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    Plasma cleaning gas with lower global warming potential than SF6
    2.
    发明授权
    Plasma cleaning gas with lower global warming potential than SF6 失效
    全球变暖潜能值低于SF6的等离子体清洁气体

    公开(公告)号：US06886573B2

    公开(公告)日：2005-05-03

    申请号：US10237224

    申请日：2002-09-06

    申请人： John Peter Hobbs ,  James Joseph Hart

    发明人： John Peter Hobbs ,  James Joseph Hart

    IPC分类号： B08B7/00 ,  C23C16/44 ,  B08B9/00

    CPC分类号： C23C16/4405 ,  B08B7/0035 ,  Y02C20/30 ,  Y10S134/902 ,  Y10S438/905

    摘要： A process for cleaning a deposit from an interior surface of a processing chamber includes generating a plasma from a cleaning gas including SO2F2 and contacting the interior surface with the plasma for a time sufficient to convert the deposit into a volatile product, thereby cleaning the deposit from the interior surface, in which the process is conducted in the absence of SF6. The deposits, which may be removed by the process of the invention, include silicone, silicone oxide, silicone nitride, tungsten, copper and aluminum.

    摘要翻译： 用于从处理室的内表面清洗沉积物的方法包括从包括SO 2 F 2 N 2的清洁气体产生等离子体，并使内表面与等离子体接触 足以将沉积物转化成挥发性产物的时间，从而清除在不存在SF 6的情况下进行处理的内表面的沉积物。 可以通过本发明的方法除去的沉积物包括硅氧烷，硅氧烷，硅氮化物，钨，铜和铝。

    Package for safe storage of electrophilic fluorinating agent
    5.
    发明授权
    Package for safe storage of electrophilic fluorinating agent 失效
    用于安全储存亲电氟化剂的包装

    公开(公告)号：US06365246B1

    公开(公告)日：2002-04-02

    申请号：US09162281

    申请日：1998-09-29

    申请人： Robert George Syvret ,  James Joseph Hart ,  Andrew Joseph Woytek ,  Frank Michael Prozonic

    发明人： Robert George Syvret ,  James Joseph Hart ,  Andrew Joseph Woytek ,  Frank Michael Prozonic

    IPC分类号： B29D2200

    CPC分类号： C07D213/89 ,  C07D253/02 ,  C07D487/08 ,  C09B39/00 ,  Y10T428/1352

    摘要： An economical means of safely “containing” or “packaging” commercial electrophilic fluorination agents whereby these agents are readily stored and transported in a package, typically without loss of “F+” activity, and in a form which is readily and directly useable, i.e., in solution or a slurry. Importantly, the solution/slurry medium provides a tremendous safety margin for storage and transportation since the solution medium has an enormous ability to absorb heat (due to the latent heat of vaporization of the liquid) relative to the contained active fluorination agent.

    摘要翻译： 安全地“包含”或“包装”商业亲电氟化剂的经济手段，其中这些试剂容易地以包装方式储存和运输，通常不损失“F +”活性，并且以易于直接使用的形式，即， 在溶液或浆液中。 重要的是，溶液/浆液介质为储存和运输提供了巨大的安全余地，因为溶液相对于所含的活性氟化剂具有很大的吸收热量（由于液体的蒸发潜热）的能力。