OPTICAL DEVICE AND ASSOCIATED METHODS
    1.
    发明申请
    OPTICAL DEVICE AND ASSOCIATED METHODS 有权
    光学器件及相关方法

    公开(公告)号:US20120050879A1

    公开(公告)日:2012-03-01

    申请号:US13290908

    申请日:2011-11-07

    申请人: Alan KATHMAN

    发明人: Alan KATHMAN

    IPC分类号: G02B3/00 B31B1/62

    摘要: An optical device includes a transparent substrate, a first replicated refractive surface on a first surface of the substrate in a first material, and a second replicated refractive surface on a second surface, opposite the first surface, and made of a second material, different from the first material. The material and curvature of the first replicated surface and the material and curvature of the second replicated surface may be configured to substantially reduce the chromatic dispersion and/or the thermal sensitivity of the optical device.

    摘要翻译: 光学装置包括透明基板,在第一材料的基板的第一表面上的第一复制折射表面和与第一表面相对的第二表面上的第二复制折射表面,并且由与第二材料不同的第二材料制成 第一种材料。 第一复制表面的材料和曲率以及第二复制表面的材料和曲率可以被配置为基本上降低光学器件的色散和/或热敏感性。

    Diffractive Optical Elements And Applications Thereof
    6.
    发明申请
    Diffractive Optical Elements And Applications Thereof 有权
    衍射光学元件及其应用

    公开(公告)号:US20110299165A1

    公开(公告)日:2011-12-08

    申请号:US13154034

    申请日:2011-06-06

    IPC分类号: G02B5/18

    CPC分类号: G02B5/1866

    摘要: A fanout diffractive optical element having a discrete periodic surface relief structure having a 2-dimensional (x,y) shape is described. The surface relief structure can include a first lobe and a second lobe separated by a waist region having a width less than the first lobe and the second lobe. The 2-dimensional (x,y) shape of surface relief structure can have an inversion center and can lack symmetry about any plane that is normal to the surface relief structure. Also described are apparatuses having a fanout diffractive optical element and methods of producing a plurality of light diffracting orders using a fanout diffractive optical element.

    摘要翻译: 描述了具有二维(x,y)形状的离散周期性表面浮雕结构的扇出衍射光学元件。 表面浮雕结构可以包括由具有小于第一凸角和第二凸角的宽度的​​腰部区域分开的第一凸角和第二凸角。 表面浮雕结构的二维(x,y)形状可以具有反转中心,并且可能缺乏与表面浮雕结构垂直的任何平面的对称性。 还描述了具有扇出衍射光学元件的装置和使用扇出衍射光学元件产生多个衍射光束的方法。

    Monolithic polarization controlled angle diffusers, associated methods and lithographic systems incorporating controlled angle diffusers
    7.
    发明申请
    Monolithic polarization controlled angle diffusers, associated methods and lithographic systems incorporating controlled angle diffusers 有权
    单片极化控制角扩散器,相关方法和并入受控角扩散器的光刻系统

    公开(公告)号:US20070211337A1

    公开(公告)日:2007-09-13

    申请号:US11711854

    申请日:2007-02-28

    IPC分类号: G02B27/28

    摘要: A monolithic polarization controlled angle diffuser includes a system having a first surface and a second surface, a controlled angle diffuser pattern for providing an angular distribution at an illumination plane, the controlled angle diffuser pattern being on one of the first and second surfaces of the substrate, and a polarizing pattern on one of the first and second surfaces of the substrate. The controlled angle diffuser pattern includes at least two controlled angle diffuser elements. Each controlled angle diffuser element outputs different angular distributions. The polarizing pattern includes at least two polarizing elements. Each polarizing element corresponds to a respective controlled angle diffuser element. The at least two polarizing elements output polarizations are rotated with respect to one another.

    摘要翻译: 单片偏振控制角扩散器包括具有第一表面和第二表面的系统,用于在照明平面处提供角度分布的受控角漫射器图案,所述受控角漫射器图案位于所述基板的第一和第二表面中的一个上 ,以及在基板的第一和第二表面之一上的偏振图案。 受控角度扩散器图案包括至少两个受控角度扩散器元件。 每个受控角度扩散器元件输出不同的角度分布。 偏振图案包括至少两个偏振元件。 每个偏振元件对应于相应的受控角度扩散器元件。 输出极化的至少两个偏振元件相对于彼此旋转。

    Diffractive optical elements and applications thereof
    10.
    发明授权
    Diffractive optical elements and applications thereof 有权
    衍射光学元件及其应用

    公开(公告)号:US08593733B2

    公开(公告)日:2013-11-26

    申请号:US13154034

    申请日:2011-06-06

    IPC分类号: G02B5/18

    CPC分类号: G02B5/1866

    摘要: A fanout diffractive optical element having a discrete periodic surface relief structure having a 2-dimensional (x,y) shape is described. The surface relief structure can include a first lobe and a second lobe separated by a waist region having a width less than the first lobe and the second lobe. The 2-dimensional (x,y) shape of surface relief structure can have an inversion center and can lack symmetry about any plane that is normal to the surface relief structure. Also described are apparatuses having a fanout diffractive optical element and methods of producing a plurality of light diffracting orders using a fanout diffractive optical element.

    摘要翻译: 描述了具有二维(x,y)形状的离散周期性表面浮雕结构的扇出衍射光学元件。 表面浮雕结构可以包括由具有小于第一凸角和第二凸角的宽度的​​腰部区域分隔开的第一凸角和第二凸角。 表面浮雕结构的二维(x,y)形状可以具有反转中心,并且可能缺乏与表面浮雕结构垂直的任何平面的对称性。 还描述了具有扇出衍射光学元件的装置和使用扇出衍射光学元件产生多个衍射光束的方法。