公开(公告)号：US08734627B2

公开(公告)日：2014-05-27

申请号：US13504159

申请日：2010-11-12

申请人： Shinobu Matsubara ,  Yoshikuni Horishita ,  Atsushi Ono

发明人： Shinobu Matsubara ,  Yoshikuni Horishita ,  Atsushi Ono

IPC分类号： C23C14/54

CPC分类号： H02M1/32 ,  C23C14/34 ,  C23C14/564 ,  H02H9/001 ,  H05H1/36 ,  H05H1/46

摘要： Provided is a power supply apparatus which can effectively restrict the current rise at the time of occurrence of arc discharge that is directly related to the occurrence of splashes or particles, and which is also capable of preventing the discharge voltage from getting excessive at the time of finishing the arc processing. The power supply apparatus has: a DC power supply unit which applies a DC voltage to a target which comes into contact with a plasma; and an arc processing unit which can detect arc discharge generated in the electrode by positive and negative outputs from the DC power supply unit, and also which can perform arc discharge suppression processing. An output characteristics switching circuit switches the outputs such that the output to the electrode has constant-current characteristics and that the output to the electrode has constant-voltage characteristics by the time of completion of the arc suppressing processing.

摘要翻译： 提供一种电力供给装置，其能够有效地限制与发生飞溅或粒子直接相关的电弧放电发生时的电流上升，并且还能够防止放电电压在 整理电弧加工。 电源装置具有：对与等离子体接触的目标施加直流电压的直流电源单元; 以及电弧处理单元，其可以通过来自直流电源单元的正和负输出来检测在电极中产生的电弧放电，并且还可以执行电弧放电抑制处理。 输出特性切换电路切换输出，使得对电极的输出具有恒定电流特性，并且通过电弧抑制处理完成时，对电极的输出具有恒定电压特性。

公开(公告)号：US08506771B2

公开(公告)日：2013-08-13

申请号：US12989692

申请日：2009-05-20

申请人： Yoshikuni Horishita ,  Atsushi Ono ,  Wataru Oshima

发明人： Yoshikuni Horishita ,  Atsushi Ono ,  Wataru Oshima

IPC分类号： H01J37/34

CPC分类号： H02M7/53871 ,  H01J37/3417 ,  H01J37/3429 ,  H01J37/3444 ,  H02M2001/007

摘要： A bipolar pulsed power supply which supplies power in a bipolar pulsed mode at a predetermined frequency to a pair of electrodes that come into contact with a plasma is arranged to reduce the switching loss of the switching elements in a bridge circuit, and also to attain a high durability without using high-performance switching elements. The bipolar pulsed power supply has: a bridge circuit constituted by switching elements SW1 through SW4 connected to positive and negative DC outputs from a DC power supply source; and a control means for controlling switching ON or OFF of each of the switching elements in the bridge circuit. An output-short-circuiting switching element SW0 is disposed between the positive and the negative DC outputs from the DC power supply source such that, in a short-circuited state of the output-short-circuiting switching element, each of the switching elements in the bridge circuit is switched by the control means.

摘要翻译： 以与预定频率相对的双极性脉冲模式的电力供给与等离子体接触的一对电极的双极脉冲电源被配置为减小桥式电路中的开关元件的开关损耗， 高耐用性，而不使用高性能开关元件。 双极脉冲电源具有：由直流电源连接到正，负直流输出的开关元件SW1〜SW4构成的桥接电路; 以及用于控制桥式电路中的每个开关元件的接通或断开的控制装置。 输出短路开关元件SW0设置在来自直流电源的正极和负极直流输出之间，使得在输出短路开关元件的短路状态下，每个开关元件 桥接电路由控制装置切换。

公开(公告)号：US08467211B2

公开(公告)日：2013-06-18

申请号：US12989444

申请日：2009-05-20

申请人： Yoshikuni Horishita ,  Shinobu Matsubara ,  Atsushi Ono

发明人： Yoshikuni Horishita ,  Shinobu Matsubara ,  Atsushi Ono

IPC分类号： H02M7/537 ,  H02M7/5387

CPC分类号： H02M7/53871 ,  C23C14/352 ,  H02M7/493

摘要： A bipolar pulsed power supply is provided in which, while effectively restricting the rise in current at the time of arcing which directly leads to the generation of splashes and particles, the occurrence of overvoltage at the time of polarity reversal is prevented. The power supply has a bridge circuit constituted by switching elements SW1 through SW4 connected to positive and negative DC outputs from a DC power supply source. The operation of the switching elements is controlled to output in a bipolar pulsed mode at a predetermined frequency to a pair of electrodes which come into contact with a plasma. There is provided an output-characteristics-switching circuit which switches the output such that, when outputting to the electrodes, the output to the electrodes has initially constant-voltage characteristics and subsequent output to the electrodes has constant-current characteristics.

摘要翻译： 提供了双极脉冲电源，其中在有效地限制直流导致飞溅和颗粒的产生的电弧时的电流上升的同时，防止了极性反转时的过电压的发生。 电源具有由直流电源的正，负直流输出连接的开关元件SW1〜SW4构成的桥接电路。 控制开关元件的操作，以预定频率以双极脉冲模式输出到与等离子体接触的一对电极。 提供了输出特性切换电路，其切换输出，使得当输出到电极时，对电极的输出具有初始的恒定电压特性，并且随后对电极的输出具有恒定电流特性。

公开(公告)号：US08248813B2

公开(公告)日：2012-08-21

申请号：US13051279

申请日：2011-03-18

申请人： Atsushi Ono ,  Yoshihiro Kobayashi ,  Shojiro Kitamura ,  Masayuki Matsunaga ,  Akitoshi Hara

发明人： Atsushi Ono ,  Yoshihiro Kobayashi ,  Shojiro Kitamura ,  Masayuki Matsunaga ,  Akitoshi Hara

IPC分类号： H05K1/18

CPC分类号： B81B7/007 ,  B81B7/0074 ,  B81B2201/025 ,  H01L24/97 ,  H01L2224/48091 ,  H01L2224/48227 ,  H01L2924/15156 ,  H01L2924/15313 ,  H01L2924/16195 ,  Y10T29/49155 ,  H01L2924/00014

摘要： An electronic device includes: an outline configuration including a first surface, a second surface facing opposite from the first surface, and a mounting surface coupled to the first and second surfaces; a first substrate including a first electrode; a second substrate including a second electrode; a resin disposed between the first and second substrates; and an electric element sealed with the resin and having an outline configuration of a polyhedron, the electric element being disposed such that a broadest surface of the polyhedron faces one of the first substrate and the second substrate. The first surface is one surface of the first substrate, the one surface being opposite from another surface of the first substrate on a side adjacent to the resin. The second surface is one surface of the second substrate, the one surface being opposite from another surface of the second substrate on a side adjacent to the resin. The mounting surface includes: an exposed surface of the resin between the first and second substrates, and side surfaces of the first and second substrates adjacent to the exposed surface. The first electrode is disposed at an end of the first surface adjacent to the mounting surface and electrically coupled to the electric element. The second electrode is disposed at an end of the second surface adjacent to the mounting surface.

摘要翻译： 电子设备包括：轮廓配置，其包括第一表面，与第一表面相对的第二表面和联接到第一和第二表面的安装表面; 第一基板，包括第一电极; 第二基板，包括第二电极; 设置在所述第一和第二基板之间的树脂; 以及用所述树脂密封并具有多面体轮廓构造的电气元件，所述电气元件设置成使得所述多面体的最宽表面面向所述第一基板和所述第二基板之一。 所述第一表面是所述第一基板的一个表面，所述一个表面在与所述树脂相邻的一侧与所述第一基板的另一个表面相对。 所述第二表面是所述第二基板的一个表面，所述一个表面在与所述树脂相邻的一侧与所述第二基板的另一表面相对。 安装表面包括：树脂在第一和第二基板之间的暴露表面以及与暴露表面相邻的第一和第二基板的侧表面。 第一电极设置在与安装表面相邻的第一表面的端部处并且电耦合到电气元件。 第二电极设置在邻近安装表面的第二表面的端部。

公开(公告)号：US20110227455A1

公开(公告)日：2011-09-22

申请号：US13116215

申请日：2011-05-26

申请人： Sachio NAGAMITSU ,  Atsushi Ono

发明人： Sachio NAGAMITSU ,  Atsushi Ono

IPC分类号： H01L41/083

CPC分类号： B25J9/1095 ,  A61F2002/5066 ,  F03G7/005 ,  Y10S310/80

摘要： A first conductive polymer film, a plate-shaped first porous member, a second conductive polymer film, and a plate-shaped second porous member are stacked on one another, and the adjacent members are connected with each other on one end portions so as to form a zigzag pattern. The first and second porous members each have an ionic solution injected thereinto so as to function as an electrolyte retention layer, so that operations can be carried out with tensions being always maintained upon both of the expansion and the contraction, and rigidity and a driving force can be exerted in both of the contracting and expanding directions.

摘要翻译： 第一导电聚合物膜，板状第一多孔构件，第二导电聚合物膜和板状第二多孔构件彼此堆叠，并且相邻构件在一个端部彼此连接，以便 形成锯齿形图案。 第一和第二多孔构件各自具有注入到其中的离子溶液，以便用作电解质保留层，使得可以在两者的膨胀和收缩两者上始终保持张力，以及刚性和驱动力 可以在承包和扩展方向上施加。

公开(公告)号：US20110173787A1

公开(公告)日：2011-07-21

申请号：US12976252

申请日：2010-12-22

申请人： Atsushi ONO ,  Takayuki KIKUCHI

发明人： Atsushi ONO ,  Takayuki KIKUCHI

IPC分类号： H01L41/22

CPC分类号： H03H9/1014 ,  H03H3/02 ,  Y10T29/42

摘要： A manufacturing method of a piezoelectric device includes: forming a lid for sealing a cavity of a package base by forming a recess part and forming a through hole in an inner surface of the recess part in a metal plate; fixing the lid to the package base containing a piezoelectric vibrating reed so that the recess part may project toward the package base side; providing a metal piece in the recess part; decompressing the cavity via the through hole; and closing the through hole by applying a laser to the metal piece to melt the metal piece, wherein, at forming of the lid, the through hole is formed in a direction orthogonal to a thickness direction of the metal plate.

摘要翻译： 压电装置的制造方法包括：形成用于通过形成凹部密封封装基座的空腔并在金属板的凹部的内表面形成通孔的盖; 将盖固定到包含压电振动片的包装基底上，使得凹部可朝向包装基部侧突出; 在所述凹部中设置金属片; 通过通孔减压空腔; 并且通过对所述金属片施加激光来关闭所述通孔，以熔化所述金属片，其中，在形成所述盖时，所述通孔形成在与所述金属板的厚度方向正交的方向上。

公开(公告)号：US20110120861A1

公开(公告)日：2011-05-26

申请号：US12999085

申请日：2009-06-17

申请人： Yoshikuni Horishita ,  Shinobu Matsubara ,  Atsushi Ono

发明人： Yoshikuni Horishita ,  Shinobu Matsubara ,  Atsushi Ono

IPC分类号： C23C14/34

CPC分类号： H05H1/46 ,  C23C14/3464 ,  C23C14/542 ,  H01J37/34 ,  H01J37/3444 ,  H03H7/38

摘要： There is provided a power supply apparatus that is capable of suppressing the occurrence of anomalous electric discharge due to charge-up of a substrate and that is capable of forming a good thin film on a large-area substrate. The power supply apparatus of this invention has: a first discharge circuit that alternately charges predetermined potential at a predetermined frequency to a pair of targets that are in contact with a plasma; and a second discharge circuit that charges predetermined potential between the grounding and the electrode, out of the pair of electrodes, that is not charged with potential from the first discharge circuit. The second discharge circuit is provided with a reverse potential charging means for charging, at the time of polarity reversal, at least one of the electrodes with potential that is reverse to the output potential.

摘要翻译： 提供一种电源装置，其能够抑制由于基板的充电而产生的异常放电，并且能够在大面积基板上形成良好的薄膜。 本发明的电源装置具有：将与预定频率的预定电位交替地与等离子体接触的一对目标交替地充电的第一放电电路; 以及第二放电电路，其从未被所述第一放电电路充电的所述一对电极中的所述接地和所述电极之间的预定电位充电。 第二放电电路设置有反向电位充电装置，用于在极性反转时对具有与输出电位相反的电位的至少一个电极进行充电。

公开(公告)号：US07759751B2

公开(公告)日：2010-07-20

申请号：US11783614

申请日：2007-04-10

申请人： Atsushi Ono

发明人： Atsushi Ono

IPC分类号： H01L31/18

CPC分类号： H04N5/2253 ,  H01L27/14618 ,  H01L27/14625 ,  H01L27/14685 ,  H01L2224/48227 ,  H01L2224/48465 ,  H01L2924/01029 ,  H01L2924/01078 ,  H01L2924/01079 ,  H01L2924/07811 ,  H01L2924/3025 ,  H04N5/2257 ,  H01L2924/00

摘要： An electric wiring of a module for an optical apparatus includes: a first through electrode passing through the solid-state image sensor; a first rewiring layer being formed in such a way as to be re-wired to a necessary area in the rear surface of the solid-state image sensor, and being electrically connected to the first through electrode; a second rewiring layer being formed in such a way as to be re-wired to a necessary area in the rear surface of the image processing apparatus, and being electrically connected to the first rewiring layer; a second through electrode passing through the image processing apparatus and being electrically connected to the second rewiring layer; and a third rewiring layer being formed in such a way as to be re-wired to a necessary area in a front surface of the image processing apparatus, and being electrically connected to the second through electrode. The image processing apparatus includes an external connection terminal electrically connected to the third rewiring layer. With the foregoing structure, a small and light module for an optical apparatus and a production method of such module are realized without giving a constraint on the structure of the module.

摘要翻译： 一种用于光学装置的模块的电线包括：穿过固态图像传感器的第一通孔; 第一重新布线层被形成为重新连接到固态图像传感器的后表面中的必要区域，并且电连接到第一贯通电极; 第二再布线层被形成为重新连接到图像处理设备的后表面中的必要区域，并且电连接到第一重新布线层; 第二贯穿电极穿过图像处理设备并电连接到第二重新布线层; 以及第三再布线层，其被重新布线到图像处理装置的前表面中的必要区域上，并且与第二通孔电连接。 图像处理装置包括电连接到第三重新布线层的外部连接端子。 利用上述结构，实现了用于光学装置的小型轻型模块和这种模块的制造方法，而不对模块的结构施加约束。

公开(公告)号：US07738797B2

公开(公告)日：2010-06-15

申请号：US11332296

申请日：2006-01-13

申请人： Yusuke Hayase ,  Atsushi Ono

发明人： Yusuke Hayase ,  Atsushi Ono

IPC分类号： H04B10/04

CPC分类号： G02B6/4201 ,  G02B6/4271

摘要： An optical module socket includes a base on which an optical module is mounted; descend/ascend means which is ascendably and descendably provided in the base and on which the optical module is mounted; holding means for holding the optical module in a predetermined state; pogopins provided in the base to connect with leads of the optical module; and positioning means of optical transmission means which are provided in the holding means and the descend/ascend means and which position, to the optical module, an optical connector to be connected to the optical module.

摘要翻译： 光学模块插座包括：基座，安装有光学模块; 下降/上升装置，其上升和下降地设置在基座中并安装光学模块; 用于将光学模块保持在预定状态的保持装置; 在基座上提供的pogopin与光模块的引线连接; 以及设置在保持装置和下降/上升装置中的光传输装置的定位装置，以及将与光模块连接的光连接器的位置。

公开(公告)号：US07699538B2

公开(公告)日：2010-04-20

申请号：US12083592

申请日：2006-09-28

申请人： Yusuke Hayase ,  Atsushi Ono ,  Toshiyuki Okayasu

发明人： Yusuke Hayase ,  Atsushi Ono ,  Toshiyuki Okayasu

IPC分类号： G02B6/36

CPC分类号： G02B6/421 ,  G02B6/4246 ,  H01L25/167 ,  H01L33/483 ,  H01L33/648 ,  H01L2924/0002 ,  H01S5/02232 ,  H01S5/02423 ,  H01L2924/00

摘要： A hermetically sealing member with an optical transmission means transmits an optical signal economically and practically between the inside and the outside of a shielding member covering a printed-circuit board while sustaining the hermetically sealed state certainly. An optoelectronic device and an optical transmission method are also provided. A hermetically sealing member with an optical transmission means includes a gasket body fixed between a printed-circuit board and a sealing face of a shielding member, and a tape fiber formed integrally with the gasket body.

摘要翻译： 具有光传输装置的密封构件在覆盖印刷电路板的屏蔽构件的内部和外部经济地和实际地传输光信号，同时保持气密密封状态。 还提供了光电子器件和光传输方法。 具有光传输装置的气密密封构件包括固定在印刷电路板和屏蔽构件的密封面之间的垫圈体，以及与垫圈体一体地形成的带状纤维。