-
公开(公告)号：US4588288A
公开(公告)日：1986-05-13
申请号：US623473
申请日：1984-06-22
Applicant: Mikio Nakasugi , Takao Yokomatsu , Junji Isohata
Inventor： Mikio Nakasugi , Takao Yokomatsu , Junji Isohata
CPC classification number: G03F9/7023 , F16C29/025 , F16C32/0648
Abstract: There is disclosed a static pressure bearing which is provided with plural fluid supplying pads for supplying a fluid in a gap between a guide member and a bearing member whereby the ratio of the change of pressure of the fluid supplied from the pads to the change in the gap is regulatable.
Abstract translation: 公开了一种静压轴承，其设置有多个用于在引导构件和轴承构件之间的间隙中供应流体的流体供应垫，由此从垫供应的流体的压力变化与所述垫的变化的比率 差距是可调节的。
-
公开(公告)号：US08365615B2
公开(公告)日：2013-02-05
申请号：US12743076
申请日：2009-01-20
Applicant: Shuuichi Sato , Yuichi Someya , Hideyuki Nishida , Takao Yokomatsu , Kentaro Nakamura
Inventor： Shuuichi Sato , Yuichi Someya , Hideyuki Nishida , Takao Yokomatsu , Kentaro Nakamura
IPC: G01L1/10
CPC classification number: G01L1/162 , H01L41/1132
Abstract: In a piezoelectric vibration type force sensor according to the present invention, vibration is restricted by a friction force between a piezoelectric body and a restricting member, and hence a range of sensing forces can be expanded compared with a case in which the vibration is restricted directly from a direction that is the same as an vibration direction. A conventional structure, in which a lead wire is soldered directly for electrically connecting the piezoelectric body to an external control circuit, causes a restriction of the vibration due to a solder attached to the piezoelectric body, resulting in narrowing the sensing range. Using the piezoelectric vibration type force sensor, the range of sensing forces can be expanded by making a state in which conducting portions of the piezoelectric body and the restricting member are not fixed but contact with each other for keeping electric conductivity.
Abstract translation: 在根据本发明的压电振动型力传感器中，通过压电体和限制构件之间的摩擦力限制振动，因此与直接限制振动的情况相比，能够扩大感测力范围 从与振动方向相同的方向。 其中引线被直接焊接以将压电体电连接到外部控制电路的常规结构导致由于附着到压电体的焊料引起的振动的限制，导致感测范围变窄。 使用压电振动型力传感器，可以通过使压电体和限制构件的导电部分不固定但彼此接触以保持导电性的状态来扩大感测力的范围。
-
公开(公告)号：US4810889A
公开(公告)日：1989-03-07
申请号：US947035
申请日：1986-12-29
Applicant: Takao Yokomatsu , Hironori Yamamoto , Mitsuaki Seki
Inventor： Takao Yokomatsu , Hironori Yamamoto , Mitsuaki Seki
CPC classification number: H01L21/67138 , G03F7/704
Abstract: An apparatus for drawing a fine circuit pattern on a wafer, includes a radiation beam generating head for generating and emitting radiation beams with which the wafer is to be patternwisely exposed; a first moving system for moving the beam generating head in a first direction; and a second moving system for moving the wafer at least in a second direction, substantially perpendicular to the first direction, while holding the wafer by attraction.
Abstract translation: 一种用于在晶片上绘制精细电路图案的装置包括用于产生和发射晶片被图案曝光的辐射束的辐射束产生头; 用于沿第一方向移动光束产生头的第一移动系统; 以及第二移动系统，用于至少在基本上垂直于第一方向的第二方向上移动晶片，同时通过吸引力保持晶片。
-
Patent Agency Ranking
公开(公告)号：US07915787B2
公开(公告)日：2011-03-29
申请号：US12169575
申请日：2008-07-08
Applicant: Mahito Negishi , Takao Yokomatsu , Ken Meisho , Seiichi Hata , Akira Shimokohbe , Dongming Sun , Sheng Wang
Inventor： Mahito Negishi , Takao Yokomatsu , Ken Meisho , Seiichi Hata , Akira Shimokohbe , Dongming Sun , Sheng Wang
IPC: H01L41/08
Abstract: A cylindrical piezoelectric element is arranged to share an axis with a cylindrical vibrator having different diameters at central and end portions to fix the vibrator forming a gap at the central portion. Vibration voltages are applied across first electrodes on the piezoelectric element and the vibrator, namely, a second electrode, to vibrate the vibrator and bring a wave front of a traveling wave into contact with a tubular member, i.e., a supporting member fitted to the vibrator. Friction at a contact portion of the vibrator moves a mover including the vibrator and the piezoelectric element in an axial direction of the tubular member. By amplifying the vibration amplitude using the vibrator provided separately from the piezoelectric element, a small actuator capable of performing high-speed driving is realized.
Abstract translation: 圆柱形压电元件被布置成与中心部分和端部具有不同直径的圆柱形振动器共轴以固定在中心部分形成间隙的振动器。 在压电元件和振动器（即第二电极）上的第一电极上施加振动电压，以使振动器振动并使行波的波前与管状构件（即，安装到振动器的支撑构件）接触 。 在振动器的接触部分的摩擦使包括振动器和压电元件在内的动子在管状构件的轴向上移动。 通过使用与压电元件分开设置的振动器放大振动振幅，实现了能够进行高速驱动的小型致动器。
-
公开(公告)号：US20090021113A1
公开(公告)日：2009-01-22
申请号：US12169575
申请日：2008-07-08
Applicant: Mahito Negishi , Takao Yokomatsu , Ken Meisho , Seiichi Hata , Akira Shimokohbe , Dongming Sun , Sheng Wang
Inventor： Mahito Negishi , Takao Yokomatsu , Ken Meisho , Seiichi Hata , Akira Shimokohbe , Dongming Sun , Sheng Wang
IPC: H02N2/02
Abstract: A cylindrical piezoelectric element is arranged to share an axis with a cylindrical vibrator having different diameters at central and end portions to fix the vibrator forming a gap at the central portion. Vibration voltages are applied across first electrodes on the piezoelectric element and the vibrator, namely, a second electrode, to vibrate the vibrator and bring a wave front of a traveling wave into contact with a tubular member, i.e., a supporting member fitted to the vibrator. Friction at a contact portion of the vibrator moves a mover including the vibrator and the piezoelectric element in an axial direction of the tubular member. By amplifying the vibration amplitude using the vibrator provided separately from the piezoelectric element, a small actuator capable of performing high-speed driving is realized.
Abstract translation: 圆柱形压电元件被布置成与中心部分和端部具有不同直径的圆柱形振动器共轴以固定在中心部分形成间隙的振动器。 在压电元件和振动器（即第二电极）上的第一电极上施加振动电压，以使振动器振动并使行波的波前与管状构件（即，安装到振动器的支撑构件）接触 。 在振动器的接触部分的摩擦使包括振动器和压电元件在内的动子在管状构件的轴向上移动。 通过使用与压电元件分开设置的振动器放大振动振幅，实现了能够进行高速驱动的小型致动器。
-
公开(公告)号：US20110113898A1
公开(公告)日：2011-05-19
申请号：US12743076
申请日：2009-01-20
Applicant: Shuuichi Sato , Yuichi Someya , Hideyuki Nishida , Takao Yokomatsu , Kentaro Nakamura
Inventor： Shuuichi Sato , Yuichi Someya , Hideyuki Nishida , Takao Yokomatsu , Kentaro Nakamura
CPC classification number: G01L1/162 , H01L41/1132
Abstract: In a piezoelectric vibration type force sensor according to the present invention, vibration is restricted by a friction force between a piezoelectric body and a restricting member, and hence a range of sensing forces can be expanded compared with a case in which the vibration is restricted directly from a direction that is the same as an vibration direction. A conventional structure, in which a lead wire is soldered directly for electrically connecting the piezoelectric body to an external control circuit, causes a restriction of the vibration due to a solder attached to the piezoelectric body, resulting in narrowing the sensing range. Using the piezoelectric vibration type force sensor, the range of sensing forces can be expanded by making a state in which conducting portions of the piezoelectric body and the restricting member are not fixed but contact with each other for keeping electric conductivity.
Abstract translation: 在根据本发明的压电振动型力传感器中，通过压电体和限制构件之间的摩擦力限制振动，因此与直接限制振动的情况相比，能够扩大感测力范围 从与振动方向相同的方向。 其中引线被直接焊接以将压电体电连接到外部控制电路的常规结构导致由于附着到压电体的焊料引起的振动的限制，导致感测范围变窄。 使用压电振动型力传感器，可以通过使压电体和限制构件的导电部分不固定但彼此接触以保持导电性的状态来扩大感测力的范围。
-
公开(公告)号：US4768064A
公开(公告)日：1988-08-30
申请号：US139114
申请日：1987-12-28
Applicant: Junji Isohata , Mikio Nakasugi , Takao Yokomatsu
Inventor： Junji Isohata , Mikio Nakasugi , Takao Yokomatsu
IPC: H01L21/30 , G03F7/20 , G03F9/00 , G05D3/00 , G12B5/00 , H01L21/027 , H01L21/67 , H01L21/68 , G03B27/42
CPC classification number: G03F7/70716
Abstract: A conveyor device for alignment in which minutely displaceable members and hydraulic fluid supply pads are disposed between a slide and a guide. The relative position of the slide and the guide is adjusted by controlling the dimension of the minutely displaceable members.
Abstract translation: 用于对准的传送装置，其中微小位移构件和液压流体供应垫设置在滑块和引导件之间。 通过控制微小位移构件的尺寸来调整滑块和导轨的相对位置。
-
公开(公告)号：US4749283A
公开(公告)日：1988-06-07
申请号：US906272
申请日：1986-09-10
Applicant: Takao Yokomatsu , Motomu Furukawa
Inventor： Takao Yokomatsu , Motomu Furukawa
CPC classification number: F16C33/746 , F16C29/025 , F16C32/0618 , F16C32/0696 , F16C33/748 , F16C2300/62
Abstract: A static pressure bearing device for relatively supporting, in an ambience, an object for relative movement, comprising a fluid supplying portion for supplying a fluid to at least a portion of a surface of the object, and a suction pump for drawing the fluid supplied to the portion of the surface of the object by the fluid supplying portion, so as to substantially prevent leakage of the fluid into the ambience.
Abstract translation: 一种用于在环境中相对支撑用于相对运动的物体的静压承受装置，包括用于将流体供应到物体的表面的至少一部分的流体供应部分和用于将供应到 通过流体供应部分的物体的表面的部分，以便基本上防止流体泄漏到环境中。
-
-
-
-
-
-
-
Search Results
8
records
(took 0.015 seconds)
