公开(公告)号：US5434464A

公开(公告)日：1995-07-18

申请号：US247562

申请日：1994-05-23

申请人： Stephen M. Bobbio ,  Thomas D. DuBois ,  Farid M. Tranjan ,  Youssef Bousaba ,  James D. Jacobson ,  Scott H. Goodwin-Johansson ,  Kerstin McKay

发明人： Stephen M. Bobbio ,  Thomas D. DuBois ,  Farid M. Tranjan ,  Youssef Bousaba ,  James D. Jacobson ,  Scott H. Goodwin-Johansson ,  Kerstin McKay

IPC分类号： H02N1/00

CPC分类号： H02N1/008

摘要： A microelectromechanical transducer including a plurality of parallel electrically conductive strips maintained in closely spaced relation by a plurality of spacers can generate useful displacements and forces. The transducer can be strengthened by arranging the conductive strips in cells surrounded by unidirectional cell stiffening members and unidirectional displacement limiting members. The unidirectional cell stiffening members may include notches. The unidirectional displacement limiting members may include unidirectional buckling straps or flexible arches. The cells of electrically conductive strips can be organized in modular or fractal arrays.

摘要翻译： 包括由多个间隔物保持紧密间隔关系的多个平行导电条的微机电换能器可产生有用的位移和力。 可以通过将导电条布置在由单向电池加强构件和单向位移限制构件包围的电池中来加强换能器。 单向电池加强构件可以包括凹口。 单向位移限制构件可以包括单向弯曲带或柔性拱形。 导电条的细胞可以以模块化或分形阵列组织。

公开(公告)号：US06972889B2

公开(公告)日：2005-12-06

申请号：US10184345

申请日：2002-06-27

申请人： Scott H. Goodwin-Johansson ,  Brian H. Augustine ,  Lindsey N. Yadon

发明人： Scott H. Goodwin-Johansson ,  Brian H. Augustine ,  Lindsey N. Yadon

IPC分类号： G02B26/02

CPC分类号： G02B26/0841 ,  G02B26/02 ,  G02B26/0866 ,  G09G3/3433 ,  G09G2300/0456

摘要： A simplified MEMS optical display device driven by electrostatic forces and associated arrays are provided for. The optical display device includes an optically transparent substrate, an optically transparent fixed electrode disposed on the substrate and a pigmented translucent film disposed on the substrate. A moveable optical shutter is affixed to the substrate and is generally aligned with the fixed electrode and the pigmented translucent film. The moveable optical shutter comprises an electrode element and a biasing element. In addition, a fixed portion attached to the substrate and a distal portion adjacent to the fixed portion defines the optical shutter. When an electrostatic voltage differential is established between the fixed electrode and the optical shutter electrode element the distal portion of the optical shutter will move to controllably regulate the pigmentation of an optical signal.

摘要翻译： 提供了由静电力和相关阵列驱动的简化的MEMS光学显示装置。 光学显示装置包括光学透明基板，设置在基板上的光学透明固定电极和设置在基板上的着色半透明膜。 可移动的光学快门固定到基底上，并且与固定电极和着色的半透明膜大致对齐。 可移动光学快门包括电极元件和偏置元件。 此外，附接到基板的固定部分和与固定部分相邻的远侧部分限定光学快门。 当在固定电极和光学快门电极元件之间建立静电电压差时，光学快门的远端部分将移动以可控制地调节光学信号的着色。

公开(公告)号：US06590267B1

公开(公告)日：2003-07-08

申请号：US09661997

申请日：2000-09-14

申请人： Scott H. Goodwin-Johansson ,  Gary E. McGuire

发明人： Scott H. Goodwin-Johansson ,  Gary E. McGuire

IPC分类号： H01L2978

CPC分类号： F16K99/0001 ,  B81B3/0021 ,  B81B2201/054 ,  B81B2203/0127 ,  B81B2203/04 ,  F15C5/00 ,  F16K99/0007 ,  F16K99/0028 ,  F16K99/0051 ,  F16K2099/0074 ,  F16K2099/008 ,  H01H2059/0081

摘要： A MEMS (Micro Electro Mechanical System) valve device driven by electrostatic forces is provided. This valve device can provide for fast actuation, large valve force and large displacements while utilizing minimal power. The MEMS valve device includes a substrate having an aperture formed therein, a substrate electrode, a moveable membrane that overlies the aperture and has an electrode element and a biasing element. Additionally, at least one resiliently compressible dielectric layer is provided to insure electrical isolation between the substrate electrode and electrode element of the moveable membrane. In operation, a voltage differential is established between the substrate electrode and the electrode element of the moveable membrane to move the membrane relative to the aperture to thereby controllably adjust the portion of the aperture that is covered by the membrane. Additional embodiments provide for the resiliently compressible dielectric layer to be formed on either or both the substrate electrode and the moveable membrane and provide for either or both the valve seat surface and the valve seal surface. In yet another embodiment the resiliently compressible dielectric layer(s) have a textured surface; either at the valve seat, the valve seal or at both surfaces. In another embodiment of the invention a pressure-relieving aperture is defined within the substrate and is positioned to underlie the moveable membrane. Alternatively, additional embodiments of the present invention provide for MEMS valve arrays driven by electrostatic forces. The MEMS valve array comprises a substrate having a plurality of apertures defined therein. A method for making the MEMS valve device is also provided.

摘要翻译： 提供了由静电力驱动的MEMS（微机电系统）阀装置。 该阀装置可以提供快速致动，大的阀力和大的位移，同时利用最小的功率。 MEMS阀装置包括其中形成有孔的基板，基板电极，覆盖在孔上并具有电极元件和偏置元件的可移动膜。 此外，提供至少一个可弹性压缩介电层以确保基板电极和可移动​​膜的电极元件之间的电隔离。 在操作中，在基板电极和可移动​​膜的电极元件之间建立电压差以使膜相对于孔移动，从而可控地调节由膜覆盖的孔的部分。 另外的实施例提供了可弹性压缩的介电层，其形成在基板电极和可移动​​膜之一或两者上，并为阀座表面和阀密封表面中的一个或两者提供。 在另一个实施例中，弹性可压缩介电层具有纹理表面; 无论是在阀座，阀门密封件还是在两个表面。 在本发明的另一个实施例中，压力释放孔限定在衬底内并且被定位成可移动膜的下面。 或者，本发明的另外的实施例提供了由静电力驱动的MEMS阀阵列。 MEMS阀阵列包括其中限定有多个孔的基板。 还提供了制造MEMS阀装置的方法。

公开(公告)号：US5001082A

公开(公告)日：1991-03-19

申请号：US337187

申请日：1989-04-12

申请人： Scott H. Goodwin-Johansson

发明人： Scott H. Goodwin-Johansson

IPC分类号： H01L21/285 ,  H01L21/336

CPC分类号： H01L29/66575 ,  H01L21/28518 ,  H01L29/41783 ,  H01L29/665 ,  Y10S148/019 ,  Y10S148/116

摘要： A self-aligned salicide process produces small dimensioned semiconductor devices, for example metal oxide semiconductor (MOS) devices. An electrode is formed on the face of a semiconductor substrate, the electrode having a top and a sidewall and an insulating coating on the sidewall. Then a silicon layer and a refractory metal layer are formed on the face, top and sidewall, with one of the layers being continuous, and the other layer having a break on the sidewall. In a preferred embodiment the silicon layer is directionally applied, to form thick portions on the face and top and thin portion on the sidewall. The thin portion on the sidewall is removed and a metal layer is uniformly deposited. The substrate is heated to convert at least part of the silicon and metal layers to silicide. The silicide layer on the face is planar and does not consume the substrate at the face, allowing shallow source and drain regions to be formed.

摘要翻译： 自对准的自对准硅化物工艺生产小尺寸的半导体器件，例如金属氧化物半导体（MOS）器件。 电极形成在半导体衬底的表面上，电极具有顶部和侧壁以及侧壁上的绝缘涂层。 然后在表面，顶部和侧壁上形成硅层和难熔金属层，其中一层是连续的，另一层在侧壁上具有断裂。 在优选实施例中，硅层被定向地施加，以在侧壁上的表面和顶部以及薄的部分上形成厚的部分。 去除侧壁上的薄部分并均匀地沉积金属层。 将衬底加热以将至少部分硅和金属层转化为硅化物。 表面上的硅化物层是平面的，并且不消耗基板在表面，允许形成浅的源极和漏极区域。

公开(公告)号：US06731492B2

公开(公告)日：2004-05-04

申请号：US10139527

申请日：2002-05-06

申请人： Scott H. Goodwin-Johansson

发明人： Scott H. Goodwin-Johansson

IPC分类号： H02N1300

CPC分类号： H01H59/0009 ,  H01H1/06 ,  H01H1/20 ,  H01H2037/008 ,  H01H2059/0081

摘要： A MEMS (Micro Electro Mechanical System) electrostatically operated high voltage switch or relay device is provided. These devices can switch high voltages while using relatively low electrostatic operating voltages. The MEMS device comprises a substrate, a substrate electrode, and one or more substrate contacts. The MEMS device also includes a flexible composite overlying the substrate, one or more composite contacts, and at least one insulator. The switch or relay device is provided overdrive potential through protrusions on the contact surface of the switch or relay contacts. In one embodiment the substrate contacts define protrusions on the contact surface that extend toward the flexible composite contacts. In another embodiment the flexible composite contacts define protrusions on the contact surface that extend toward the substrate contacts.

摘要翻译： 提供了一种MEMS（微机电系统）静电操作的高压开关或继电器。 这些器件可以在使用相对较低的静电工作电压的同时切换高电压。 MEMS器件包括衬底，衬底电极和一个或多个衬底触点。 MEMS器件还包括覆盖衬底，一个或多个复合触点和至少一个绝缘体的柔性复合材料。 开关或继电器装置通过开关或继电器触点的接触表面上的突起提供过驱动电位。 在一个实施例中，基板触点限定了朝向柔性复合触点延伸的接触表面上的凸起。 在另一个实施例中，柔性复合触点限定在接触表面上朝向基板触点延伸的凸起。

公开(公告)号：US06617643B1

公开(公告)日：2003-09-09

申请号：US10185338

申请日：2002-06-28

申请人： Scott H. Goodwin-Johansson

发明人： Scott H. Goodwin-Johansson

IPC分类号： H01L2976

CPC分类号： H01L29/7391 ,  H01L29/88

摘要： A three terminal tunneling device that has a smaller voltage transition between off-current and on-current states and which also has less dependence on the lateral dimensions of the device. The device is a hybrid between a MOS transistor, a gated diode and a tunneling diode. The semiconductor device includes a lightly doped substrate of a first conductivity type. The lightly doped substrate will include a first heavily doped region of a first conductivity type formed in the substrate and a lightly doped layer of a first conductivity type disposed on the substrate and the first heavily doped region. The device also including a gate insulator layer disposed on the lightly doped layer and underlying a portion of the first heavily doped region and a gate electrode that is disposed on the gate insulator layer. Additionally, the device will include a second heavily doped region of a first conductivity formed in the substrate extending into the first heavily doped region of a first conductivity and a heavily doped region of a second conductivity formed in the substrate extending into the lightly doped substrate and spatially isolated from the first heavily doped region.

摘要翻译： 一种三端隧道装置，其在截止电流和通电状态之间具有较小的电压转换，并且对装置的横向尺寸的依赖性较小。 该器件是MOS晶体管，门控二极管和隧道二极管之间的混合。 半导体器件包括第一导电类型的轻掺杂衬底。 轻掺杂衬底将包括在衬底中形成的第一导电类型的第一重掺杂区域和设置在衬底和第一重掺杂区域上的第一导电类型的轻掺杂层。 该器件还包括设置在轻掺杂层上并位于第一重掺杂区域的一部分之下的栅极绝缘体层和设置在栅极绝缘体层上的栅电极。 另外，器件将包括形成在衬底中的第一重导体的第二重掺杂区域延伸到第一导电性的第一重掺杂区域和形成在衬底中的第二导电层的重掺杂区域延伸到轻掺杂衬底中， 在空间上与第一重掺杂区隔离。

公开(公告)号：US06485273B1

公开(公告)日：2002-11-26

申请号：US09654446

申请日：2000-09-01

申请人： Scott H. Goodwin-Johansson

发明人： Scott H. Goodwin-Johansson

IPC分类号： F04B45047

CPC分类号： F04D33/00

摘要： A MEMS pumping device driven by electrostatic forces comprises a substrate having at least one substrate electrode disposed thereon. Affixed to the substrate is a moveable membrane that generally overlies the at least one substrate electrode. The moveable membrane comprises at least one electrode element and a biasing element. The moveable membrane includes a fixed portion attached to the substrate and a distal portion extending from the fixed portion and being moveable with respect to the substrate electrode. A dielectric element is disposed between the at least one substrate electrode and the at least one electrode element of the moveable membrane to provide for electrical isolation. In operation, a voltage differential is established between the at least one substrate electrode and the at least one electrode element which displaces the moveable membrane relative to the substrate to thereby controllably distribute matter residing between the substrate and the distal portion of the moveable membrane. In a further embodiment the MEMS pumping devices comprise more that two moveable membranes that are configured so as to maximize flow in a desired direction. Additional embodiments include more than one electrode element disposed within the moveable membrane that are capable of individual and sequential biasing to improve overall net flow in the desired flow direction.

摘要翻译： 由静电力驱动的MEMS泵送装置包括其上设置有至少一个基板电极的基板。 粘附到基底上的是可移动的膜，其通常覆盖至少一个基底电极。 可动膜包括至少一个电极元件和偏置元件。 可移动膜包括附接到基板的固定部分和从固定部分延伸并且可相对于基板电极移动的远端部分。 电介质元件设置在至少一个基板电极和可移动​​膜的至少一个电极元件之间以提供电隔离。 在操作中，在所述至少一个衬底电极和至少一个电极元件之间建立电压差，所述至少一个电极元件使可移动膜相对于衬底移位，从而可控地分布位于可移动膜的衬底和远端部分之间的物质。 在另一实施例中，MEMS抽吸装置包括更多的两个可移动膜，其被配置为使得在期望方向上的流量最大化。 另外的实施例包括设置在可移动膜内的多于一个电极元件，其能够单独和顺序偏置以改善期望流动方向上的整体净流量。

公开(公告)号：US06396620B1

公开(公告)日：2002-05-28

申请号：US09702082

申请日：2000-10-30

申请人： Scott H. Goodwin-Johansson

发明人： Scott H. Goodwin-Johansson

IPC分类号： G02B2600

CPC分类号： B81B3/0021 ,  B81B2203/0127 ,  B81C2201/0109 ,  B81C2201/056 ,  G02B26/02 ,  G02B26/0841 ,  G02B26/085

摘要： An electromagnetic radiation shutter device driven by electrostatic forces comprises a stationary membrane capable of allowing electromagnetic radiation transmission therethrough, and a first and second flexible membrane comprising an electrode element and at least one biasing element. The first flexible membrane has a fixed portion attached to the underside of the stationary membrane and a distal portion adjacent to the fixed portion and released from the underside of the stationary membrane. The second flexible membrane has a fixed portion attached to the topside of the stationary membrane and a distal portion adjacent to the fixed portion and released from the topside of the stationary membrane. In operation, a voltage differential is established between the electrode element of the first flexible membrane and the electrode element of the second flexible membrane thereby moving the first and second flexible membranes relative to the stationary membrane. In a closed state (i.e. fully activated), the flexible membranes will be generally parallel to the stationary membrane and will be capable of deflecting electromagnetic radiation. In an open state (i.e. no voltage applied), the flexible membranes will generally be fully curled based on biasing in the flexible membranes induced during fabrication and/or imparted by material characteristics.

摘要翻译： 由静电力驱动的电磁辐射快门装置包括能够允许电磁辐射透射的固定膜，以及包括电极元件和至少一个偏压元件的第一和第二柔性膜。 第一柔性膜具有附接到固定膜的下侧的固定部分和与固定部分相邻并从固定膜的下侧释放的远侧部分。 第二柔性膜具有固定部分，固定部分固定在固定膜的顶面上，远侧部分与固定部分相邻并从固定膜顶部释放。 在操作中，在第一柔性膜的电极元件和第二柔性膜的电极元件之间建立电压差，从而使第一和第二柔性膜相对于固定膜移动。 在关闭状态（即完全激活）时，柔性膜将大致平行于固定膜并且能够偏转电磁辐射。 在打开状态（即没有施加电压）的情况下，柔性膜通常将基于在制造过程中诱导的柔性膜中的偏置和/或由材料特性赋予而完全卷曲。

公开(公告)号：US5740258A

公开(公告)日：1998-04-14

申请号：US461001

申请日：1995-06-05

申请人： Scott H. Goodwin-Johansson

发明人： Scott H. Goodwin-Johansson

IPC分类号： A61F11/14 ,  G10K11/178 ,  H03B29/00 ,  A61F11/06 ,  H04R25/00

CPC分类号： G10K11/1788 ,  A61F2011/145 ,  G10K2210/108 ,  G10K2210/1081

摘要： A noise suppressor includes an input transducer and an output transducer adapted to be located in an ear canal. A housing is provided to support the transducers in the ear canal, and the housing provides an acoustically unobstructed passage from the entrance of the ear canal to the ear drum. The input transducer generates electrical signals in response to sound pressure waves entering the ear canal, and a portion of the electrical signal is processed to generate an inverse noise signal which is applied to the output transducer. Accordingly, the output transducer produces inverse noise pressure waves in order to reduce an undesired noise portion of the sound pressure waves reaching the ear drum. The sound pressure waves also reach the ear drum without significant alteration.

摘要翻译： 噪声抑制器包括适于位于耳道中的输入换能器和输出换能器。 提供外壳以支撑耳道中的换能器，并且外壳提供从耳道的入口到耳鼓的声学畅通的通道。 输入传感器响应于进入耳道的声压波产生电信号，并且处理一部分电信号以产生施加到输出换能器的反相噪声信号。 因此，输出换能器产生反相噪声压力波，以便减少到达耳鼓的声压波的不期望的噪声部分。 声压波也到达耳鼓，没有明显的改变。