Electro-optical method and apparatus for testing integrated circuits
    1.
    发明授权
    Electro-optical method and apparatus for testing integrated circuits 失效
    电光学方法和集成电路测试装置

    公开(公告)号:US5216359A

    公开(公告)日:1993-06-01

    申请号:US644038

    申请日:1991-01-18

    IPC分类号: G01R31/28

    CPC分类号: G01R31/2884

    摘要: Internal test sites on integrated circuit chips may be tested with minimal input/output pad or chip area overhead by providing transient interconnections to the internal test sites using an optically activated photoconductive layer which is formed over the active device layers of the integrated circuit to be tested. The photoconductive layer may be optically activated using an optical mask or hologram, to electrically access the desired internal test sites. Different test sites may be tested using different masks or holograms. The photoconductive layer is preferably hydrogenated amorphous silicon which is highly compatible with standard integrated circuit processing.

    摘要翻译: 集成电路芯片上的内部测试点可以通过最小的输入/输出焊盘或芯片面积开销进行测试,通过使用光电激活的光导电层(内部测试点)形成瞬态互连,形成在被测集成电路的有源器件层上 。 光电导层可以使用光学掩模或全息图进行光学激活,以电接触所需的内部测试位置。 可以使用不同的掩模或全息图测试不同的测试点。 光电导层优选为与标准集成电路处理高度兼容的氢化非晶硅。

    Field emitter flat panel display device and method for operating same
    2.
    发明授权
    Field emitter flat panel display device and method for operating same 失效
    场致发射体平板显示装置及其操作方法

    公开(公告)号:US5698942A

    公开(公告)日:1997-12-16

    申请号:US681227

    申请日:1996-07-22

    IPC分类号: G09G3/22 H01J3/02 H01J1/30

    摘要: A field emitter flat panel display and associated method of operation provides an electron emission path along which a beam of electrons emitted by a microelectronic field emitter travels such that the electrons impinge upon a light emitting element without passing through a mirror. The light emitting element is spaced apart from the microelectronic field emitter and includes a mirror and a luminescence layer on the mirror. The flat panel display can also include a deflector, such as a deflector electrode, which is spaced apart from both the microelectronic field emitter and the associated light emitting element and which controllably deflects the beam of electrons emitted by the microelectronic field emitter toward the luminescent layer of the associated light emitting element and along a curved electron emission path which is independent of the underlying mirror. Since the energy of the electrons is not dissipated by passing through a mirror prior to impinging upon the luminescent layer, the field emitter flat panel display and, more particularly, the microelectronic field emitter can be efficiently driven at relatively low voltage levels while still producing a relatively bright display.

    摘要翻译: 场发射器平板显示器和相关联的操作方法提供电子发射路径,微电子场发射器发射的电子束沿着该发射路径行进,使得电子撞击在发光​​元件上而不通过反射镜。 发光元件与微电子场发射器间隔开,并且在反射镜上包括反射镜和发光层。 平板显示器还可以包括偏转器电极,偏转器电极与微电子场发射器和相关联的发光元件两者间隔开,并且可控地将微电子场发射器发射的电子束偏转到发光层 并且沿着独立于下面的反射镜的弯曲电子发射路径。 由于在撞击发光层之前电子的能量不会通过反射镜而消散,所以可以在相当低的电压电平下有效地驱动场致发射体平板显示器,更具体地说,微电子场发射器驱动,同时仍然产生 比较明亮的显示。

    Pleated sheet microelectromechanical transducer
    3.
    发明授权
    Pleated sheet microelectromechanical transducer 失效
    褶皱片微机电换能器

    公开(公告)号:US5479061A

    公开(公告)日:1995-12-26

    申请号:US999161

    申请日:1992-12-31

    IPC分类号: H02N1/00

    CPC分类号: H02N1/006

    摘要: An electrically and mechanically robust microelectromechanical transducer is formed of a pleated dielectric sheet having patterned electrical conductors on the opposing faces thereof. The pleats define a plurality of spaced apart walls, with each wall including an electrically conductive portion at one side thereof. Positive and negative voltages, applied to opposite faces of the pleated sheet, cause the walls to move towards one another by electrostatic attraction. The walls can also move away from one another by electrostatic repulsion upon application of appropriate voltages. The microelectromechanical transducer may be fabricated by fabricating a sheet with integral pleats or by forming a "self-pleating" flat sheet which forms pleats after conductor fabrication thereon.

    摘要翻译: 电和机械鲁棒的微电子机械换能器由在其相对面上具有图案化电导体的折叠电介质片形成。 褶皱限定多个间隔开的壁,每个壁在其一侧包括导电部分。 施加到打褶片的相对面的正电压和负电压导致壁通过静电吸引而相互移动。 在施加适当的电压时,壁也可以通过静电排斥而相互远离。 微机电换能器可以通过制造具有整体褶皱的片材或者通过形成在其上制造导体之后形成褶皱的“自打褶”平板来制造。

    Ionic modification of organic resins and photoresists to produce
photoactive etch resistant compositions
    5.
    发明授权
    Ionic modification of organic resins and photoresists to produce photoactive etch resistant compositions 失效
    有机树脂和光致抗蚀剂的离子改性以产生光敏抗蚀组合物

    公开(公告)号:US5393642A

    公开(公告)日:1995-02-28

    申请号:US999208

    申请日:1992-12-31

    IPC分类号: G03F7/016 G03F7/09

    摘要: A photoresist composition is disclosed that comprises an organic resin that is thermoset by acid catalysis and a photoactive, etch-resistant ionic modifier formed of an anion and a cation. The modifier is present in the organic resin in an amount effective to produce substantial photoreactivity and etch resistance in a mixture of the resin and the modifier. The cation will, upon exposure to electromagnetic radiation, produce a species that is weakly basic or neutral, and the anion will, upon exposure to electromagnetic radiation, produce an acid precursor that will form a relatively strong acid in an acid-base solvent system. As a result, the relatively strong acid will catalyze the organic resin upon exposure to an appropriate frequency of electromagnetic radiation and the relatively weak base or neutral species formed by the cation will not substantially neutralize the acid or interfere with the acid catalyzed reaction of the organic resin.

    摘要翻译: 公开了一种光致抗蚀剂组合物,其包含通过酸催化热固性的有机树脂和由阴离子和阳离子形成的光敏抗蚀刻离子改性剂。 改性剂以有效产生在树脂和改性剂的混合物中的显着的光反应性和耐蚀刻性的量存在于有机树脂中。 阳离子在暴露于电磁辐射时会产生弱碱性或中性的物质,阴离子在暴露于电磁辐射时会产生在酸碱溶剂体系中形成较强酸的酸前体。 结果,相对较强的酸将在暴露于适当频率的电磁辐射时催化有机树脂,并且由阳离子形成的相对弱的碱或中性物质基本上不会中和酸或干扰有机酸的酸催化反应 树脂。

    Photoresists resistant to oxygen plasmas
    7.
    发明授权
    Photoresists resistant to oxygen plasmas 失效
    耐氧等离子体的光刻胶

    公开(公告)号:US5114827A

    公开(公告)日:1992-05-19

    申请号:US585708

    申请日:1990-09-20

    IPC分类号: G03F7/004 G03F7/022 G03F7/36

    CPC分类号: G03F7/004 G03F7/0226 G03F7/36

    摘要: The invention is a modified organic photoresist which is resistant to etching in oxygen-containing plasmas and therefore particularly useful for masking and etching organic polymer materials in VLSI and advanced packaging applications. The invention comprises adding a phosphorous-containing compound to a conventional photoresist. The phosphorous-containing compound is of a type and in an amount effective to substantially prevent etching of the modified photoresist in an oxygen-containing plasma without substantially adversely affecting the photosensitivity of the photoresist or the elasticity or the adhesion of the etch resistant film formed during oxygen-containing plasma exposure to an underlying material to be patterned and etched.

    摘要翻译: 本发明是一种改进的有机光致抗蚀剂,其耐氧蚀等离子体中的蚀刻性能,因此特别适用于在VLSI和高级封装应用中掩蔽和蚀刻有机聚合物材料。 本发明包括向常规光致抗蚀剂中加入含磷化合物。 含磷化合物的类型和数量有效地基本上防止在含氧等离子体中蚀刻改性光致抗蚀剂而基本上不利地影响光致抗蚀剂的光敏性或弹性或在其中形成的耐蚀刻膜的粘附性 含氧等离子体暴露于待图案化和蚀刻的下层材料。

    Chemically cured low temperature polyimides
    8.
    发明授权
    Chemically cured low temperature polyimides 失效
    化学固化低温聚合物

    公开(公告)号:US5248760A

    公开(公告)日:1993-09-28

    申请号:US646362

    申请日:1991-01-25

    IPC分类号: C08G73/10

    CPC分类号: C08G73/1028

    摘要: The invention comprises curing polyamic acid solutions into polyimide solutions by adding a hydrophilic reagent to a polyamic acid solution. The hydrophilic reagent is selected to have little or no reactivity with amines or carboxylic acids, and is of the type that will react with water to form by-products that shift the equilibrium between polyamic acid as a reactant and polyimide and water as products toward the production of polyimide.

    摘要翻译: 本发明包括通过向聚酰胺酸溶液中加入亲水性试剂将聚酰胺酸溶液固化成聚酰亚胺溶液。 选择亲水试剂与胺或羧酸几乎没有或没有反应性,并且是与水反应以形成副产物的类型,其将作为反应物的聚酰胺酸和聚酰亚胺和水之间的平衡作为产物转移到 生产聚酰亚胺。

    Portable heart monitor performing multiple functions
    9.
    发明授权
    Portable heart monitor performing multiple functions 失效
    便携式心脏监护仪执行多种功能

    公开(公告)号:US4974601A

    公开(公告)日:1990-12-04

    申请号:US244964

    申请日:1988-09-05

    CPC分类号: A61B5/04325 A61B5/02438

    摘要: A method and apparatus for monitoring multiple aspects of a patient's cardiac condition which is portable microprocessor based, and can be programmed to select (for storage in random access memory (RAM)) anomalous heartbeat waveforms while rejecting normal waveforms. In addition, the cardiac monitor gives real time warnings of erratic heartbeat waveforms and stores these waveforms for future analysis. The cardiac monitor also detects and energizes an alarm signal if a patient's heartbeat skips a predetermined number of beats.

    摘要翻译: 一种用于监测患者心脏状态的多个方面的方法和装置,其是基于便携式微处理器,并且可被编程为在拒绝正常波形的同时选择(用于随机存取存储器(RAM)中存储)异常心跳波形。 此外,心脏监护仪可提供不稳定的心跳波形的实时警告,并存储这些波形以供将来分析。 如果患者的心跳跳过预定数量的心跳,心脏监护仪还会检测并激活警报信号。