公开(公告)号：US20080241486A1

公开(公告)日：2008-10-02

申请号：US12055501

申请日：2008-03-26

申请人： Seiji Ishikawa ,  Hiroyasu Matsuura ,  Yuichi Hamamura ,  Tadamichi Wachi

发明人： Seiji Ishikawa ,  Hiroyasu Matsuura ,  Yuichi Hamamura ,  Tadamichi Wachi

IPC分类号： G03F7/20 ,  B32B5/00

CPC分类号： G03F9/7003 ,  G03F7/70275 ,  G03F7/70383 ,  G03F7/70475 ,  G03F7/70791 ,  Y10T428/24802

摘要： Direct exposure equipment having a multiple heads generally conducts overlapping exposure at an exposure area boundary between the heads. In such a case, if the heads are misaligned, a flaw will occur in a pattern shape at an area that is subject to overlapping exposure. To overcome this, TEGs are disposed for evaluating line width and resistance at an overlapping exposure area between the exposure heads and at a returning exposure area formed when direct exposure equipment having a multi-head configuration exposes a substrate. By examining measured values from these TEGs, a misalignment in the multiple exposure heads is detected.

摘要翻译： 具有多个头部的直接曝光设备通常在头部之间的曝光区域边界处进行重叠曝光。 在这种情况下，如果头部不对准，则在受到重叠曝光的区域上的图案形状的缺陷将发生。 为了克服这个原因，TEG被设置用于评估曝光头之间的重叠曝光区域和在具有多头构造的直接曝光设备暴露基板时形成的返回曝光区域的线宽和电阻。 通过检查这些TEG的测量值，检测多个曝光头中的未对准。

公开(公告)号：US08274642B2

公开(公告)日：2012-09-25

申请号：US12390687

申请日：2009-02-23

申请人： Hiroyasu Matsuura ,  Seiji Ishikawa ,  Tadamichi Wachi ,  Toshimasa Ishigaki

发明人： Hiroyasu Matsuura ,  Seiji Ishikawa ,  Tadamichi Wachi ,  Toshimasa Ishigaki

IPC分类号： G03B27/32 ,  G03B27/44 ,  G03B27/42

CPC分类号： G03F7/70791 ,  G03F7/70433

摘要： A maskless exposure method of drawing a circuit pattern includes: moving a substrate with respect to a projection optical system; scanning, by the projection optical system, the substrate in a first direction; shifting a scanning region in a second direction; scanning the substrate in the first direction so that an overlapping part is formed. A plurality of marks different from the circuit pattern are exposed in a vicinity of the overlapping part. The plurality of marks are a set of marks at least including two marks disposed on one side of the overlapping part and two marks disposed on another side of the overlapping part. Deviations between the pair of the scanning regions, an inclination of exposing light, and a yawing angle of a stage are analyzed by measuring deviations of distances among the plurality of marks. Calibration data are obtained from a result of the analyzing.

摘要翻译： 绘制电路图案的无掩模曝光方法包括：相对于投影光学系统移动基板; 通过投影光学系统沿第一方向扫描基板; 沿第二方向移动扫描区域; 在第一方向扫描基板，从而形成重叠部分。 与电路图案不同的多个标记在重叠部分附近露出。 多个标记是至少包括设置在重叠部分的一侧上的两个标记和设置在重叠部分的另一侧上的两个标记的一组标记。 通过测量多个标记之间的距离的偏差来分析一对扫描区域之间的偏差，曝光的倾斜度和舞台的偏航角度。 校准数据是从分析结果中获得的。

公开(公告)号：US20090262319A1

公开(公告)日：2009-10-22

申请号：US12390687

申请日：2009-02-23

申请人： Hiroyasu Matsuura ,  Seiji Ishikawa ,  Tadamichi Wachi ,  Toshimasa Ishigaki

发明人： Hiroyasu Matsuura ,  Seiji Ishikawa ,  Tadamichi Wachi ,  Toshimasa Ishigaki

IPC分类号： G03B27/42

CPC分类号： G03F7/70791 ,  G03F7/70433

摘要： A maskless exposure method of drawing a circuit pattern includes: moving a substrate with respect to a projection optical system; scanning, by the projection optical system, the substrate in a first direction; shifting a scanning region in a second direction; scanning the substrate in the first direction so that an overlapping part is formed. A plurality of marks different from the circuit pattern are exposed in a vicinity of the overlapping part. The plurality of marks are a set of marks at least including two marks disposed on one side of the overlapping part and two marks disposed on another side of the overlapping part. Deviations between the pair of the scanning regions, an inclination of exposing light, and a yawing angle of a stage are analyzed by measuring deviations of distances among the plurality of marks. Calibration data are obtained from a result of the analyzing.

摘要翻译： 绘制电路图案的无掩模曝光方法包括：相对于投影光学系统移动基板; 通过投影光学系统沿第一方向扫描基板; 沿第二方向移动扫描区域; 在第一方向扫描基板，从而形成重叠部分。 与电路图案不同的多个标记在重叠部分附近露出。 多个标记是至少包括设置在重叠部分的一侧上的两个标记和设置在重叠部分的另一侧上的两个标记的一组标记。 通过测量多个标记之间的距离的偏差来分析一对扫描区域之间的偏差，曝光的倾斜度和舞台的偏航角度。 校准数据是从分析结果中获得的。

公开(公告)号：US08313806B2

公开(公告)日：2012-11-20

申请号：US12216060

申请日：2008-06-27

申请人： Hiroyasu Matsuura

发明人： Hiroyasu Matsuura

IPC分类号： C23C16/00 ,  B05D5/00 ,  B05D1/32

CPC分类号： C23C14/042 ,  C23C14/541 ,  C23C14/56 ,  H01L51/001 ,  H01L51/56

摘要： Provided is a method for moving, in a vacuum chamber carrying therein a fixedly-provided evaporation source, a substrate toward the evaporation source together with a mask closely attached to the substrate surface, and onto the surface substrate, evaporating a material vaporized in the evaporation source through an aperture formed to the mask. In this method of the invention, means for moving the substrate toward the evaporation source is provided with cooling means not to come in contact with but to be in proximity to a surface of the mask on the evaporation source side, and a cooling plate formed with an aperture proximal to the evaporation source is disposed. With such a configuration, the steam of the material coming from the evaporation source is directed to the mask and the substrate through the aperture of the cooling plate. As such, the material film evaporated on the substrate surface shows a satisfactory distribution of film thickness, and any possible misalignment from desired positions of evaporation can be accordingly suppressed.

摘要翻译： 提供了一种在真空室中携带固定设置的蒸发源的方法，将基板与紧贴在基板表面上的掩模一起朝向蒸发源移动，并且在表面基板上蒸发蒸发的材料 源通过形成到掩模的孔。 在本发明的这种方法中，用于将基板朝向蒸发源移动的装置设置有冷却装置，其不与蒸发源侧的掩模的表面接触而接近，并且形成有冷却板 设置靠近蒸发源的孔。 通过这样的结构，来自蒸发源的材料的蒸汽通过冷却板的孔被引向掩模和基板。 因此，在基板表面上蒸发的材料膜显示出令人满意的膜厚度分布，并且可以相应地抑制与期望的蒸发位置的任何可能的未对准。

公开(公告)号：US20070152579A1

公开(公告)日：2007-07-05

申请号：US11717075

申请日：2007-03-13

申请人： Issei Takemoto ,  Eiji Matsuzaki ,  Yuji Mori ,  Nobuyuki Ushifusa ,  Hiroyasu Matsuura

发明人： Issei Takemoto ,  Eiji Matsuzaki ,  Yuji Mori ,  Nobuyuki Ushifusa ,  Hiroyasu Matsuura

IPC分类号： H01J1/62 ,  H01J63/04

CPC分类号： H05B33/26 ,  H01L27/3244 ,  H01L51/5221 ,  H01L51/5246 ,  H01L51/5259

摘要： A display device includes a first substrate having a display area with a plurality of pixels on a main surface and a first seal area formed at a periphery of the display area, and a second substrate disposed to cover the main surface of the first substrate, and having a second seal area at a part of the second substrate opposite to the first seal area. At least one driving circuit which drives the plurality of pixels is arranged outside of the display area on the first substrate. The second substrate has a recessed portion formed at a part of the main surface of the second substrate within the second seal area, and a moisture absorbent layer having a light shielding property adheres to the recessed portion and is arranged to cover the display area and the at least one driving circuit.

摘要翻译： 显示装置包括：第一基板，其具有在主表面上具有多个像素的显示区域和形成在显示区域周边的第一密封区域;以及第二基板，设置成覆盖第一基板的主表面;以及 在与第一密封区域相对的第二基板的一部分处具有第二密封区域。 驱动多个像素的至少一个驱动电路被布置在第一基板上的显示区域的外部。 第二基板具有形成在第二密封区域内的第二基板的主表面的一部分的凹部，并且具有遮光性的吸湿层粘附到凹部，并且布置成覆盖显示区域和 至少一个驱动电路。

公开(公告)号：US20070072337A1

公开(公告)日：2007-03-29

申请号：US11521308

申请日：2006-09-15

申请人： Eiji Matsuzaki ,  Keiji Takanosu ,  Hiroyasu Matsuura

发明人： Eiji Matsuzaki ,  Keiji Takanosu ,  Hiroyasu Matsuura

IPC分类号： H01L51/40

CPC分类号： H01L51/0011 ,  C23C14/042 ,  C23C14/12 ,  H01L51/56

摘要： The present invention provides an organic EL display panel manufacturing method which is capable of forming a desired organic film or the like with high accuracy without imparting damages to a substrate and an organic film and an organic EL display panel which is manufactured by the method. An opening portion which corresponds to a panel pattern region of a display panel is formed in a vapor deposition mask. The opening portion has a bottom surface in the inside of a recessed surface which is retracted from a surface on which the vapor deposition mask is brought into contact with the substrate. The opening portion of the vapor deposition mask is spaced apart from the substrate with a predetermined gap space and evaporated particles from an evaporating source are vapor-deposited to the substrate through the opening portion.

摘要翻译： 本发明提供一种有机EL显示面板的制造方法，其能够高精度地形成期望的有机膜等，而不会对基板和有机膜造成损害，并且通过该方法制造的有机EL显示面板。 在气相沉积掩模中形成对应于显示面板的面板图案区域的开口部分。 开口部具有在从蒸镀掩模与基板接触的表面缩回的凹面的内侧的底面。 气相沉积掩模的开口部分具有预定的间隙空间与衬底间隔开，蒸发源的蒸发颗粒通过开口部分气相沉积到衬底上。

公开(公告)号：US06867841B2

公开(公告)日：2005-03-15

申请号：US10331072

申请日：2002-12-27

申请人： Nobuaki Nakasu ,  Hiroyasu Matsuura ,  Toshiyuki Koshita ,  Mitsuaki Shiba ,  Hitoshi Azuma ,  Yoshiteru Tomizuka ,  Tsuneo Okada

发明人： Nobuaki Nakasu ,  Hiroyasu Matsuura ,  Toshiyuki Koshita ,  Mitsuaki Shiba ,  Hitoshi Azuma ,  Yoshiteru Tomizuka ,  Tsuneo Okada

IPC分类号： G02F1/1341 ,  G02F1/13

CPC分类号： G02F1/1341

摘要： The invention provides a high quality liquid crystal panel with low non-uniformity by enveloping a pair of glass substrates sandwiching an uncured thermosetting seal member with heat-resistant metal sheets, bringing the insides of the sheets into a substantially hermetically closed state to decompress the space around the substrates, pressing the glass substrates and the seal member by a pressure difference from the atmospheric pressure in a predetermined space created by the enveloping sheets, heating the sheets, the glass substrates and the seal member with a heater disposed at a position remote from the sheet and curing the seal member, and maintaining the gap between the pair of glass substrates to prevent non-uniformity of the gap between the pair of glass substrates constituting the liquid crystal panel.

摘要翻译： 本发明提供了一种通过包裹一对玻璃基板并具有低不均匀性的高品质液晶面板，该玻璃基板将具有耐热金属板的未固化的热固性密封件夹在一起，使得片材的内部基本上为气密的状态以减压空间 在基板周围，在由包封片产生的预定空间内与大气压力的压力按压玻璃基板和密封部件，用设置在远离的基板的加热器加热片材，玻璃基板和密封部件。 并且固化密封构件，并且保持一对玻璃基板之间的间隙，以防止构成液晶面板的一对玻璃基板之间的间隙不均匀。

公开(公告)号：US20080074588A1

公开(公告)日：2008-03-27

申请号：US11845806

申请日：2007-08-28

申请人： Shinji Sekiguchi ,  Keiji Takanosu ,  Yasushi Sano ,  Koji Hara ,  Hiroyasu Matsuura

发明人： Shinji Sekiguchi ,  Keiji Takanosu ,  Yasushi Sano ,  Koji Hara ,  Hiroyasu Matsuura

IPC分类号： G02F1/1335 ,  H01L21/02

CPC分类号： G02F1/133555 ,  G02F1/13363 ,  G02F2001/133565 ,  G02F2001/133633 ,  G02F2413/09

摘要： The present invention relates to a method of manufacturing a transflective liquid crystal display device including a color filter substrate having a plurality of pixels, each including a reflective display part and a transmissive display part, and retardation plates each built in areas on a principal surface of the color filter substrate opposed to a liquid crystal layer, which correspond to the reflective display parts. The manufacturing method is characterized by including in the following order: a first step of applying a photosetting resin composition on the principal surface of the color filter; a second step of partially curing areas of a photosetting resin film, which correspond to the reflective display parts, respectively, by light exposure through a mask; a third step of removing uncured portions of the photosetting resin film remaining in the second step by development; a fourth step of selectively forming unevenness in areas of a principal surface of the cured photosetting resin film, which correspond to the reflective display parts; and a fifth step of applying a material of the retardation plate onto the photosetting resin film having the unevenness, to form the retardation plates in the respective areas corresponding to the reflective display parts, by anchoring energy of a part having the unevenness, for the material of the retardation plate.

摘要翻译： 本发明涉及一种半透射型液晶显示装置的制造方法，其包括具有多个像素的滤色器基板，每个像素包括反射显示部分和透射显示部分，以及相位差板，其各自内置在 与液晶层相对的与反射显示部相对应的滤色器基板。 该制造方法的特征在于包括以下顺序：在滤色器的主表面上施加光固化树脂组合物的第一步骤; 通过通过掩模的曝光分别对应于反射显示部分部分地固化光固化树脂膜的区域的第二步骤; 第三步，通过显影除去残留在第二步中的光固化树脂膜的未固化部分; 在与所述反射显示部对应的所述固化的光固化型树脂薄膜的主面的区域中选择性地形成凹凸的第四工序; 以及将相位差板的材料施加到具有不平坦度的光固化树脂膜上的第五步骤，通过将具有不平坦部分的能量锚定在材料上以形成相应于反射显示部分的各个区域中的相位差板 的相位差板。

公开(公告)号：US5355175A

公开(公告)日：1994-10-11

申请号：US71014

申请日：1993-06-02

申请人： Setsuo Okada ,  Noriyoshi Takeya ,  Manabu Okamoto ,  Yoshinobu Nagase ,  Takashi Yoshimi ,  Hitoshi Yamazaki ,  Hiroyasu Matsuura ,  Masakazu Miyazaki ,  Yoshiki Furuta ,  Masahiro Sui ,  Hirofumi Matoba

发明人： Setsuo Okada ,  Noriyoshi Takeya ,  Manabu Okamoto ,  Yoshinobu Nagase ,  Takashi Yoshimi ,  Hitoshi Yamazaki ,  Hiroyasu Matsuura ,  Masakazu Miyazaki ,  Yoshiki Furuta ,  Masahiro Sui ,  Hirofumi Matoba

IPC分类号： H04N5/265 ,  H04N5/272 ,  H04N5/278

CPC分类号： H04N5/272

摘要： A video mixing apparatus mixes a graphics video image and a playback video image at a plurality of mixture ratios in one image plane. Fade data indicative of the mixing ratio of at least one line of the playback video signal and the graphics video signal is sequentially generated in accordance with a predetermined order. The fade data is held into holding means and is outputted from the holding means synchronously with a horizontal sync signal. The levels of the playback video signal and the graphics video signal are individually adjusted in accordance with the fade data outputted from the holding means and the adjusted signals are added. The playback video signal and the graphics video signal are mixed at the mixing ratio set every line of one image plane. In a video apparatus using the graphics video image and playback video image, various kinds of effective video images can be formed by mixing the graphics video image of every video image such as background, person, characters, or the like and the playback video image.

摘要翻译： 视频混合设备在一个图像平面中以多个混合比混合图形视频图像和重放视频图像。 根据预定顺序依次生成指示回放视频信号和图形视频信号的至少一行的混合比的淡变数据。 褪色数据被保持在保持装置中，并且与水平同步信号同步地从保持装置输出。 再现视频信号和图形视频信号的电平根据从保持装置输出的淡入淡出数据被分别调整，调整后的信号相加。 重放视频信号和图形视频信号以在一个图像平面的每一行设定的混合比混合。 在使用图形视频图像和回放视频图像的视频装置中，可以通过混合诸如背景，人物，人物等的每个视频图像的图形视频图像和再现视频图像来形成各种有效的视频图像。

公开(公告)号：US5260801A

公开(公告)日：1993-11-09

申请号：US705820

申请日：1991-05-28

申请人： Tetsuya Temma ,  Yasuharu Nakajima ,  Hiroyasu Matsuura ,  Takeo Tobe ,  Jun Kono ,  Takuo Fujimura ,  Isao Kikuchi ,  Atsushi Takada

发明人： Tetsuya Temma ,  Yasuharu Nakajima ,  Hiroyasu Matsuura ,  Takeo Tobe ,  Jun Kono ,  Takuo Fujimura ,  Isao Kikuchi ,  Atsushi Takada

IPC分类号： H04N5/78 ,  G11B19/02 ,  G11B20/02 ,  G11B27/00 ,  G11B27/28 ,  H04N5/765 ,  H04N5/781 ,  H04N5/92 ,  H04N5/93 ,  H04N9/797 ,  H04N9/82 ,  H04N5/76

CPC分类号： H04N9/8205 ,  G11B27/002 ,  G11B27/28 ,  H04N9/7973 ,  G11B2220/20 ,  G11B2220/2587

摘要： A video format signal recording and reproducing method wherein a plurality of division video signals are obtained by dividing a single video format signal and are recorded onto a plurality of recording media, set indication ID numbers are recorded. When the division video signals are reproduced from the recording media, the set indication ID numbers are automatically discriminated. Only when the set indication ID numbers coincide each other, the reproducing operation of the single video format signal is executed.