公开(公告)号：US20140077684A1

公开(公告)日：2014-03-20

申请号：US13512396

申请日：2012-05-04

申请人： Huarong Liu ,  Ping Chen

发明人： Huarong Liu ,  Ping Chen

IPC分类号： H01J37/04 ,  H01J9/02

CPC分类号： H01J37/04 ,  B82Y40/00 ,  H01J9/02 ,  H01J9/025 ,  H01J27/26 ,  H01J37/073 ,  H01J37/08 ,  H01J2237/06341 ,  H01J2237/0807 ,  H01J2237/2623 ,  H01L21/31116

摘要： The present disclosure provides a method for manufacturing a particle source comprising: placing a metal wire in vacuum, introducing active gas, adjusting a temperature of the metal wire and applying a positive high voltage V to the metal wire to generate at a side of the head of the metal wire an etching zone in which field induced chemical etching (FICE) is performed; increasing by the FICE a surface electric field at the top of the metal wire head to be greater than a field evaporation electric field of material for the metal wire, so that metal atoms at the top of the metal wire are evaporated off; after the field evaporation is activated by the FICE, causing mutual adjustment between the FICE and the field evaporation, until the head of the metal wire has a shape of combination of a base and a tip on the base; and stopping the FICE and the field evaporation when the head of the metal wire takes a predetermine shape.

摘要翻译： 本公开提供了一种制造颗粒源的方法，包括：将金属丝放置在真空中，引入活性气体，调节金属丝的温度并向金属丝施加正高电压V以在头的一侧产生 的金属线，其中执行场诱导化学蚀刻（FICE）的蚀刻区域; 通过FICE增加金属线头顶部的表面电场比金属线材料的场蒸发电场大，金属线顶部的金属原子被蒸发掉; 在通过FICE激活场蒸发之后，引起FICE和场蒸发之间的相互调节，直到金属丝的头部具有基部和底部的尖端的组合的形状; 并且当金属丝的头部具有预定形状时，停止FICE和场蒸发。

公开(公告)号：US20130020496A1

公开(公告)日：2013-01-24

申请号：US13512401

申请日：2012-05-04

申请人： Huarong Liu ,  Ping Chen

发明人： Huarong Liu ,  Ping Chen

IPC分类号： H01J29/00 ,  H01J27/02

CPC分类号： H01J37/073 ,  H01J1/3044 ,  H01J9/025 ,  H01J35/065 ,  H01J37/08 ,  H01J2237/0807

摘要： The present disclosure provides a particle source comprising a base having a gently-shaped top, and a tip formed as a tiny protrusion on the top of the base.

摘要翻译： 本公开提供了一种颗粒源，其包括具有轻轻地形状的顶部的基部和在基部的顶部上形成为微小突起的末端。

公开(公告)号：US09023226B2

公开(公告)日：2015-05-05

申请号：US13512396

申请日：2012-05-04

申请人： Huarong Liu ,  Ping Chen

发明人： Huarong Liu ,  Ping Chen

IPC分类号： C25F3/00 ,  C03C15/00 ,  H01J37/04 ,  H01L21/311 ,  H01J37/073 ,  H01J27/26 ,  H01J9/02 ,  H01J37/08 ,  B82Y40/00

CPC分类号： H01J37/04 ,  B82Y40/00 ,  H01J9/02 ,  H01J9/025 ,  H01J27/26 ,  H01J37/073 ,  H01J37/08 ,  H01J2237/06341 ,  H01J2237/0807 ,  H01J2237/2623 ,  H01L21/31116

摘要： The present disclosure provides a method for manufacturing a particle source comprising: placing a metal wire in vacuum, introducing active gas, adjusting a temperature of the metal wire and applying a positive high voltage V to the metal wire to generate at a side of the head of the metal wire an etching zone in which field induced chemical etching (FICE) is performed; increasing by the FICE a surface electric field at the top of the metal wire head to be greater than a field evaporation electric field of material for the metal wire, so that metal atoms at the top of the metal wire are evaporated off; after the field evaporation is activated by the FICE, causing mutual adjustment between the FICE and the field evaporation, until the head of the metal wire has a shape of combination of a base and a tip on the base; and stopping the FICE and the field evaporation when the head of the metal wire takes a predetermine shape.

摘要翻译： 本公开提供了一种制造颗粒源的方法，包括：将金属丝放置在真空中，引入活性气体，调节金属丝的温度并向金属丝施加正高电压V以在头的一侧产生 的金属线，其中执行场诱导化学蚀刻（FICE）的蚀刻区域; 通过FICE增加金属线头顶部的表面电场比金属线材料的场蒸发电场大，金属线顶部的金属原子被蒸发掉; 在通过FICE激活场蒸发之后，引起FICE和场蒸发之间的相互调节，直到金属丝的头部具有基部和底部的尖端的组合的形状; 并且当金属丝的头部具有预定形状时，停止FICE和场蒸发。