公开(公告)号：US09837245B2

公开(公告)日：2017-12-05

申请号：US14657234

申请日：2015-03-13

Applicant: Ho Seob Kim ,  Byeng Jin Kim ,  Do Jin Seong

Inventor： Ho Seob Kim ,  Byeng Jin Kim ,  Do Jin Seong

IPC: G21K5/10 ,  H01J37/26 ,  H01J37/20 ,  H01J37/10 ,  H02N2/00 ,  H02N2/02

CPC classification number: H01J37/261 ,  H01J37/10 ,  H01J37/20 ,  H01J37/28 ,  H01J2237/10 ,  H01J2237/20207 ,  H01J2237/20228 ,  H01J2237/20235 ,  H01J2237/20264 ,  H01J2237/2602 ,  H02N2/006 ,  H02N2/026

Abstract: Disclosed herein is a micro stage using a piezoelectric element that can be reliably operated even in a vacuum environment. In a particle column requiring a high precision, for example, a microelectronic column, the micro stage can be used as a stage with micro or nano degree precision for alignment of parts of the column, or for moving a sample, and so on.

公开(公告)号：US20160268929A1

公开(公告)日：2016-09-15

申请号：US14657234

申请日：2015-03-13

Applicant: Ho Seob KIM ,  Byeng Jin KIM ,  Do Jin SEONG

Inventor： Ho Seob KIM ,  Byeng Jin KIM ,  Do Jin SEONG

IPC: H02N2/02 ,  H01J37/10 ,  H01J37/26 ,  H01J37/20

CPC classification number: H01J37/261 ,  H01J37/10 ,  H01J37/20 ,  H01J37/28 ,  H01J2237/10 ,  H01J2237/20207 ,  H01J2237/20228 ,  H01J2237/20235 ,  H01J2237/20264 ,  H01J2237/2602 ,  H02N2/006 ,  H02N2/026

Abstract: Disclosed herein is a micro stage using a piezoelectric element that can be reliably operated even in a vacuum environment. In a particle column requiring a high precision, for example, a microelectronic column, the micro stage can be used as a stage with micro or nano degree precision for alignment of parts of the column, or for moving a sample, and so on.

Abstract translation: 这里公开了使用即使在真空环境中也可靠地运行的压电元件的微型平台。 在需要高精度的微粒子柱（例如微电子柱）中，微型载物台可以用作具有微量级或纳米级精度的阶段，用于校准塔的部分或用于移动样品等。