摘要:
In a pattern writing apparatus for writing a plurality of pattern blocks of LSI chips which are arrayed on a substrate, provided are a rasterization part (312) for rasterizing LSI data 931, an expansion/contraction rate calculation part 313 for obtaining the expansion/contraction rate of a substrate (9) on the basis of an image from a camera (15a), a data correction part (314) for correcting raster data (932) in accordance with the expansion/contraction rate and a data generation part (315) for generating writing data on the basis of the corrected data. From the writing data generated by the data generation part (315), an array of pattern blocks in which the width of a non-pattern region between adjacent ones of the pattern blocks is changed while the width of each pattern block is maintained is written on the substrate.
摘要:
A beam direct-writing apparatus for writing a pattern on a semiconductor substrate is provided with a head part for emitting an electron beam for direct writing and a computer for performing a computation. A program is installed in the computer in advance to obtain a path passing through a plurality of writing points on the substrate. The program divides a region (6) dotted with writing points (60) into a plurality of divided regions on the basis of the density of the points contained therein and sets a passing order among a plurality of divided regions by using an algorithm for generating the Hilbert Curve. Subsequently, the program sets a path in each of the divided regions by using a path setting algorithm and subsequently connects the path in one divided region to the path in another divided region according to the passing order, to obtain a final path (74). This allows an efficient beam direct-writing on a substrate (9).
摘要:
A process for preparing low molecular weight polytetrafluoroethylene having a melting point of 250.degree. C. to 325.degree. C. comprising polymerizing tetrafluoroethylene in at least one polymerization solvent selected from the group consisting of hydrochlorofluorocarbons, hydrofluorocarbons and perfluorocarbons which have boiling points in the range between -10.degree. C. and 70.degree. C. under constant pressure by the supplement of tetrafluoroethylene. According to this process, the low molecular weight polytetrafluoroethylene which is useful as an additive to various materials is produced in the solvent which has a low ozone destruction factor or does not destroy the ozone, under economically advantageous low pressure which can be controlled safely.
摘要:
A television signal determination circuit is associated with an automatic tuning system, which automatically tunes a television set to local channels, in order to determine whether received signals are desired television signals. The television signal determination circuit comprises a first counter means for counting received synchronizing signals for a predetermined period of time, a second counter means for counting reference clock signals for the predetermined period of time, and a determination means for determining whether the synchronizing signals are received by a predetermined number within the predetermined period of time by comparing output signals from the first and second counter means.
摘要:
Input CAD data and run-length data obtained by performing a RIP process on the input CAD data are acquired. A predetermined conversion process is performed on at least one of the input CAD data and the run-length data to make the data formats of both data comparable and then both data are compared with each other to detect an area having a difference as a defect area in the run-length data. This provides a technique to detect a defect in the run-length data to be used for drawing of a figure before the execution of drawing with a simple structure.
摘要:
A technique capable of recognizing a usage state of a power of a user, curbing additionally needed power consumption is provided. Scanning bit stream data containing information regarding scan frequencies and an initial-stage power of each of the frequencies is outputted from an output part, decomposed into data of respective scan frequencies, transformed to time series digital data in an IFFT module, transformed to scanning analog data by D/A transform in an AFE, and transmitted to a power line. Reflected analog data received from the power line is transformed by A/D transform in the AFE, transformed to frequency series reflected spectrum data in the FFT module, and sent to a check part. The check part checks combination of attenuation rates of respective scan frequencies against registered pattern data registered in a pattern correspondence relationship storage part, and outputs a related connection state of an outlet as a checked result.
摘要:
The present invention provides an improved technique for extracting contours in an image without waiting for processing of all the scanning lines in the image. Run-data on two boundary scanning lines, each representing the boundary coordinates at which the image changes, are stored in a run-data buffer. A contour extraction unit compares two sets of the run-data with one another to extract segment vectors and detect a set of closed-loop vectors defining a contour of a image area. Three registers in a working buffer store specific data representing the relationship between a starting point and a terminal point of each vector sequence and are used in detecting closed-loop vectors. A vector data memory stores vector data including coordinate values of start and end points of closed-loop vectors. The contour extraction unit detects a vector sequence which has a starting point identical with a terminal point as a function of the data registered in the working buffer to identify the vector sequence as a closed-loop.
摘要:
A speed control apparatus for an engine which is equipped with an air quantity control device for controlling an intake air quantity to the engine when being in an idling state and a speed control device for determining a control amount of the air quantity control device on the basis of the actual engine idle speed. For controlling the engine idle speed, the apparatus comprises a state variable outputting section for outputting the actual engine idle speed, the control amount of the air quantity control device and an ignition timing control amount of an igniter of the engine as state variables representing an internal state of a dynamic model of the engine, a speed deviation accumulating section for accumulating a deviation between the target speed and the actual engine idle speed, and an ignition timing deviation accumulating section for accumulating a deviation between a target ignition timing and the actual ignition timing. The control amount of the air quantity control device and the ignition timing control amount are calculated on the basis of optimal feedback gains of an air system and an ignition system predetermined on the basis of the dynamic model, the state variables, the speed deviation accumulated value and the ignition timing deviation accumulated value. This arrangement can simultaneously control the air quantity and the ignition timing without using an observer to easily control the engine idle speed to the target speed.
摘要:
An automatic tuning scheme for use in TV receivers includes a start/stop circuit which creates a search start signal and a search stop signal upon the receipt of a search start instruction and a detected incoming signal, respectively, a tuning voltage generator which generates a gradually varying tuning voltage under control of the search start signal and search stop signal, and a memory circuit for storing the tuning voltage from the generator when desired. The tuning voltage stored in the memory circuit is supplied to a tuner including a well known voltage-sensitive capacitance diode.