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公开(公告)号:US07799731B2
公开(公告)日:2010-09-21
申请号:US10490116
申请日:2002-09-27
CPC分类号: B01J37/0215 , B01J33/00 , B01J35/004 , B01J35/10 , B01J37/0244 , B01J37/347 , C01G23/04 , C01G23/047 , C01P2002/72 , C01P2002/74 , C01P2004/03 , C01P2004/04 , C01P2004/86 , C23C14/083
摘要: A photocatalyst according to the invention comprises a photocatalytic film of a compound of titanium and oxygen and is characterized in that the photocatalytic film is made porous and has 0.02 or higher value as a value calculated by dividing the arithmetical mean deviation of profile Ra with the film thickness. The photocatalytic film can also be specified by the intensity ratio between x-ray diffraction peaks of the anatase structure of titanium oxide. Such a porous photocatalytic material can be obtained by a reactive sputtering method in conditions of adjusting film formation parameters such as the film formation rate, the sputtering pressure, the substrate temperature, the oxygen partial pressure and the like in proper ranges, respectively, and the photocatalyst material is provided with excellent decomposition and hydrophilization capability.
摘要翻译: 根据本发明的光催化剂包括钛和氧化合物的光催化膜,其特征在于,光催化膜是多孔的,并且具有0.02或更高的值作为通过将膜的算术平均偏差除以膜的计算值 厚度。 也可以通过氧化钛的锐钛矿结构的x射线衍射峰之间的强度比来确定光催化膜。 这种多孔光催化材料可以通过分别在适当范围内调节成膜速度,溅射压力,基板温度,氧分压等成膜参数的条件下通过反应溅射法获得, 光催化剂材料具有优异的分解和亲水化能力。
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公开(公告)号:US20100210447A1
公开(公告)日:2010-08-19
申请号:US12769343
申请日:2010-04-28
IPC分类号: B01J37/34
CPC分类号: B01J37/0215 , B01J33/00 , B01J35/004 , B01J35/10 , B01J37/0244 , B01J37/347 , C01G23/04 , C01G23/047 , C01P2002/72 , C01P2002/74 , C01P2004/03 , C01P2004/04 , C01P2004/86 , C23C14/083
摘要: A photocatalyst according to the invention comprises a photocatalytic film of a compound of titanium and oxygen and is characterized in that the photocatalytic film is made porous and has 0.02 or higher value as a value calculated by dividing the arithmetical mean deviation of profile Ra with the film thickness. The photocatalytic film can also be specified by the intensity ratio between x-ray diffraction peaks of the anatase structure of titanium oxide. Such a porous photocatalytic material can be obtained by a reactive sputtering method in conditions of adjusting film formation parameters such as the film formation rate, the sputtering pressure, the substrate temperature, the oxygen partial pressure and the like in proper ranges, respectively, and the photocatalyst material is provided with excellent decomposition and hydrophilization capability.
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公开(公告)号:US08022011B2
公开(公告)日:2011-09-20
申请号:US12769343
申请日:2010-04-28
CPC分类号: B01J37/0215 , B01J33/00 , B01J35/004 , B01J35/10 , B01J37/0244 , B01J37/347 , C01G23/04 , C01G23/047 , C01P2002/72 , C01P2002/74 , C01P2004/03 , C01P2004/04 , C01P2004/86 , C23C14/083
摘要: A photocatalyst according to the invention comprises a photocatalytic film of a compound of titanium and oxygen and is characterized in that the photocatalytic film is made porous and has 0.02 or higher value as a value calculated by dividing the arithmetical mean deviation of profile Ra with the film thickness. The photocatalytic film can also be specified by the intensity ratio between x-ray diffraction peaks of the anatase structure of titanium oxide. Such a porous photocatalytic material can be obtained by a reactive sputtering method in conditions of adjusting film formation parameters such as the film formation rate, the sputtering pressure, the substrate temperature, the oxygen partial pressure and the like in proper ranges, respectively, and the photocatalyst material is provided with excellent decomposition and hydrophilization capability.
摘要翻译: 根据本发明的光催化剂包括钛和氧化合物的光催化膜,其特征在于,光催化膜是多孔的,并且具有0.02或更高的值作为通过将膜的算术平均偏差除以膜的计算值 厚度。 也可以通过氧化钛的锐钛矿结构的x射线衍射峰之间的强度比来确定光催化膜。 这种多孔光催化材料可以通过分别在适当范围内调节成膜速度,溅射压力,基板温度,氧分压等成膜参数的条件下通过反应溅射法获得, 光催化剂材料具有优异的分解和亲水化能力。
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公开(公告)号:US07608562B2
公开(公告)日:2009-10-27
申请号:US12274462
申请日:2008-11-20
IPC分类号: B01J21/06 , B01J37/02 , B01J37/08 , B05D5/12 , B05D1/36 , B05D1/38 , C23C14/06 , C23C14/08 , C23C14/34
CPC分类号: C23C14/5853 , B01J21/063 , B01J35/004 , B01J37/347 , C23C14/083 , C23C14/541 , H01J2237/2001 , H01J2237/2065
摘要: A method of producing a photocatalyst according to the invention comprises forming an amorphous titanium oxide and heat-treating it in an atmosphere containing oxygen, whereby a photocatalyst having a good photocatalysis can be obtained. In particular, the amorphous titanium oxide is obtained by using the reactive sputtering method and via deposition at a low temperature and at a high film formation rate. This apparatus can be provided with cooling means to allow enhancement of the throughput of the film formation process.
摘要翻译: 根据本发明的制备光催化剂的方法包括形成无定形氧化钛并在含氧的气氛中进行热处理,由此可以获得具有良好光催化作用的光催化剂。 特别地,通过使用反应性溅射法和通过在低温和高成膜速率下沉积来获得无定形氧化钛。 该装置可以设置有冷却装置,以提高成膜过程的生产量。
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公开(公告)号:US20090134022A1
公开(公告)日:2009-05-28
申请号:US12274462
申请日:2008-11-20
IPC分类号: C23C14/34
CPC分类号: C23C14/5853 , B01J21/063 , B01J35/004 , B01J37/347 , C23C14/083 , C23C14/541 , H01J2237/2001 , H01J2237/2065
摘要: A method of producing a photocatalyst according to the invention comprises forming an amorphous titanium oxide and heat-treating it in an atmosphere containing oxygen, whereby a photocatalyst having a good photocatalysis can be obtained. In particular, the amorphous titanium oxide is obtained by using the reactive sputtering method and via deposition at a low temperature and at a high film formation rate. This apparatus can be provided with cooling means to allow enhancement of the throughput of the film formation process.
摘要翻译: 根据本发明的制备光催化剂的方法包括形成无定形氧化钛并在含氧的气氛中进行热处理,由此可以获得具有良好光催化作用的光催化剂。 特别地,通过使用反应性溅射法和通过在低温和高成膜速率下沉积来获得无定形氧化钛。 该装置可以设置有冷却装置,以提高成膜过程的生产量。
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公开(公告)号:US20050020444A1
公开(公告)日:2005-01-27
申请号:US10496010
申请日:2002-11-29
CPC分类号: C23C14/5853 , B01J21/063 , B01J35/004 , B01J37/347 , C23C14/083 , C23C14/541 , H01J2237/2001 , H01J2237/2065
摘要: A method of producing a photocatalyst according to the invention comprises forming an amorphous titanium oxide and heat-treating it in an atmosphere containing oxygen, whereby a photocatalyst having a good photocatalysis can be obtained. In particular, the amorphous titanium oxide is obtained by using the reactive sputtering method and via deposition at a low temperature and at a high film formation rate. This apparatus can be provided with cooling means to allow enhancement of the throughput of the film formation process.
摘要翻译: 根据本发明的制备光催化剂的方法包括形成无定形氧化钛并在含氧的气氛中进行热处理,由此可以获得具有良好光催化作用的光催化剂。 特别地,通过使用反应性溅射法和通过在低温和高成膜速率下沉积来获得无定形氧化钛。 该装置可以设置有冷却装置,以提高成膜过程的生产量。
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7.
公开(公告)号:US20100206723A1
公开(公告)日:2010-08-19
申请号:US12769390
申请日:2010-04-28
IPC分类号: C23C14/34
CPC分类号: B01J37/0215 , B01J33/00 , B01J35/004 , B01J35/10 , B01J37/0244 , B01J37/347 , C01G23/04 , C01G23/047 , C01P2002/72 , C01P2002/74 , C01P2004/03 , C01P2004/04 , C01P2004/86 , C23C14/083
摘要: A photocatalyst according to the invention comprises a photocatalytic film of a compound of titanium and oxygen and is characterized in that the photocatalytic film is made porous and has 0.02 or higher value as a value calculated by dividing the arithmetical mean deviation of profile Ra with the film thickness. The photocatalytic film can also be specified by the intensity ratio between x-ray diffraction peaks of the anatase structure of titanium oxide. Such a porous photocatalytic material can be obtained by a reactive sputtering method in conditions of adjusting film formation parameters such as the film formation rate, the sputtering pressure, the substrate temperature, the oxygen partial pressure and the like in proper ranges, respectively, and the photocatalyst material is provided with excellent decomposition and hydrophilization capability.
摘要翻译: 根据本发明的光催化剂包括钛和氧化合物的光催化膜,其特征在于,光催化膜是多孔的,并且具有0.02或更高的值作为通过将膜的算术平均偏差除以膜的计算值 厚度。 也可以通过氧化钛的锐钛矿结构的x射线衍射峰之间的强度比来确定光催化膜。 这种多孔光催化材料可以通过分别在适当范围内调节成膜速度,溅射压力,基板温度,氧分压等成膜参数的条件下通过反应溅射法获得, 光催化剂材料具有优异的分解和亲水化能力。
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公开(公告)号:US07462578B2
公开(公告)日:2008-12-09
申请号:US10496010
申请日:2002-11-29
IPC分类号: C23C14/08 , C23C14/10 , C23C14/14 , C23C14/34 , C23C14/58 , B01J37/025 , B01J37/08 , B01J37/14 , B05D1/38 , B05D3/02 , B05D5/12
CPC分类号: C23C14/5853 , B01J21/063 , B01J35/004 , B01J37/347 , C23C14/083 , C23C14/541 , H01J2237/2001 , H01J2237/2065
摘要: A method of producing a photocatalyst according to the invention comprises forming an amorphous titanium oxide and heat-treating it in an atmosphere containing oxygen, whereby a photocatalyst having a good photocatalysis can be obtained. In particular, the amorphous titanium oxide is obtained by using the reactive sputtering method and via deposition at a low temperature and at a high film formation rate. This apparatus can be provided with cooling means to allow enhancement of the throughput of the film formation process.
摘要翻译: 根据本发明的制备光催化剂的方法包括形成无定形氧化钛并在含氧的气氛中进行热处理,由此可以获得具有良好光催化作用的光催化剂。 特别地,通过使用反应性溅射法和通过在低温和高成膜速率下沉积来获得无定形氧化钛。 该装置可以设置有冷却装置,以提高成膜过程的生产量。
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