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公开(公告)号：US08531675B2
公开(公告)日：2013-09-10
申请号：US12877888
申请日：2010-09-08
Applicant: Diaa A. Khalil , Bassem Mortada , Mohamed Nabil , Mostafa Medhat , Bassam A. Saadany
Inventor： Diaa A. Khalil , Bassem Mortada , Mohamed Nabil , Mostafa Medhat , Bassam A. Saadany
IPC: G01B9/02
CPC classification number: G01J3/4532 , G01J3/02 , G01J3/021 , G01J3/45
Abstract: A Micro Electro-Mechanical System (MEMS) spectrometer architecture compensates for verticality and dispersion problems using balancing interfaces. A MEMS spectrometer/interferometer includes a beam splitter formed on a first surface of a first medium at an interface between the first medium and a second medium, a first mirror formed on a second surface of the first medium, a second mirror formed on a third surface of the first medium and balancing interfaces designed to minimize both a difference in tilt angles between the surfaces and a difference in phase errors between beams reflected from the first and second mirrors.
Abstract translation: 微机电系统（MEMS）光谱仪架构使用平衡接口补偿垂直度和色散问题。 MEMS光谱仪/干涉仪包括在第一介质和第二介质之间的界面处形成在第一介质的第一表面上的分束器，形成在第一介质的第二表面上的第一反射镜，形成在第三介质上的第三反射镜 第一介质的表面和平衡界面被设计成最小化表面之间的倾斜角的差异以及从第一和第二反射镜反射的光束之间的相位误差。
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公开(公告)号：US20100264777A1
公开(公告)日：2010-10-21
申请号：US12761621
申请日：2010-04-16
Applicant: MOSTAFA MEDHAT , YASSEEN NADA , BASSEM MORTADA , BASSAM A. SAADANY
Inventor： MOSTAFA MEDHAT , YASSEEN NADA , BASSEM MORTADA , BASSAM A. SAADANY
CPC classification number: B81B3/0051 , B81B3/0037 , B81B2201/033 , B81B2203/0136 , B81B2203/051 , H02N1/008 , Y10T74/20558
Abstract: An electrostatic comb drive actuator for a MEMS device includes a flexure spring assembly and first and second comb drive assemblies, each coupled to the flexure spring assembly on opposing sides thereof. Each of the first and second comb assemblies includes fixed comb drive fingers and moveable comb drive fingers coupled to the flexure spring assembly and extending towards the fixed comb drive fingers. The comb drive fingers are divided equally between the first and second comb drive assemblies and placed symmetrically about a symmetry axis of the flexure spring assembly. When electrically energized, the moveable comb drive fingers of both the first and second comb drive assemblies simultaneously move towards the fixed comb drive fingers of the first and second comb drive assemblies.
Abstract translation: 用于MEMS器件的静电梳驱动致动器包括挠曲弹簧组件和第一和第二梳子驱动组件，每个组合驱动组件在其相对侧上与挠曲弹簧组件相连。 第一和第二梳组件中的每一个包括固定梳状驱动指状物和可移动梳状驱动指状物，其联接到挠性弹簧组件并朝向固定梳状驱动指状物延伸。 梳齿驱动指状物在第一和第二梳状驱动组件之间被均等分配，并且围绕挠性弹簧组件的对称轴对称地放置。 当通电时，第一和第二梳状驱动组件的可移动梳状驱动指状物同时朝向第一和第二梳状驱动组件的固定梳状驱动指状物移动。
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3.发明授权Opto-mechanical optical path retardation multiplier for optical MEMS applications 有权光学MEMS应用的光机械光路延迟乘数公开(公告)号：US08736843B2
公开(公告)日：2014-05-27
申请号：US12762068
申请日：2010-04-16
Applicant: Mostafa Medhat , Bassam A. Saadany , Diaa A. M. Khalil , Bassem Mortada
Inventor： Mostafa Medhat , Bassam A. Saadany , Diaa A. M. Khalil , Bassem Mortada
IPC: G01J3/45
CPC classification number: G02B5/124 , G02B17/023 , G02B26/0841
Abstract: An optical Micro Electro-Mechanical System (MEMS) device provides an optical path retardation multiplier. The MEMS device includes a moveable corner cube reflector, a fixed minor and a MEMS actuator. The moveable corner cube reflector is optically coupled to receive an incident beam and reflect the incident beam through 180 degrees towards the fixed mirror. The fixed minor is optically coupled to reflect a reflected beam back towards the moveable corner cube reflector along a reverse path of the incident beam. The MEMS actuator is coupled to the moveable corner cube reflector to cause a displacement of the moveable corner cube reflector to extend an optical path length of the reflected beam.
Abstract translation: 光学微机电系统（MEMS）装置提供光路延迟乘法器。 MEMS器件包括可移动角立方反射器，固定次要器件和MEMS致动器。 可移动角立方反射器被光学耦合以接收入射光束并将入射光束朝着固定镜反射180度。 固定次要件被光耦合以沿着入射光束的反向路径将反射光束反射回朝向可移动角立方反射器。 MEMS致动器耦合到可移动角立方反射器以引起可移动角立方反射器的位移以延伸反射光束的光路长度。
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Patent Agency Ranking
公开(公告)号：US08922787B2
公开(公告)日：2014-12-30
申请号：US13758580
申请日：2013-02-04
Applicant: Bassem Mortada , Diaa Abdel Maged Khalil , Bassam A. Saadany
Inventor： Bassem Mortada , Diaa Abdel Maged Khalil , Bassam A. Saadany
CPC classification number: G01B9/02015 , G01B9/02051 , G01B9/02091 , G01J3/021 , G01J3/0256 , G01J3/453 , G01J9/02 , G02B26/0833 , G02B27/14 , G02B27/143 , G02B27/16
Abstract: A spatial splitting-based optical Micro Electro-Mechanical Systems (MEMS) Interferometer includes a spatial splitter for spatially splitting an input beam into two interferometer beams and a spatial combiner for spatially combining the two interferometer beams. A MEMS moveable mirror is provided to produce an optical path difference between the first interferometer beam and the second interferometer beam.
Abstract translation: 基于空间分裂的光学微机电系统（MEMS）干涉仪包括用于将输入光束空间分割成两个干涉仪光束的空间分离器和用于空间组合两个干涉仪光束的空间组合器。 提供MEMS可动反射镜以产生第一干涉仪光束和第二干涉仪光束之间的光程差。
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公开(公告)号：US08497619B2
公开(公告)日：2013-07-30
申请号：US12761621
申请日：2010-04-16
Applicant: Mostafa Medhat , Yasseen Nada , Bassem Mortada , Bassam A. Saadany
Inventor： Mostafa Medhat , Yasseen Nada , Bassem Mortada , Bassam A. Saadany
CPC classification number: B81B3/0051 , B81B3/0037 , B81B2201/033 , B81B2203/0136 , B81B2203/051 , H02N1/008 , Y10T74/20558
Abstract: An electrostatic comb drive actuator for a MEMS device includes a flexure spring assembly and first and second comb drive assemblies, each coupled to the flexure spring assembly on opposing sides thereof. Each of the first and second comb assemblies includes fixed comb drive fingers and moveable comb drive fingers coupled to the flexure spring assembly and extending towards the fixed comb drive fingers. The comb drive fingers are divided equally between the first and second comb drive assemblies and placed symmetrically about a symmetry axis of the flexure spring assembly. When electrically energized, the moveable comb drive fingers of both the first and second comb drive assemblies simultaneously move towards the fixed comb drive fingers of the first and second comb drive assemblies.
Abstract translation: 用于MEMS器件的静电梳驱动致动器包括挠曲弹簧组件和第一和第二梳子驱动组件，每个组合驱动组件在其相对侧上与挠曲弹簧组件相连。 第一和第二梳组件中的每一个包括固定梳状驱动指状物和可移动梳状驱动指状物，其联接到挠性弹簧组件并朝向固定梳状驱动指状物延伸。 梳齿驱动指状物在第一和第二梳状驱动组件之间被均等分配，并且围绕挠性弹簧组件的对称轴对称地放置。 当通电时，第一和第二梳状驱动组件的可移动梳状驱动指状物同时朝向第一和第二梳状驱动组件的固定梳状驱动指状物移动。
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6.发明申请OPTO-MECHANICAL OPTICAL PATH RETARDATION MULTIPLIER FOR OPTICAL MEMS APPLICATIONS 有权光机械光学路径延迟乘法器用于光学MEMS应用公开(公告)号：US20100265512A1
公开(公告)日：2010-10-21
申请号：US12762068
申请日：2010-04-16
Applicant: MOSTAFA MEDHAT , BASSAM A. SAADANY , DIAA A. KHALIL , BASSEM MORTADA
Inventor： MOSTAFA MEDHAT , BASSAM A. SAADANY , DIAA A. KHALIL , BASSEM MORTADA
CPC classification number: G02B5/124 , G02B17/023 , G02B26/0841
Abstract: An optical Micro Electro-Mechanical System (MEMS) device provides an optical path retardation multiplier. The MEMS device includes a moveable corner cube reflector, a fixed minor and a MEMS actuator. The moveable corner cube reflector is optically coupled to receive an incident beam and reflect the incident beam through 180 degrees towards the fixed mirror. The fixed minor is optically coupled to reflect a reflected beam back towards the moveable corner cube reflector along a reverse path of the incident beam. The MEMS actuator is coupled to the moveable corner cube reflector to cause a displacement of the moveable corner cube reflector to extend an optical path length of the reflected beam.
Abstract translation: 光学微机电系统（MEMS）装置提供光路延迟乘法器。 MEMS器件包括可移动角立方反射器，固定次要器件和MEMS致动器。 可移动角立方反射器被光学耦合以接收入射光束并将入射光束朝着固定镜反射180度。 固定次要件被光耦合以沿着入射光束的反向路径将反射光束反射回朝向可移动角立方反射器。 MEMS致动器耦合到可移动角立方反射器以引起可移动角立方反射器的位移以延伸反射光束的光路长度。
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公开(公告)号：US20140192365A1
公开(公告)日：2014-07-10
申请号：US13758580
申请日：2013-02-04
Applicant: Bassem Mortada , Diaa Abdel Maged Khalil , Bassam A. Saadany
Inventor： Bassem Mortada , Diaa Abdel Maged Khalil , Bassam A. Saadany
IPC: G01B9/02
CPC classification number: G01B9/02015 , G01B9/02051 , G01B9/02091 , G01J3/021 , G01J3/0256 , G01J3/453 , G01J9/02 , G02B26/0833 , G02B27/14 , G02B27/143 , G02B27/16
Abstract: A spatial splitting-based optical Micro Electro-Mechanical Systems (MEMS) Interferometer includes a spatial splitter for spatially splitting an input beam into two interferometer beams and a spatial combiner for spatially combining the two interferometer beams. A MEMS moveable mirror is provided to produce an optical path difference between the first interferometer beam and the second interferometer beam.
Abstract translation: 基于空间分裂的光学微机电系统（MEMS）干涉仪包括用于将输入光束空间分割成两个干涉仪光束的空间分离器和用于空间组合两个干涉仪光束的空间组合器。 提供MEMS可动反射镜以产生第一干涉仪光束和第二干涉仪光束之间的光程差。
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公开(公告)号：US20110058180A1
公开(公告)日：2011-03-10
申请号：US12877888
申请日：2010-09-08
Applicant: Diaa A. Khalil , Bassem Mortada , Mohamed Nabil , Mostafa Medhat , Bassam A. Saadany
Inventor： Diaa A. Khalil , Bassem Mortada , Mohamed Nabil , Mostafa Medhat , Bassam A. Saadany
IPC: G01B9/02
CPC classification number: G01J3/4532 , G01J3/02 , G01J3/021 , G01J3/45
Abstract: A Micro Electro-Mechanical System (MEMS) spectrometer architecture compensates for verticality and dispersion problems using balancing interfaces. A MEMS spectrometer/interferometer includes a beam splitter formed on a first surface of a first medium at an interface between the first medium and a second medium, a first mirror formed on a second surface of the first medium, a second mirror formed on a third surface of the first medium and balancing interfaces designed to minimize both a difference in tilt angles between the surfaces and a difference in phase errors between beams reflected from the first and second mirrors.
Abstract translation: 微机电系统（MEMS）光谱仪架构使用平衡接口补偿垂直度和色散问题。 MEMS光谱仪/干涉仪包括在第一介质和第二介质之间的界面处形成在第一介质的第一表面上的分束器，形成在第一介质的第二表面上的第一反射镜，形成在第三介质上的第三反射镜 第一介质的表面和平衡界面被设计成最小化表面之间的倾斜角的差异以及从第一和第二反射镜反射的光束之间的相位误差。
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