Flame guard and exhaust system for large area combustion deposition line, and associated methods

    公开(公告)号:US09637820B2

    公开(公告)日:2017-05-02

    申请号:US12654651

    申请日:2009-12-28

    CPC classification number: C23C16/453 C23C16/545 Y10T29/49826

    Abstract: Certain example embodiments relate to an in-line scalable system that may be used in the combustion deposition depositing of thin films. The systems of certain example embodiments may comprise one or more modules, with each such module including at least one burner and at least one high volume cooling section. In certain example implementations, multiple burners and multiple cooling sections are provided to a single module in alternating order. The systems of certain example embodiments may, in addition or in the alternative, comprise a combined flame guard and exhaust system. The combined flame guard and exhaust system of certain example embodiments advantageously may provide a means to reduce the amount of interference of the deposition process by ambient conditions, improve flame uniformity in the deposition zone, contain and exhaust combustion products while reducing restrictions to the stable operating space of the combustion deposition process, etc.

    Large area combustion deposition line, and associated methods
    4.
    发明申请
    Large area combustion deposition line, and associated methods 审中-公开
    大面积燃烧沉积线及相关方法

    公开(公告)号:US20110159199A1

    公开(公告)日:2011-06-30

    申请号:US12654653

    申请日:2009-12-28

    CPC classification number: C23C16/453 C03C17/002

    Abstract: Certain example embodiments relate to an in-line scalable system that may be used in the combustion deposition depositing of thin films. The systems of certain example embodiments may comprise one or more modules, with each such module including at least one burner and at least one high volume cooling section. In certain example implementations, multiple burners and multiple cooling sections are provided to a single module in alternating order. The systems of certain example embodiments may, in addition or in the alternative, comprise a combined flame guard and exhaust system. The combined flame guard and exhaust system of certain example embodiments advantageously may provide a means to reduce the amount of interference of the deposition process by ambient conditions, improve flame uniformity in the deposition zone, contain and exhaust combustion products while reducing restrictions to the stable operating space of the combustion deposition process, etc.

    Abstract translation: 某些示例实施例涉及可用于薄膜的燃烧沉积沉积中的在线可缩放系统。 某些示例性实施例的系统可以包括一个或多个模块,其中每个这样的模块包括至少一个燃烧器和至少一个高容积冷却部分。 在某些示例性实施方案中,多个燃烧器和多个冷却段以交替的顺序提供给单个模块。 另外或替代地,某些示例性实施例的系统可以包括组合的防火和排气系统。 某些示例性实施例的组合的防火和排气系统有利地可以提供一种方法,以减少环境条件下沉积过程的干扰量,改善沉积区中的火焰均匀性,容纳和排放燃烧产物,同时减少对稳定运行的限制 燃烧沉积过程的空间等

    Flame guard and exhaust system for large area combustion deposition line, and associated methods
    5.
    发明申请
    Flame guard and exhaust system for large area combustion deposition line, and associated methods 有权
    大面积燃烧沉积生产线的防火和排气系统及相关方法

    公开(公告)号:US20110159198A1

    公开(公告)日:2011-06-30

    申请号:US12654651

    申请日:2009-12-28

    CPC classification number: C23C16/453 C23C16/545 Y10T29/49826

    Abstract: Certain example embodiments relate to an in-line scalable system that may be used in the combustion deposition depositing of thin films. The systems of certain example embodiments may comprise one or more modules, with each such module including at least one burner and at least one high volume cooling section. In certain example implementations, multiple burners and multiple cooling sections are provided to a single module in alternating order. The systems of certain example embodiments may, in addition or in the alternative, comprise a combined flame guard and exhaust system. The combined flame guard and exhaust system of certain example embodiments advantageously may provide a means to reduce the amount of interference of the deposition process by ambient conditions, improve flame uniformity in the deposition zone, contain and exhaust combustion products while reducing restrictions to the stable operating space of the combustion deposition process, etc.

    Abstract translation: 某些示例实施例涉及可用于薄膜的燃烧沉积沉积中的在线可缩放系统。 某些示例性实施例的系统可以包括一个或多个模块,其中每个这样的模块包括至少一个燃烧器和至少一个高容积冷却部分。 在某些示例性实施方案中,多个燃烧器和多个冷却段以交替的顺序提供给单个模块。 另外或替代地,某些示例性实施例的系统可以包括组合的防火和排气系统。 某些示例性实施例的组合的防火和排气系统有利地可以提供一种方法,以减少环境条件下沉积过程的干扰量,改善沉积区中的火焰均匀性,容纳和排放燃烧产物,同时减少对稳定运行的限制 燃烧沉积过程的空间等

    Remote combustion deposition burner and/or related methods
    9.
    发明申请
    Remote combustion deposition burner and/or related methods 有权
    远程燃烧沉积燃烧器和/或相关方法

    公开(公告)号:US20100129561A1

    公开(公告)日:2010-05-27

    申请号:US12591168

    申请日:2009-11-10

    Inventor: David D. McLean

    Abstract: Certain example embodiments relate to a burner for use in combustion deposition depositing a coating on a substrate. An infrared (IR) burner generates radiant energy in an area between the burner and the substrate. A delivery device (1) provides a stream comprising a substantially vaporized precursor and a carrier gas from a location remote from the radiant energy generated by the IR burner, and (2) causes the stream to flow between the substrate and the IR burner. The stream is substantially laminar when exiting the delivery device. The radiant energy is sufficient to cause the precursor in the stream to be combusted and to heat the substrate to allow at least a portion of the combusted precursor to form the coating, directly or indirectly, on the substrate. The burners of certain example embodiments may be used, for example, to combustion deposition deposit metal oxide coatings onto glass substrates.

    Abstract translation: 某些示例性实施例涉及用于在基板上沉积涂层的燃烧沉积中使用的燃烧器。 红外(IR)燃烧器在燃烧器和基板之间的区域中产生辐射能。 输送装置(1)从远离由IR燃烧器产生的辐射能量的位置提供包含基本蒸发的前体和载气的流,和(2)使流在基板和IR燃烧器之间流动。 当离开输送装置时,流体基本上是层流的。 辐射能量足以使流中的前体燃烧并加热基底,以允许至少一部分燃烧的前体直接或间接地在基底上形成涂层。 某些示例性实施例的燃烧器可以用于例如在玻璃基板上的燃烧沉积金属氧化物涂层。

    Combustion deposition burner and/or related methods
    10.
    发明申请
    Combustion deposition burner and/or related methods 有权
    燃烧沉积燃烧器和/或相关方法

    公开(公告)号:US20090304941A1

    公开(公告)日:2009-12-10

    申请号:US12155762

    申请日:2008-06-09

    Inventor: David D. McLean

    Abstract: Certain example embodiments relate to a burner for use in combustion deposition depositing a coating on a substrate. First and second spaced-apart combustion gas manifolds are configured to respectively produce first and second flames (which may effectively combine to form a single flame front beyond the outer face of the burner in certain example embodiments). The first and second combustion gas manifolds form a precursor reaction zone therebetween. An adjustable precursor delivery manifold located between the first and second combustion gas manifolds is configured to receive a precursor used in forming the coating. The precursor delivery manifold is positioned so as to substantially directly provide the precursor to a desired or predetermined portion of the precursor reaction zone. The precursor delivery manifold includes first and second cooled walls arranged to reduce the occurrence of precursor pre-reactions upstream of the precursor reaction zone. The burners of certain example embodiments may be used to combustion deposition deposit metal oxide coatings onto glass substrates.

    Abstract translation: 某些示例性实施例涉及用于在基板上沉积涂层的燃烧沉积中使用的燃烧器。 第一和第二间隔开的燃烧气体歧管被构造成分别产生第一和第二火焰(其在某些示例性实施例中可以有效地组合以形成超过燃烧器的外表面的单个火焰前沿)。 第一和第二燃烧气体歧管在它们之间形成前体反应区。 位于第一燃烧气体歧管和第二燃烧气体歧管之间的可调节前体输送歧管被配置成接收用于形成涂层的前体。 前体输送歧管被定位成基本上直接将前体提供到前体反应区域的期望的或预定的部分。 前体输送歧管包括布置成减少前体反应区上游的前体预反应的发生的第一和第二冷却壁。 某些示例性实施例的燃烧器可用于将金属氧化物涂层沉积到玻璃基板上。

Patent Agency Ranking