Article for polishing semiconductor substrates
    82.
    发明授权
    Article for polishing semiconductor substrates 失效
    用于抛光半导体衬底的文章

    公开(公告)号:US07014538B2

    公开(公告)日:2006-03-21

    申请号:US10382079

    申请日:2003-03-05

    IPC分类号: B24D11/00

    摘要: A method and apparatus for using fixed abrasive polishing pads that contain posts for chemical mechanical polishing (CMP). The posts have different shapes, different sizes, different heights, different materials, different distribution of abrasive particles and different process chemicals. This invention also includes preconditioning fixed abrasive articles comprising a plurality of posts so that the posts have equal heights above the backing to achieve a uniform texture. This invention relates to improvements with respect to in situ rate measurement (ISRM) devices. The invention resides in providing a mechanical means, such as a notch, to determine when approaching the end of the abrasive web roll. The invention resides in coding the web throughout its length to enable determining the location of different portions of the web. This invention resides in providing perforations in the sides or end of the web for improved handling.

    摘要翻译: 一种用于使用固定研磨抛光垫的方法和装置,其包含用于化学机械抛光(CMP)的柱。 柱具有不同的形状,不同的尺寸,不同的高度,不同的材料,不同的磨料颗粒分布和不同的工艺化学品。 本发明还包括预处理包括多个柱的固定磨料制品,使得柱在背衬上方具有相等的高度以实现均匀的质地。 本发明涉及对现场速率测量(ISRM)装置的改进。 本发明在于提供一种机械装置,例如凹口,以确定何时接近研磨织物卷筒的端部。 本发明在于对其整个长度进行编码以确定网的不同部分的位置。 本发明在于在腹板的侧面或端部提供穿孔以改善处理。

    Stone polishing pad containing cork powder and method for manufacturing the same
    83.
    发明申请
    Stone polishing pad containing cork powder and method for manufacturing the same 审中-公开
    含软木粉的石材抛光垫及其制造方法

    公开(公告)号:US20030182867A1

    公开(公告)日:2003-10-02

    申请号:US10238316

    申请日:2002-09-10

    发明人: Shuk-dae Son

    IPC分类号: C09K003/14 B24D003/00

    CPC分类号: B24D3/00 B24D3/344 B24D7/06

    摘要: Disclosed are a mixture of a stone polishing pad, a stone polishing pad made of the mixture and a method for manufacturing the stone polishing pad. Instead of planar structure, the stone polishing pad has polishing protrusions and an uneven surface formed on the surface of the polishing protrusions that contacts with the polished object. The stone polishing pad is formed by charging a mould with the mixture of the stone polishing pad that includes cork powder, and forming the same under high temperature and high pressure.

    摘要翻译: 公开了一种石抛光垫,由该混合物制成的石抛光垫以及用于制造石抛光垫的方法的混合物。 代替平面结构,石抛光垫具有抛光突起和形成在与抛光对象接触的抛光突起的表面上的不平坦表面。 该石材抛光垫通过将模具与包括软木粉末的石材抛光垫的混合物充填并在高温高压下成型而形成。

    Superabrasive tool and method of manufacturing the same
    84.
    发明授权
    Superabrasive tool and method of manufacturing the same 失效
    超研磨工具及其制造方法

    公开(公告)号:US06312324B1

    公开(公告)日:2001-11-06

    申请号:US09077024

    申请日:1998-05-27

    IPC分类号: B24D300

    摘要: A superabrasive tool such as a superabrasive grindstone (101; 102), a superabrasive dresser (103; 104; 105) or a superabrasive lap surface plate (106) includes a base (20) of steel and a superabrasive layer (10) formed on the base (20). The superabrasive layer (10) includes superabrasive grains (11) consisting of diamond grains, cubic boron nitride grains or the like and a holding layer consisting of a nickel plating layer (16) and a bond layer (17), or a brazing filler metal layer (18), holding the superabrasive grains (11) and fixing the same onto the base (20). Grooves (12) or holes (14) are formed on flat surfaces (19) of the superabrasive grains (11) exposed from the holding layer (16, 17; 18). The holding layer (16, 17; 18) holding and fixing the superabrasive grains (11) so that the surfaces of the grains are partially exposed is formed on the base (20). The grooves (12) or the holes (14) are formed by irradiating the surfaces of the superabrasive grains (11) exposed from the holding layer (16, 17; 18) with a laser beam (50). Working of high accuracy can be performed by forming the grooves (12) or the holes (14) on the surfaces of the superabrasive grains (11).

    摘要翻译: 超研磨工具,例如超研磨磨石(101; 102),超研磨修整器(103; 104; 105)或超级磨料搭接表面板(106),包括钢的基部(20)和形成在 基座(20)。 超级磨料层(10)包括由金刚石晶粒,立方氮化硼晶粒等构成的超磨料颗粒(11)和由镀镍层(16)和接合层(17)组成的保持层,或钎料 层(18),保持超磨料颗粒(11)并将其固定到基底(20)上。 在从保持层(16,17; 18)露出的超级磨料颗粒(11)的平坦表面(19)上形成槽(12)或孔(14)。 保持层(16,17; 18)在基体(20)上形成有保持和固定超磨料颗粒(11)以使颗粒的表面部分露出的部分。 通过用激光束(50)照射从保持层(16,17; 18)暴露的超级磨料颗粒(11)的表面,形成凹槽(12)或孔(14)。 可以通过在超级磨料颗粒(11)的表面上形成凹槽(12)或孔(14)来实现高精度的工作。

    Titanium diboride-based composite articles with alumina dispersoids,
having improved fracture toughness
    87.
    发明授权
    Titanium diboride-based composite articles with alumina dispersoids, having improved fracture toughness 失效
    具有氧化铝分散体的二硼化钛基复合材料具有改善的断裂韧性

    公开(公告)号:US4863490A

    公开(公告)日:1989-09-05

    申请号:US158493

    申请日:1988-02-22

    IPC分类号: B24D3/00 B24D3/14 B24D3/34

    CPC分类号: B24D3/342 B24D3/00 B24D3/14

    摘要: Composite articles, cutting tools, and wear parts are prepared by densification of a mixture comprising alumina whiskers, chopped fibers, or particles uniformly distributed in a titanium diboride matrix. Optionally, other dispersoids may also be incorporated. The preferred composite article or cutting tool has a fracture toughness equal to or greater than about 2.5 MN/m.sup.3/2. Methods of preparation and use are also presented.

    摘要翻译: 通过致密化包含氧化铝晶须,短切纤维或均匀分布在二硼化钛基质中的颗粒的混合物来制备复合制品,切削工具和耐磨部件。 也可以并入其它分散体。 优选的复合制品或切削工具具有等于或大于约2.5MN / m3 / 2的断裂韧性。 还介绍了制备和使用方法。

    Cutting tool fabrication process
    90.
    发明授权
    Cutting tool fabrication process 失效
    切削工具制造工艺

    公开(公告)号:US4681600A

    公开(公告)日:1987-07-21

    申请号:US776652

    申请日:1985-09-16

    IPC分类号: B24D3/00 B24D18/00

    CPC分类号: B24D3/00 B24D18/00

    摘要: A method is provided for making improved molded abrasive tools by applying centifugal force and/or vibratory action to the abrasive particles during the molding operation. The abrasive is thereby forced and/or sifted preferentially into a closely packed surface layer with close conformity to the mold surface.

    摘要翻译: 提供了一种通过在模制操作期间将磨焦力和/或振动作用施加到磨料颗粒来制备改进的模制研磨工具的方法。 因此,研磨剂被迫和/或优先地筛分成与模具表面紧密一致的紧密堆积的表面层。