摘要:
An object of this invention is to reduce even slight irregularities in illumination that occur after assembly of an optical system. To this end, in an exemplary illumination-optical system, a light source that emits extreme ultraviolet (EUV) light, a collimator, a fly's-eye mirror, and a condenser are positioned, in this stated order. A prescribed illumination area on the emission side of the condenser is irradiated with Köhler illumination. At least one unit mirror, among multiple unit mirrors of the fly's-eye mirror, is a correction mirror that has reflectivity irregularities. The reflectivity irregularities correct a portion of, or all, the illumination irregularities in the illumination area.
摘要:
A nanometer size roughened structure is formed on a surface of a light-emitting element, and luminous efficiency is improved.The roughened structure on the surface of the light-emitting element of the invention is formed into the following shape such that the refractive index smoothly changes: (1) the mean diameter of projections on the roughened surface is smaller than the light wavelength; (2) a pitch of the roughened surface is irregular; and (3) positions of the top and bottom of the roughened surface are distributed from their mean values within the light wavelength in order to give a smooth gradient of the refractive index. The surface of such light-emitting element is obtained by forming a thin film on the surface of the light-emitting element using a resin composition which contains a block copolymer or graft copolymer and forms a micophase-separated structure in a self-organization manner; selectively removing at least one phase of the microphase-separated structure of the thin film formed on the surface; and etching the surface of the light-emitting element using the remaining phase as an etching mask.
摘要:
A control apparatus includes a shift position detecting device for detecting a shift position that is changed by manual operation of the vehicle driver, an ECU for controlling an A/T based on a signal for a detected vehicle running state, and connectors that connect to an electrical unit outside the casing. Further, the shift position detecting device, the connectors, and the electronic control unit are electrically connected through a connecting board. Consequently, the shift position detecting device, the ECU, and the connectors can be freely laid out.
摘要:
The present invention provides an inorganic separation membrane including a silicalite nanocrystalline layer formed on a porous ceramic substrate, and a porous inorganic protective layer is formed on the nanocrystalline layer. The crystal grain diameter of the silicalite nanocrystal is preferably 150 nm or less, and the thickness of the silicalite nanocrystalline layer is preferably 1.0 to 4.0 μm. The separation membrane may be manufactured by: immersing a porous ceramic substrate in a dispersion solution of silicalite nanocrystals; laminating the silicalite nanocrystals on the surface of the porous ceramic substrate by evacuating the insider of the porous ceramic substrate; forming a porous inorganic protective layer on the silicalite nanocrystalline layer by a hydrothermal synthesis by heating after immersing the porous substrate in a zeolite synthesis solution containing a silica source; and removing organic components in the silicalite nanocrystal by liquid phase oxidation.
摘要:
The present invention provides a control method for an error detection & correction apparatus, comprising a plurality of data processing apparatuses which reside in a data communications path and partake in exchanging data by the unit of error correcting code, and a plurality of information exchange paths which are installed between the plurality of data processing apparatuses; and generating a true syndrome by exchanging a partial syndrome relating to a part of the data partaken by each of the data processing apparatuses by way of the information exchange paths, comprising the step of exchanging renewal information relating to a part of the data partaken by each of the data processing apparatuses with the other data processing apparatus by way of the information exchange path.
摘要:
A fluid pressure booster includes: a control piston in which brake operation input acts in an advancing direction, and reaction based on fluid pressure of a booster fluid pressure generation chamber that generates fluid pressure for actuating a master piston acts in a retracting direction; a pressure increasing valve provided between the booster fluid pressure generation chamber and a fluid pressure generation source so as to open at the time of advance of the control piston and close at the time of retraction of the control piston; and a pressure reducing valve provided between a release chamber and the booster fluid pressure generation chamber so as to close at the time of the advance of the control piston and open at the time of the retraction of the control piston. The pressure increasing valve includes first valve means and second valve means that sequentially open according to an increase in the brake operation input, and a seal diameter of the second valve means is larger than that of the first valve means. Thus, it is possible to enhance initial response of the pressure increasing valve, and also enhance response of the pressure increasing valve when a brake operation member is strongly operated.
摘要:
A method for improving adhesion of Cu to a Ru layer in Cu metallization. The method includes providing a substrate in a process chamber of a deposition system, depositing a Ru layer on the substrate in a chemical vapor deposition process, and forming a Cu seed layer on the Ru layer to prevent oxidation of the Ru layer. The Cu seed layer is partially or completely oxidized prior to performing a Cu bulk plating process on the substrate. The oxidized portion of the Cu seed layer is substantially dissolved and removed from the substrate during interaction with a Cu plating solution, thereby forming a bulk Cu layer with good adhesion to the underlying Ru layer.
摘要:
To provide an optical waveguide and an optical transmitting and receiving module able to perform a transmitting operation and a receiving operation simultaneously, wherein a linearly first waveguide 21 that one side is coupled to an optical fiber 3 and the other side is coupled to a light receiving element 4, and a second waveguide 22 that one side is coupled so as to make an acute angle θ with the side of the first waveguide 21 to be coupled to the light receiving element 4 and the other is coupled to a light emitting element 5 are provided. By controlling a shape of the second waveguide 22, the receiving signal light from the optical fiber 3 is received to the light receiving element 4, and is not guided to the second waveguide 22. Therefore, the receiving operation and the transmitting operation can be preformed at the same time. Namely, when the transmitting optical signal is the incident of light from the light emitting element 5 to the second waveguide 22, the optical signal is guided by the second waveguide 22 toward the first waveguide 21, coupled to the first waveguide 21, and guided toward the optical fiber 3.
摘要:
This invention provides a DDR type zeolite membrane, characterized in that it is formed as a membrane on a substrate and its main component is silica, and that each single gas permeance at room temperature and 100° C. are different, respectively among at least two types of gases selected from a group consisting of carbon dioxide (CO2), hydrogen (H2), oxygen (O2), nitrogen (N2), methane (CH4), normal butane (n-C4H10), isobutane (i-C4H10), sulfur hexafluoride (SF6), ethane (C2H6), ethylene (C2H4), propane (C3H8), propylene (C3H6), carbon monoxide (CO), and nitrogen monoxide (NO).
摘要翻译:本发明提供一种DDR型沸石膜,其特征在于,其形成为基材上的膜,其主要成分为二氧化硅,室温和100℃下的单一气体渗透率分别在至少两个 选自二氧化碳(CO 2/2),氢(H 2 H 2),氧(O 2/2),氮 (N 2 H 2),甲烷(CH 3)4,正丁烷(nC 4 H 10),异丁烷( (C 6 H 6),六氟化硫(SF 6 N),乙烷(C 2 H 6) 丙烯(C 3 H 8),乙烯(C 3 H 4),丙烯(C 3 H 8) 丙烯(C 3 H 6),一氧化碳(CO)和一氧化氮(NO)。
摘要:
The present invention discloses a production method for a zeolite shaped body in which a tetrapropylammonium hydroxide (TPAOH) solution and tetrapropylammonium bromide (TPABr) are added to a silica sol, an obtained prepared solution is heated under a condition that crystallization and/or precipitation does not occur in the prepared solution in a sealed vessel, the heated prepared solution is dried, an obtained dry gel is shaped, and the shaped dry gel is subjected to crystallization treatment in steam, and it is possible to efficiently produce a zeolite shaped body on which a zeolite membrane can be formed and maintained without generating any crack, and which satisfies both reduction of pressure loss and maintenance or improvement of mechanical strength, when used as a gas separation membrane such as a molecular sieve membrane or a pervaporation membrane.