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公开(公告)号：US06858911B2
公开(公告)日：2005-02-22
申请号：US10309951
申请日：2002-12-04
IPC分类号： B81B5/00 , F04B19/00 , F04B43/04 , G02B6/35 , H01F7/06 , H01F7/08 , H02K33/16 , H02N1/00 , H01L29/82
CPC分类号： H02K33/16 , B81B5/00 , F04B19/006 , F04B43/043 , G02B6/3566 , G02B6/3572 , G02B6/3584 , G02B6/3586 , H01F7/06 , H01F7/08 , H01F2007/068 , H02N1/006
摘要： A Microelectromechanical (MEMS) device that can minimize the effects of fabrication tolerances on the operation of the device can include a MEMS electromagnetic actuator to selectively generate displacement forces to displace an actuable element along a path. A cantilever can apply an opposing force to the actuable element to control the amount of displacement. Coil ends of the actuator can be shaped to vary a gap distance between the coil ends, and/or the magnetic portion of the actuable element may be shaped, so as to vary the force applied to the actuable element along the displacement axis. One or more pins located in the deflection path of the cantilever can contact the cantilever at one or more points so as to change the bending resistance of the cantilever. The cross-section of the cantilever can also be varied along its length so as to change the bending resistance of the cantilever.
摘要翻译： 可以最小化制造公差对器件操作的影响的微机电（MEMS）器件可以包括MEMS电磁致动器，其选择性地产生位移力以沿着路径移位可致动元件。 悬臂可以向可致动元件施加相反的力以控制位移量。 可以将致动器的线圈端部成形为改变线圈端部之间的间隙距离，和/或可致动元件的磁性部分可以成形，以便沿着位移轴线改变施加到致动元件的力。 位于悬臂的偏转路径中的一个或多个销可以在一个或多个点处接触悬臂，以便改变悬臂的抗弯曲性。 悬臂的横截面也可以沿其长度变化，以便改变悬臂的抗弯曲性。
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公开(公告)号：US5592037A
公开(公告)日：1997-01-07
申请号：US122968
申请日：1993-09-20
申请人： Edward N. Sickafus
发明人： Edward N. Sickafus
IPC分类号： H02K29/00 , B81B3/00 , B81B5/00 , H02K3/26 , H02K29/06 , H02K29/08 , H02K37/08 , H02K37/12 , H02K1/06 , G01D7/02 , H02K3/00
CPC分类号： H02K3/26 , H02K29/06 , H02K37/08 , H02K37/125 , H02K99/00 , Y10S310/06
摘要： An analog-display device, such as a gauge or the like, includes a moveable display member driven by a planar micro-motor. The micro-motor comprises a substrate, a stator for receiving electrical current to generate an electromagnetic field, and a rotor which is rotatable in response to electromagnetic fields generated by the stator. In the stator, a plurality of electrically conductive micro-coils are supported by the substrate and arrayed in a first plane. A plurality of magnetic members is arrayed in the rotor in a second plane substantially parallel to the first plane. The visible display member of the analog display device is mounted for movement by rotation of the rotor body. Analog display devices of the invention can be used in motor vehicle instrument panels, wherein the micro-motor carrying the display member can be mounted, as by cementing, to the display face of the device.
摘要翻译： 诸如仪表等的模拟显示装置包括由平面微电机驱动的可移动显示构件。 微型电动机包括基板，用于接收电流以产生电磁场的定子和可响应于定子产生的电磁场而旋转的转子。 在定子中，多个导电微型线圈由衬底支撑并排列在第一平面中。 多个磁性构件在基本上平行于第一平面的第二平面中排列在转子中。 模拟显示装置的可视显示部件安装成通过转子体的旋转而移动。 本发明的模拟显示装置可用于机动车辆仪表板，其中承载显示构件的微型电动机可以通过固定安装到装置的显示面上。
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83.发明授权Method and apparatus for detecting the movement of an object with a micro machine that responds to a change in magnetic flux associated with the object 失效用于利用响应于与物体相关联的磁通量变化的微型机器检测物体的运动的方法和装置
公开(公告)号：US5481188A
公开(公告)日：1996-01-02
申请号：US24772
申请日：1993-03-02
申请人： Takao Mizutani
发明人： Takao Mizutani
摘要： A device is provided to measure and record the movement of an object according to a change in magnetic flux which changes as the object moves. The device contains a micro machine which has a rotation detection member, a driving gear which is formed coaxially with the rotation detection member, and a first detection plate which is also formed coaxially with the rotation detection member. The rotation detection member rotates according to the change in magnetic flux, and the rotation of the rotation detection member causes the driving gear and the first detection plate to rotate. The driving gear engages a follower gear, so as to form a gear train, and a second detection plate is formed coaxially with the follower gear and rotates when the follower gear rotates. First and second detecting elements are respectively disposed opposite the first and second detection plates, and the position of the object is determined by the relative respective positions of the first and second detection plates and the first and second detecting elements. In addition, the invention includes a method which is performed by the device.
摘要翻译： 提供了一种装置，用于根据随着物体移动而变化的磁通量的变化来测量和记录物体的运动。 该装置包括具有旋转检测构件，与旋转检测构件同轴地形成的驱动齿轮的微型机器以及也与旋转检测构件同轴地形成的第一检测板。 旋转检测构件根据磁通量的变化而旋转，旋转检测构件的旋转使得驱动齿轮和第一检测板旋转。 驱动齿轮啮合从动齿轮，以形成齿轮系，第二检测板与从动齿轮同轴地形成，并且当从动齿轮旋转时旋转。 第一和第二检测元件分别与第一和第二检测板相对设置，并且物体的位置由第一和第二检测板以及第一和第二检测元件的相对位置确定。 此外，本发明包括由该装置执行的方法。
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公开(公告)号：US11796396B2
公开(公告)日：2023-10-24
申请号：US17216047
申请日：2021-03-29
发明人： Tsai-Hao Hung , Shih-Chi Kuo
CPC分类号： G01K7/32 , B81B3/0008 , B81C1/00944 , B81B2201/0278 , B81B2203/0136 , B81B2203/04 , B81C2201/013 , B81C2201/0105 , B81C2201/0116
摘要： The structure of a micro-electro-mechanical system (MEMS) thermal sensor and a method of fabricating the MEMS thermal sensor are disclosed. A method of fabricating a MEMS thermal sensor includes forming first and second sensing electrodes with first and second electrode fingers, respectively, on a substrate and forming a patterned layer with a rectangular cross-section between a pair of the first electrode fingers. The first and second electrode fingers are formed in an interdigitated configuration and suspended above the substrate. The method further includes modifying the patterned layer to have a curved cross-section between the pair of the first electrode fingers, forming a curved sensing element on the modified patterned layer to couple to the pair of the first electrodes, and removing the modified patterned layer.
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公开(公告)号：US11757378B1
公开(公告)日：2023-09-12
申请号：US17833827
申请日：2022-06-06
发明人： Shih-Yu Liao , Tsai-Hao Hung
CPC分类号： H02N1/006 , B81B7/0016 , B81B2203/0136 , H04N23/687
摘要： A micromechanical arm array is provided. The micromechanical arm array comprises: a plurality of micromechanical arms spaced from each other in a first horizontal direction and extending in a second horizontal direction, wherein each micromechanical arm comprises a protrusion at a top of each micromechanical arm and protruding upwardly in a vertical direction; a plurality of protection films, each protection film encapsulating one of the plurality of micromechanical arms; and a metal connection structure extending in the first horizontal direction. The metal connection structure comprises: a plurality of joint portions, each joint portion corresponding to and surrounding the protrusion of one of the plurality of micromechanical arms; and a plurality of connection portions extending in the first horizontal direction and connecting two neighboring joint portions.
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公开(公告)号：US20230008705A1
公开(公告)日：2023-01-12
申请号：US17369829
申请日：2021-07-07
发明人： Qin Zhou , Youmin Wang
摘要： A microelectromechanical system MEMS structure is described. A first actuator is attached to a substrate and configured to rotate the substrate along a first axis of rotation. An array of rotatable MEMS mirrors is mounted on the substrate, aligned parallel to the first axis of rotation. Each rotatable MEMS mirror is rotatable about a second axis of rotation with each second axis of rotation being perpendicular to the first axis of rotation and parallel to every other axis of rotation. An array of second actuators is configured to rotate each of the rotatable MEMS mirrors about its corresponding second axis of rotation. A controller is configured to control the first actuator to rotate the substrate about the first axis of rotation. The controller further controls the array of second actuators to rotate each rotatable MEMS mirror of the array of rotatable MEMS mirrors about its corresponding second axis of rotation.
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公开(公告)号：US11312618B2
公开(公告)日：2022-04-26
申请号：US16492345
申请日：2018-03-14
发明人： Audrey Berthelot , Mikaël Colin , Alain Jeanroy , Guillaume Lehee , Olivier Vancauwenberghe , Philippe Onfroy , Jean-Sébastien Mace
摘要： A microdevice (100) comprising a movable element (111) capable of moving relative to a fixed part (115), produced in first and second layers of material (104, 106) arranged one above the other such that the movable element comprises a portion (112) of the first layer and a portion (118) of the second layer secured to each other, and wherein the movable element is suspended from the fixed part by a suspension structure (121) formed in the first and/or second layer of material.
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公开(公告)号：US11208321B2
公开(公告)日：2021-12-28
申请号：US16107431
申请日：2018-08-21
摘要： Three-dimensional micro devices usable as electromagnetic and magnetomechanical energy converters, as micromagnetic motors or generators, and methods for their production. The three-dimensional micro devices exhibit high efficiency even at dimensions on the microscale and below, and the method for production, as well as mass production, is simple and economical. Moreover, the three-dimensional micro devices at least include one three-dimensional device produced using roll-up technology. This three-dimensional device includes all functional and structural components for full functionality. At least one functional or structural component is an element that is at least partially freely movable at least partially within a surrounding element and is arranged such that it can be rotated at least around one of its axes.
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公开(公告)号：US10903740B2
公开(公告)日：2021-01-26
申请号：US16735346
申请日：2020-01-06
申请人： wiSpry, Inc.
摘要： The present subject matter relates to charge pump devices, systems, and methods in which a first plurality of series-connected charge-pump stages is connected between a supply voltage node and a first circuit node, wherein the first plurality of charge-pump stages are operable to produce a first electrical charge at the first circuit node, the first electrical charge having a first polarity; and a second plurality of series-connected charge-pump stages is connected between the supply voltage node and a second circuit node, wherein the second plurality of charge-pump stages are operable to produce a second electrical charge at the second circuit node, the second electrical charge having a second polarity.
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公开(公告)号：US10816792B2
公开(公告)日：2020-10-27
申请号：US15780004
申请日：2016-12-01
摘要： Wavelength division multiplexing (WDM) has enabled telecommunication service providers to fully exploit the transmission capacity of optical fibers. State of the art systems in long-haul networks now have aggregated capacities of terabits per second. Moreover, by providing multiple independent multi-gigabit channels, WDM technologies offer service providers with a straight forward way to build networks and expand networks to support multiple clients with different requirements. In order to reduce costs, enhance network flexibility, reduce spares, and provide re-configurability many service providers have migrated away from fixed wavelength transmitters, receivers, and transceivers, to wavelength tunable transmitters, receivers, and transceivers as well as wavelength dependent add-drop multiplexer, space switches etc. However, to meet the competing demands for improved performance, increased integration, reduced footprint, reduced power consumption, increased flexibility, re-configurability, and lower cost it is desirable to exploit/adopt monolithic optical circuit technologies, hybrid optoelectronic integration, and microelectromechanical systems (MEMS).
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