公开(公告)号：US06201240B1

公开(公告)日：2001-03-13

申请号：US09186268

申请日：1998-11-04

申请人： Noam Dotan ,  Sergio Serulnik ,  Dubi Shachal

发明人： Noam Dotan ,  Sergio Serulnik ,  Dubi Shachal

IPC分类号： H01J37244

CPC分类号： H01J37/222

摘要： Disclosed is a system and method for enhancing edge, topography, and materials in SEM images. The enhancements are achieved by collecting secondary electrons at narrow energy bands. This allows construction of various “primary” images having specific features enhanced. Further enhancement is achieved by various manipulations and combinations of the “primary” images to obtain a final enhanced image. Yet further enhancements are achieved by assigning color to various “primary” images before constructing the final image.

摘要翻译： 公开了用于增强SEM图像中的边缘，形貌和材料的系统和方法。 通过在窄能带收集二次电子来实现增强。 这允许构建具有增强的特定特征的各种“主”图像。 通过“主”图像的各种操作和组合来实现进一步的增强，以获得最终的增强图像。 在构建最终图像之前，通过将颜色分配给各种“主”图像来实现进一步的增强。

公开(公告)号：US20050017192A1

公开(公告)日：2005-01-27

申请号：US10492393

申请日：2002-10-09

申请人： Dror Shemesh ,  Dubi Shachal

发明人： Dror Shemesh ,  Dubi Shachal

IPC分类号： G06T17/00 ,  G06T17/20 ,  H01J3/14 ,  H01J3/26 ,  H01J37/153 ,  H01J37/21 ,  H01J37/22 ,  H01J37/26

CPC分类号： H01J37/21 ,  H01J37/153 ,  H01J37/22 ,  H01J37/241 ,  H01J37/265 ,  H01J37/28 ,  H01J2237/1501

摘要： An apparatus and method for fast changing a focal length of a charged particle beam the method comprising the step of changing a control signal in response to a relationship between the control signal voltage value and the focal length of the charged particle beam.

摘要翻译： 一种用于快速改变带电粒子束的焦距的装置和方法，该方法包括响应于控制信号电压值与带电粒子束的焦距之间的关系改变控制信号的步骤。

公开(公告)号：US06670610B2

公开(公告)日：2003-12-30

申请号：US10005190

申请日：2001-11-26

申请人： Dror Shemesh ,  Ariel Ben-Porath ,  Dubi Shachal ,  Alexey Stepanov

发明人： Dror Shemesh ,  Ariel Ben-Porath ,  Dubi Shachal ,  Alexey Stepanov

IPC分类号： H01J3726

CPC分类号： H01J37/3056 ,  H01J37/304 ,  H01J2237/28

摘要： A system and method for directing the object, such as a semiconductor die. The system includes a first images such as a scanning electron microscope, a stage for moving the object and a second imager and miller such as a focused ion beam generator. The object is images to locate a desired location in which the object is to be milled and a landmark that is utilized for directing the miller. The system can include additional steps of milling, analyzing and movement of the object.

公开(公告)号：US07161158B2

公开(公告)日：2007-01-09

申请号：US10492393

申请日：2002-10-09

申请人： Dror Shemesh ,  Dubi Shachal

发明人： Dror Shemesh ,  Dubi Shachal

IPC分类号： H01J3/14 ,  H01J37/21 ,  H01J3/28 ,  H01J37/256

CPC分类号： H01J37/21 ,  H01J37/153 ,  H01J37/22 ,  H01J37/241 ,  H01J37/265 ,  H01J37/28 ,  H01J2237/1501

摘要： An apparatus and method for fast changing a focal length of a charged particle beam the method comprising the step of changing a control signal in response to a relationship between the control signal voltage value and the focal length of the charged particle beam.

摘要翻译： 一种用于快速改变带电粒子束的焦距的装置和方法，该方法包括响应于控制信号电压值与带电粒子束的焦距之间的关系改变控制信号的步骤。