公开(公告)号：US07504470B2

公开(公告)日：2009-03-17

申请号：US11215303

申请日：2005-08-31

申请人： Juha T. Rantala ,  Jyri Paulasaari ,  Janne Kylmä ,  Turo T. Törmänen ,  Jarkko Pietikäinen ,  Nigel Hacker ,  Admir Hadzic

发明人： Juha T. Rantala ,  Jyri Paulasaari ,  Janne Kylmä ,  Turo T. Törmänen ,  Jarkko Pietikäinen ,  Nigel Hacker ,  Admir Hadzic

IPC分类号： C08G77/18

CPC分类号： C09D183/14 ,  C08G77/50 ,  H01B3/46 ,  H01L21/02126 ,  H01L21/02282 ,  H01L21/3122 ,  H01L21/76822 ,  H01L21/76837 ,  H01L23/5329 ,  H01L2924/0002 ,  H01L2924/12044 ,  Y10T428/31663 ,  H01L2924/00

摘要： A thin film comprising a composition obtained by polymerizing a monomer having the formula I: wherein: R1 is a hydrolysable group, R2 is a polarizability reducing organic group, and R3 is a bridging hydrocarbon group, to form a siloxane material. The invention also concerns methods for producing the thin films. The thin film can be used a low k dielectric in integrated circuit devices. The novel dielectric materials have excellent properties of planarization resulting in good local and global planarity on top a semiconductor substrate topography, which reduces or eliminates the need for chemical mechanical planarization after dielectric and oxide liner deposition.

摘要翻译： 一种薄膜，其包含通过聚合具有式I的单体而获得的组合物：其中：R 1是可水解基团，R 2是极化率降低的有机基团，并且R 3是桥连烃基，以形成硅氧烷材料。 本发明还涉及制备薄膜的方法。 该薄膜可用于集成电路器件中的低k电介质。 新型介电材料具有优异的平面化特性，从而在半导体衬底形貌的顶部产生良好的局部和全局平面性，从而减少或消除了电介质和氧化物衬垫沉积后对化学机械平面化的需要。

公开(公告)号：US07514709B2

公开(公告)日：2009-04-07

申请号：US10552663

申请日：2004-04-13

申请人： Juha T. Rantala ,  Jyri Paulasaari ,  Janne Kylmä

发明人： Juha T. Rantala ,  Jyri Paulasaari ,  Janne Kylmä

IPC分类号： H01L29/08

CPC分类号： C08L83/04 ,  C08G77/06 ,  C08G77/12 ,  C08G77/14 ,  C08G77/16 ,  C08G77/18 ,  C08G77/20 ,  C08G77/24 ,  C08G77/70 ,  H01B3/30 ,  H01L21/02126 ,  H01L21/02211 ,  H01L21/02282 ,  H01L21/3122 ,  H01L23/5329 ,  H01L2924/0002 ,  H01L2924/12044 ,  H01L2924/00

摘要： A low dielectric constant polymer, comprising monomeric units derived from a compound having the general formula I (R1—R2)n—Si—(X1)4-n, wherein each X1 is independently selected from hydrogen and inorganic leaving groups, R2 is an optional group and comprises an alkylene having 1 to 6 carbon atoms or an arylene, R1 is a polycycloalkyl group and n is an integer 1 to 3. The polymer has excellent electrical and mechanical properties.

摘要翻译： 低介电常数聚合物，其包含衍生自具有通式I（R1-R2）n-Si-（X1）4-n的化合物的单体单元，其中每个X1独立地选自氢和无机离去基团，R 2是 任选的基团，并且包含具有1至6个碳原子的亚烷基或亚芳基，R 1是多环烷基，n是1至3的整数。该聚合物具有优异的电学和机械性能。

公开(公告)号：US07256250B2

公开(公告)日：2007-08-14

申请号：US10492555

申请日：2002-10-11

申请人： Jukka Tuominen ,  Janne Kylmä ,  Jukka Seppälä ,  Johan-Fredrik Selin

发明人： Jukka Tuominen ,  Janne Kylmä ,  Jukka Seppälä ,  Johan-Fredrik Selin

IPC分类号： C08G63/02

CPC分类号： C08L67/00 ,  C08G63/60 ,  C09D167/00

摘要： The object of the present invention is a biodegradable polymer network and methods to make it. The polymer network consists of a cross-linked polyester resin, which is composed of hydroxy acid units, structural units derived from an unsaturated bifunctional monomer, and structural units derived from a polyol monomer. The polyester resin is produced directly by a polyoon-densation reaction, after which it is cross-linked to a polymer of high molecular weight The polyester can be co-polymerised with a co-monomer increasing flexibility, or be blended with a reactive macromonomer, which adds elasticity and crosslinking density. The prepared polymer network can be especially used to coat continuous or singular objects made of fibrous, porous, biomass based or inorganic materials, or as a blending component in these, or used to impregnate these in order to induce water durability, barrier properties, elasticity, coherence or mechanical strength.

摘要翻译： 本发明的目的是可生物降解的聚合物网络及其制备方法。 聚合物网络由由羟基酸单元组成的交联聚酯树脂，衍生自不饱和双官能单体的结构单元和衍生自多元醇单体的结构单元组成。 聚酯树脂通过多孔致密反应直接生产，然后与高分子量的聚合物交联。聚酯可以与增加柔性的共聚单体共聚，或与反应性大分子单体共混， 这增加了弹性和交联密度。 制备的聚合物网络可以特别用于涂覆由纤维，多孔，生物质基或无机材料制成的连续或单个物体，或作为其中的共混组分，或用于浸渍这些物质，以引起水的耐久性，阻隔性，弹性 ，一致性或机械强度。