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81.发明申请Raman spectroscopy method, Raman spectroscopy system and Raman spectroscopy device 失效拉曼光谱法，拉曼光谱系和拉曼光谱仪公开(公告)号：US20060001872A1
公开(公告)日：2006-01-05
申请号：US11029016
申请日：2005-01-05
申请人： Masayuki Naya
发明人： Masayuki Naya
CPC分类号： G01N21/658
摘要： In a Raman spectroscopy, the surface of metal film which is formed on a dielectric substrate in thickness of 50 to 200 nm and is characterized in that a plurality of fine holes satisfying the conditions defined by the following formulae are formed is caused to adsorb the material to be analyzed, light is projected onto the surface and the scattering light scattered by the surface is separated to obtain a spectrum of the scattering light, λ = a ( ɛ 1 · ɛ2 ɛ1 + ɛ2 ) 1 2 d
摘要翻译： 在拉曼光谱中，形成在电介质基板上的厚度为50〜200nm的金属膜的表面，其特征在于，形成满足由下式定义的条件的多个细孔吸附材料 要分析，将光投射到表面上，并且分散由表面散射的散射光，以获得散射光的光谱，
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82.发明申请Mask for proximity field optical exposure, exposure apparatus and method therefor 审中-公开用于近场光学曝光的掩模，曝光装置及其方法公开(公告)号：US20050227153A1
公开(公告)日：2005-10-13
申请号：US11144825
申请日：2005-06-06
申请人： Isao Tsuruma , Masayuki Naya , Atsushi Mukai
发明人： Isao Tsuruma , Masayuki Naya , Atsushi Mukai
IPC分类号： G03B27/42 , G03B27/58 , G03C5/00 , G03F1/00 , G03F1/60 , G03F1/82 , G03F7/20 , H01L21/027 , G03F9/00
CPC分类号： B82Y10/00 , G03F1/50 , G03F1/82 , G03F7/2014 , G03F7/70325 , G03F7/7035 , G03F7/707 , G03F7/70741 , G03F7/70783
摘要： A mask for exposure 1 having an aperture in a prescribed pattern formed on one surface and subjected to proximity field exposure in a state kept in contact with the surface of a wafer 2. The mask 1 is made of a transparent material such as glass or quartz glass. The mask 1 forms a circular shape with a thickness of 1 mm or less, preferably 0.1-0.5 mm.
摘要翻译： 一种曝光用掩模1，其具有形成在一个表面上的规定图案的孔径，并且在与晶片2的表面保持接触的状态下进行近场曝光。掩模1由透明材料制成，例如玻璃或石英 玻璃。 掩模1形成厚度为1mm以下，优选为0.1-0.5mm的圆形。
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公开(公告)号：US20050168745A1
公开(公告)日：2005-08-04
申请号：US11029023
申请日：2005-01-05
申请人： Masayuki Naya
发明人： Masayuki Naya
IPC分类号： G01N21/27 , B82Y15/00 , G01N21/41 , G01N33/543 , G01N33/553 , G01N21/55
CPC分类号： G01N21/554 , G01N33/54346 , G01N33/54373 , G01N2021/258
摘要： A fine structure body comprising first fine metal particles, which have head regions projected upwardly from a surface of a base body, is utilized. A substance capable of undergoing specific binding with a test body is fixed to the head regions of the first fine metal particles. Second fine metal particles, to which a substance capable of undergoing specific binding with the test body has been fixed, are dispersed in a sample liquid. The test body is detected from variation of a resonance wavelength of localized plasmon resonance, which variation occurs when the test body is adsorbed to the surface of the fine structure body by being sandwiched between the substance fixed to the first fine metal particle and the substance fixed to the second fine metal particle.
摘要翻译： 利用具有从基体的表面向上突出的头部区域的第一细小金属颗粒的精细结构体。 能够与试验体进行特异性结合的物质固定在第一金属微粒的头部区域。 将能够与试验体进行特异性结合的物质固定在其上的第二金属微粒分散在样品液中。 通过局部等离子体共振的共振波长的变化来检测测试体，当通过夹在固定到第一金属微粒的物质和固定的物质之间而将测试体吸附到微细结构体的表面时发生变化 到第二细金属颗粒。
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公开(公告)号：US20050151973A1
公开(公告)日：2005-07-14
申请号：US11020645
申请日：2004-12-27
申请人： Masayuki Naya , Hirotomo Sasaki , Tadashi Inaba , Toshihide Ezoe
发明人： Masayuki Naya , Hirotomo Sasaki , Tadashi Inaba , Toshihide Ezoe
IPC分类号： G01N33/543 , C07C259/06 , C07C335/20 , C07D409/12 , C12Q1/68 , C23C26/00 , G01N21/27 , G01N21/41 , G01N33/53 , G01N21/55
CPC分类号： G01N21/553 , G01N21/554
摘要： An optical device having a structure which contains a metallic layer and enables excitation of plasmon resonance, such as a measurement chip for use with a surface-plasmon-resonance biosensor having a metallic layer. In order to prevent oxidation of the metallic layer, the metallic layer is covered with a film made of a mercapto compound containing a benzene ring and/or a hetero ring, or a reductive compound containing a metal-binding group which can be bound to the metal of which the metallic layer is made.
摘要翻译： 具有包含金属层并能够激发等离子体共振的结构的光学器件，例如与具有金属层的表面等离子体共振生物传感器一起使用的测量芯片。 为了防止金属层的氧化，金属层被含有苯环和/或杂环的巯基化合物的膜或包含可结合到金属的杂环的金属结合基团的还原性化合物覆盖 制作金属层的金属。
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85.发明申请Microstructure for use in Raman spectrometry and production process for the microstructure 失效用于拉曼光谱的微结构和微观结构的生产工艺公开(公告)号：US20050105085A1
公开(公告)日：2005-05-19
申请号：US11008180
申请日：2004-12-10
申请人： Masayuki Naya
发明人： Masayuki Naya
CPC分类号： G01N21/658
摘要： In a microstructure: minute pores are formed at a surface of a substrate in such a manner that the minute pores are dispersedly distributed over the surface, and the gaps between the minute pores are 1 micrometer or smaller; minute metal particles are arranged at the minute pores and have such sizes that the minute metal particles can cause localized plasmon resonance; the minute metal particles have head portions protruding from the surface; and the diameters of the head portions are greater than the diameters of the minute pores. In Raman spectrometry, a specimen material is absorbed by the surface from which the head portions protrude, light is applied to the surface, and a spectrum of scattered light is obtained.
摘要翻译： 在微细结构中：在基板的表面形成微孔，使微孔分布在表面上，微细孔之间的间隙为1微米或更小; 微小的金属颗粒被布置在微孔处，并且具有这样的尺寸，使得微小的金属颗粒可引起局部等离子体共振; 微小金属颗粒具有从表面突出的头部; 并且头部的直径大于微孔的直径。 在拉曼光谱法中，样品材料被头部突出的表面吸收，光被施加到表面，并且获得散射光的光谱。
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公开(公告)号：US06597456B2
公开(公告)日：2003-07-22
申请号：US09851957
申请日：2001-05-10
申请人： Takashi Kubo , Masayuki Naya
发明人： Takashi Kubo , Masayuki Naya
IPC分类号： G01N2155
CPC分类号： G01N21/553 , G01N2201/0415
摘要： A measuring apparatus includes a dielectric block, a film layer which is formed on a first face of the dielectric block and is brought into contact with a sample, an optical system which causes a light beam to enter the dielectric block through a second face so that the light beam is reflected in total internal reflection at the interface of the dielectric block and the film layer and various angles of incidence of the light beam to the interface can be obtained, and a photodetector which detects the intensity of the light beam which is reflected in total internal reflection at the interface and goes outside the dielectric block through a third face thereof. A measuring chip includes a single dielectric block having all the first to third faces and the film layer integrally formed on the first face of the dielectric block.
摘要翻译： 测量装置包括介质块，形成在介质块的第一面上并与样品接触的膜层，使得光束通过第二面进入介质块的光学系统，使得 光束在介质块和膜层的界面处的全反射中被反射，并且可以获得光束到界面的各种入射角，以及检测被反射的光束的强度的光电检测器 在界面处的全内反射，并通过其第三面向外介质块。 测量芯片包括具有所有第一至第三表面的单个介质块和整体形成在介质块的第一面上的膜层。
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公开(公告)号：US06577396B1
公开(公告)日：2003-06-10
申请号：US09315024
申请日：1999-05-20
申请人： Masayuki Naya
发明人： Masayuki Naya
IPC分类号： G01N2155
CPC分类号： G01N21/553
摘要： A surface plasmon sensor includes a dielectric block, a metal film which is formed on one face of the dielectric block and is brought into contact with a sample, a light source emitting a light beam and an optical system which causes the light beam to enter the dielectric block and converges the light beam on the interface of the dielectric block and the metal film so that components of the light beam impinge upon the interface at various angles including angles of total reflection. An array of a plurality of photodetector elements extending in a predetermined direction and positioned detect is positioned so that the components of the light beam reflected at the interface in total reflection at various angles are received by the respective photodetector elements. Light detecting signals output from the photodetector elements are differentiated with respect to the direction of the array of the photodetector elements, and the reflecting angle at which the intensity of the light reflected at the interface takes a minimum value is determined on the basis of the differential values.
摘要翻译： 表面等离子体激元传感器包括介质块，金属膜，其形成在介质块的一个面上并与样品接触，发射光束的光源和使光束进入的光学系统 介电块并将光束会聚在介质块和金属膜的界面上，使得光束的分量以包括全反射角在内的各种角度撞击界面。 定位在预定方向上延伸并定位检测的多个光检测器元件的阵列，使得以各种角度以全反射在界面处反射的光束的分量由各自的光检测器元件接收。 光检测器元件输出的光检测信号相对于光检测器元件的阵列的方向是不同的，并且根据差分来确定在界面处反射的光的强度处于最小值的反射角 价值观。
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88.发明授权Micro-aperture probe evaluating apparatus having a display and a collimating optical system 失效具有显示器和准直光学系统的微孔探针评价装置公开(公告)号：US06426491B2
公开(公告)日：2002-07-30
申请号：US09817236
申请日：2001-03-27
申请人： Masayuki Naya
发明人： Masayuki Naya
IPC分类号： G02B704
CPC分类号： G01Q60/22 , Y10S977/862
摘要： A sample analyzing apparatus includes a micro-aperture probe, which is provided with a light passage aperture having a diameter shorter than wavelengths of light, the light passage aperture being formed at a radiating end of the micro-aperture probe, and a light source, which produces light for sample analysis. An incidence optical system causes the light for sample analysis to enter into the micro-aperture probe from an entry end of the micro-aperture probe. A sample supporting member supports a sample at a position that is exposed to near field light radiated out of the radiating end of the micro-aperture probe. An image sensor receives light scattered by the sample and detects an intensity distribution pattern of the scattered light. A display device displays the detected intensity distribution pattern.
摘要翻译： 样品分析装置包括微孔探针，该微孔探针设置有直径比光的波长短的光通过孔，在微孔探针的辐射端形成有光通过孔，以及光源， 其产生用于样品分析的光。 入射光学系统使得用于样品分析的光从微孔探针的入口端进入微孔径探针。 样品支撑构件在暴露于从微孔探针的辐射端辐射出的近场光的位置处支撑样品。 图像传感器接收由样本散射的光，并检测散射光的强度分布图案。 显示装置显示检测到的强度分布模式。
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公开(公告)号：US06344367B1
公开(公告)日：2002-02-05
申请号：US09612906
申请日：2000-07-10
申请人： Masayuki Naya , Toshiaki Fukunaga
发明人： Masayuki Naya , Toshiaki Fukunaga
IPC分类号： H01L2100
摘要： A first resist layer (21) and a second resist layer (22) are formed on a base material (11) in the recited order, the first resist layer (21) being removable by etching and the second resist layer (22) being a photosensitive resist layer in which either exposed or unexposed regions become soluble in a developing solvent upon emission of light. Near-field light is then emitted to the second resist layer (22) by means (24) for emitting near-field light (27) according to a diffraction grating pattern upon reception of the light. Next, the diffraction grating pattern is formed in the second resist layer (22) by developing the second resist layer (22). The first resist layer (21) is etched with the pattern in the second resist layer (22) as an etching mask, and a diffraction grating pattern consisting of the first and second resist layers (21, 22) is formed. Finally, a diffraction grating is formed in the base material (11) by etching the base material (11) with the pattern in the first and second resist layers (21, 22) as an etching mask.
摘要翻译： 第一抗蚀剂层（21）和第二抗蚀剂层（22）按顺序形成在基材（11）上，第一抗蚀剂层（21）可通过蚀刻去除，第二抗蚀剂层（22）为 光敏抗蚀剂层，其中暴露或未曝光的区域在发光时变得可溶于显影溶剂。 然后，通过接收光的衍射光栅图案，通过用于发射近场光（27）的装置（24）将近场光发射到第二抗蚀剂层（22）。 接着，通过显影第二抗蚀剂层（22），在第二抗蚀剂层（22）中形成衍射光栅图案。 在第二抗蚀剂层（22）中用第一抗蚀剂层（21）蚀刻第一抗蚀剂层（21）作为蚀刻掩模，并且形成由第一和第二抗蚀剂层（21,22）组成的衍射光栅图案。 最后，通过用第一和第二抗蚀剂层（21,22）中的图案作为蚀刻掩模蚀刻基底材料（11），在基底材料（11）中形成衍射光栅。
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公开(公告)号：US06208422B1
公开(公告)日：2001-03-27
申请号：US09301126
申请日：1999-04-28
申请人： Masayuki Naya
发明人： Masayuki Naya
IPC分类号： G01N2155
CPC分类号： G01N21/553
摘要： A surface plasmon sensor includes a dielectric block, a metal film having a sample supporting side which is faced toward a face of the dielectric block spaced therefrom and on which a sample is placed, a light source emitting a light beam, an optical system which causes the light beam to enter the dielectric block so that the light beam is reflected in total reflection at the face of the dielectric block and various angles of incidence of the light beam to the face of the dielectric block including an angle of incidence at which surface plasmon is generated can be obtained, and a sensor which detects the angle of incidence of the light beam at which attenuation in total reflection takes place and the amount of reflected light is reduced. A distance measuring light beam is caused to enter the dielectric block to be reflected in total reflection at the face of the dielectric block. A driver moves the dielectric block and the metal film relatively to each other so that the distance between the face of the dielectric block and the sample support side of the metal film changes. A photodetector measures the amount of distance measuring light beam reflected in total reflection at the face of the dielectric block. The driver is controlled to move the dielectric block and the metal film so that the amount of reflected distance measuring light beam as detected by the photodetector is kept constant.
摘要翻译： 表面等离子体激元传感器包括介电块，具有样品支撑侧的金属膜，所述样品支撑侧面向与其隔开的放置样品的介质块的表面，发射光束的光源，导致 光束进入介质块，使得光束在介质块的表面处以全反射反射，并且光束到介质块的表面的各种入射角包括表面等离子体激元的入射角 以及传感器，其检测发生全反射衰减的光束的入射角度和反射光量的减少。 使距离测量光束进入介质块，以在介质块的表面处的全反射中反射。 驱动器使介质块和金属膜彼此相对移动，使得介质块的表面与金属膜的样品支撑侧之间的距离改变。 光电检测器测量在介质块的表面处的全反射中反射的距离测量光束的量。 控制驱动器以移动介质块和金属膜，使得由光电检测器检测的反射距离测量光束的量保持恒定。
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