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公开(公告)号：US06317447B1
公开(公告)日：2001-11-13
申请号：US09490835
申请日：2000-01-25
申请人： William N. Partlo , Igor V. Fomenkov , Jean-Marc Hueber , Zsolt Bor , Eckehard D. Onkels , Michael C. Cates , Richard C. Ujazdowski , Vladimir B. Fleurov , Dmitri V. Gaidarenko
发明人： William N. Partlo , Igor V. Fomenkov , Jean-Marc Hueber , Zsolt Bor , Eckehard D. Onkels , Michael C. Cates , Richard C. Ujazdowski , Vladimir B. Fleurov , Dmitri V. Gaidarenko
IPC分类号： H01S322
CPC分类号： G03F7/70025 , G03F7/70575 , G03F7/708 , H01S3/036 , H01S3/038 , H01S3/0381 , H01S3/0382
摘要： Methods and structural changes in gas discharge lasers for minimizing wavelength chirp at high pulse rates. Applicants have identified the major cause of wavelength chirp in high pulse rate gas discharge lithography lasers as pressure waves from a discharge reflecting back to the discharge region coincident with a subsequent discharge. The timing of the arrival of the pressure wave is determined by the temperature of the laser gas through which the wave is traveling. During burst mode operation, the laser gas temperature in prior art lasers changes by several degrees over periods of a few milliseconds. These changing temperatures change the location of the coincident pressure waves from pulse to pulse within the discharge region causing a variation in the pressure of the laser gas which in turn affects the index of refraction of the discharge region causing the laser beam exiting the rear of the laser to slightly change direction. This change in beam direction causes the grating in the LNP to reflect back to the discharge region light at a slightly different wavelength causing the wavelength chirp. Solution to the problem is to include in the laser chamber structural elements to moderate or disperse the pressure waves and to maintain the laser gas temperature as close as feasible to constant values.
摘要翻译： 气体放电激光器的方法和结构变化，以最大限度地减少高脉冲波长啁啾。 申请人已经确定了在高脉冲气体放电光刻激光器中的波长啁啾的主要原因，因为从反射回到放电区域的放电的压力波与随后的放电一致。 压力波的到达时间由波浪行进的激光气体的温度决定。 在突发模式操作期间，现有技术的激光器中的激光气体温度在几毫秒的时间内改变了几度。 这些变化的温度改变了放电区域内重合压力波从脉冲到脉冲的位置，导致激光气体的压力变化，这反过来影响放电区域的折射率，导致激光束离开 激光稍微改变方向。 光束方向的这种变化导致LNP中的光栅以稍微不同的波长反射回到放电区域，导致波长啁啾。 解决问题的方法是在激光室结构元件中包括中压或分散压力波，并将激光气体温度保持在尽可能接近的恒定值。
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公开(公告)号：US06466602B1
公开(公告)日：2002-10-15
申请号：US09590961
申请日：2000-06-09
申请人： Vladimir B. Fleurov , Michael C. Cates , Michael Du'Lyea , Igor V. Fomenkov , Dmitri V. Gaidarenko , Jean-Marc Hueber , Richard G. Morton , Eckehard D. Onkels , Robert A. Shannon , Ross H. Winnick
发明人： Vladimir B. Fleurov , Michael C. Cates , Michael Du'Lyea , Igor V. Fomenkov , Dmitri V. Gaidarenko , Jean-Marc Hueber , Richard G. Morton , Eckehard D. Onkels , Robert A. Shannon , Ross H. Winnick
IPC分类号： H01S3097
CPC分类号： G03F7/70025 , G03F7/70041 , G03F7/70575 , G03F7/70933 , H01S3/036 , H01S3/038 , H01S3/0381 , H01S3/0385 , H01S3/0387 , H01S3/041 , H01S3/0979 , H01S3/22 , H01S3/2207 , H01S3/223 , H01S3/225
摘要： A gas discharge laser having a laser chamber with two elongated erodable electrode elements, each having an erodable section and an electrode with support configured to minimize discharge region laser gas turbulence and with the electrode elements being configured to permit gradual erosion over more than 8 billion pulses without causing substantial changes in the shape of electrical discharges between the electrode elements. A pulse power system provides electrical pulses of at least 2J at rates of at least 2 KHz. A blower circulates laser gas between the electrodes at speeds of at least 2 m/s and a heat exchanger is provided to remove heat produced by the blower and the discharges.
摘要翻译： 一种气体放电激光器，其具有具有两个细长可蚀电极元件的激光室，每个具有可蚀刻部分和具有支撑件的电极，其配置为使放电区域激光气体湍流最小化，并且电极元件被配置为允许在超过80亿个脉冲 而不会引起电极元件之间放电形状的显着变化。 脉冲功率系统以至少2KHz的速率提供至少2J的电脉冲。 鼓风机以至少2m / s的速度在电极之间循环激光气体，并且提供热交换器以去除由鼓风机和排出物产生的热量。
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公开(公告)号：US06414979B2
公开(公告)日：2002-07-02
申请号：US09768753
申请日：2001-01-23
申请人： Richard C. Ujazdowski , Michael C. Cates , Richard G. Morton , Jean-Marc Hueber , Ross H. Winnick
发明人： Richard C. Ujazdowski , Michael C. Cates , Richard G. Morton , Jean-Marc Hueber , Ross H. Winnick
IPC分类号： H01S3097
CPC分类号： G03F7/70933 , G03F7/70025 , G03F7/70041 , G03F7/70575 , H01S3/036 , H01S3/038 , H01S3/0381 , H01S3/0385 , H01S3/0387 , H01S3/041 , H01S3/0979 , H01S3/22 , H01S3/2207 , H01S3/223 , H01S3/225
摘要： A gas discharge laser having a laser chamber with two elongated erodable electrode elements, at least one of said electrode element having a generally blunt blade-shaped portion comprised of a material having high electrical conductivity with a flow shaping dielectric fairing positioned on each of two sides of said blunt blade-shaped portion. A pulse power system provides electrical pulses at rates of at least 1 KHz. A blower circulates laser gas between the electrodes at speeds of at least 10 m/s and a heat exchanger is provided to remove heat produced by the blower and the discharges.
摘要翻译： 一种气体放电激光器，其具有具有两个细长的可蚀电极元件的激光室，所述电极元件中的至少一个具有大致钝的刀片形部分，其由具有高导电性的材料组成，并且流动成形电介质整流罩位于两侧 的所述钝刀形部分。 脉冲功率系统以至少1KHz的速率提供电脉冲。 鼓风机以至少10m / s的速度在电极之间循环激光气体，并且提供热交换器以去除由鼓风机和排出物产生的热量。
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公开(公告)号：US06654403B2
公开(公告)日：2003-11-25
申请号：US09748317
申请日：2000-12-22
IPC分类号： H01S3097
CPC分类号： G03F7/70025 , G03F7/70041 , G03F7/70575 , G03F7/708 , H01S3/036 , H01S3/038 , H01S3/0381 , H01S3/0385 , H01S3/0387 , H01S3/0979 , H01S3/223 , H01S3/225
摘要： An excimer laser with a laser chamber containing a circulating laser gas containing fluorine and a set of long life electrode structures. At least one of the electrode structures has an erosion pad and a cross section shape designed to provide in conjunction with other chamber structure a gradual increasing flow cross section between the discharge region and the circulating tangential fan blade. In a preferred embodiment, electrode lifetime is increased by annealing the erosion rod after it is are machined. This annealing relieves the surface stress caused by the machining operation and reduces the exposed metallic grain boundary length per unit area on the surface of the electrodes, which provides substantial reduction in erosion caused by fluorine chemical attack. Annealing after machining also reduces the stress throughout the bulk of the electrode material. In preferred embodiments the anode is a copper-aluminum alloy and the cathode is a copper-zinc alloy.
摘要翻译： 具有激光室的准分子激光器，其包含含有氟的循环激光气体和一组长寿命的电极结构。 电极结构中的至少一个具有冲蚀焊盘和横截面形状，其设计成与其他腔室结构一起提供在放电区域和循环切向风扇叶片之间逐渐增加的流动横截面。 在优选的实施方案中，通过在侵蚀棒被加工之后对其进行退火来增加电极寿命。 该退火减轻了加工操作引起的表面应力，降低了电极表面单位面积暴露的金属晶界长度，大大减少了氟化学侵蚀引起的侵蚀。 加工后的退火也可以减少整个电极材料的应力。 在优选实施例中，阳极是铜 - 铝合金，阴极是铜 - 锌合金。
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公开(公告)号：US5930027A
公开(公告)日：1999-07-27
申请号：US22980
申请日：1998-02-12
CPC分类号： G02B6/4214 , G02B26/0841 , H04N5/7416
摘要： A fiber optic spatial light modulation system which includes a light source which produces source light, an optical fiber bundle which includes a plurality of individual optical fibers, and a spatial light modulator which is interposed between the light source and the optical fiber bundle, and which selectively modulates the amount of the source light coupled into each of the individual optical fibers, wherein the amount of the source light coupled into different ones of the individual optical fibers can be unequal. In the disclosed embodiment, the spatial light modulator is a digital micromirror device which includes an array of micromirrors, a semiconductor memory which includes an array of memory cells, wherein each of the memory cells is associated with a respective one of the micromirrors and stores a bit of binary data, and the system employs a digital microprocessor which executes a desired control algorithm and sends the binary data to appropriate ones of the memory cells to selectively drive the micromirrors into an on position or an off position in accordance with the binary value of the binary data. Each of the individual optical fibers has associated therewith a plurality of micromirrors which are each oriented to couple the source light into the corresponding individual optical fiber when in the on position and to not couple the source light into the corresponding individual optical fiber when in the off position.
摘要翻译： 一种光纤空间光调制系统，包括产生源光的光源，包括多个单独的光纤的光纤束，以及介于光源和光纤束之间的空间光调制器， 选择性地调制耦合到每个单独光纤中的源光的量，其中耦合到各个单独光纤中的源光的量可以是不相等的。 在所公开的实施例中，空间光调制器是包括微镜阵列的数字微镜器件，包括存储器单元阵列的半导体存储器，其中每个存储器单元与相应的一个微镜相关联并存储 二进制数据位，并且系统采用执行期望的控制算法的数字微处理器，并将二进制数据发送到适当的存储单元，以根据二进制值的二进制值选择性地将微镜驱动到打开位置或关闭位置 二进制数据。 每个单独的光纤具有多个微反射镜，每个微型反射镜在取向时将其定向成在处于接通位置时将源光耦合到相应的单独光纤中，并且当处于关闭状态时不将源光耦合到相应的单独光纤中 位置。
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公开(公告)号：US20110043785A1
公开(公告)日：2011-02-24
申请号：US12543330
申请日：2009-08-18
IPC分类号： G01P3/36
摘要： A multifunction light detection and ranging (LIDAR) system for aircraft or other applications may use autodyne techniques. An autodyne system can use a single laser source and a single detector. The autodyne technique can mix two signal beams to produce a “beat note” at the frequency difference between the beams. Autodyne detection can leverage photon counting to support significantly reduced system complexity. Reduced complexity may provide solutions with significantly reduced power consumption, lighter weight, smaller volume, and lower cost. The multifunction LIDAR system can detect and identify regions of weather hazards such as lightning storms, aircraft wake vortex, clear air turbulence, and wind shear. The multifunction LIDAR system may also be configured to measure aircraft air and ground speed in multiple dimensions as well as aircraft altitude.
摘要翻译： 用于飞机或其他应用的多功能光检测和测距（LIDAR）系统可以使用自动旋转技术。 自动旋转系统可以使用单个激光源和单个检测器。 自动对焦技术可以混合两个信号光束，以在光束之间的频率差产生“拍音”。 自动检测可以利用光子计数来显着降低系统复杂度。 降低复杂性可提供显着降低功耗，重量更轻，体积更小，成本更低的解决方案。 多功能激光雷达系统可以检测和识别雷电风暴，飞机尾流涡流，清澈空气湍流和风切变等天气危害区域。 多功能激光雷达系统还可以被配置成在多个维度以及飞机高度上测量飞机的空中和地面速度。
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公开(公告)号：US5194723A
公开(公告)日：1993-03-16
申请号：US813866
申请日：1991-12-24
申请人： Michael C. Cates , Richard R. Hamm
发明人： Michael C. Cates , Richard R. Hamm
IPC分类号： G01N29/24
CPC分类号： G01N29/2418 , G01N2291/0423
摘要： The present invention provides an automated system and method for removing one or more layers of a material from a substrate. The system and method include irradiating a structure comprising at least one layer of material formed on a substrate with a light beam having an intensity sufficient to ablate the materials in order to expose selected regions of the substrate, where the ablated material generates photoacoustic signature signals; scanning the structure with the light beam along a predetermined path at a scan speed; detecting the photoacoustic signature signals; determining an updated scan speed functionally related to the detected photoacoustic signals; and directing the scan speed to be equal to the updated scan speed. Another embodiment exposes a selected layer of a multilayered structure in a process which includes irradiating the surface of multilayered structure at a first location with a light beam having sufficient intensity to ablate the irradiated layer and generate photoacoustic pressure wave signals; detecting the photoacoustic pressure wave signals generated at the irradiated surface; comparing representations of the photoacoustic pressure wave signals with a reference value corresponding to a photoacoustic signature signal of a layer of the structure selected to be exposed; and directing the light source to scan the surface of the structure at a scan speed functionally related to the difference between the photoacoustic pressure wave signals and the reference value.
摘要翻译： 本发明提供一种用于从衬底去除材料的一层或多层的自动化系统和方法。 该系统和方法包括用形成在衬底上的至少一层材料的结构照射具有足以消融材料的强度的光束，以暴露衬底的选定区域，其中消融材料产生光声特征信号; 以扫描速度沿预定路径用光束扫描结构; 检测光声签名信号; 确定与检测到的光声信号功能相关的更新的扫描速度; 并且将扫描速度定向为等于更新的扫描速度。 另一实施例在包括用第一位置的多层结构的表面照射具有足够强度的光束以消融辐照层并产生光声压波信号的过程中暴露多层结构的选定层; 检测在所照射的表面产生的光声压力波信号; 将光声压力波信号的表示与对应于被选择曝光的结构的层的光声签名信号相对应的参考值进行比较; 并且引导光源以与光声压波信号和参考值之间的差异功能相关的扫描速度扫描结构的表面。
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公开(公告)号：US5782253A
公开(公告)日：1998-07-21
申请号：US204852
申请日：1994-03-02
CPC分类号： B24C1/086 , B08B7/0035 , B08B7/0042 , B23K26/144 , B23K26/364 , B24C1/003 , B44D3/166
摘要： A system is provided for removing material from a structure having at least one layer of the material formed on a substrate. The system includes a radiant energy source, such as a flashlamp, with an actively cooled reflector for irradiating a target area of a structure with radiant energy, preferably sufficiently intense in at least the visible and ultraviolet, to break or weaken chemical bonds in the material, and an abrasive blaster for impinging the material after irradiation with a cool particle stream, preferably including of CO.sub.2 particles, to remove the irradiated material and cool the substrate. The system may also include light sensors used in a feedback loop to control the removal process by varying the speed at which the radiant energy source is moved along the structure, the repetition rate of the source, the intensity of the source, the pulse width of the source and/or the distance between the source and the structure.
摘要翻译： 提供了一种从具有至少一层形成在基底上的材料的结构中去除材料的系统。 该系统包括诸如闪光灯的辐射能源，其具有主动冷却的反射器，用于以至少可见光和紫外线照射具有辐射能的结构的目标区域，优选地足够强度以破坏或削弱材料中的化学键 以及用于用优选包括CO 2颗粒的冷颗粒流照射之后冲击材料的研磨剂，以去除所辐射的材料并冷却基底。 该系统还可以包括在反馈环路中使用的光传感器，以通过改变辐射能源沿着结构移动的速度，源的重复率，源的强度，源的脉冲宽度来控制去除过程 源和/或源和结构之间的距离。
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9.发明授权Method and apparatus for removing contaminants and coatings from a substrate using pulsed radiant energy and liquid carbon dioxide 失效使用脉冲辐射能和液体二氧化碳从基板去除污染物和涂层的方法和装置
公开(公告)号：US5613509A
公开(公告)日：1997-03-25
申请号：US460732
申请日：1995-06-02
CPC分类号： B24C1/086 , B08B7/0035 , B08B7/0042 , B23K26/144 , B23K26/364 , B24C1/003 , B44D3/166
摘要： An improved system and method are provided for removing material coatings or contaminants such as paints from a structure. The system and method include a radiant energy source, such as a flashlamp, for irradiating the target area of the structure with the radiant energy sufficient to initiate the pyrolysis and/or ablation of the coating or contaminant and a low temperature carbon dioxide stream which is directed at the target area to disperse the material from the structure, clean the exposed surface and cool the underlying substrate. The low temperature carbon dioxide stream is formed from a liquid carbon dioxide from a liquid carbon dioxide source which undergoes phase transition to yield a predetermined amount of low temperature carbon dioxide gas and carbon dioxide snow. The system and method eliminate the need for a carbon dioxide pelletizer, a carbon dioxide pellet transport hopper, and a compressed carrier gas which are used in related systems.
摘要翻译： 提供改进的系统和方法用于从结构中去除材料涂层或污染物，例如油漆。 该系统和方法包括辐射能源，例如闪光灯，用于以足以引发涂层或污染物的热解和/或消融的辐射能辐射结构的目标区域，以及低温二氧化碳流 指向目标区域以分散来自结构的材料，清洁暴露的表面并冷却下面的基底。 低温二氧化碳流由来自液态二氧化碳源的液态二氧化碳形成，其经历相变以产生预定量的低温二氧化碳气体和二氧化碳积雪。 该系统和方法消除了在相关系统中使用的二氧化碳造粒机，二氧化碳球粒输送料斗和压缩载气的需要。
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公开(公告)号：US08508721B2
公开(公告)日：2013-08-13
申请号：US12543330
申请日：2009-08-18
IPC分类号： G01C3/08
摘要： A multifunction light detection and ranging (LIDAR) system for aircraft or other applications may use autodyne techniques. An autodyne system can use a single laser source and a single detector. The autodyne technique can mix two signal beams to produce a “beat note” at the frequency difference between the beams. Autodyne detection can leverage photon counting to support significantly reduced system complexity. Reduced complexity may provide solutions with significantly reduced power consumption, lighter weight, smaller volume, and lower cost. The multifunction LIDAR system can detect and identify regions of weather hazards such as lightning storms, aircraft wake vortex, clear air turbulence, and wind shear. The multifunction LIDAR system may also be configured to measure aircraft air and ground speed in multiple dimensions as well as aircraft altitude.
摘要翻译： 用于飞机或其他应用的多功能光检测和测距（LIDAR）系统可以使用自动旋转技术。 自动旋转系统可以使用单个激光源和单个检测器。 自动对焦技术可以混合两个信号光束，以在光束之间的频率差产生“拍音”。 自动检测可以利用光子计数来显着降低系统复杂度。 降低复杂性可提供显着降低功耗，重量更轻，体积更小，成本更低的解决方案。 多功能激光雷达系统可以检测和识别雷电风暴，飞机尾流涡流，清澈空气湍流和风切变等天气危害区域。 多功能激光雷达系统还可以被配置成在多个维度以及飞机高度上测量飞机的空中和地面速度。
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