Abstract:
Provided is a piezoelectric vibration type force sensor including a vibration body including a disk-shaped piezoelectric material and a pair of drive electrodes, for vibrating in a radial direction of the piezoelectric material when an AC voltage is applied to the pair of drive electrodes, a substrate to be brought into contact with a surface on one side of the vibration body, an elastic member that is disposed to be brought into contact with a surface on another side of the vibration body, and a holding member including a contact portion and a loose-fit portion that loosely fits in the hollow through hole. The holding member fixes the contact portion and the loose-fit portion to the substrate so that movements of the vibration body in a vibration direction and in a direction orthogonal to the vibration direction are restricted for positioning.
Abstract:
Arrays of resonator sensors include an active wafer array comprising a plurality of active wafers, a first end cap array coupled to a first side of the active wafer array, and a second end cap array coupled to a second side of the active wafer array. Thickness shear mode resonator sensors may include an active wafer coupled to a first end cap and a second end cap. Methods of forming a plurality of resonator sensors include forming a plurality of active wafer locations and separating the active wafer locations to form a plurality of discrete resonator sensors. Thickness shear mode resonator sensors may be produced by such methods.
Abstract:
A technique for detecting external force applied to a piezoelectric plate is provided. A crystal plate is cantilever-supported in a container. Excitation electrodes are formed on an upper face and lower face, respectively, of the crystal plate. A movable electrode is formed on the lower face side. A fixed electrode is provided on a bottom portion of the container facing the movable electrode. The excitation electrode on the upper face side and the fixed electrode are connected to an oscillation circuit. When the crystal plate bends by external force applied, capacitance between. A direction of the movable electrode along a length direction of the crystal plate is set to 30° to 60°, relative to a face orthogonal to an intended direction of the external force. The movable electrode and fixed electrode changes, and this capacitance change and a deformation of the crystal circuit.
Abstract:
In a piezoelectric vibration type force sensor according to the present invention, vibration is restricted by a friction force between a piezoelectric body and a restricting member, and hence a range of sensing forces can be expanded compared with a case in which the vibration is restricted directly from a direction that is the same as an vibration direction. A conventional structure, in which a lead wire is soldered directly for electrically connecting the piezoelectric body to an external control circuit, causes a restriction of the vibration due to a solder attached to the piezoelectric body, resulting in narrowing the sensing range. Using the piezoelectric vibration type force sensor, the range of sensing forces can be expanded by making a state in which conducting portions of the piezoelectric body and the restricting member are not fixed but contact with each other for keeping electric conductivity.
Abstract:
A force sensor (10) is forced from a vibrating beam (11), an excitation piezoelectric device (12) to cause a vibration in the beam at its resonate frequency and a measurement piezoelectric device (12) to measure the frequencies being indication of the force applied to the beam (11). The excitation and measurement piezoelectric devices (12) are attached to the beam adjacent to each other at one end of the beam (11).
Abstract:
An apparatus and method for monolithic force transducers in which a sensed force is applied across only two ends of a pair of force sensing elements so that the pair of force sensing elements are loaded in series with one in compression and the other in tension, whereby the force sensed by each of the two force sensing elements are identically equal in magnitude but opposite in sense.
Abstract:
A load detecting device includes a sensor element including a function for generating and detecting a vibration within a single element, the sensor element converting a load or an acceleration into a detection signal, a driving portion for outputting a driving signal for vibrating the sensor element, a vibration detecting portion for extracting the detection signal from the sensor element and for detecting a vibration characteristic value of the sensor element, a wiring for electrically connecting the sensor element, the driving portion and the vibration detecting portion to one another, and for transmitting a superimposed signal constituted by superposition of the driving signal from the driving portion and the detection signal from the sensor element, and a calculating portion for calculating one of or both of a load and an acceleration applied to the sensor element based on the vibration characteristic value from the vibration detecting portion.
Abstract:
A triple beam resonator (10) is provided with three beams or tines (12, 14, 16) aligned in parallel alongside each other and joined at a decoupling zone (18) at each end, which is in turn connected to the surrounding material. The central beam (14) is twice the width of the two outer beams (12, 16). The resonating element has a length of 15.5 mm, a thickness of 0.25 mm and beam widths of 2 mm and 1 mm. The distance between the beams is 0.5 mm. Finite element analysis predicts the modal behavior with stress distribution and eigenfrequencies of the resonator (10). Thick-film PZT elements (20, 22) were printed on separate regions at each end of the central beam (14), where maximum stresses exist as the resonator (10) operates in its favored mode of vibration. The PZT element (20) at one end drives the vibrations, while the PZT element (22) at the other end detects them. Positioning the PZT driving and sensing elements (20,22) on the regions of maximum stresses maximizes the degree of mechanical coupling between the active piezoelectric layer and the resonator for generation of both driving forces and sensing signals. Very high quality factors of 3100 and higher have been experienced. Furthermore, the resonator can be manufactures by batch production techniques while maintaining high reliability and reproducibility.
Abstract:
Time of flight of sound t0, tn propagating through fixed one face to another of the object under zero load (σ0) and changed applied load (σn) respectively are measured, then stress dependent coefficient α peculiar to material of the object can be obtained from above data and the equation determined beforehand α=f(Δtn, σn) using stress dependent coefficient calculation circuit 12. Time of flight of sound t propagating through one face to another of the object 1 at the determined place under applied unknown load is measured next. Time of flight tn, t0 are measured by time of flight measurement system 11. This invention consists of the stress measurement method and the apparatus to calculate real stress caused in the practically equipped object using equation σ=f(Δt, α) determined beforehand based on time of flight t and stress dependent coefficient α mentioned above.
Abstract translation:在零负载(西格玛)下,通过固定的一个面传播到物体的另一个的声音t 0 0,t N n N的飞行时间,并改变 分别测量施加的载荷(σσn),则可以从上述数据获得对象材料特有的应力依赖系数α,并且事先确定的方程α= f(Deltat n n / 接下来测量在施加的未知负载下在确定的位置通过一个面传播到物体1的另一个的声音t的飞行时间。 飞行时间t sub>,t <0>由飞行时间测量系统11测量。本发明由应力测量方法和计算在 使用公式<?in-line-formula description =“In-line Formulas”end =“lead”?> sigma = f(Deltat,alpha)<?in-line-formula description =“In-line Formulas” 根据飞行时间t和上述的应力依赖系数α,事先确定end =“tail”?>。
Abstract:
A system including piezoelectric material wherein a force exerted on the piezoelectric material is determined by subjecting the piezoelectric material to an input signal of sweeping frequency and evaluating the response of the piezoelectric material to the applied signal.