Image splitting in optical inspection systems
    1.
    发明授权
    Image splitting in optical inspection systems 有权
    光学检测系统中的图像分割

    公开(公告)号:US07719674B2

    公开(公告)日:2010-05-18

    申请号:US11944677

    申请日:2007-11-26

    Abstract: In an optical inspection tool, an image of an object under inspection, such as a semiconductor wafer, may be obtained using imaging optics defining a focal plane. Light comprising the image can be detected using multiple detectors which each register a portion of the image. The image of the object at the focal plane can be split into two, three, or more parts by mirrors or other suitable reflecting elements positioned tangent to the focal plane and/or with at least some portion at the focal plane with additional portions past the focal plane so that the focal plane lies between the imaging optics and the splitting apparatus. In some embodiments, reflective planes may be arranged to direct different portions to different detectors. Some reflective planes may be separated by a gap so that some portions of the light are directed while some portions pass through the gap. Other splitting elements may comprise a group of transmissive and reflective areas interspersed in an element positioned at or in the focal plane, with some portions of the light are reflected to detectors while other portions pass through the element(s) to other detectors. Splitting apparatuses and elements may be cascaded.

    Abstract translation: 在光学检查工具中,可以使用限定焦平面的成像光学元件来获得被检查物体(诸如半导体晶片)的图像。 可以使用多个检测器来检测包括图像的光,每个检测器记录图像的一部分。 在焦平面处的物体的图像可以通过反射镜或与焦平面相切定位的其它合适的反射元件和/或与焦平面上的至少一些部分分离成两个,三个或更多个部分,附加部分经过该焦平面 焦平面,使得焦平面位于成像光学元件和分割装置之间。 在一些实施例中,可以布置反射平面以将不同部分引导到不同的检测器。 一些反射面可以被间隙分离,使得一些部分的光被引导,而一些部分通过间隙。 其他分裂元件可以包括散布在位于焦平面处或焦平面处的元件中的一组透射和反射区域,其中一些部分光被反射到检测器,而其他部分穿过元件到其它检测器。 分割装置和元件可以级联。

    THERMO-ELECTRIC COOLING SYSTEM AND METHOD FOR COOLING ELECTRONIC DEVICES

    公开(公告)号:US20130003765A1

    公开(公告)日:2013-01-03

    申请号:US13520425

    申请日:2011-01-05

    Abstract: A thermo-electric cooling (TEC) system is presented for cooling of a device, such a laser for example. The TECT system comprises first and second heat pumping assemblies, and a control unit associated at least with said second heat pumping assembly. Each heat pumping assembly has a heat source from which heat is pumped and a heat drain through which pumped heat is dissipated. The at least first and second heat pumping assemblies are arranged in a cascade relationship having at least one thermal interface between the heat source of the second heat pumping assembly and the heat drain of the first heat pumping assembly, the heat source of the first heat pumping assembly being thermally coupled to the electronic device which is to be cooled by evacuating heat therefrom. The control unit is configured and operable to carry out at least one of the following: (i) operating said second heat pumping assembly to provide a desired temperature condition such that temperature of the heat drain of said first heat pumping assembly is either desirably low or by a certain value lower than temperature of the heat source of said first heat pumping assembly; and (ii) operating said second heat pumping assembly to maintain predetermined temperature of said thermal interface.

    Image Splitting in Optical Inspection Systems
    3.
    发明申请
    Image Splitting in Optical Inspection Systems 有权
    光学检测系统中的图像分割

    公开(公告)号:US20080137073A1

    公开(公告)日:2008-06-12

    申请号:US11944677

    申请日:2007-11-26

    Abstract: In an optical inspection tool, an image of an object under inspection, such as a semiconductor wafer, may be obtained using imaging optics defining a focal plane. Light comprising the image can be detected using multiple detectors which each register a portion of the image. The image of the object at the focal plane can be split into two, three, or more parts by mirrors or other suitable reflecting elements positioned tangent to the focal plane and/or with at least some portion at the focal plane with additional portions past the focal plane so that the focal plane lies between the imaging optics and the splitting apparatus. In some embodiments, reflective planes may be arranged to direct different portions to different detectors. Some reflective planes may be separated by a gap so that some portions of the light are directed while some portions pass through the gap. Other splitting elements may comprise a group of transmissive and reflective areas interspersed in an element positioned at or in the focal plane, with some portions of the light are reflected to detectors while other portions pass through the element(s) to other detectors. Splitting apparatuses and elements may be cascaded.

    Abstract translation: 在光学检查工具中,可以使用限定焦平面的成像光学元件来获得被检查物体(诸如半导体晶片)的图像。 可以使用多个检测器来检测包括图像的光,每个检测器记录图像的一部分。 在焦平面处的物体的图像可以通过反射镜或与焦平面相切定位的其它合适的反射元件和/或与焦平面上的至少一些部分分离成两个,三个或更多个部分,附加部分经过该焦平面 焦平面,使得焦平面位于成像光学元件和分割装置之间。 在一些实施例中,可以布置反射平面以将不同部分引导到不同的检测器。 一些反射面可以被间隙分离,使得一些部分的光被引导,而一些部分通过间隙。 其他分裂元件可以包括散布在位于焦平面处或焦平面处的元件中的一组透射和反射区域,其中一些部分光被反射到检测器,而其他部分穿过元件到其它检测器。 分割装置和元件可以级联。

    Image Splitting in Optical Inspection Systems
    4.
    发明申请
    Image Splitting in Optical Inspection Systems 有权
    光学检测系统中的图像分割

    公开(公告)号:US20080137074A1

    公开(公告)日:2008-06-12

    申请号:US11944684

    申请日:2007-11-26

    Abstract: In an optical inspection tool, an image of an object under inspection, such as a semiconductor wafer, may be obtained using imaging optics defining a focal plane. Light comprising the image can be split into portions that are detected using multiple detectors which each register a portion of the image. The image of the object at the focal plane can be split into two, three, or more parts by polarization-based beam splitters and/or lenses positioned tangent to the focal plane. The splitting apparatus may comprise a pair of arrays of half-cylinder lenses comprising a convex side and a flat side. The arrays can be positioned with the cylinder axes perpendicular to one another and the flat sides facing each other. Thus, the pair of arrays can divide incoming light into a plurality of rectangular portions without introducing non-uniformities which would occur if several spherical lenses are configured for use in a rectangular array.

    Abstract translation: 在光学检查工具中,可以使用限定焦平面的成像光学元件来获得被检查物体(诸如半导体晶片)的图像。 包括图像的光可以被分割成使用多个检测器检测的部分,每个检测器记录图像的一部分。 在焦平面处的物体的图像可以通过基于偏振的分束器和/或与焦平面相切的透镜分离成两个,三个或更多个部分。 分割装置可以包括一对半柱透镜,其包括凸面和平坦侧。 阵列可以被定位成使得圆柱轴线彼此垂直并且平坦的面朝向彼此。 因此,一对阵列可以将入射光分成多个矩形部分,而不会引入不均匀性,如果若干球形透镜配置为用于矩形阵列,则会发生不均匀性。

    Thermo-electric cooling system and method for cooling electronic devices
    6.
    发明授权
    Thermo-electric cooling system and method for cooling electronic devices 有权
    热电冷却系统及电子设备冷却方法

    公开(公告)号:US09134054B2

    公开(公告)日:2015-09-15

    申请号:US13520425

    申请日:2011-01-05

    Abstract: A thermo-electric cooling (TEC) system is presented for cooling of a device, such a laser for example. The TECT system comprises first and second heat pumping assemblies, and a control unit associated at least with said second heat pumping assembly. Each heat pumping assembly has a heat source from which heat is pumped and a heat drain through which pumped heat is dissipated. The at least first and second heat pumping assemblies are arranged in a cascade relationship having at least one thermal interface between the heat source of the second heat pumping assembly and the heat drain of the first heat pumping assembly, the heat source of the first heat pumping assembly being thermally coupled to the electronic device which is to be cooled by evacuating heat therefrom. The control unit is configured and operable to carry out at least one of the following: (i) operating said second heat pumping assembly to provide a desired temperature condition such that temperature of the heat drain of said first heat pumping assembly is either desirably low or by a certain value lower than temperature of the heat source of said first heat pumping assembly; and (ii) operating said second heat pumping assembly to maintain predetermined temperature of said thermal interface.

    Abstract translation: 提出了一种用于冷却器件(例如激光器)的热电冷却(TEC)系统。 TECT系统包括第一和第二热泵组件,以及至少与所述第二热泵组件相连的控制单元。 每个热泵组件都具有一个热源,热量从该热源被泵送,并且一个散热通过该热量消散。 至少第一和第二热泵组件布置成级联关系,其具有在第二热抽运组件的热源​​和第一热泵组件的热源​​之间的至少一个热界面,第一热泵的热源 组件热耦合到待通过从其中排出热量而被冷却的电子设备。 控制单元被配置和操作以执行以下至少一个:(i)操作所述第二热泵组件以提供期望的温度条件,使得所述第一热泵组件的排水温度理想地为低或 低于所述第一热泵组件的热源​​的温度的一定值; 和(ii)操作所述第二热泵组件以维持所述热界面的预定温度。

    TERAHERTZ SPECTROSCOPY SYSTEM AND METHOD
    7.
    发明申请
    TERAHERTZ SPECTROSCOPY SYSTEM AND METHOD 有权
    TERAHERTZ光谱系统和方法

    公开(公告)号:US20120044479A1

    公开(公告)日:2012-02-23

    申请号:US13212231

    申请日:2011-08-18

    Abstract: A terahertz spectrometer includes: a terahertz-wave emitter and a terahertz receiver elements. The terahertz wave generated by means of generating beat frequency corresponding to the difference between two rapidly tunable continuous wave lasers. Having a difference in time between the interrogating signal and the reference signal at the receiver end side, which corresponds to intermediate frequency (IF), not centered around the baseband, i.e. zero Hertz. The offset step size of the intermediate frequency from zero Hertz is linearly correlated to the position of the interrogated object position.

    Abstract translation: 太赫兹光谱仪包括:太赫波发射器和太赫兹接收器元件。 通过产生对应于两个快速可调连续波激光器之间的差异的拍频产生的太赫兹波。 在询问信号和对应于中频(IF)的接收机端侧的参考信号之间的时间差不以基带为中心,即零赫兹。 中间频率从零赫兹的偏移步长与询问对象位置的位置线性相关。

    Image splitting in optical inspection systems
    8.
    发明授权
    Image splitting in optical inspection systems 有权
    光学检测系统中的图像分割

    公开(公告)号:US07714998B2

    公开(公告)日:2010-05-11

    申请号:US11944684

    申请日:2007-11-26

    Abstract: In an optical inspection tool, an image of an object under inspection, such as a semiconductor wafer, may be obtained using imaging optics defining a focal plane. Light comprising the image can be split into portions that are detected using multiple detectors which each register a portion of the image. The image of the object at the focal plane can be split into two, three, or more parts by polarization-based beam splitters and/or lenses positioned tangent to the focal plane. The splitting apparatus may comprise a pair of arrays of half-cylinder lenses comprising a convex side and a flat side. The arrays can be positioned with the cylinder axes perpendicular to one another and the flat sides facing each other. Thus, the pair of arrays can divide incoming light into a plurality of rectangular portions without introducing non-uniformities which would occur if several spherical lenses are configured for use in a rectangular array.

    Abstract translation: 在光学检查工具中,可以使用限定焦平面的成像光学元件来获得被检查物体(诸如半导体晶片)的图像。 包括图像的光可以被分割成使用多个检测器检测的部分,每个检测器记录图像的一部分。 在焦平面处的物体的图像可以通过基于偏振的分束器和/或与焦平面相切的透镜分离成两个,三个或更多个部分。 分割装置可以包括一对半柱透镜,其包括凸面和平坦侧。 阵列可以被定位成使得圆柱轴线彼此垂直并且平坦的面朝向彼此。 因此,一对阵列可以将入射光分成多个矩形部分,而不会引入不均匀性,如果若干球形透镜配置为用于矩形阵列,则会发生不均匀性。

    Terahertz spectroscopy system and method
    9.
    发明授权
    Terahertz spectroscopy system and method 有权
    太赫兹光谱系统和方法

    公开(公告)号:US09279723B2

    公开(公告)日:2016-03-08

    申请号:US13212231

    申请日:2011-08-18

    Abstract: A terahertz spectrometer includes: a terahertz-wave emitter and a terahertz receiver elements. The terahertz wave generated by means of generating beat frequency corresponding to the difference between two rapidly tunable continuous wave lasers. Having a difference in time between the interrogating signal and the reference signal at the receiver end side, which corresponds to intermediate frequency (IF), not centered around the baseband, i.e. zero Hertz. The offset step size of the intermediate frequency from zero Hertz is linearly correlated to the position of the interrogated object position.

    Abstract translation: 太赫兹光谱仪包括:太赫波发射器和太赫兹接收器元件。 通过产生对应于两个快速可调连续波激光器之间的差异的拍频产生的太赫兹波。 在询问信号和对应于中频(IF)的接收机端侧的参考信号之间的时间差不以基带为中心,即零赫兹。 中间频率从零赫兹的偏移步长与询问对象位置的位置线性相关。

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