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公开(公告)号：US08313806B2
公开(公告)日：2012-11-20
申请号：US12216060
申请日：2008-06-27
申请人： Hiroyasu Matsuura
发明人： Hiroyasu Matsuura
CPC分类号： C23C14/042 , C23C14/541 , C23C14/56 , H01L51/001 , H01L51/56
摘要： Provided is a method for moving, in a vacuum chamber carrying therein a fixedly-provided evaporation source, a substrate toward the evaporation source together with a mask closely attached to the substrate surface, and onto the surface substrate, evaporating a material vaporized in the evaporation source through an aperture formed to the mask. In this method of the invention, means for moving the substrate toward the evaporation source is provided with cooling means not to come in contact with but to be in proximity to a surface of the mask on the evaporation source side, and a cooling plate formed with an aperture proximal to the evaporation source is disposed. With such a configuration, the steam of the material coming from the evaporation source is directed to the mask and the substrate through the aperture of the cooling plate. As such, the material film evaporated on the substrate surface shows a satisfactory distribution of film thickness, and any possible misalignment from desired positions of evaporation can be accordingly suppressed.
摘要翻译： 提供了一种在真空室中携带固定设置的蒸发源的方法，将基板与紧贴在基板表面上的掩模一起朝向蒸发源移动，并且在表面基板上蒸发蒸发的材料 源通过形成到掩模的孔。 在本发明的这种方法中，用于将基板朝向蒸发源移动的装置设置有冷却装置，其不与蒸发源侧的掩模的表面接触而接近，并且形成有冷却板 设置靠近蒸发源的孔。 通过这样的结构，来自蒸发源的材料的蒸汽通过冷却板的孔被引向掩模和基板。 因此，在基板表面上蒸发的材料膜显示出令人满意的膜厚度分布，并且可以相应地抑制与期望的蒸发位置的任何可能的未对准。
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公开(公告)号：US20070152579A1
公开(公告)日：2007-07-05
申请号：US11717075
申请日：2007-03-13
CPC分类号： H05B33/26 , H01L27/3244 , H01L51/5221 , H01L51/5246 , H01L51/5259
摘要： A display device includes a first substrate having a display area with a plurality of pixels on a main surface and a first seal area formed at a periphery of the display area, and a second substrate disposed to cover the main surface of the first substrate, and having a second seal area at a part of the second substrate opposite to the first seal area. At least one driving circuit which drives the plurality of pixels is arranged outside of the display area on the first substrate. The second substrate has a recessed portion formed at a part of the main surface of the second substrate within the second seal area, and a moisture absorbent layer having a light shielding property adheres to the recessed portion and is arranged to cover the display area and the at least one driving circuit.
摘要翻译： 显示装置包括：第一基板，其具有在主表面上具有多个像素的显示区域和形成在显示区域周边的第一密封区域;以及第二基板，设置成覆盖第一基板的主表面;以及 在与第一密封区域相对的第二基板的一部分处具有第二密封区域。 驱动多个像素的至少一个驱动电路被布置在第一基板上的显示区域的外部。 第二基板具有形成在第二密封区域内的第二基板的主表面的一部分的凹部，并且具有遮光性的吸湿层粘附到凹部，并且布置成覆盖显示区域和 至少一个驱动电路。
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3.发明申请Method of manufacturing the organic electroluminescent display and organic electroluminescent display manufactured by the method 有权通过该方法制造有机电致发光显示器和有机电致发光显示器的方法公开(公告)号：US20070072337A1
公开(公告)日：2007-03-29
申请号：US11521308
申请日：2006-09-15
IPC分类号： H01L51/40
CPC分类号： H01L51/0011 , C23C14/042 , C23C14/12 , H01L51/56
摘要： The present invention provides an organic EL display panel manufacturing method which is capable of forming a desired organic film or the like with high accuracy without imparting damages to a substrate and an organic film and an organic EL display panel which is manufactured by the method. An opening portion which corresponds to a panel pattern region of a display panel is formed in a vapor deposition mask. The opening portion has a bottom surface in the inside of a recessed surface which is retracted from a surface on which the vapor deposition mask is brought into contact with the substrate. The opening portion of the vapor deposition mask is spaced apart from the substrate with a predetermined gap space and evaporated particles from an evaporating source are vapor-deposited to the substrate through the opening portion.
摘要翻译： 本发明提供一种有机EL显示面板的制造方法，其能够高精度地形成期望的有机膜等，而不会对基板和有机膜造成损害，并且通过该方法制造的有机EL显示面板。 在气相沉积掩模中形成对应于显示面板的面板图案区域的开口部分。 开口部具有在从蒸镀掩模与基板接触的表面缩回的凹面的内侧的底面。 气相沉积掩模的开口部分具有预定的间隙空间与衬底间隔开，蒸发源的蒸发颗粒通过开口部分气相沉积到衬底上。
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公开(公告)号：US06867841B2
公开(公告)日：2005-03-15
申请号：US10331072
申请日：2002-12-27
申请人： Nobuaki Nakasu , Hiroyasu Matsuura , Toshiyuki Koshita , Mitsuaki Shiba , Hitoshi Azuma , Yoshiteru Tomizuka , Tsuneo Okada
发明人： Nobuaki Nakasu , Hiroyasu Matsuura , Toshiyuki Koshita , Mitsuaki Shiba , Hitoshi Azuma , Yoshiteru Tomizuka , Tsuneo Okada
IPC分类号： G02F1/1341 , G02F1/13
CPC分类号： G02F1/1341
摘要： The invention provides a high quality liquid crystal panel with low non-uniformity by enveloping a pair of glass substrates sandwiching an uncured thermosetting seal member with heat-resistant metal sheets, bringing the insides of the sheets into a substantially hermetically closed state to decompress the space around the substrates, pressing the glass substrates and the seal member by a pressure difference from the atmospheric pressure in a predetermined space created by the enveloping sheets, heating the sheets, the glass substrates and the seal member with a heater disposed at a position remote from the sheet and curing the seal member, and maintaining the gap between the pair of glass substrates to prevent non-uniformity of the gap between the pair of glass substrates constituting the liquid crystal panel.
摘要翻译： 本发明提供了一种通过包裹一对玻璃基板并具有低不均匀性的高品质液晶面板，该玻璃基板将具有耐热金属板的未固化的热固性密封件夹在一起，使得片材的内部基本上为气密的状态以减压空间 在基板周围，在由包封片产生的预定空间内与大气压力的压力按压玻璃基板和密封部件，用设置在远离的基板的加热器加热片材，玻璃基板和密封部件。 并且固化密封构件，并且保持一对玻璃基板之间的间隙，以防止构成液晶面板的一对玻璃基板之间的间隙不均匀。
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公开(公告)号：US08274642B2
公开(公告)日：2012-09-25
申请号：US12390687
申请日：2009-02-23
CPC分类号： G03F7/70791 , G03F7/70433
摘要： A maskless exposure method of drawing a circuit pattern includes: moving a substrate with respect to a projection optical system; scanning, by the projection optical system, the substrate in a first direction; shifting a scanning region in a second direction; scanning the substrate in the first direction so that an overlapping part is formed. A plurality of marks different from the circuit pattern are exposed in a vicinity of the overlapping part. The plurality of marks are a set of marks at least including two marks disposed on one side of the overlapping part and two marks disposed on another side of the overlapping part. Deviations between the pair of the scanning regions, an inclination of exposing light, and a yawing angle of a stage are analyzed by measuring deviations of distances among the plurality of marks. Calibration data are obtained from a result of the analyzing.
摘要翻译： 绘制电路图案的无掩模曝光方法包括：相对于投影光学系统移动基板; 通过投影光学系统沿第一方向扫描基板; 沿第二方向移动扫描区域; 在第一方向扫描基板，从而形成重叠部分。 与电路图案不同的多个标记在重叠部分附近露出。 多个标记是至少包括设置在重叠部分的一侧上的两个标记和设置在重叠部分的另一侧上的两个标记的一组标记。 通过测量多个标记之间的距离的偏差来分析一对扫描区域之间的偏差，曝光的倾斜度和舞台的偏航角度。 校准数据是从分析结果中获得的。
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6.发明授权Method of manufacturing the organic electroluminescent display and organic electroluminescent display manufactured by the method 有权通过该方法制造有机电致发光显示器和有机电致发光显示器的方法公开(公告)号：US07915073B2
公开(公告)日：2011-03-29
申请号：US11521308
申请日：2006-09-15
IPC分类号： H01L51/40
CPC分类号： H01L51/0011 , C23C14/042 , C23C14/12 , H01L51/56
摘要： The present invention provides an organic EL display panel manufacturing method which is capable of forming a desired organic film or the like with high accuracy without imparting damages to a substrate and an organic film and an organic EL display panel which is manufactured by the method. An opening portion which corresponds to a panel pattern region of a display panel is formed in a vapor deposition mask. The opening portion has a bottom surface in the inside of a recessed surface which is retracted from a surface on which the vapor deposition mask is brought into contact with the substrate. The opening portion of the vapor deposition mask is spaced apart from the substrate with a predetermined gap space and evaporated particles from an evaporating source are vapor-deposited to the substrate through the opening portion.
摘要翻译： 本发明提供一种有机EL显示面板的制造方法，其能够高精度地形成期望的有机膜等，而不会对基板和有机膜造成损害，并且通过该方法制造的有机EL显示面板。 在气相沉积掩模中形成对应于显示面板的面板图案区域的开口部分。 开口部具有在从蒸镀掩模与基板接触的表面缩回的凹面的内侧的底面。 气相沉积掩模的开口部分具有预定的间隙空间与衬底间隔开，蒸发源的蒸发颗粒通过开口部分气相沉积到衬底上。
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7.发明申请公开(公告)号：US20080241486A1
公开(公告)日：2008-10-02
申请号：US12055501
申请日：2008-03-26
CPC分类号： G03F9/7003 , G03F7/70275 , G03F7/70383 , G03F7/70475 , G03F7/70791 , Y10T428/24802
摘要： Direct exposure equipment having a multiple heads generally conducts overlapping exposure at an exposure area boundary between the heads. In such a case, if the heads are misaligned, a flaw will occur in a pattern shape at an area that is subject to overlapping exposure. To overcome this, TEGs are disposed for evaluating line width and resistance at an overlapping exposure area between the exposure heads and at a returning exposure area formed when direct exposure equipment having a multi-head configuration exposes a substrate. By examining measured values from these TEGs, a misalignment in the multiple exposure heads is detected.
摘要翻译： 具有多个头部的直接曝光设备通常在头部之间的曝光区域边界处进行重叠曝光。 在这种情况下，如果头部不对准，则在受到重叠曝光的区域上的图案形状的缺陷将发生。 为了克服这个原因，TEG被设置用于评估曝光头之间的重叠曝光区域和在具有多头构造的直接曝光设备暴露基板时形成的返回曝光区域的线宽和电阻。 通过检查这些TEG的测量值，检测多个曝光头中的未对准。
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8.发明授权Image display apparatus with ultraviolet ray shield resin film and process for its production 有权具有紫外线屏蔽树脂薄膜的图像显示装置及其制造方法公开(公告)号：US07045944B2
公开(公告)日：2006-05-16
申请号：US10624482
申请日：2003-07-23
IPC分类号： H01J61/35
CPC分类号： H05B33/22 , H01J1/70 , H01L51/5246 , H01L51/525 , H01L51/5259 , H05B33/04
摘要： Disclosed is an image display apparatus having a construction such that ultraviolet rays irradiated from a second substrate side are prevented from propagating through a first substrate to reach its display area by providing a picture-frame resin film for shielding ultraviolet rays on that area of the first substrate that is to be sealed to the second substrate with a sealant. Thereby, when the sealant for sealing the substrates is cured by irradiation of ultraviolet rays, photo deterioration of organic materials constituting emitting layered products and semiconductor layers constituting active elements both of which are formed on the display area may be prevented, and a high-reliability and high-performance image display apparatus may be realized.
摘要翻译： 公开了一种图像显示装置，其结构是防止从第二基板侧照射的紫外线通过提供用于屏蔽紫外线的图像框树脂膜在第一基板的该区域上传播通过第一基板到达其显示区域 用密封剂密封到第二基板的基板。 因此，当通过紫外线的照射固化用于密封基板的密封剂时，可以防止形成在显示区域上的构成发光层叠体的有机材料和构成有源元件的半导体层的光劣化，并且可靠性高 并且可以实现高性能图像显示装置。
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公开(公告)号：US06882402B2
公开(公告)日：2005-04-19
申请号：US10001087
申请日：2001-10-31
IPC分类号： G02F1/13 , G02F1/1339
CPC分类号： G02F1/1339
摘要： Glass substrates interposed by unhardened thermosetting sealing material is surrounded by two sheets. The space between the sheets is placed in a roughly sealed state and decompressed to produce at least a partial vacuum between the sheets. The sheets serve to press the glass substrates against the sealing material by the pressure difference relative to the atmospheric pressure. One or more heaters spaced apart from the sheets heat the glass substrates and the sealing material, setting the sealing material.
摘要翻译： 由未硬化的热固性密封材料插入的玻璃基板被两片包围。 片材之间的空间被放置在大致密封的状态并减压，以在片材之间产生至少一部分真空。 片材用于通过相对于大气压力的压差将玻璃基板压靠在密封材料上。 与片材间隔开的一个或多个加热器加热玻璃基板和密封材料，设置密封材料。
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公开(公告)号：US20100277450A1
公开(公告)日：2010-11-04
申请号：US12836167
申请日：2010-07-14
IPC分类号： G09G5/00
CPC分类号： H05B33/26 , H01L27/3244 , H01L51/5221 , H01L51/5246 , H01L51/5259
摘要： A display device includes a first substrate having a display area with a plurality of pixels on a main surface and a first seal area formed at a periphery of the display area, and a second substrate disposed to cover the main surface of the first substrate, and having a second seal area at a part of the second substrate opposite to the first seal area. At least one driving circuit is arranged outside of the display area on the first substrate. The second substrate has a recessed portion formed at a part of the main surface of the second substrate within the second seal area, and a film coats the recessed portion and/or an outside of the second substrate. A moisture absorbent layer is arranged in the recessed portion so as to be adhered to the recessed portion or the film when the film coats the recessed portion.
摘要翻译： 显示装置包括：第一基板，其具有在主表面上具有多个像素的显示区域和形成在显示区域周边的第一密封区域;以及第二基板，设置成覆盖第一基板的主表面;以及 在所述第二基板的与所述第一密封区域相对的一部分处具有第二密封区域。 至少一个驱动电路布置在第一基板上的显示区域的外部。 第二基板具有形成在第二密封区域内的第二基板的主表面的一部分处的凹部，并且膜涂覆第二基板的凹部和/或外部。 当该薄膜包覆凹陷部分时，该凹陷部分设置一吸湿层以便粘附到该凹陷部分或该薄膜上。
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