公开(公告)号：US08679307B2

公开(公告)日：2014-03-25

申请号：US10633130

申请日：2003-08-01

申请人： Paul E. Fischione ,  Alan C. Robins ,  David W. Smith ,  Rocco R. Cerchiara ,  Joseph M. Matesa, Jr.

发明人： Paul E. Fischione ,  Alan C. Robins ,  David W. Smith ,  Rocco R. Cerchiara ,  Joseph M. Matesa, Jr.

IPC分类号： C23C14/34

CPC分类号： G01N1/28 ,  G01B11/14 ,  G01N1/32 ,  H01J37/185 ,  H01J37/20 ,  H01J37/3056 ,  H01J37/32082 ,  H01J2237/1825 ,  H01J2237/3174 ,  H01J2237/335

摘要： An apparatus for preparing specimens for microscopy including equipment for providing two or more of each of the following specimen processing activities under continuous vacuum conditions: plasma cleaning the specimen, ion beam or reactive ion beam etching the specimen, plasma etching the specimen and coating the specimen with a conductive material. Also, an apparatus and method for detecting a position of a surface of the specimen in a processing chamber, wherein the detected position is used to automatically move the specimen to appropriate locations for subsequent processing.

摘要翻译： 包括用于在连续真空条件下提供以下两种或多种以下样品处理活性的设备的显微镜准备装置：等离子体清洗样品，离子束或反应离子束蚀刻样品，等离子体蚀刻样品并涂覆样品 与导电材料。 另外，一种用于检测处理室中样品表面的位置的装置和方法，其中检测位置用于自动将样本移动到合适的位置进行后续处理。

公开(公告)号：US09214313B2

公开(公告)日：2015-12-15

申请号：US13082983

申请日：2011-04-08

申请人： Joseph M. Matesa, Jr. ,  Paul E. Fischione

发明人： Joseph M. Matesa, Jr. ,  Paul E. Fischione

IPC分类号： H01J1/50 ,  H01J37/08 ,  H01J27/04 ,  H01J37/305

CPC分类号： H01J37/08 ,  H01J27/04 ,  H01J37/3056 ,  H01J2237/061 ,  H01J2237/0815

摘要： An ion source is disclosed which utilizes independently powered electrodes that are isolated with a series of insulators. The ion source comprises an anode electrode with a hollow interior, where the anode is disposed between a cathode and an anti-cathode. A magnet or electro-magnet imposes a magnetic field in an axial direction through the bore of the anode. Gas is introduced into the anode area at a controllable pressure. The ion source includes a first voltage differential between the anode and cathode for the production of plasma and a second voltage differential between the anode and the anti-cathode for extraction of ions from the plasma, forming an ion beam, which is preferably of a narrow diameter at low beam energy. In particular, the voltage differential between the anti-cathode and anode is adjusted to control the initial beam divergence of extracted ions. An optional focus electrode with an independent power supply further focuses the ion beam. A final electrode defines the output boundary of the ion source to provide un-perturbed drift of the ions into the vacuum chamber.

摘要翻译： 公开了一种离子源，其利用与一系列绝缘体隔离的独立供电的电极。 离子源包括具有中空内部的阳极电极，其中阳极设置在阴极和反阴极之间。 磁体或电磁铁通过阳极的孔沿轴向施加磁场。 气体以可控的压力被引入阳极区域。 离子源包括用于产生等离子体的阳极和阴极之间的第一电压差和用于从等离子体提取离子的阳极和反阴极之间的第二电压差，形成离子束，其优选地为窄 直径在低光束能量。 特别地，调整反阴极和阳极之间的电压差以控制提取的离子的初始光束发散。 具有独立电源的可选聚焦电极进一步聚焦离子束。 最终电极定义了离子源的输出边界，以提供离子到真空室中的无扰动漂移。

公开(公告)号：US20140098380A1

公开(公告)日：2014-04-10

申请号：US14099512

申请日：2013-12-06

申请人： Paul E. Fischione ,  Alan C. Robins ,  Rocco R. Cerchiara ,  Joseph M. Matesa, JR.

发明人： Paul E. Fischione ,  Alan C. Robins ,  Rocco R. Cerchiara ,  Joseph M. Matesa, JR.

IPC分类号： G01B11/14 ,  G01N1/28

CPC分类号： G01N1/28 ,  G01B11/14 ,  G01N1/32 ,  H01J37/185 ,  H01J37/20 ,  H01J37/3056 ,  H01J37/32082 ,  H01J2237/1825 ,  H01J2237/3174 ,  H01J2237/335

摘要： An apparatus for preparing specimens for microscopy including equipment for providing two or more of each of the following specimen processing activities under continuous vacuum conditions: plasma cleaning the specimen, ion beam or reactive ion beam etching the specimen, plasma etching the specimen and coating the specimen with a conductive material. Also, an apparatus and method for detecting a position of a surface of the specimen in a processing chamber, wherein the detected position is used to automatically move the specimen to appropriate locations for subsequent processing.

摘要翻译： 包括用于在连续真空条件下提供以下两种或多种以下样品处理活性的设备的显微镜准备装置：等离子体清洗样品，离子束或反应离子束蚀刻样品，等离子体蚀刻样品并涂覆样品 与导电材料。 另外，一种用于检测处理室中样品表面的位置的装置和方法，其中检测位置用于自动将样本移动到合适的位置进行后续处理。

公开(公告)号：US20110248179A1

公开(公告)日：2011-10-13

申请号：US13082983

申请日：2011-04-08

申请人： Joseph M. Matesa, Jr. ,  Paul E. Fischione

发明人： Joseph M. Matesa, Jr. ,  Paul E. Fischione

IPC分类号： H01J3/20

CPC分类号： H01J37/08 ,  H01J27/04 ,  H01J37/3056 ,  H01J2237/061 ,  H01J2237/0815

摘要： An ion source is disclosed which utilizes independently powered electrodes that are isolated with a series of insulators. The ion source comprises an anode electrode with a hollow interior, where the anode is disposed between a cathode and an anti-cathode. A magnet or electro-magnet imposes a magnetic field in an axial direction through the bore of the anode. Gas is introduced into the anode area at a controllable pressure. The ion source includes a first voltage differential between the anode and cathode for the production of plasma and a second voltage differential between the anode and the anti-cathode for extraction of ions from the plasma, forming an ion beam, which is preferably of a narrow diameter at low beam energy. In particular, the voltage differential between the anti-cathode and anode is adjusted to control the initial beam divergence of extracted ions. An optional focus electrode with an independent power supply further focuses the ion beam. A final electrode defines the output boundary of the ion source to provide un-perturbed drift of the ions into the vacuum chamber.

摘要翻译： 公开了一种离子源，其利用与一系列绝缘体隔离的独立供电的电极。 离子源包括具有中空内部的阳极电极，其中阳极设置在阴极和反阴极之间。 磁体或电磁铁通过阳极的孔沿轴向施加磁场。 气体以可控的压力被引入阳极区域。 离子源包括用于产生等离子体的阳极和阴极之间的第一电压差和用于从等离子体提取离子的阳极和反阴极之间的第二电压差，形成离子束，其优选地为窄 直径在低光束能量。 特别地，调整反阴极和阳极之间的电压差以控制提取的离子的初始光束发散。 具有独立电源的可选聚焦电极进一步聚焦离子束。 最终电极定义了离子源的输出边界，以提供离子到真空室中的无扰动漂移。

公开(公告)号：US20130119267A1

公开(公告)日：2013-05-16

申请号：US13466947

申请日：2012-05-08

申请人： Pushkarraj V. Deshmukh ,  Jeffrey J. Gronsky ,  Paul E. Fischione

发明人： Pushkarraj V. Deshmukh ,  Jeffrey J. Gronsky ,  Paul E. Fischione

IPC分类号： G01N21/01 ,  G01N23/00

CPC分类号： G01N21/01 ,  G01N21/0303 ,  G01N23/00 ,  H01J37/20 ,  H01J37/228 ,  H01J2237/2002 ,  H01J2237/2003 ,  H01J2237/206 ,  H01J2237/2065

摘要： An in situ optical specimen holder is disclosed which allows imaging and analysis during dynamic experimentation. This holder assembly includes a set of focusing and reflection optics along with an environmental cell. Electromagnetic radiation can be used to optically excite the specimen in the presence or absence of fluid and the source of such radiation may be located within the body of the holder itself. The spot size of the irradiation at the specimen surface can be varied, thus exciting only a specific region on the specimen. The window type cell provides a variable fluid path length ranging from the specimen thickness to 500 μm. The holder has the provision to continuously circulate fluids over the specimen. The pressure within the cell can be regulated by controlling the flow rate of the fluids and the speed of the pumps.

摘要翻译： 公开了一种在动态实验中进行成像和分析的原位光学样本架。 该支架组件包括一组聚焦和反射光学器件以及环境细胞。 电磁辐射可以用于在存在或不存在流体的情况下光学激发样品，并且这种辐射源可以位于保持器本体的主体内。 样品表面的照射点尺寸可以变化，从而仅激发样品上的特定区域。 窗型细胞提供从样品厚度到500μm的可变流体路径长度。 支架具有使流体在试样上连续循环的条件。 可以通过控制流体的流量和泵的速度来调节电池内的压力。

公开(公告)号：US08178851B2

公开(公告)日：2012-05-15

申请号：US12847167

申请日：2010-07-30

申请人： Pushkarraj V. Deshmukh ,  Jeffrey J. Gronsky ,  Paul E. Fischione

发明人： Pushkarraj V. Deshmukh ,  Jeffrey J. Gronsky ,  Paul E. Fischione

IPC分类号： G01N1/28 ,  G01N1/44 ,  G01N1/00

CPC分类号： G01N21/0303 ,  H01J37/20 ,  H01J37/228 ,  H01J2237/2002 ,  H01J2237/2003 ,  H01J2237/206 ,  H01J2237/2065

摘要： An in situ optical specimen holder is disclosed which may be utilized for imaging and analysis during dynamic experimentation. This holder assembly includes a set of focusing and reflection optics along with an environmental cell. Electromagnetic radiation can be used to optically excite the specimen in the presence or absence of fluid. A highly reflective mirror may be used to focus the radiation on to the specimen without the presence of any heating components within the cell. The spot size of the irradiation at the specimen surface can be varied, thus exciting only a specific region on the specimen. The window type cell provides a variable fluid path length ranging from the specimen thickness to 500 μm. The holder has the provision to continuously circulate fluids over the specimen. The pressure within the cell can be regulated by controlling the flow rate of the fluids and the speed of the pumps.

摘要翻译： 公开了一种在动态实验中可用于成像和分析的原位光学样本保持器。 该支架组件包括一组聚焦和反射光学器件以及环境细胞。 在存在或不存在流体的情况下，电磁辐射可用于光学激发样品。 可以使用高反射镜来将辐射聚焦在样品上，而不会在电池内存在任何加热组分。 样品表面的照射点尺寸可以变化，从而仅激发样品上的特定区域。 窗型细胞提供从样品厚度到500μm的可变流体路径长度。 支架具有使流体在试样上连续循环的条件。 可以通过控制流体的流量和泵的速度来调节电池内的压力。

公开(公告)号：US20120024086A1

公开(公告)日：2012-02-02

申请号：US12845486

申请日：2010-07-28

申请人： Halina Stabacinskiene ,  Jeffrey J. Gronsky ,  Christine M. Thomas ,  Pushkarraj V. Deshmukh ,  Alan C. Robins ,  Paul E. Fischione

发明人： Halina Stabacinskiene ,  Jeffrey J. Gronsky ,  Christine M. Thomas ,  Pushkarraj V. Deshmukh ,  Alan C. Robins ,  Paul E. Fischione

IPC分类号： B01L3/00

CPC分类号： G01N23/20033 ,  H01J37/20 ,  H01J37/26 ,  H01J2237/2001 ,  H01J2237/20207 ,  H01J2237/204

摘要： An improved cryogenic specimen holder for imaging and analysis facilitates imaging at very high tilt angles with a large field of view. A retractable specimen holder tip protects the specimen during transport. An optimized Dewar design is positioned at a fixed, tilted angle with respect to the axis of the holder, providing a means of continuously cooling the specimen irrespective of the high tilt angle and the amount of liquid nitrogen present in the vessel. The Dewar neck design reduces the entrapment of nitrogen gas bubbles and its shape prevents the spilling of liquid nitrogen at high tilt angles. The specimen holder has a retractable tip that completely encapsulates the specimen within a shielded environment internal to the specimen holder body. The cooling and specimen transfer mechanisms reduce thermal drift and the detrimental effects of vibrations generated by both the evaporation of liquid nitrogen present in the Dewar as well as other environmental effects.

摘要翻译： 用于成像和分析的改进的低温试样保持器便于在具有大视场的非常高的倾斜角下进行成像。 可伸缩的样品架头在运输过程中保护样品。 优化的杜瓦设计相对于保持器的轴线定位成固定的倾斜角度，提供连续冷却样品的手段，而不管存在于容器中的高倾斜角和液氮量。 杜瓦瓶颈设计减少了氮气气泡的夹带，其形状可以防止液氮在高倾角下溢出。 样品架具有可收缩的尖端，其将样品完全包封在样品保持体内部的屏蔽环境内。 冷却和样品转移机制减少了热漂移和杜瓦瓶中存在的液氮蒸发产生的振动的不利影响以及其他环境影响。

公开(公告)号：US5633502A

公开(公告)日：1997-05-27

申请号：US515271

申请日：1995-08-11

申请人： Paul E. Fischione

发明人： Paul E. Fischione

IPC分类号： G01N1/32 ,  H01J37/32 ,  H01J37/18 ,  H01J37/30

CPC分类号： H01J37/32082 ,  G01N1/32 ,  H01J2237/335

摘要： A plasma processing method and apparatus are disclosed in which a low energy, high frequency plasma is utilized to remove both amorphous damage resulting from various specimen preparation techniques and contamination, mainly in form of hydrocarbons, from transmission electron microscopy specimens and specimen holders. The system comprises a vacuum system, a plasma chamber into which the specimen and the specimen holder are inserted, a housing having an access port with removable inner sleeve components, and a high frequency power supply which is coupled to the plasma chamber and enables both the generation and maintenance of the plasma. The inner sleeve components are preferably capable of accepting specimen holders produced by all manufacturers of transmission electron microscopes. In the preferred embodiment, the vacuum system comprises an oil-free vacuum system. To commence processing, the vacuum system is engaged for the evacuation of the plasma chamber for subsequent formation of the plasma. Processed gas may be introduced into the plasma chamber through the automated operation of various switches and valves. The plasma formation is preferably initiated through the coupling of an oscillating field to the plasma chamber. Many processed gas mixtures can be used. The preferred processed gas mixture comprises a mixture of twenty-five percent oxygen and seventy-five percent argon. The oxygen chemically reacts with hydrocarbons on the specimen and specimen holder and converts them to CO.sub.2 and H.sub.2 O. The argon provides the means to reduce specimen amorphous damage.

摘要翻译： 公开了一种等离子体处理方法和装置，其中使用低能量，高频等离子体来从透射电子显微镜试样和样品保持器中除去由各种样品制备技术产生的无定形损伤，主要以烃的形式污染。 该系统包括一个真空系统，一个等离子体室，试样和试样架插入该等离子体室中，一个壳体具有一个具有可拆卸的内部套筒部件的进入口，以及耦合到该等离子体室的高频电源， 发电和维护等离子体。 内套筒部件优选能够接收由所有透射电子显微镜制造商生产的试样支架。 在优选实施例中，真空系统包括无油真空系统。 为了开始处理，真空系统被接合用于等离子体室的排空，以便随后形成等离子体。 加工气体可以通过各种开关和阀的自动操作被引入到等离子体室中。 等离子体形成优选通过将振荡场耦合到等离子体室来启动。 可以使用许多加工气体混合物。 优选的处理气体混合物包括二十五％的氧气和七十五％的氩气的混合物。 氧气与样品和样品架上的碳氢化合物反应，并将其转化为CO2和H2O。 氩提供了减少样品无定形损伤的手段。

公开(公告)号：US07219565B2

公开(公告)日：2007-05-22

申请号：US10409347

申请日：2003-04-07

申请人： Paul E. Fischione ,  Jeff Gronsky

发明人： Paul E. Fischione ,  Jeff Gronsky

IPC分类号： G01L1/22 ,  G01N3/02

CPC分类号： H01J37/20 ,  H01J2237/20 ,  H01J2237/2007 ,  H01J2237/20207 ,  H01J2237/204

摘要： A specimen holding apparatus includes a main body, a specimen supporting surface provided on the main body, and a restraining element movable along the main body in a direction substantially parallel to the longitudinal axis of the main body from a first position in which the restraining element is removed from the specimen supporting surface to a second position in which the restraining element encroaches over the specimen supporting surface. An alternate specimen holding apparatus includes a main body, a specimen supporting surface provided on the main body in a first horizontal plane, and a restraining element attached to the main body that is rotatable in a second horizontal plane substantially parallel to the first horizontal plane between a first position in which the restraining element is removed from the specimen supporting surface and a second position in which the restraining element encroaches over the specimen supporting surface.

摘要翻译： 试样保持装置包括主体，设置在主体上的试样支撑面，以及沿着与本体的纵轴基本平行的方向沿着主体移动的限制元件，其中限制元件 从试样支撑面移除到限制元件侵入试样支承面的第二位置。 替代的样本保持装置包括主体，在第一水平面上设置在主体上的样本支撑表面和附接到主体的限制元件，该限制元件可在基本上平行于第一水平面的第二水平面中旋转，第二水平面 其中限制元件从样品支撑表面移除的第一位置和约束元件侵入到样品支撑表面上的第二位置。

公开(公告)号：US09010202B2

公开(公告)日：2015-04-21

申请号：US13560647

申请日：2012-07-27

申请人： Halina Stabacinskiene ,  Jeffrey J. Gronsky ,  Christine M. Thomas ,  Pushkarraj V. Deshmukh ,  Alan C. Robins ,  Paul E. Fischione

发明人： Halina Stabacinskiene ,  Jeffrey J. Gronsky ,  Christine M. Thomas ,  Pushkarraj V. Deshmukh ,  Alan C. Robins ,  Paul E. Fischione

IPC分类号： B01L3/00 ,  G01N21/00 ,  G01N23/20 ,  H01J37/20 ,  H01J37/26 ,  B01L7/00

CPC分类号： G01N23/20033 ,  B01L7/50 ,  G01N2223/612 ,  H01J37/20 ,  H01J37/26 ,  H01J2237/0216 ,  H01J2237/2001 ,  H01J2237/20207 ,  H01J2237/204

摘要： An improved cryogenic specimen holder for imaging and analysis facilitates imaging at very high tilt angles with a large field of view. A retractable specimen holder tip protects the specimen during transport. An optimized Dewar design is positioned at a fixed, tilted angle with respect to the axis of the holder, providing a means of continuously cooling the specimen irrespective of the high tilt angle and amount of liquid nitrogen present in the vessel. The Dewar neck design reduces entrapment of nitrogen gas bubbles and its shape prevents the spilling of liquid nitrogen at high tilt angles. The specimen holder has a retractable tip that completely encapsulates the specimen within a shielded environment internal to the specimen holder body. The cooling and specimen transfer mechanisms reduce thermal drift and the detrimental effects of vibrations generated by both the evaporation of liquid nitrogen present in the Dewar and other environmental effects.

摘要翻译： 用于成像和分析的改进的低温试样保持器便于在具有大视场的非常高的倾斜角下进行成像。 可伸缩的样品架头在运输过程中保护样品。 优化的杜瓦设计相对于保持器的轴线定位成固定的倾斜角度，提供连续冷却样品的手段，而不管存在于容器中的高的倾斜角和液氮量。 杜瓦瓶颈设计减少了氮气气泡的夹带，其形状可以防止液氮在高倾角下溢出。 样品架具有可收缩的尖端，其将样品完全包封在样品保持体内部的屏蔽环境内。 冷却和样品转移机制降低了热漂移和由杜瓦瓶中存在的液氮蒸发和其他环境影响产生的振动的不利影响。