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公开(公告)号:US08679307B2
公开(公告)日:2014-03-25
申请号:US10633130
申请日:2003-08-01
申请人: Paul E. Fischione , Alan C. Robins , David W. Smith , Rocco R. Cerchiara , Joseph M. Matesa, Jr.
发明人: Paul E. Fischione , Alan C. Robins , David W. Smith , Rocco R. Cerchiara , Joseph M. Matesa, Jr.
IPC分类号: C23C14/34
CPC分类号: G01N1/28 , G01B11/14 , G01N1/32 , H01J37/185 , H01J37/20 , H01J37/3056 , H01J37/32082 , H01J2237/1825 , H01J2237/3174 , H01J2237/335
摘要: An apparatus for preparing specimens for microscopy including equipment for providing two or more of each of the following specimen processing activities under continuous vacuum conditions: plasma cleaning the specimen, ion beam or reactive ion beam etching the specimen, plasma etching the specimen and coating the specimen with a conductive material. Also, an apparatus and method for detecting a position of a surface of the specimen in a processing chamber, wherein the detected position is used to automatically move the specimen to appropriate locations for subsequent processing.
摘要翻译: 包括用于在连续真空条件下提供以下两种或多种以下样品处理活性的设备的显微镜准备装置:等离子体清洗样品,离子束或反应离子束蚀刻样品,等离子体蚀刻样品并涂覆样品 与导电材料。 另外,一种用于检测处理室中样品表面的位置的装置和方法,其中检测位置用于自动将样本移动到合适的位置进行后续处理。
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公开(公告)号:US6014323A
公开(公告)日:2000-01-11
申请号:US130076
申请日:1998-08-07
CPC分类号: H02M7/49 , H02M5/271 , H02M5/458 , H02M2007/4835
摘要: An electrical power converter for an incoming AC transformer connected to a multiphase power source and having multiple secondary windings. Each secondary winding is connected to multiple switching cells, each of which functions like a matrix converter. The secondary windings can be either single or multi-phase and more than one transformer can be provided such that the multiple secondary windings can be distributed among individual transformers. The output of at least two of the switching cells are connected in series. The switching cells can be either bi-directional or unidirectional and can also have a three-phase input. A combination of IGBTs and diodes can form the switching cells.
摘要翻译: 用于连接到多相电源并具有多个次级绕组的输入AC变压器的电力转换器。 每个次级绕组连接到多个开关单元,每个开关单元的功能如矩阵转换器。 次级绕组可以是单相或多相,并且可以提供多于一个的变压器,使得多个次级绕组可以分布在各个变压器之间。 至少两个开关单元的输出串联连接。 开关单元可以是双向的或单向的,并且还可以具有三相输入。 IGBT和二极管的组合可以形成开关单元。
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公开(公告)号:US09214313B2
公开(公告)日:2015-12-15
申请号:US13082983
申请日:2011-04-08
IPC分类号: H01J1/50 , H01J37/08 , H01J27/04 , H01J37/305
CPC分类号: H01J37/08 , H01J27/04 , H01J37/3056 , H01J2237/061 , H01J2237/0815
摘要: An ion source is disclosed which utilizes independently powered electrodes that are isolated with a series of insulators. The ion source comprises an anode electrode with a hollow interior, where the anode is disposed between a cathode and an anti-cathode. A magnet or electro-magnet imposes a magnetic field in an axial direction through the bore of the anode. Gas is introduced into the anode area at a controllable pressure. The ion source includes a first voltage differential between the anode and cathode for the production of plasma and a second voltage differential between the anode and the anti-cathode for extraction of ions from the plasma, forming an ion beam, which is preferably of a narrow diameter at low beam energy. In particular, the voltage differential between the anti-cathode and anode is adjusted to control the initial beam divergence of extracted ions. An optional focus electrode with an independent power supply further focuses the ion beam. A final electrode defines the output boundary of the ion source to provide un-perturbed drift of the ions into the vacuum chamber.
摘要翻译: 公开了一种离子源,其利用与一系列绝缘体隔离的独立供电的电极。 离子源包括具有中空内部的阳极电极,其中阳极设置在阴极和反阴极之间。 磁体或电磁铁通过阳极的孔沿轴向施加磁场。 气体以可控的压力被引入阳极区域。 离子源包括用于产生等离子体的阳极和阴极之间的第一电压差和用于从等离子体提取离子的阳极和反阴极之间的第二电压差,形成离子束,其优选地为窄 直径在低光束能量。 特别地,调整反阴极和阳极之间的电压差以控制提取的离子的初始光束发散。 具有独立电源的可选聚焦电极进一步聚焦离子束。 最终电极定义了离子源的输出边界,以提供离子到真空室中的无扰动漂移。
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公开(公告)号:US20140098380A1
公开(公告)日:2014-04-10
申请号:US14099512
申请日:2013-12-06
CPC分类号: G01N1/28 , G01B11/14 , G01N1/32 , H01J37/185 , H01J37/20 , H01J37/3056 , H01J37/32082 , H01J2237/1825 , H01J2237/3174 , H01J2237/335
摘要: An apparatus for preparing specimens for microscopy including equipment for providing two or more of each of the following specimen processing activities under continuous vacuum conditions: plasma cleaning the specimen, ion beam or reactive ion beam etching the specimen, plasma etching the specimen and coating the specimen with a conductive material. Also, an apparatus and method for detecting a position of a surface of the specimen in a processing chamber, wherein the detected position is used to automatically move the specimen to appropriate locations for subsequent processing.
摘要翻译: 包括用于在连续真空条件下提供以下两种或多种以下样品处理活性的设备的显微镜准备装置:等离子体清洗样品,离子束或反应离子束蚀刻样品,等离子体蚀刻样品并涂覆样品 与导电材料。 另外,一种用于检测处理室中样品表面的位置的装置和方法,其中检测位置用于自动将样本移动到合适的位置进行后续处理。
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公开(公告)号:US20110248179A1
公开(公告)日:2011-10-13
申请号:US13082983
申请日:2011-04-08
IPC分类号: H01J3/20
CPC分类号: H01J37/08 , H01J27/04 , H01J37/3056 , H01J2237/061 , H01J2237/0815
摘要: An ion source is disclosed which utilizes independently powered electrodes that are isolated with a series of insulators. The ion source comprises an anode electrode with a hollow interior, where the anode is disposed between a cathode and an anti-cathode. A magnet or electro-magnet imposes a magnetic field in an axial direction through the bore of the anode. Gas is introduced into the anode area at a controllable pressure. The ion source includes a first voltage differential between the anode and cathode for the production of plasma and a second voltage differential between the anode and the anti-cathode for extraction of ions from the plasma, forming an ion beam, which is preferably of a narrow diameter at low beam energy. In particular, the voltage differential between the anti-cathode and anode is adjusted to control the initial beam divergence of extracted ions. An optional focus electrode with an independent power supply further focuses the ion beam. A final electrode defines the output boundary of the ion source to provide un-perturbed drift of the ions into the vacuum chamber.
摘要翻译: 公开了一种离子源,其利用与一系列绝缘体隔离的独立供电的电极。 离子源包括具有中空内部的阳极电极,其中阳极设置在阴极和反阴极之间。 磁体或电磁铁通过阳极的孔沿轴向施加磁场。 气体以可控的压力被引入阳极区域。 离子源包括用于产生等离子体的阳极和阴极之间的第一电压差和用于从等离子体提取离子的阳极和反阴极之间的第二电压差,形成离子束,其优选地为窄 直径在低光束能量。 特别地,调整反阴极和阳极之间的电压差以控制提取的离子的初始光束发散。 具有独立电源的可选聚焦电极进一步聚焦离子束。 最终电极定义了离子源的输出边界,以提供离子到真空室中的无扰动漂移。
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公开(公告)号:US20140157914A1
公开(公告)日:2014-06-12
申请号:US14183195
申请日:2014-02-18
IPC分类号: G01N1/28
CPC分类号: G01N1/28 , G01B11/14 , G01N1/32 , H01J37/185 , H01J37/20 , H01J37/3056 , H01J37/32082 , H01J2237/1825 , H01J2237/3174 , H01J2237/335
摘要: An apparatus for preparing specimens for microscopy including equipment for providing two or more of each of the following specimen processing activities under continuous vacuum conditions: plasma cleaning the specimen, ion beam or reactive ion beam etching the specimen, plasma etching the specimen and coating the specimen with a conductive material. Also, an apparatus and method for detecting a position of a surface of the specimen in a processing chamber, wherein the detected position is used to automatically move the specimen to appropriate locations for subsequent processing.
摘要翻译: 包括用于在连续真空条件下提供以下两种或多种以下样品处理活性的设备的显微镜准备装置:等离子体清洗样品,离子束或反应离子束蚀刻样品,等离子体蚀刻样品并涂覆样品 与导电材料。 另外,一种用于检测处理室中样品表面的位置的装置和方法,其中检测位置用于自动将样本移动到合适的位置进行后续处理。
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