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    Method for loading and unloading a transport device
    1.
    发明授权
    Method for loading and unloading a transport device 失效
    运输装置的装卸方法

    公开(公告)号：US08033781B2

    公开(公告)日：2011-10-11

    申请号：US12730683

    申请日：2010-03-24

    申请人： Johannes Struempfel ,  Reinhardt Bauer ,  Andrewas Heisig ,  Hans-Christian Hecht ,  Hartmut Freitag ,  Heiko Richter ,  Andre Ulbricht ,  Falk Schwerdtfeger

    发明人： Johannes Struempfel ,  Reinhardt Bauer ,  Andrewas Heisig ,  Hans-Christian Hecht ,  Hartmut Freitag ,  Heiko Richter ,  Andre Ulbricht ,  Falk Schwerdtfeger

    IPC分类号： B65G47/34

    CPC分类号： C23C14/56 ,  Y10S414/123

    摘要： A transport device for transporting elongated substrates through a vacuum coating system comprises an essentially rectangular frame and two groups of holding elements, which are rotatably mounted on opposite sides of the frame in such a manner that any pair of opposite holding elements can be connected to both ends of a substrate. Furthermore, at least one retainer bar is provided that is operatively connected to a group of holding elements in such a manner that the holding elements of this group are moveable in order to increase or decrease by choice their distance from the holding elements of the other group. Also provided are a loading and unloading device for loading and unloading the transport device, and a method for loading and unloading the transport device.

    摘要翻译： 用于通过真空涂覆系统传送细长基材的输送装置包括基本上矩形的框架和两组保持元件，这些保持元件可旋转地安装在框架的相对侧上，使得任何一对相对的保持元件可以连接到两个 底物的末端。 此外，提供了至少一个保持杆，其以这样的方式可操作地连接到一组保持元件，使得该组的保持元件可移动，以便通过选择它们与另一组的保持元件的距离来增加或减少 。 还提供了用于装载和卸载运输装置的装载和卸载装置，以及用于装载和卸载运输装置的方法。

    Transport device, loading device and method for loading and unloading the transport device
    2.
    发明授权
    Transport device, loading device and method for loading and unloading the transport device 失效
    运输装置，装载装置和运输装置的装卸方法

    公开(公告)号：US08007223B2

    公开(公告)日：2011-08-30

    申请号：US11870014

    申请日：2007-10-10

    申请人： Johannes Struempfel ,  Reinhardt Bauer ,  Andreas Heisig ,  Hans-Christian Hecht ,  Hartmut Freitag ,  Heiko Richter ,  André Ulbricht ,  Falk Schwerdtfeger

    发明人： Johannes Struempfel ,  Reinhardt Bauer ,  Andreas Heisig ,  Hans-Christian Hecht ,  Hartmut Freitag ,  Heiko Richter ,  André Ulbricht ,  Falk Schwerdtfeger

    IPC分类号： B65G47/34 ,  B65G49/05

    CPC分类号： C23C14/56 ,  Y10S414/123

    摘要： A transport device for transporting elongated substrates through a vacuum coating system comprises an essentially rectangular frame and two groups of holding elements, which are rotatably mounted on opposite sides of the frame in such a manner that any pair of opposite holding elements can be connected to both ends of a substrate. Furthermore, at least one retainer bar is provided that is operatively connected to a group of holding elements in such a manner that the holding elements of this group are moveable in order to increase or decrease by choice their distance from the holding elements of the other group. Also provided are a loading and unloading device for loading and unloading the transport device, and a method for loading and unloading the transport device.

    摘要翻译： 用于通过真空涂覆系统传送细长基材的输送装置包括基本上矩形的框架和两组保持元件，这些保持元件可旋转地安装在框架的相对侧上，使得任何一对相对的保持元件可以连接到两个 底物的末端。 此外，提供了至少一个保持杆，其以这样的方式可操作地连接到一组保持元件，使得该组的保持元件可移动，以便通过选择它们与另一组的保持元件的距离来增加或减少 。 还提供了用于装载和卸载运输装置的装载和卸载装置，以及用于装载和卸载运输装置的方法。

    TRANSPORT APPARATUS FOR ELONGATE SUBSTRATES
    4.
    发明申请
    TRANSPORT APPARATUS FOR ELONGATE SUBSTRATES 失效
    用于基底的运输装置

    公开(公告)号：US20090095215A1

    公开(公告)日：2009-04-16

    申请号：US12247250

    申请日：2008-10-08

    申请人： Johannes STRUEMPFEL ,  Reinhardt Bauer ,  Andreas Heisig ,  Andre Ulbricht ,  Steffen Goerke ,  Heiko Richter ,  Falk Schwerdtfeger

    发明人： Johannes STRUEMPFEL ,  Reinhardt Bauer ,  Andreas Heisig ,  Andre Ulbricht ,  Steffen Goerke ,  Heiko Richter ,  Falk Schwerdtfeger

    IPC分类号： B05C13/00

    CPC分类号： C23C14/50 ,  C23C14/56 ,  F27D3/026

    摘要： In a transport device for elongated substrates, especially in hot processes, which includes an essentially rectangular frame, formed by longitudinal and transverse spars connected to each other, in which at least three transverse spars are provided between two longitudinal spars, at least one transverse spar is made from a material, whose heat expansion coefficient differs from the heat expansion coefficient of the material of the other transverse spars or/and at least one transverse spar is connected force-free to at least one transverse support or/and at least one transverse spar is formed from an open profile.

    摘要翻译： 在用于细长基材的输送装置中，特别是在热过程中，其包括基本上矩形的框架，由彼此连接的纵向和横向翼梁形成，其中至少三个横向翼梁设置在两个纵向翼梁之间，至少一个横向翼梁 由材料制成，其热膨胀系数不同于其它横向翼梁的材料的热膨胀系数或/和至少一个横向翼梁与至少一个横向支撑件或/和至少一个横向支撑件无力连接 翼梁由敞开的轮廓形成。

    Vacuum coating system comprising a transport unit for transporting substrates
    5.
    发明授权
    Vacuum coating system comprising a transport unit for transporting substrates 失效
    真空镀膜系统，包括用于输送基材的输送单元

    公开(公告)号：US08127712B2

    公开(公告)日：2012-03-06

    申请号：US12280931

    申请日：2007-07-09

    申请人： Reinhardt Bauer ,  Frank Hupka ,  Andreas Heisig ,  Johannes Struempfel ,  Hans-Christian Hecht ,  Wolfgang Erbkamm

    发明人： Reinhardt Bauer ,  Frank Hupka ,  Andreas Heisig ,  Johannes Struempfel ,  Hans-Christian Hecht ,  Wolfgang Erbkamm

    IPC分类号： B65G37/00 ,  B65G15/24 ,  B05C13/00

    CPC分类号： B65G37/005 ,  B65G15/24 ,  C23C14/568

    摘要： A vacuum coating unit having a pair of side by side transport devices for transporting substrates in a transport direction. Each transport device includes at least one first endless conveyor running in the transport direction and having a conveying element guided around at least two guide rollers or pulleys. The conveying element is located at a distance from a guide device extending in the transport direction parallel to the conveying element in such a way that the ends of the substrates can be introduced into the gap between the conveying element and the guide device of the transport devices and can be moved in the transport direction by the displacement of the conveying elements.

    摘要翻译： 一种真空镀膜装置，具有一对并排运送装置，用于在输送方向上输送基材。 每个输送装置包括至少一个在输送方向上运行的第一环形输送机，并具有围绕至少两个导辊或滑轮引导的输送元件。 输送元件位于与沿输送方向平行于输送元件延伸的引导装置一定距离处，使得基板的端部能够被引入到输送元件和输送装置的引导装置之间的间隙中 并且可以通过输送元件的位移在输送方向上移动。

    VACUUM COATING SYSTEM COMPRISING A TRANSPORT UNIT FOR TRANSPORTING SUBSTRATES
    6.
    发明申请
    VACUUM COATING SYSTEM COMPRISING A TRANSPORT UNIT FOR TRANSPORTING SUBSTRATES 失效
    包括用于运输基材的运输单元的真空涂料系统

    公开(公告)号：US20090173280A1

    公开(公告)日：2009-07-09

    申请号：US12280931

    申请日：2007-07-09

    申请人： Reinhardt Bauer ,  Frank Hupka ,  Andreas Heisig ,  Johannes Struempfel ,  Hans-Christian Hecht ,  Wolfgang Erbkamm

    发明人： Reinhardt Bauer ,  Frank Hupka ,  Andreas Heisig ,  Johannes Struempfel ,  Hans-Christian Hecht ,  Wolfgang Erbkamm

    IPC分类号： C23C16/54

    CPC分类号： B65G37/005 ,  B65G15/24 ,  C23C14/568

    摘要： A vacuum coating unit with a transport device for transporting substrates in a transport direction, comprises at least one first endless conveyor running in the transport direction and having a conveyor device guided around at least two deflection rollers. The conveyor device is located at a distance from a guide device extending in the transport direction parallel to the conveyor device of the first endless conveyor in such a way that the substrates can be introduced into the gap between the conveyor device and the guide device and can be moved in the transport direction by the displacement of the conveyor device.

    摘要翻译： 具有用于沿输送方向输送基材的输送装置的真空涂布单元包括至少一个在输送方向上运行的第一环形输送机，并具有围绕至少两个偏转辊引导的输送装置。 输送装置位于与沿着平行于第一环形输送机的输送装置的输送方向延伸的引导装置的距离上，使得基板可以被引入到输送装置和引导装置之间的间隙中， 通过输送装置的位移沿输送方向移动。

    Transport device with a monitoring appliance and substrate treatment apparatus
    7.
    发明授权
    Transport device with a monitoring appliance and substrate treatment apparatus 失效
    带监控设备和基板处理设备的运输设备

    公开(公告)号：US08069974B2

    公开(公告)日：2011-12-06

    申请号：US12169966

    申请日：2008-07-09

    申请人： Reinhardt Bauer ,  Johannes Struempfel ,  Andreas Heisig ,  Matthias Smolke ,  Thomas Posseckardt ,  Frank Hupka

    发明人： Reinhardt Bauer ,  Johannes Struempfel ,  Andreas Heisig ,  Matthias Smolke ,  Thomas Posseckardt ,  Frank Hupka

    IPC分类号： B65G43/00

    CPC分类号： B65G43/04

    摘要： In a transport device, which comprises at least one endless conveyor guided around at least two guide rollers, a monitoring appliance for monitoring motion of a guide roller is positioned on at least one of the guide rollers. The monitoring appliance comprises a first contact element disposed on and electrically connected with the guide roller, and a second contact element disposed near the guide roller. The first and second contact elements are arranged relative to one another in such a way that an electrical contact between them occurs with every revolution of the guide roller, such that the electric potential of the guide roller is transmitted to the second contact element. Additionally, a substrate treatment apparatus comprising such transport device is disclosed.

    摘要翻译： 在包括围绕至少两个引导辊引导的至少一个环形输送机的输送装置中，用于监测导辊运动的监控装置被定位在至少一个导辊上。 监控装置包括设置在引导辊上并与导向辊电连接的第一接触元件和设置在引导辊附近的第二接触元件。 第一和第二接触元件相对于彼此布置，使得它们之间的电接触发生在导辊的每转一圈，使得导向辊的电位传递到第二接触元件。 另外，公开了一种包括该输送装置的基板处理装置。

    DEVICE FOR CONTROLLING THE TEMPERATURE OF SUBSTRATES
    9.
    发明申请
    DEVICE FOR CONTROLLING THE TEMPERATURE OF SUBSTRATES 有权
    用于控制基板温度的装置

    公开(公告)号：US20120118541A1

    公开(公告)日：2012-05-17

    申请号：US13376465

    申请日：2010-06-18

    申请人： Hubertus Von Der Waydbrink ,  Thomas Meyer ,  Michael Hentschel ,  Reinhardt Bauer ,  Andrej Wolf ,  Hans-Christian Hecht

    发明人： Hubertus Von Der Waydbrink ,  Thomas Meyer ,  Michael Hentschel ,  Reinhardt Bauer ,  Andrej Wolf ,  Hans-Christian Hecht

    IPC分类号： F28F13/00

    CPC分类号： C23C14/541 ,  C23C14/56

    摘要： A device for controlling the temperature of substrates in a substrate-treatment system, in which a substrate can be guided in the longitudinal extension of the substrate-treatment system in a substrate transport plane within a vacuum chamber past a treatment device, solves the problem of dynamically shaping a dynamic change of the thermal insulation to control the heat transfer in the substrate and thereby, reduce, in particular, thermal inertias by providing a heat-absorbing cooler side of the substrate transport plane. The heat-absorbing cooler can be shielded, at least partially from the substrate transport plane, using an insulation member.

    摘要翻译： 用于控制基板处理系统中的基板的温度的装置，其中基板可以在基板处理系统的纵向延伸中在通过处理装置的真空室内的基板输送平面中被引导，解决了 动态地塑造热绝缘的动态变化以控制衬底中的热传递，从而通过提供衬底传输平面的吸热冷却器侧，特别地减少热惯性。 使用绝缘构件，可以至少部分地从基板输送平面屏蔽吸热式冷却器。