公开(公告)号：US20050048688A1

公开(公告)日：2005-03-03

申请号：US10930450

申请日：2004-08-30

申请人： Satyadev Patel ,  Andrew Huibers ,  Steve Chiang

发明人： Satyadev Patel ,  Andrew Huibers ,  Steve Chiang

IPC分类号： B81B3/00 ,  B81B7/00 ,  B81C1/00 ,  B81C99/00 ,  H01L21/00 ,  H01L21/30 ,  H01L21/44

CPC分类号： B81C1/00333 ,  B81B2201/042 ,  B81C2203/0118 ,  B82Y30/00 ,  H01L24/97 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01013 ,  H01L2924/01018 ,  H01L2924/01019 ,  H01L2924/01023 ,  H01L2924/01027 ,  H01L2924/01033 ,  H01L2924/01049 ,  H01L2924/01054 ,  H01L2924/01072 ,  H01L2924/01074 ,  H01L2924/01079 ,  H01L2924/01322 ,  H01L2924/10329 ,  H01L2924/12036 ,  H01L2924/12044 ,  H01L2924/19041 ,  H01L2924/19042 ,  H01L2924/3025 ,  H01L2924/00

摘要： A method for forming a MEMS device is disclosed, where a final release step is performed just prior to a wafer bonding step to protect the MEMS device from contamination, physical contact, or other deleterious external events. Without additional changes to the MEMS structure between release and wafer bonding and singulation, except for an optional stiction treatment, the MEMS device is best protected and overall process flow is improved. The method is applicable to the production of any MEMS device and is particularly beneficial in the making of fragile micromirrors.

公开(公告)号：US20050042792A1

公开(公告)日：2005-02-24

申请号：US10930342

申请日：2004-08-30

申请人： Satyadev Patel ,  Andrew Huibers ,  Steve Chiang

发明人： Satyadev Patel ,  Andrew Huibers ,  Steve Chiang

IPC分类号： B81B3/00 ,  B81B7/00 ,  B81C1/00 ,  B81C99/00 ,  H01L21/00

CPC分类号： B81C1/00333 ,  B81B2201/042 ,  B81C2203/0118 ,  B82Y30/00 ,  H01L24/97 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01013 ,  H01L2924/01018 ,  H01L2924/01019 ,  H01L2924/01023 ,  H01L2924/01027 ,  H01L2924/01033 ,  H01L2924/01049 ,  H01L2924/01054 ,  H01L2924/01072 ,  H01L2924/01074 ,  H01L2924/01079 ,  H01L2924/01322 ,  H01L2924/10329 ,  H01L2924/12036 ,  H01L2924/12044 ,  H01L2924/19041 ,  H01L2924/19042 ,  H01L2924/3025 ,  H01L2924/00

摘要： A method for forming a MEMS device is disclosed, where a final release step is performed just prior to a wafer bonding step to protect the MEMS device from contamination, physical contact, or other deleterious external events. Without additional changes to the MEMS structure between release and wafer bonding and singulation, except for an optional stiction treatment, the MEMS device is best protected and overall process flow is improved. The method is applicable to the production of any MEMS device and is particularly beneficial in the making of fragile micromirrors.

公开(公告)号：US07751113B2

公开(公告)日：2010-07-06

申请号：US11625964

申请日：2007-01-23

申请人： Andrew Huibers

发明人： Andrew Huibers

IPC分类号： G02B7/02

CPC分类号： G02B26/0841

摘要： Disclosed herein is a micromirror device having a reflective mirror plate with reduced dimensions. The micromirror device can be a member of an array of micromirror devices for use in optical signal modulations, such as display applications and optical signal switching applications.

摘要翻译： 本文公开了具有尺寸减小的反射镜板的微反射镜装置。 微镜器件可以是用于光信号调制（诸如显示应用和光信号切换应用）的微镜器件阵列的成员。

公开(公告)号：US07265892B2

公开(公告)日：2007-09-04

申请号：US11120814

申请日：2005-05-02

申请人： Andrew Huibers

发明人： Andrew Huibers

IPC分类号： G02B26/00 ,  G03B21/26 ,  H01L29/20 ,  H01L21/00 ,  H04N9/31

CPC分类号： G02B26/0833 ,  G02B26/0841 ,  H04N9/3114

摘要： Disclosed herein is a micromirror array device package having a light blocking area for reducing unexpected light scattering from the surfaces of the posts.

摘要翻译： 本文公开了一种具有遮光区域的微镜阵列器件封装，用于减少从柱的表面发出的意外的光散射。

公开(公告)号：US20070182939A1

公开(公告)日：2007-08-09

申请号：US11671845

申请日：2007-02-06

申请人： Andrew Huibers ,  Regis Grasser

发明人： Andrew Huibers ,  Regis Grasser

IPC分类号： G03B21/14

CPC分类号： G03B21/2013 ,  G02B27/0905 ,  G02B27/0961 ,  G02B27/1033 ,  G03B21/008 ,  G03B21/2033 ,  G03B21/208 ,  H04N9/315

摘要： A digital system without a color filter is provided. The desired color components are produced by a light source capable of emitting the desired color components. The color components are delivered to the pixels of the spatial light modulator through a group of optical lens and/or lightpipes, but without a color filter.

摘要翻译： 提供了不带滤色片的数字系统。 期望的颜色分量由能够发射所需颜色成分的光源产生。 颜色分量通过一组光学透镜和/或光管被传送到空间光调制器的像素，但没有滤色器。

公开(公告)号：US20070177113A1

公开(公告)日：2007-08-02

申请号：US11620537

申请日：2007-01-05

申请人： Andrew Huibers

发明人： Andrew Huibers

IPC分类号： G03B3/00

CPC分类号： H04N9/3141 ,  G03B21/005 ,  G03B21/208 ,  G03B2205/0061

摘要： Disclosed herein is a method of projecting images using light valves. Pixel patterns generated of the light valve pixels based on image data are projected at different locations at a time.

摘要翻译： 本文公开了一种使用光阀投影图像的方法。 基于图像数据生成的光阀像素的像素图案一次投影在不同的位置。

公开(公告)号：US20050190430A1

公开(公告)日：2005-09-01

申请号：US11067562

申请日：2005-02-25

申请人： Sataydev Patel ,  Andrew Huibers

发明人： Sataydev Patel ,  Andrew Huibers

IPC分类号： G02B26/00 ,  G02B26/08 ,  H01L20060101 ,  H01L21/00

CPC分类号： G02B26/0841

摘要： A micromirror device is disclosed, along with a method of making such a micromirror device that comprises a mirror plate, a hinge and an extension plate. The extension plate is formed on the mirror plate and between the mirror plate and the electrode associated with the mirror plate for rotating the mirror plate. The extension plate can be metallic or dielectric. Also disclosed is a method of making such a micromirror device. In particular, the extension plate is formed after the formation of the mirror plate. Moreover, also disclosed is a projection system that comprises a spatial light modulator having an array of such micromirrors, as well as a light source, condensing optics, wherein light from the light source is focused onto the array of micromirrors, projection optics for projecting light selectively reflected from the array of micromirrors onto a target, and a controller for selectively actuating the micromirrors in the array.

摘要翻译： 公开了一种微反射镜装置，以及制造这种微镜装置的方法，其包括镜板，铰链和延伸板。 延伸板形成在镜板上，并且在镜板和与用于旋转镜板的镜板相关联的电极之间。 延伸板可以是金属或电介质。 还公开了制造这种微镜装置的方法。 特别地，在形成镜板之后形成延伸板。 此外，还公开了一种投影系统，其包括具有这种微镜阵列的空间光调制器以及光源聚光光学器件，其中来自光源的光聚焦到微镜阵列上，用于投射光的投影光学器件 从微镜阵列选择性地反射到目标上，以及用于选择性地致动阵列中的微镜的控制器。

公开(公告)号：US20050024733A1

公开(公告)日：2005-02-03

申请号：US10899635

申请日：2004-07-26

申请人： Peter Richards ,  Andrew Huibers ,  Michel Combes

发明人： Peter Richards ,  Andrew Huibers ,  Michel Combes

IPC分类号： G02B7/00 ,  G02B27/10 ,  G02B27/14

CPC分类号： G02B26/008 ,  G01J3/10 ,  G01J2003/1213

摘要： A method and apparatus for compensating for deficiency in the illumination light from a light source is provided, where the spectrum in the visible range of light from the light source is determined, and a deficiency at a wavelength or band of wavelengths in the visible range of light is determined therefrom, a color sequencing device is provided having a set of filters comprising red, green and blue filter segments, and an additional color balancing filter segment, and wherein a the color balancing segment is constructed so as to preferentially pass a band or bands of wavelengths, which band or bands are determined based on the determined deficiency of the light source.

摘要翻译： 提供了用于补偿来自光源的照明光的不足的方法和装置，其中确定了来自光源的光的可见光范围内的光谱，以及在可见光范围内的波长或波段的不足 由此确定光，提供了具有一组包括红色，绿色和蓝色滤色片段的滤光片和附加色彩平衡滤光片片段的色彩排序装置，其中色彩平衡片段被构造成优先通过一条带或 基于所确定的光源的不足，确定该波段的波段或波段。

公开(公告)号：US20050007557A1

公开(公告)日：2005-01-13

申请号：US10914038

申请日：2004-08-05

申请人： Andrew Huibers

发明人： Andrew Huibers

IPC分类号： B81B3/00 ,  G02B26/08 ,  G03B21/28 ,  G03B21/00 ,  G02B26/00

CPC分类号： G03B21/28 ,  G02B26/0841 ,  Y10S359/904

摘要： In order to minimize light diffraction along the direction of switching and more particularly light diffraction into the acceptance cone of the collection optics, in the present invention, micromirrors are provided which are not rectangular. Also, in order to minimize the cost of the illumination optics and the size of the display unit of the present invention, the light source is placed orthogonal to the rows (or columns) of the array, and/or the light source is placed orthogonal to a side of the frame defining the active area of the array. The incident light beam, though orthogonal to the sides of the active area, is not however, orthogonal to any substantial portion of sides of the individual micromirrors in the array. Orthogonal sides cause incident light to diffract along the direction of micromirror switching, and result in light ‘leakage’ into the ‘on’ state even if the micromirror is in the ‘off’ state. This light diffraction decreases the contrast ratio of the micromirror. The micromirrors of the present invention result in an improved contrast ratio, and the arrangement of the light source to micromirror array in the present invention results in a more compact system. Another feature of the invention is the ability of the micromirrors to pivot in opposite direction to on and off positions (the on position directing light to collection optics), where the movement to the on position is greater than movement to the off position. A further feature of the invention is a package for the micromirror array, the package having a window that is not parallel to the substrate upon which the micromirrors are formed. One example of the invention includes all the above features.

摘要翻译： 为了最小化沿着切换方向的光衍射，并且更特别地，将光衍射最小化到收集光学器件的接收锥体中，在本发明中，提供了不是矩形的微镜。 此外，为了最小化本发明的照明光学器件的成本和显示单元的尺寸，将光源与阵列的行（或列）正交放置，和/或将光源正交 到帧的定义阵列的有效区域的一侧。 然而，入射光束虽然正交于有源区域的侧面，但是不是与阵列中的各个微镜的任何相当大部分的侧面正交。 正交侧使得入射光沿着微镜切换的方向衍射，并且即使微镜处于“关闭”状态，也导致光“泄漏”进入“打开”状态。 该光衍射降低了微镜的对比度。 本发明的微反射镜导致对比度提高，并且在本发明中光源到微镜阵列的布置导致更紧凑的系统。 本发明的另一个特征是微镜能够相对于打开和关闭位置（将光引导到收集光学器件）的相对方向枢转，其中到打开位置的移动大于移动到关闭位置。 本发明的另一个特征是用于微镜阵列的封装，该封装具有不与形成微反射镜的基板平行的窗口。 本发明的一个实例包括所有上述特征。

公开(公告)号：US06356378B1

公开(公告)日：2002-03-12

申请号：US09624591

申请日：2000-07-24

申请人： Andrew Huibers

发明人： Andrew Huibers

IPC分类号： G02B2608

CPC分类号： G02B26/0833 ,  G02B26/08 ,  G02B26/0841 ,  Y10S359/904

摘要： A spatial light modulator includes an upper optically transmissive substrate held above a lower substrate containing addressing circuitry. One or more electrostatically deflectable elements are suspended by hinges from the upper substrate. In operation, individual mirrors are selectively deflected and serve to spatially modulate light that is incident to, and then reflected back through, the upper substrate. Motion stops may be attached to the reflective deflectable elements so that the mirror does not snap to the bottom substrate. Instead, the motion stop rests against the upper substrate thus limiting the deflection angle of the reflective deflectable elements.

摘要翻译： 空间光调制器包括保持在包含寻址电路的下基板上的上透光基板。 一个或多个静电可偏转元件通过铰链从上基板悬挂。 在操作中，单独的反射镜被选择性地偏转并且用于空间调制入射到上基板上并随后被上反射回的光。 运动止挡件可以附接到反射偏转元件，使得反射镜不卡扣到底部基板。 相反，运动停止件靠在上基板上，从而限制反射可偏转元件的偏转角。