Ultra-wide angle MEMS scanner architecture
    1.
    发明授权
    Ultra-wide angle MEMS scanner architecture 有权
    超广角MEMS扫描仪架构

    公开(公告)号:US08411340B2

    公开(公告)日:2013-04-02

    申请号:US12761819

    申请日:2010-04-16

    Abstract: An optical microscanner achieves wide rotation angles utilizing a curved reflector. The optical microscanner includes a moveable mirror for receiving an incident beam and reflecting the incident beam to produce a reflected beam and a Micro Electro-Mechanical System (MEMS) actuator that causes a linear displacement of the moveable mirror. The curved reflector produces an angular rotation of the reflected beam based on the linear displacement of the moveable mirror.

    Abstract translation: 光学显微镜利用弯曲的反射镜实现宽的旋转角度。 光学显微镜包括用于接收入射光束并反射入射光束以产生反射光束的可移动反射镜和引起可动反射镜的线性位移的微机电系统(MEMS)致动器。 弯曲的反射器基于可移动反射镜的线性位移产生反射光束的角度旋转。

    MEMS BASED SWEPT LASER SOURCE
    2.
    发明申请
    MEMS BASED SWEPT LASER SOURCE 审中-公开
    基于MEMS的切换激光源

    公开(公告)号:US20120320936A1

    公开(公告)日:2012-12-20

    申请号:US13528328

    申请日:2012-06-20

    Abstract: A MEMS-based swept laser source is formed from two coupled cavities. The first cavity includes a first mirror and a fully reflective moveable mirror and operates to tune the output wavelength of the laser. The second cavity is optically coupled to the first cavity and includes an active gain medium, the first mirror and a second mirror. The second cavity further has a length substantially greater than the first cavity such that there are multiple longitudinal modes of the second cavity within a transmission bandwidth of the first cavity output.

    Abstract translation: 基于MEMS的扫频激光源由两个耦合腔形成。 第一腔包括第一反射镜和全反射可动反射镜,并且用于调节激光器的输出波长。 第二腔被光耦合到第一腔,并且包括主动增益介质,第一反射镜和第二反射镜。 第二腔还具有基本上大于第一空腔的长度,使得在第一空腔输出的传输带宽内存在第二空腔的多个纵向模式。

    OPTO-MECHANICAL OPTICAL PATH RETARDATION MULTIPLIER FOR OPTICAL MEMS APPLICATIONS
    3.
    发明申请
    OPTO-MECHANICAL OPTICAL PATH RETARDATION MULTIPLIER FOR OPTICAL MEMS APPLICATIONS 有权
    光机械光学路径延迟乘法器用于光学MEMS应用

    公开(公告)号:US20100265512A1

    公开(公告)日:2010-10-21

    申请号:US12762068

    申请日:2010-04-16

    CPC classification number: G02B5/124 G02B17/023 G02B26/0841

    Abstract: An optical Micro Electro-Mechanical System (MEMS) device provides an optical path retardation multiplier. The MEMS device includes a moveable corner cube reflector, a fixed minor and a MEMS actuator. The moveable corner cube reflector is optically coupled to receive an incident beam and reflect the incident beam through 180 degrees towards the fixed mirror. The fixed minor is optically coupled to reflect a reflected beam back towards the moveable corner cube reflector along a reverse path of the incident beam. The MEMS actuator is coupled to the moveable corner cube reflector to cause a displacement of the moveable corner cube reflector to extend an optical path length of the reflected beam.

    Abstract translation: 光学微机电系统(MEMS)装置提供光路延迟乘法器。 MEMS器件包括可移动角立方反射器,固定次要器件和MEMS致动器。 可移动角立方反射器被光学耦合以接收入射光束并将入射光束朝着固定镜反射180度。 固定次要件被光耦合以沿着入射光束的反向路径将反射光束反射回朝向可移动角立方反射器。 MEMS致动器耦合到可移动角立方反射器以引起可移动角立方反射器的位移以延伸反射光束的光路长度。

    Compensated MEMS FTIR Spectrometer Architecture
    5.
    发明申请
    Compensated MEMS FTIR Spectrometer Architecture 有权
    补偿MEMS FTIR光谱仪架构

    公开(公告)号:US20110058180A1

    公开(公告)日:2011-03-10

    申请号:US12877888

    申请日:2010-09-08

    CPC classification number: G01J3/4532 G01J3/02 G01J3/021 G01J3/45

    Abstract: A Micro Electro-Mechanical System (MEMS) spectrometer architecture compensates for verticality and dispersion problems using balancing interfaces. A MEMS spectrometer/interferometer includes a beam splitter formed on a first surface of a first medium at an interface between the first medium and a second medium, a first mirror formed on a second surface of the first medium, a second mirror formed on a third surface of the first medium and balancing interfaces designed to minimize both a difference in tilt angles between the surfaces and a difference in phase errors between beams reflected from the first and second mirrors.

    Abstract translation: 微机电系统(MEMS)光谱仪架构使用平衡接口补偿垂直度和色散问题。 MEMS光谱仪/干涉仪包括在第一介质和第二介质之间的界面处形成在第一介质的第一表面上的分束器,形成在第一介质的第二表面上的第一反射镜,形成在第三介质上的第三反射镜 第一介质的表面和平衡界面被设计成最小化表面之间的倾斜角的差异以及从第一和第二反射镜反射的光束之间的相位误差。

    Compensated MEMS FTIR spectrometer architecture
    7.
    发明授权
    Compensated MEMS FTIR spectrometer architecture 有权
    补偿MEMS FTIR光谱仪架构

    公开(公告)号:US08531675B2

    公开(公告)日:2013-09-10

    申请号:US12877888

    申请日:2010-09-08

    CPC classification number: G01J3/4532 G01J3/02 G01J3/021 G01J3/45

    Abstract: A Micro Electro-Mechanical System (MEMS) spectrometer architecture compensates for verticality and dispersion problems using balancing interfaces. A MEMS spectrometer/interferometer includes a beam splitter formed on a first surface of a first medium at an interface between the first medium and a second medium, a first mirror formed on a second surface of the first medium, a second mirror formed on a third surface of the first medium and balancing interfaces designed to minimize both a difference in tilt angles between the surfaces and a difference in phase errors between beams reflected from the first and second mirrors.

    Abstract translation: 微机电系统(MEMS)光谱仪架构使用平衡接口补偿垂直度和色散问题。 MEMS光谱仪/干涉仪包括在第一介质和第二介质之间的界面处形成在第一介质的第一表面上的分束器,形成在第一介质的第二表面上的第一反射镜,形成在第三介质上的第三反射镜 第一介质的表面和平衡界面被设计成最小化表面之间的倾斜角的差异以及从第一和第二反射镜反射的光束之间的相位误差。

    System, method and apparatus for a micromachined interferometer using optical splitting
    8.
    发明授权
    System, method and apparatus for a micromachined interferometer using optical splitting 有权
    使用光学分裂的微加工干涉仪的系统,方法和装置

    公开(公告)号:US08508745B2

    公开(公告)日:2013-08-13

    申请号:US12849638

    申请日:2010-08-03

    Abstract: A Mach-Zehnder MEMS interferometer is achieved using two half plane beam splitters formed at respective edges of a first medium. The first beam splitter is optically coupled to receive an incident beam and operates to split the incident beam into two beams, a first one propagating in the first medium towards the second beam splitter and a second one propagating in a second medium. A moveable mirror in the second medium reflects the second beam back towards the second beam splitter to cause interference of the two beams.

    Abstract translation: 使用形成在第一介质的相应边缘处的两个半平面分束器来实现马赫 - 策德尔MEMS干涉仪。 第一分束器被光学耦合以接收入射光束并且操作以将入射光束分成两束,第一光束分离器在第一介质中传播到第二分束器,第二光束在第二介质中传播。 第二介质中的可移动反射镜将第二光束反射回第二光束分离器以引起两个光束的干涉。

    System, Method and Apparatus for a Micromachined Interferometer Using Optical Splitting
    9.
    发明申请
    System, Method and Apparatus for a Micromachined Interferometer Using Optical Splitting 有权
    使用光学分裂的微机械干涉仪的系统,方法和装置

    公开(公告)号:US20100315647A1

    公开(公告)日:2010-12-16

    申请号:US12849638

    申请日:2010-08-03

    Abstract: A Mach-Zehnder MEMS interferometer is achieved using two half plane beam splitters formed at respective edges of a first medium. The first beam splitter is optically coupled to receive an incident beam and operates to split the incident beam into two beams, a first one propagating in the first medium towards the second beam splitter and a second one propagating in a second medium. A moveable mirror in the second medium reflects the second beam back towards the second beam splitter to cause interference of the two beams.

    Abstract translation: 使用形成在第一介质的相应边缘处的两个半平面分束器来实现马赫 - 策德尔MEMS干涉仪。 第一分束器被光学耦合以接收入射光束并且操作以将入射光束分成两束,第一光束分离器在第一介质中传播到第二分束器,第二光束在第二介质中传播。 第二介质中的可移动反射镜将第二光束反射回第二光束分离器以引起两个光束的干涉。

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