公开(公告)号：US4953834A

公开(公告)日：1990-09-04

申请号：US146295

申请日：1988-01-20

申请人： Wolfram Ebert ,  Eberhard Handrich ,  Martin Hafen ,  Bruno Ryrko

发明人： Wolfram Ebert ,  Eberhard Handrich ,  Martin Hafen ,  Bruno Ryrko

IPC分类号： H03H9/24 ,  F16C11/12 ,  F16F1/02 ,  F16F1/18 ,  H03H3/007

CPC分类号： F16F1/18 ,  F16C11/12

摘要： A micromechanical bending spring joint is formed of selectively etched wafer material. The joint includes a pair of leaf springs arranged alongside each other. Each spring is inclined at an oblique angle to the opposed surfaces of the wafer and such springs cross to define a point of intersection. The joint, selectively etched from a single wafer, is characterized by high precision of fulcrum position, bending spring constant and transverse axis rigidity.

摘要翻译： 微机械弯曲弹簧接头由选择性蚀刻的晶片材料形成。 接头包括一对彼此并排配置的板簧。 每个弹簧与晶片的相对表面倾斜倾斜，并且这种弹簧交叉以限定交点。 从单个晶片选择性地蚀刻的接头的特征在于支点位置精度高，弯曲弹簧常数和横向轴刚度。

公开(公告)号：US06490923B1

公开(公告)日：2002-12-10

申请号：US09719698

申请日：2000-12-14

申请人： Uwe Breng ,  Martin Hafen ,  Eberhard Handrich ,  Bruno Ryrko

发明人： Uwe Breng ,  Martin Hafen ,  Eberhard Handrich ,  Bruno Ryrko

IPC分类号： G01C1900

CPC分类号： G01C19/5656

摘要： A micromechanical rotation rate sensor based on the Coriolis principle includes two plate-like oscillators arranged one above the other in two planes for excitation to oscillate by means of an electrostatic drive. Three elements in each case form an oscillator structure. The oscillators are in each case suspended on opposite side edges by at least one web between an associated plate-like support and an associated drive plate element. The two supports and the two drive plate elements are, in each case, arranged one above the other in layers. A fixed plate element is located between the two drive plate elements so that, in each case, an identical narrow drive gap is defined between the drive plate elements. The drive gap is considerably smaller than the distance between the plate-like oscillators. An intermediate support that fills the intermediate space is inserted between the two plate-like supports and is completely electrically isolated from the surrounding frame to further reduce the respective capacitances to be recharged. The invention reduces the electrodynamic coupling between the drive and the read-out by a factor of about 100 in comparison with known micromechanical rotation rate sensors of like design.

摘要翻译： 基于科里奥利原理的微机械转速传感器包括两个板状振荡器，两个平板状振荡器在两个平面之间并排布置，用于通过静电驱动振荡。 每种情况下的三个元件形成振荡器结构。 振荡器在每一种情况下通过在相关联的板状支撑件和相关联的驱动板元件之间的至少一个腹板在相对侧边缘上悬挂。 在每种情况下，两个支撑件和两个驱动板元件层叠在一起。 固定板元件位于两个驱动板元件之间，使得在每种情况下，在驱动板元件之间限定相同的窄驱动间隙。 驱动间隙远小于板状振荡器之间的距离。 填充中间空间的中间支撑件插入在两个板状支撑件之间，并且与周围框架完全电绝缘，以进一步减小要再充电的相应电容。 与已知的类似设计的微机械旋转速率传感器相比，本发明将驱动器和读出装置之间的电动力耦合减少了大约100倍。

公开(公告)号：US06374671B1

公开(公告)日：2002-04-23

申请号：US09254502

申请日：1999-10-26

申请人： Bruno Ryrko ,  Günter Spahlinger ,  Walter Gutmann

发明人： Bruno Ryrko ,  Günter Spahlinger ,  Walter Gutmann

IPC分类号： G01P904

CPC分类号： G01C19/56 ,  B06B1/0215 ,  B06B2201/40 ,  B06B2201/52 ,  B06B2201/70 ,  G05D19/02

摘要： For the drive excitation, the method for the capacitive drive excitation of oscillators in sensors for the capacitive measurement of force, acceleration and, in particular, rotation rates according to the Coriolis principle, provides according to the invention for the use of high-frequency constant-amplitude pulse packets with no DC component, the width or phase angle of which can be adjusted in order to keep the oscillator speed constant, for the purpose of resetting or correcting tolerances. As an alternative, the method may also be configured in such a way that, in the case of oscillators with pairwise excitation electrodes which are symmetrical with respect to the rotation axis, equal constant-amplitude HF voltages are applied, the frequency of which is chosen to be substantially higher than the natural frequency of the oscillator, in which case a particular resulting force of attraction on the oscillator is brought about by shifting the phase angle between the drive voltages and, in the case of rotation rate sensors working according to the closed-loop principle, system resetting can also be ensured. By virtue of the invention, problems with coupling the excitation signal into the read channel of a micromechanical oscillator system can be brought well under control.

摘要翻译： 对于驱动激励，根据科里奥利原理，用于电容测量力，加速度，特别是转速的传感器中的振荡器的电容驱动激励方法提供了根据本发明使用的高频常数 没有直流分量的幅度脉冲数据包，为了保持振荡器速度恒定，可以对其宽度或相位角进行调整，以实现复位或修正公差。 作为替代方案，该方法还可以被配置为使得在具有成对激励电极的相对于旋转轴对称的振荡器的情况下，施加相等的恒定幅度HF电压，其频率被选择 大大高于振荡器的固有频率，在这种情况下，通过移动驱动电压之间的相位角，并且在旋转速率传感器根据闭合状态工作的情况下，引起特定的振荡器吸引力 循环原理，也可以确保系统复位。 根据本发明，可以很好地控制将激励信号耦合到微机械振荡器系统的读通道中的问题。

公开(公告)号：US6119517A

公开(公告)日：2000-09-19

申请号：US352258

申请日：1999-07-13

申请人： Uwe Breng ,  Bruno Ryrko ,  Steffen Zimmermann

发明人： Uwe Breng ,  Bruno Ryrko ,  Steffen Zimmermann

IPC分类号： G01C19/56 ,  G01C19/00

CPC分类号： G01C19/574

摘要： Strictly out-of-phase stimulation of the two oscillators of a micro-mechanical rate-of-rotation sensor based on the Coriolis principle, having two-plate like oscillators arranged in layers one above another in two parallel planes and capable of being stimulated to oscillate perpendicular to the planes by means of an electrostatic drive, is achieved by the oscillators each being connected via at least one spring to a couple element formed, in each case, in the same wafer layer. The couple elements are mirror-symmetrically configured with respect to a mid-plane between the oscillators and connected to each other by a coupling web arranged therebetween to form a couple structure for the oscillators.

摘要翻译： 基于科里奥利原理的微机械转速传感器的两个振荡器的严格异相刺激，其具有两层板状振荡器，它们在两个平行的平面中以另一个上方布置，并能够被刺激到 通过静电驱动垂直于平面振荡的振荡器通过每个通过至少一个弹簧连接到在每个情况下形成在同一晶片层中的耦合元件的耦合元件来实现。 耦合元件相对于振荡器之间的中间平面镜像对称地配置，并且通过布置在其间的耦合网彼此连接，以形成用于振荡器的耦合结构。

公开(公告)号：US5614742A

公开(公告)日：1997-03-25

申请号：US587604

申请日：1996-01-02

申请人： Thomas Gessner ,  Martin Hafen ,  Eberhard Handrich ,  Peter Leinfelder ,  Bruno Ryrko ,  Egbert Vetter ,  Maik Wiemer

发明人： Thomas Gessner ,  Martin Hafen ,  Eberhard Handrich ,  Peter Leinfelder ,  Bruno Ryrko ,  Egbert Vetter ,  Maik Wiemer

IPC分类号： G01P15/08 ,  G01P15/125 ,  H01L21/306 ,  H01L29/84 ,  H01L29/82

CPC分类号： G01P15/0802 ,  G01P15/125 ,  G01P2015/0828 ,  Y10S148/012 ,  Y10S73/01

摘要： A high precision micromechanical accelerometer comprises a layered structure of five (5) semiconductor wafers insulated from one another by thin oxide layers. The accelerometer is formed by first connecting a coverplate and a baseplate to associated insulating plates. Counter-electrodes, produced by anisotropic etching from the respective insulating plates, are fixed to the coverplate and the baseplate respectively. The counter-electrodes are contactable through the cover or baseplate via contact windows. A central wafer contains a unilaterally linked mass (pendulum) that is also produced by anisotropic etching and which serves as a movable central electrode of a differential capacitor. The layered structure is hermetically sealed by semiconductor fusion bonding. A stepped gradation from the top is formed at a wafer edge region for attaching contact pads to individual wafers to permit electrical contacting of individual wafers. The invention permits fabrication of a .mu.B device characterized by extremely small leakage capacitances and high temperature stability.

摘要翻译： 高精度微机械加速度计包括由半氧化物层彼此绝缘的五（5）个半导体晶片的分层结构。 通过首先将盖板和底板连接到相关联的绝缘板来形成加速度计。 通过各自绝缘板的各向异性蚀刻制成的对电极分别固定在盖板和底板上。 相对电极可以通过接触窗口通过盖板或底板接触。 中央晶片包含单向连接的质量（摆），其也通过各向异性蚀刻产生，并且用作差分电容器的可移动中心电极。 层状结构通过半导体熔融粘合而密封。 在晶片边缘区域形成从顶部的阶梯状梯度，用于将接触焊盘附接到单个晶片以允许单个晶片的电接触。 本发明允许制造以极小的泄漏电容和高温稳定性为特征的μB器件。

公开(公告)号：US5504032A

公开(公告)日：1996-04-02

申请号：US224750

申请日：1994-04-07

申请人： Thomas Gessner ,  Martin Hafen ,  Eberhard Handrich ,  Peter Leinfelder ,  Bruno Ryrko ,  Egbert Vetter ,  Maik Wiemer

发明人： Thomas Gessner ,  Martin Hafen ,  Eberhard Handrich ,  Peter Leinfelder ,  Bruno Ryrko ,  Egbert Vetter ,  Maik Wiemer

IPC分类号： G01P15/08 ,  G01P15/125 ,  H01L21/306 ,  H01L29/84 ,  H01L21/76

CPC分类号： G01P15/0802 ,  G01P15/125 ,  G01P2015/0828 ,  Y10S148/012 ,  Y10S73/01

摘要： A high precision micromechanical accelerometer comprises a layered structure of five (5) semiconductor wafers insulated from one another by thin semiconductor material oxide layers. The accelerometer is formed by first connecting a coverplate and a baseplate to associated insulating plates. Counter-electrodes, produced by anisotropic etching from the respective insulating plates, are fixed to the coverplate and the baseplate respectively. The counter-electrodes are contactable through the cover or baseplate via contact windows. A central wafer contains a unilaterally linked mass (pendulum) that is also produced by anisotropic etching and which serves as a movable central electrode of a differential capacitor. The layered structure is hermetically sealed by semiconductor fusion bonding. A stepped gradation from the top is formed at a wafer edge region for attaching contact pads to individual wafers to permit electrical contacting of individual wafers. The invention permits fabrication of a .mu.B device characterized by extremely small leakage capacitances and high temperature stability.

摘要翻译： 一种高精度微机械加速度计包括由薄半导体材料氧化物层彼此绝缘的五（5）个半导体晶片的分层结构。 通过首先将盖板和底板连接到相关联的绝缘板来形成加速度计。 通过各自绝缘板的各向异性蚀刻制成的对电极分别固定在盖板和基板上。 相对电极可以通过接触窗口通过盖板或底板接触。 中央晶片包含单向连接的质量（摆），其也通过各向异性蚀刻产生，并且用作差分电容器的可移动中心电极。 层状结构通过半导体熔融粘合而密封。 在晶片边缘区域形成从顶部的阶梯状梯度，用于将接触焊盘附接到单个晶片以允许单个晶片的电接触。 本发明允许制造以极小的泄漏电容和高温稳定性为特征的μB器件。