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    Cathode arrangement, electron gun, and lithography system comprising such electron gun
    87.
    发明申请
    Cathode arrangement, electron gun, and lithography system comprising such electron gun 有权
    阴极装置，电子枪和包括这种电子枪的光刻系统

    公开(公告)号：US20150187541A1

    公开(公告)日：2015-07-02

    申请号：US14578525

    申请日：2014-12-22

    Applicant: MAPPER LITHOGRAPHY IP B.V

    Inventor： Laura DINU-GÜRTLER ,  Eric Petrus HOGERVORST

    IPC: H01J37/317 ,  H01J1/15 ,  H01J37/075

    CPC classification number: H01J37/3174 ,  G03F7/70058 ,  H01J1/15 ,  H01J1/28 ,  H01J3/027 ,  H01J3/029 ,  H01J37/075 ,  H01J37/3177 ,  H01J2229/481 ,  H01J2237/061

    Abstract: The invention relates to a cathode arrangement comprising: a thermionic cathode comprising an emission portion provided with an emission surface for emitting electrons, and a reservoir for holding a material, wherein the material, when heated, releases work function lowering particles that diffuse towards the emission portion and emanate at the emission surface at a first evaporation rate; a focusing electrode comprising a focusing surface for focusing the electrons emitted from the emission surface of the cathode; and an adjustable heat source configured for keeping the focusing surface at a temperature at which accumulation of work function lowering particles on the focusing surface is prevented.

    Abstract translation: 本发明涉及一种阴极装置，其包括：热离子阴极，其包括具有用于发射电子的发射表面的发射部分和用于保持材料的储存器，其中所述材料在被加热时释放向发射扩散的功函数降低颗粒 以第一蒸发速率发射在发射表面; 聚焦电极，其包括用于聚焦从阴极的发射表面发射的电子的聚焦表面; 以及可调节热源，其被配置为将聚焦表面保持在防止在聚焦表面上降低颗粒的功函数积累的温度。

    Method and system for operating electron guns in magnetic fields
    88.
    发明申请
    Method and system for operating electron guns in magnetic fields 有权

    公开(公告)号：US20130035905A1

    公开(公告)日：2013-02-07

    申请号：US13622212

    申请日：2012-09-18

    Applicant: The Board of Trustees of the Leland Stanford Junio

    Inventor： Dragos E. Constantin ,  Rebecca Fahrig ,  Paul J. Keall

    IPC: G06F17/50

    CPC classification number: H01J3/027 ,  H01J3/029 ,  H05H7/08 ,  H05H2007/084

    Abstract: A method of configuring an electron gun for generating and injecting an electron beam into a linac accelerating waveguide operating in magnetic fringe fields of an MRI scanner in the absence of a magnetic shield is provided using an appropriately programmed computer to determining an anode drift tube diameter at an injection point of a linac according to a magnetic field value from an MRI scanner and to a predetermined current density, where the magnetic field has an isocenter, determining a transverse diameter of a Type M cathode in an electron gun, according to the anode drift tube diameter and the current density, and minimizing an emittance value in an electron beam of the electron gun at an entry point of the anode drift tube by optimizing the distance between the cathode and the anode, where the electron beam is along an axis of symmetry of the magnetic field.

    Field emission cathode structure using perforated gate
    90.
    发明申请
    Field emission cathode structure using perforated gate 失效
    使用穿孔门的场发射阴极结构

    公开(公告)号：US20030193297A1

    公开(公告)日：2003-10-16

    申请号：US10305559

    申请日：2002-11-27

    Applicant: Sony Corporation ,  Sony Electronics Inc.

    Inventor： Benjamin Edward Russ ,  Jack Barger ,  James Wang

    IPC: H05B039/04

    CPC classification number: H01J29/467 ,  H01J3/021 ,  H01J3/029 ,  H01J29/481 ,  H01J29/488 ,  H01J31/127

    Abstract: An electron emitting structure that produces a substantially uniform electric field resulting in a substantially straight electron emission. In a preferred form, the electron emitting structure is used as a cathode plate of a field emission display (FED). In one embodiment, an electron emitting structure comprises a substrate, a first electrode formed on the substrate, a second electrode crossing over an active region of the first electrode, and an insulating material separating and electrically insulating the first and second electrodes. A plurality of openings are formed in at least a portion of the second electrode crossing over the active region. And, an electron emitting material is deposited on at least a portion of the active region of the first electrode, portions of the electron emitting material not underneath respective ones of the plurality of openings of the second electrode.

    Abstract translation: 一种电子发射结构，其产生基本上均匀的电场，导致基本上直的电子发射。 在优选的形式中，电子发射结构用作场致发射显示器（FED）的阴极板。 在一个实施例中，电子发射结构包括衬底，形成在衬底上的第一电极，与第一电极的有源区交叉的第二电极以及分隔并电绝缘第一和第二电极的绝缘材料。 在第二电极的至少一部分上形成有多个开口，该第二电极与有源区交叉。 并且，电子发射材料沉积在第一电极的有源区的至少一部分上，电子发射材料的部分不在第二电极的多个开口中的相应的开口下方。

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