公开(公告)号：US20100330776A1

公开(公告)日：2010-12-30

申请号：US12495114

申请日：2009-06-30

申请人： Steven M. Zuniga ,  Robert D. Tolles ,  Derek G. Aqui ,  Andrew J. Nagengast ,  Anthony J. Senn ,  Keenan Leon Guerrero

发明人： Steven M. Zuniga ,  Robert D. Tolles ,  Derek G. Aqui ,  Andrew J. Nagengast ,  Anthony J. Senn ,  Keenan Leon Guerrero

IPC分类号： H01L21/46 ,  B32B37/06 ,  B32B37/10

CPC分类号： B32B37/003 ,  B32B37/10 ,  B32B37/1009 ,  B32B38/004 ,  B32B2309/60 ,  B32B2309/68 ,  B32B2457/14 ,  H01L21/67092 ,  H01L21/67748 ,  H01L21/6875

摘要： A bonding apparatus and method holds first and second bodies peripherally, one above the other, on respective shelves. A lower heat-transfer body is configured to lift the first body from below and press the first and second bodies against an upper heat-transfer body to enable bonding between the first and second bodies.

摘要翻译： 接合装置和方法将第一和第二主体周边地彼此上下放置在相应的搁架上。 下部传热体构造成从下方提升第一体，并且将第一和第二体压靠在上部传热体上，以使第一和第二体之间的粘结。

公开(公告)号：US08151852B2

公开(公告)日：2012-04-10

申请号：US12495114

申请日：2009-06-30

申请人： Steven M. Zuniga ,  Robert D. Tolles ,  Derek G. Aqui ,  Andrew J. Nagengast ,  Anthony J. Senn ,  Keenan Leon Guerrero

发明人： Steven M. Zuniga ,  Robert D. Tolles ,  Derek G. Aqui ,  Andrew J. Nagengast ,  Anthony J. Senn ,  Keenan Leon Guerrero

IPC分类号： B32B37/00

CPC分类号： B32B37/003 ,  B32B37/10 ,  B32B37/1009 ,  B32B38/004 ,  B32B2309/60 ,  B32B2309/68 ,  B32B2457/14 ,  H01L21/67092 ,  H01L21/67748 ,  H01L21/6875

摘要： A bonding apparatus and method holds first and second bodies peripherally, one above the other, on respective shelves. A lower heat-transfer body is configured to lift the first body from below and press the first and second bodies against an upper heat-transfer body to enable bonding between the first and second bodies.

摘要翻译： 接合装置和方法将第一和第二主体周边地彼此上下放置在相应的搁架上。 下部传热体构造成从下方提升第一体，并且将第一和第二体压靠在上部传热体上，以使第一和第二体之间的粘结。

公开(公告)号：US08545660B1

公开(公告)日：2013-10-01

申请号：US13424984

申请日：2012-03-20

申请人： Steven M. Zuniga ,  Robert D. Tolles ,  Derek G. Aqui ,  Andrew J. Nagengast ,  Anthony J. Senn ,  Keenan Leon Guerrero

发明人： Steven M. Zuniga ,  Robert D. Tolles ,  Derek G. Aqui ,  Andrew J. Nagengast ,  Anthony J. Senn ,  Keenan Leon Guerrero

IPC分类号： B32B37/00

CPC分类号： B32B37/003 ,  B32B37/10 ,  B32B37/1009 ,  B32B38/004 ,  B32B2309/60 ,  B32B2309/68 ,  B32B2457/14 ,  H01L21/67092 ,  H01L21/67748 ,  H01L21/6875

摘要： A bonding apparatus and method holds first and second bodies peripherally, one above the other, on respective shelves. A lower heat-transfer body is configured to lift the first body from below and press the first and second bodies against an upper heat-transfer body to enable bonding between the first and second bodies.

摘要翻译： 接合装置和方法将第一和第二主体周边地彼此上下放置在相应的搁架上。 下部传热体构造成从下方提升第一体，并且将第一和第二体压靠在上部传热体上，以使第一和第二体之间的粘结。

公开(公告)号：US20110143521A1

公开(公告)日：2011-06-16

申请号：US12636490

申请日：2009-12-11

申请人： Steven M. Zuniga ,  Derek G. Aqui ,  Andrew J. Nagengast ,  Keenan Leon Guerrero ,  Harish K. Bolla ,  Aditya Agarwal

发明人： Steven M. Zuniga ,  Derek G. Aqui ,  Andrew J. Nagengast ,  Keenan Leon Guerrero ,  Harish K. Bolla ,  Aditya Agarwal

IPC分类号： H01L21/30 ,  H01L21/677

CPC分类号： H01L21/68728 ,  H01L21/67766 ,  H01L21/67781

摘要： A system for simultaneously treating multiple workpieces is configured with treatment sites, configured to hold respective workpieces, fixed on a rotatable base. Treatment stations are equipped with respective active components operable simultaneously to treat respective workpieces identically on respective aligned treatment sites. For loading and unloading the treatment sites are rotated through distinct loading and unloading stations of the treatment stations which allow loading of a second batch while a first batch is being unloaded.

摘要翻译： 用于同时处理多个工件的系统被配置有处理部位，其被配置为保持固定在可旋转底座上的各个工件。 处理站配备有可同时操作的相应活动部件，以在相应的对准的处理部位上相同地处理相应的工件。 对于装载和卸载，处理站点通过处理站的不同装载和卸载站进行旋转，允许在第一批卸载时加载第二批料。

公开(公告)号：US20110143520A1

公开(公告)日：2011-06-16

申请号：US12636410

申请日：2009-12-11

申请人： Steven M. Zuniga ,  Derek G. Aqui ,  Andrew J. Nagengast ,  Kirk G. Liebscher ,  John M. Alexander ,  Keenan Leon Guerrero

发明人： Steven M. Zuniga ,  Derek G. Aqui ,  Andrew J. Nagengast ,  Kirk G. Liebscher ,  John M. Alexander ,  Keenan Leon Guerrero

IPC分类号： H01L21/70 ,  H01L21/677 ,  H01L21/673

CPC分类号： H01L21/67092 ,  H01L21/67766 ,  H01L21/67781 ,  H01L21/68728 ,  H01L21/68771

摘要： A system for treating distinct batches of workpieces to serial procedures comprises first and second multi-site structures. In each multi-site structure the sites are rotatable for alignment in turn with loading and unloading stations together constituting treatment or process stations. Workpieces of a batch are loaded onto all of the treatment sites and then simultaneously and identically treated by operation of treatment stations with which the process sites are aligned. After treatment in the first structure, workpieces of a batch are transferred from the unloading stations of the first structure to the loading stations of the second structure for further processing.

摘要翻译： 用于将不同批次的工件处理为串行程序的系统包括第一和第二多站点结构。 在每个多站点结构中，站点可旋转以依次与装载站和卸载站一起构成处理站或处理站。 将批料的​​工件加载到所有处理部位上，然后通过与处理部位对齐的处理站的操作同时并且相同地处理。 在第一结构中处理之后，批次的工件从第一结构的卸载站传送到第二结构的装载站，用于进一步处理。

公开(公告)号：US08207047B2

公开(公告)日：2012-06-26

申请号：US12636490

申请日：2009-12-11

申请人： Steven M. Zuniga ,  Derek G. Aqui ,  Andrew J. Nagengast ,  Keenan Leon Guerrero ,  Harish K. Bolla ,  Aditya Agarwal

发明人： Steven M. Zuniga ,  Derek G. Aqui ,  Andrew J. Nagengast ,  Keenan Leon Guerrero ,  Harish K. Bolla ,  Aditya Agarwal

IPC分类号： H01L21/30

CPC分类号： H01L21/68728 ,  H01L21/67766 ,  H01L21/67781

摘要： A system for simultaneously treating multiple workpieces is configured with treatment sites, configured to hold respective workpieces, fixed on a rotatable base. Treatment stations are equipped with respective active components operable simultaneously to treat respective workpieces identically on respective aligned treatment sites. For loading and unloading the treatment sites are rotated through distinct loading and unloading stations of the treatment stations which allow loading of a second batch while a first batch is being unloaded.

摘要翻译： 用于同时处理多个工件的系统被配置有处理部位，其被配置为保持固定在可旋转底座上的各个工件。 处理站配备有可同时操作的相应活动部件，以在相应的对准的处理部位上相同地处理相应的工件。 对于装载和卸载，处理站点通过处理站的不同装载和卸载站进行旋转，允许在第一批卸载时加载第二批料。

公开(公告)号：US20110140334A1

公开(公告)日：2011-06-16

申请号：US12636328

申请日：2009-12-11

申请人： Steven M. Zuniga ,  Derek G. Aqui ,  Andrew J. Nagengast ,  Keenan Leon Guerrero ,  Harish K. Bolla ,  Aditya Agarwal

发明人： Steven M. Zuniga ,  Derek G. Aqui ,  Andrew J. Nagengast ,  Keenan Leon Guerrero ,  Harish K. Bolla ,  Aditya Agarwal

IPC分类号： B23Q3/00

CPC分类号： H01L21/68728 ,  H01L21/6719 ,  H01L21/68707 ,  H01L21/68764 ,  H01L21/68771

摘要： A system for simultaneously treating multiple workpieces is configured with sites, configured to hold respective workpieces, affixed on a rotatable base. Each site has a shelf accommodating an interior space and may be positioned by base rotation in alignment with a station of fixed location. Each station is equipped with an active component. The active components are movable simultaneously within respective stations into the respective interior spaces of respective aligned sites.

摘要翻译： 用于同时处理多个工件的系统被配置有被固定在可旋转底座上的各个工件的位置。 每个场地具有容纳内部空间的搁架，并且可以通过基座旋转定位成与固定位置的工位对准。 每个车站都配有一个有源组件。 有源部件可以在相应的站内同时移动到各个对准的位置的相应的内部空间中。

公开(公告)号：US08360409B2

公开(公告)日：2013-01-29

申请号：US12636328

申请日：2009-12-11

申请人： Steven M. Zuniga ,  Derek G. Aqui ,  Andrew J. Nagengast ,  Keenan Leon Guerrero ,  Harish K. Bolla ,  Aditya Agarwal

发明人： Steven M. Zuniga ,  Derek G. Aqui ,  Andrew J. Nagengast ,  Keenan Leon Guerrero ,  Harish K. Bolla ,  Aditya Agarwal

IPC分类号： B23Q3/00

CPC分类号： H01L21/68728 ,  H01L21/6719 ,  H01L21/68707 ,  H01L21/68764 ,  H01L21/68771

摘要： A system for simultaneously treating multiple workpieces is configured with sites, configured to hold respective workpieces, affixed on a rotatable base. Each site has a shelf accommodating an interior space and may be positioned by base rotation in alignment with a station of fixed location. Each station is equipped with an active component. The active components are movable simultaneously within respective stations into the respective interior spaces of respective aligned sites.

摘要翻译： 用于同时处理多个工件的系统被配置有被固定在可旋转底座上的各个工件的位置。 每个场地具有容纳内部空间的搁架，并且可以通过基座旋转定位成与固定位置的工位对准。 每个车站都配有一个有源组件。 有源部件可以在相应的站内同时移动到各个对准的位置的相应的内部空间中。

公开(公告)号：US08334191B2

公开(公告)日：2012-12-18

申请号：US12636410

申请日：2009-12-11

申请人： Steven M. Zuniga ,  Derek G. Aqui ,  Andrew J. Nagengast ,  Kirk G. Liebscher ,  John M. Alexander ,  Keenan Leon Guerrero

发明人： Steven M. Zuniga ,  Derek G. Aqui ,  Andrew J. Nagengast ,  Kirk G. Liebscher ,  John M. Alexander ,  Keenan Leon Guerrero

IPC分类号： H01L21/30 ,  H01L21/46

CPC分类号： H01L21/67092 ,  H01L21/67766 ,  H01L21/67781 ,  H01L21/68728 ,  H01L21/68771

摘要： A system for treating distinct batches of workpieces to serial procedures comprises first and second multi-site structures. In each multi-site structure the sites are rotatable for alignment in turn with loading and unloading stations together constituting treatment or process stations. Workpieces of a batch are loaded onto all of the treatment sites and then simultaneously and identically treated by operation of treatment stations with which the process sites are aligned. After treatment in the first structure, workpieces of a batch are transferred from the unloading stations of the first structure to the loading stations of the second structure for further processing.

摘要翻译： 用于将不同批次的工件处理为串行程序的系统包括第一和第二多站点结构。 在每个多站点结构中，站点可旋转以依次与装载站和卸载站一起构成处理站或处理站。 将批料的​​工件加载到所有处理部位上，然后通过与处理部位对齐的处理站的操作同时并且相同地处理。 在第一结构中处理之后，批次的工件从第一结构的卸载站传送到第二结构的装载站，用于进一步处理。

公开(公告)号：US5534706A

公开(公告)日：1996-07-09

申请号：US207329

申请日：1994-03-07

申请人： Peter G. Borden ,  Derek G. Aqui ,  Matt A. Evanko

发明人： Peter G. Borden ,  Derek G. Aqui ,  Matt A. Evanko

IPC分类号： G01N15/06 ,  G01N15/02 ,  G01N15/14 ,  G01N21/00

CPC分类号： G01N15/02

摘要： A method for accomplishing particle monitoring above the throttle valve of a turbo pump provides a particle sensor which is built into the throttle valve in such a way that it is insensitive to local plasma glows. Furthermore, the particle sensor is placed such that a particle monitoring laser beam of the particle sensor is offset from the centerline of the pipe, so as to maximize exposure to process gas flow which is diverted to the periphery of the pipe by the position of a butterfly valve plate.

摘要翻译： 在涡轮泵的节气门上方实现颗粒监测的方法提供了一种内置在节流阀中的颗粒传感器，使得其对局部等离子体发光不敏感。 此外，粒子传感器被放置成使得粒子传感器的粒子监测激光束偏离管道的中心线，以便最大程度地暴露于通过位置的管道的转移到管道的周围的处理气体流 蝶阀板。