摘要:
A magnesium oxide single crystal having controlled crystallinity has a subboundary, and ranges of variation of diffraction line positions, as measured for reciprocal lattice maps with respect to a region surrounded by the same subboundary, with the range of the variation of 1×10−3 to 2×10−2 degree of on Δω coordinates, and with the range of the variation of 4×10−4 to 5×10−3 degree on 2θ coordinates.
摘要:
Provided is a MgO single crystal for obtaining a magnesium oxide (MgO) single crystal deposition material which is prevented from splashing during the vapor deposition in, e.g., an electron beam deposition method without reducing the deposition rate, and for obtaining a MgO single crystal substrate which can form thereon, e.g., a superconductor thin film having excellent superconducting properties. A MgO single crystal having a calcium content of 150×10−6 to 1,000×10−6 kg/kg and a silicon content of 10×10−6 kg/kg or less, wherein the MgO single crystal has a variation of 30% or less in terms of a CV value in detected amounts of calcium fragment ions, as analyzed by TOF-SIMS with respect to the polished surface of the MgO single crystal. A MgO single crystal deposition material and a MgO single crystal substrate for forming a thin film obtained from the MgO single crystal.
摘要翻译:本发明提供一种用于获得氧化镁(MgO)单晶沉积材料的MgO单晶,其在例如电子束沉积方法中在气相沉积期间防止溅射而不降低沉积速率,并且获得MgO单晶衬底 其可以在其上形成,例如具有优异超导性能的超导体薄膜。 具有钙含量为150×10 -6〜1,000×10 -6 kg / kg,硅含量为10×10 -6 kg / kg以下的MgO单晶,其中MgO单晶的变化范围为30%以下, 通过TOF-SIMS相对于MgO单晶的抛光表面分析的钙碎片离子的检测量的CV值。 一种MgO单晶沉积材料和用于形成由MgO单晶获得的薄膜的MgO单晶衬底。
摘要:
Provided is a MgO single crystal for obtaining a magnesium oxide (MgO) single crystal deposition material which is prevented from splashing during the vapor deposition in, e.g., an electron beam deposition method without reducing the deposition rate, and for obtaining a MgO single crystal substrate which can form thereon, e.g., a superconductor thin film having excellent superconducting properties. A MgO single crystal having a calcium content of 150×10−6 to 1,000×10−6 kg/kg and a silicon content of 10×10−6 kg/kg or less, wherein the MgO single crystal has a variation of 30% or less in terms of a CV value in detected amounts of calcium fragment ions, as analyzed by TOF-SIMS with respect to the polished surface of the MgO single crystal. A MgO single crystal deposition material and a MgO single crystal substrate for forming a thin film obtained from the MgO single crystal.
摘要翻译:本发明提供一种用于获得氧化镁(MgO)单晶沉积材料的MgO单晶,其在例如电子束沉积方法中在气相沉积期间防止溅射而不降低沉积速率,并且获得MgO单晶衬底 其可以在其上形成,例如具有优异超导性能的超导体薄膜。 钙含量为150×10 -6〜1,000×10 -6 kg / kg,硅含量为10×10 -6 kg / kg以下的MgO单晶,其中,MgO单晶的变化率为30% 根据TOF-SIMS相对于MgO单晶的抛光表面的分析,检测到的钙碎片离子量的CV值以下。 一种MgO单晶沉积材料和用于形成由MgO单晶获得的薄膜的MgO单晶衬底。
摘要:
The present invention is related to a magnesium oxide particle aggregate with the requirement of a first inflection point diameter is more than 0.30×10−6 to 0.60×10−6 m, a particle void volume is 0.50×10−3 to 0.90×10−3 m3·kg−1, and a micropore volume is 0.04×10−3 to 0.11×10−3 m3·kg−1 in the cumulative intrusion volume curve of said particle by having controlled particle aggregation structure so that the solid phase-solid phase reaction between magnesium oxide and the SiO2 film on the surface can be appropriately controlled.
摘要:
A magnesium oxide single crystal having controlled crystallinity comprising a subboundary, and ranges of variation of diffraction line positions, as measured for reciprocal lattice maps with respect to a region surrounded by the same subboundary, with the range of the variation of 1×10−3 to 2×10−2 degree of on Δω coordinates, and with the range of the variation of 4×10−4 to 5×10−3 degree on 2θ coordinates.
摘要:
An object of the present invention is to provide a magnesium oxide particle aggregate having a controlled particle aggregation structure so that the solid phase-solid phase reaction between magnesium oxide and the SiO2 film on the surface can be appropriately controlled. The object can be achieved by a magnesium oxide particle aggregate characterized in that a first inflection point diameter is 0.30×10−6 m or less, an interparticle void volume is 1.40×10−3 to 2.20×10−3 m3/kg and a particle void volume is 0.55×10−3 to 0.80×10−3 m3/kg in a cumulative intrusion volume curve of the particle aggregate.