申请人: Kenji Suzuki

    发明人: Kenji Suzuki

    IPC分类号: H01L21/44

    摘要: A method for improving adhesion of Cu to a Ru layer in Cu metallization. The method includes providing a substrate in a process chamber of a deposition system, depositing a Ru layer on the substrate in a chemical vapor deposition process, and forming a Cu seed layer on the Ru layer to prevent oxidation of the Ru layer. The Cu seed layer is partially or completely oxidized prior to performing a Cu bulk plating process on the substrate. The oxidized portion of the Cu seed layer is substantially dissolved and removed from the substrate during interaction with a Cu plating solution, thereby forming a bulk Cu layer with good adhesion to the underlying Ru layer.

    摘要翻译: Cu金属化时Cu改善Ru层的附着力的方法。 该方法包括在沉积系统的处理室中提供衬底,在化学气相沉积工艺中在衬底上沉积Ru层,以及在Ru层上形成Cu籽晶层以防止Ru层的氧化。 在对基材进行Cu块体电镀工艺之前,Cu籽晶层部分或完全氧化。 在与Cu电镀溶液相互作用的过程中,Cu籽晶层的氧化部分基本上被溶解并从衬底去除,从而形成具有与下面的Ru层具有良好粘附性的体Cu层。

    Optical waveguide and optical transmitting/receiving module
    88.
    发明申请
    Optical waveguide and optical transmitting/receiving module 有权
    光波导和光发射/接收模块

    公开(公告)号:US20060093267A1

    公开(公告)日:2006-05-04

    申请号:US10541088

    申请日:2004-01-29

    IPC分类号: G02B6/26

    摘要: To provide an optical waveguide and an optical transmitting and receiving module able to perform a transmitting operation and a receiving operation simultaneously, wherein a linearly first waveguide 21 that one side is coupled to an optical fiber 3 and the other side is coupled to a light receiving element 4, and a second waveguide 22 that one side is coupled so as to make an acute angle θ with the side of the first waveguide 21 to be coupled to the light receiving element 4 and the other is coupled to a light emitting element 5 are provided. By controlling a shape of the second waveguide 22, the receiving signal light from the optical fiber 3 is received to the light receiving element 4, and is not guided to the second waveguide 22. Therefore, the receiving operation and the transmitting operation can be preformed at the same time. Namely, when the transmitting optical signal is the incident of light from the light emitting element 5 to the second waveguide 22, the optical signal is guided by the second waveguide 22 toward the first waveguide 21, coupled to the first waveguide 21, and guided toward the optical fiber 3.

    摘要翻译: 为了提供能够同时执行发送操作和接收操作的光波导和光发送和接收模块,其中一侧耦合到光纤3并且另一侧的线性第一波导21耦合到光接收 元件4和第二波导22,其一侧被联接以便使与第一波导21的侧面成锐角的角度θ耦合到光接收元件4而另一侧耦合到发光元件5 提供。 通过控制第二波导22的形状,来自光纤3的接收信号光被接收到光接收元件4,并且不被引导到第二波导22。 因此,可以同时进行接收操作和发送操作。 也就是说,当发射光信号是从发光元件5到第二波导22的光的入射时,光信号被第二波导管22引导到与第一波导21耦合的第一波导21,并被引向 光纤3。

    Production method for zeolite shaped body and production method for zeolite layered composite
    90.
    发明申请
    Production method for zeolite shaped body and production method for zeolite layered composite 有权
    沸石成型体的制造方法及沸石层状复合体的制造方法

    公开(公告)号:US20050148457A1

    公开(公告)日:2005-07-07

    申请号:US11052694

    申请日:2005-02-07

    摘要: The present invention discloses a production method for a zeolite shaped body in which a tetrapropylammonium hydroxide (TPAOH) solution and tetrapropylammonium bromide (TPABr) are added to a silica sol, an obtained prepared solution is heated under a condition that crystallization and/or precipitation does not occur in the prepared solution in a sealed vessel, the heated prepared solution is dried, an obtained dry gel is shaped, and the shaped dry gel is subjected to crystallization treatment in steam, and it is possible to efficiently produce a zeolite shaped body on which a zeolite membrane can be formed and maintained without generating any crack, and which satisfies both reduction of pressure loss and maintenance or improvement of mechanical strength, when used as a gas separation membrane such as a molecular sieve membrane or a pervaporation membrane.

    摘要翻译: 本发明公开了一种沸石成型体的制造方法,其中将四丙基氢氧化铵(TPAOH)溶液和四丙基溴化铵(TPABr)加入二氧化硅溶胶中,将得到的制备溶液在结晶和/或沉淀的条件下加热 在密封容器中不会发生在制备的溶液中,将加热的制备溶液干燥,获得的干凝胶成型,并将成形的干凝胶在蒸汽中进行结晶处理,并且可以有效地生产沸石成型体 可以在不产生裂纹的情况下形成和保持沸石膜,并且当用作分子筛膜或渗透蒸发膜等气体分离膜时,可以同时满足压力损失降低和维护或机械强度的提高。