公开(公告)号：US4423376A

公开(公告)日：1983-12-27

申请号：US245818

申请日：1981-03-20

申请人： Herbert P. Byrnes ,  Richard Wahl

发明人： Herbert P. Byrnes ,  Richard Wahl

IPC分类号： G01R1/073 ,  H01L21/66 ,  G01R1/06 ,  G01R31/02

CPC分类号： G01R1/073 ,  G01R1/07314 ,  G01R1/07357 ,  H01R12/714

摘要： An electrical probe assembly with rotatable probe elements for establishing electrical contact to pad surfaces having a plurality of elongated probe elements formed of a conductive flexible material, each having a length many times its diameter, spaced upper and lower flat support elements having apertures receiving the ends of the probe elements and maintaining the probe elements in a generally parallel arrangement with at least the lower ends in a configuration corresponding to the pad configuration to be contacted, and a means to simultaneously rotate the probe elements.

摘要翻译： 一种具有可旋转探针元件的电探头组件，用于建立与焊盘表面的电接触，所述探针元件具有由导电柔性材料形成的多个细长探针元件，每个细长探针元件的长度为其直径的许多倍，间隔开的上部和下部平坦支撑元件具有容纳端部 的探针元件，并且将探针元件保持为大致平行的布置，其中至少下端具有对应于待接触的垫构造的构造，以及同时旋转探针元件的装置。

公开(公告)号：US5150040A

公开(公告)日：1992-09-22

申请号：US601490

申请日：1990-10-22

申请人： Herbert P. Byrnes ,  Richard Wahl

发明人： Herbert P. Byrnes ,  Richard Wahl

IPC分类号： H01L21/68

CPC分类号： H01L21/68

摘要： A dual mode Z/Theta stage supports and moves a work piece such as a semiconductor wafer into position for positioning during testing. The Z/Theta stage has a peripheral four point elevator drive. The elevating suspension comprises parallel, vertically oriented, rigid lift pins which bear the weight of a top-plate. The lift pins are located about the periphery of the stage to provide stability of the support. The top plate essentially floats on the lift pins so that virtually no frictional forces are translated to lift pins. The lift pins are elevated together by the force of four matched pin lift levers, crank arms. The crank arms are driven by downward force from a vertically translating air piston which is in contact with the crank arms 31. The air piston provides a gentle force moderated by pneumatic pressure which can moderate the full force of a stepping motor which drives it.

摘要翻译： 双模式Z / Theta台支持并移动诸如半导体晶片的工件，以便在测试期间进行定位。 Z / Theta舞台有一个外围四点电梯驱动。 升降悬架包括承载顶板重量的平行的垂直取向的刚性提升销。 升降销位于工作台的周围，以提供支撑件的稳定性。 顶板基本上漂浮在提升销上，使得实际上没有摩擦力被转换成提升销。 提升销通过四个匹配的提升杆，曲柄臂的力一起升高。 曲柄臂由与曲柄臂31接触的垂直平移空气活塞的向下的力驱动。空气活塞提供由气动压力调节的平缓的力，其可以调节驱动它的步进电机的全部力。

公开(公告)号：US4027935A

公开(公告)日：1977-06-07

申请号：US697812

申请日：1976-06-21

申请人： Herbert P. Byrnes ,  Richard Wahl

发明人： Herbert P. Byrnes ,  Richard Wahl

IPC分类号： G01R1/06 ,  G01R1/073 ,  G01R31/00 ,  G01R31/26 ,  H01R12/71 ,  H01R13/02 ,  H01R13/22 ,  H01R13/24 ,  H01R27/00 ,  H01R31/00 ,  H01R9/12

CPC分类号： G01R1/07357 ,  H01R12/714

摘要： A contact for a contactor assembly is provided which is short enough for use in high frequency applications and which has a pivotable end and a pre-curved center section which deflects in combination with the pivoting of the pivotable end to provide minimal forces on contact pads when a force is applied between the pad and the contactor assembly. The pre-curved center section has a large radius and is arranged such that the pivotable end and the contacting end of the contact are offset from one another within the plane including the radius of the center section so that the deflection direction is predetermined and deflection forces are reduced.

摘要翻译： 提供用于接触器组件的接触件足够短以用于高频应用中，并且具有可枢转的端部和预弯曲的中心部分，该中心部分与可枢转端部的枢转相结合地偏转以在接触焊盘上提供最小的力 在垫和接触器组件之间施加力。 预弯曲的中心部分具有大的半径并且布置成使得接触件的可枢转端和接触端在包括中心部分的半径的平面内彼此偏移，使得偏转方向是预定的，并且偏转力 减少了

公开(公告)号：US5207585A

公开(公告)日：1993-05-04

申请号：US606413

申请日：1990-10-31

申请人： Herbert P. Byrnes ,  Jean-Marc Halbout ,  Michael R. Scheuermann ,  Eugene Shapiro

发明人： Herbert P. Byrnes ,  Jean-Marc Halbout ,  Michael R. Scheuermann ,  Eugene Shapiro

IPC分类号： G01R31/26 ,  G01R1/067 ,  G01R1/073 ,  H01L21/312 ,  H01L21/60 ,  H01L21/66 ,  H01R12/62 ,  H01R12/71 ,  H05K3/36

CPC分类号： H01R12/62 ,  G01R1/06711 ,  G01R1/0735 ,  H01R12/714 ,  H05K3/365 ,  H01L2924/0002 ,  H01R2201/20

摘要： A thin interface pellicle probe for making temporary or permanent interconnections to pads or bumps on a semiconductor device wherein the pads or bumps may be arranged in high density patterns is described incorporating an electrode for each pad or bump wherein the electrode has a raised portion thereon for penetrating the surface of the pad or bump to create sidewalls to provide a clean contact surface and the electrode has a recessed surface to limit the penetration of the raised portion. The electrodes may be affixed to a thin flexible membrane to permit each contact to have independent movement over a limited distance and of a limited rotation. The invention overcomes the problem of making easily breakable electrical interconnections to high density arrays of pads or bumps on integrated circuit structures for testing, burn-in or package interconnect and testing applications.

摘要翻译： 描述了用于对半导体器件上的焊盘或凸起进行临时或永久互连的薄接口防护薄膜探针，其中焊盘或凸块可以以高密度图案布置，其中包括用于每个焊盘或凸块的电极，其中电极在其上具有凸起部分， 穿过垫或凸块的表面以产生侧壁以提供清洁的接触表面，并且电极具有凹陷表面以限制凸起部分的穿透。 电极可以固定到薄的柔性膜上，以允许每个接触件在有限的距离和有限的旋转上具有独立的运动。 本发明克服了在用于测试，老化或封装互连和测试应用的集成电路结构上制造易于断开的电互连到高密度阵列的焊盘或凸块的问题。