Pattern writing apparatus, pattern writing method and substrate
    1.
    发明授权
    Pattern writing apparatus, pattern writing method and substrate 失效
    图案写入装置,图案写入方法和基板

    公开(公告)号:US06809755B2

    公开(公告)日:2004-10-26

    申请号:US10424768

    申请日:2003-04-29

    申请人: Kazuhiro Nakai

    发明人: Kazuhiro Nakai

    IPC分类号: H01L21027

    CPC分类号: G03F7/70508 G03F7/704

    摘要: In a pattern writing apparatus for writing a plurality of pattern blocks of LSI chips which are arrayed on a substrate, provided are a rasterization part (312) for rasterizing LSI data 931, an expansion/contraction rate calculation part 313 for obtaining the expansion/contraction rate of a substrate (9) on the basis of an image from a camera (15a), a data correction part (314) for correcting raster data (932) in accordance with the expansion/contraction rate and a data generation part (315) for generating writing data on the basis of the corrected data. From the writing data generated by the data generation part (315), an array of pattern blocks in which the width of a non-pattern region between adjacent ones of the pattern blocks is changed while the width of each pattern block is maintained is written on the substrate.

    摘要翻译: 在用于写入排列在基板上的多个LSI芯片的图形块的图形写入装置中,设置有用于光栅化LSI数据931的光栅化部(312),用于获得扩展/收缩的扩展/收缩率计算部313 基于来自照相机(15a)的图像的基板(9)的速率,用于根据扩展/收缩率校正光栅数据(932)的数据校正部(314)和数据生成部(315) 用于基于校正数据生成写入数据。 根据由数据生成部(315)生成的写入数据,在保持了各图案块的宽度的同时改变相邻的图案块之间的非图案区域的宽度改变的图案块阵列被写入 底物。

    Beam direct-writing apparatus, imaging apparatus and method of obtaining preferable path passing through points
    2.
    发明授权
    Beam direct-writing apparatus, imaging apparatus and method of obtaining preferable path passing through points 失效
    光束直写装置,成像装置和获得优选路径通过点的方法

    公开(公告)号:US06717160B2

    公开(公告)日:2004-04-06

    申请号:US10355178

    申请日:2003-01-31

    IPC分类号: G21K510

    摘要: A beam direct-writing apparatus for writing a pattern on a semiconductor substrate is provided with a head part for emitting an electron beam for direct writing and a computer for performing a computation. A program is installed in the computer in advance to obtain a path passing through a plurality of writing points on the substrate. The program divides a region (6) dotted with writing points (60) into a plurality of divided regions on the basis of the density of the points contained therein and sets a passing order among a plurality of divided regions by using an algorithm for generating the Hilbert Curve. Subsequently, the program sets a path in each of the divided regions by using a path setting algorithm and subsequently connects the path in one divided region to the path in another divided region according to the passing order, to obtain a final path (74). This allows an efficient beam direct-writing on a substrate (9).

    摘要翻译: 用于在半导体衬底上写入图案的光束直写装置设置有用于发射用于直接写入的电子束的头部和用于执行计算的计算机。 预先在计算机中安装程序以获得通过基板上的多个写入点的路径。 该程序根据其中所包含的点的密度将带有写入点(60)的区域(6)分成多个分割区域,并且通过使用用于生成多个分割区域的算法来设置多个分割区域之间的通过顺序 希尔伯特曲线。 随后,程序通过使用路径设置算法设置每个分割区域中的路径,然后根据传递顺序将一个分割区域中的路径连接到另一分割区域中的路径,以获得最终路径(74)。 这允许在衬底(9)上有效的光束直接写入。

    Process for preparing low molecular weight polytetrafluoroethylene
    3.
    发明授权
    Process for preparing low molecular weight polytetrafluoroethylene 失效
    制备低分子量聚四氟乙烯的方法

    公开(公告)号:US5789504A

    公开(公告)日:1998-08-04

    申请号:US619654

    申请日:1996-03-22

    CPC分类号: C08F14/26

    摘要: A process for preparing low molecular weight polytetrafluoroethylene having a melting point of 250.degree. C. to 325.degree. C. comprising polymerizing tetrafluoroethylene in at least one polymerization solvent selected from the group consisting of hydrochlorofluorocarbons, hydrofluorocarbons and perfluorocarbons which have boiling points in the range between -10.degree. C. and 70.degree. C. under constant pressure by the supplement of tetrafluoroethylene. According to this process, the low molecular weight polytetrafluoroethylene which is useful as an additive to various materials is produced in the solvent which has a low ozone destruction factor or does not destroy the ozone, under economically advantageous low pressure which can be controlled safely.

    摘要翻译: PCT No.PCT / JP94 / 01558 Sec。 371日期:1996年3月22日 102(e)1996年3月22日PCT PCT 1994年9月22日PCT公布。 公开号WO95 / 08580 日期:1995年3月30日一种制备熔点为250℃至325℃的低分子量聚四氟乙烯的方法,包括在至少一种聚合溶剂中聚合四氟乙烯,所述聚合溶剂选自氢氟氯烃,氢氟烃和具有沸点的全氟化碳 通过补充四氟乙烯在恒定压力下在-10℃至70℃的范围内。 根据该方法,可以在可以安全控制的经济上有利的低压下,在具有低臭氧破坏因子或不破坏臭氧的溶剂中生产可用作各种材料的添加剂的低分子量聚四氟乙烯。

    Television signal determination in an automatic tuning system
    5.
    发明授权
    Television signal determination in an automatic tuning system 失效
    自动调谐系统中的电视信号确定

    公开(公告)号:US4205347A

    公开(公告)日:1980-05-27

    申请号:US900246

    申请日:1978-04-26

    IPC分类号: H03J7/18 H04N5/50 H04N5/44

    CPC分类号: H04N5/50 H03J7/18

    摘要: A television signal determination circuit is associated with an automatic tuning system, which automatically tunes a television set to local channels, in order to determine whether received signals are desired television signals. The television signal determination circuit comprises a first counter means for counting received synchronizing signals for a predetermined period of time, a second counter means for counting reference clock signals for the predetermined period of time, and a determination means for determining whether the synchronizing signals are received by a predetermined number within the predetermined period of time by comparing output signals from the first and second counter means.

    摘要翻译: 电视信号确定电路与自动调谐系统相关联,该自动调谐系统将电视机自动调谐到本地通道,以便确定接收的信号是否是期望的电视信号。 电视信号判定电路包括:第一计数器装置,用于对预定时间段的接收到的同步信号进行计数;第二计数器装置,用于在预定时间段内对参考时钟信号进行计数;以及确定装置,用于确定是否接收到同步信号 通过比较来自第一和第二计数器装置的输出信号,在预定时间段内预定数量。

    Defect inspection apparatus, defect inspection program, recording medium storing defect inspection program, figure drawing apparatus and figure drawing system
    6.
    发明授权
    Defect inspection apparatus, defect inspection program, recording medium storing defect inspection program, figure drawing apparatus and figure drawing system 失效
    缺陷检查装置,缺陷检查程序,存储缺陷检查程序的记录介质,图形绘制装置和图形绘制系统

    公开(公告)号:US08300918B2

    公开(公告)日:2012-10-30

    申请号:US12045774

    申请日:2008-03-11

    IPC分类号: G06K9/00

    CPC分类号: G06T7/0004

    摘要: Input CAD data and run-length data obtained by performing a RIP process on the input CAD data are acquired. A predetermined conversion process is performed on at least one of the input CAD data and the run-length data to make the data formats of both data comparable and then both data are compared with each other to detect an area having a difference as a defect area in the run-length data. This provides a technique to detect a defect in the run-length data to be used for drawing of a figure before the execution of drawing with a simple structure.

    摘要翻译: 获取通过对输入的CAD数据执行RIP处理获得的CAD数据和游程长度数据。 对输入的CAD数据和游程长度数据中的至少一个执行预定的转换处理,以使两个数据的数据格式相当,然后将两个数据进行比较,以检测具有差异的区域作为缺陷区域 在游程长度数据中。 这提供了一种技术,用于以简单的结构检测执行绘图之前用于绘制图形的游程长度数据中的缺陷。

    INDOOR LINE TERMINAL STATE DETERMINATION APPARATUS, PLC ADAPTOR, AND METHOD FOR DETERMINING INDOOR LINE TERMINAL STATE
    7.
    发明申请
    INDOOR LINE TERMINAL STATE DETERMINATION APPARATUS, PLC ADAPTOR, AND METHOD FOR DETERMINING INDOOR LINE TERMINAL STATE 审中-公开
    室内线终端状态测定装置,PLC适配器及确定室内线终端状态的方法

    公开(公告)号:US20110298595A1

    公开(公告)日:2011-12-08

    申请号:US13150967

    申请日:2011-06-01

    IPC分类号: G05B11/01

    摘要: A technique capable of recognizing a usage state of a power of a user, curbing additionally needed power consumption is provided. Scanning bit stream data containing information regarding scan frequencies and an initial-stage power of each of the frequencies is outputted from an output part, decomposed into data of respective scan frequencies, transformed to time series digital data in an IFFT module, transformed to scanning analog data by D/A transform in an AFE, and transmitted to a power line. Reflected analog data received from the power line is transformed by A/D transform in the AFE, transformed to frequency series reflected spectrum data in the FFT module, and sent to a check part. The check part checks combination of attenuation rates of respective scan frequencies against registered pattern data registered in a pattern correspondence relationship storage part, and outputs a related connection state of an outlet as a checked result.

    摘要翻译: 提供了能够识别用户的电力的使用状态的技术,抑制另外需要的功率消耗。 从输出部分输出包含关于扫描频率和每个频率的初始功率的信息的扫描比特流数据,分解成各个扫描频率的数据,转换成IFFT模块中的时间序列数字数据,转换成扫描模拟 数据通过在AFE中的D / A变换,并被发送到电力线。 从AFE接收到的反射模拟数据通过AFE中的A / D变换进行变换,转换为FFT模块中的频率序列反射光谱数据,并发送到检查部分。 检查部分检查各个扫描频率的衰减率与登记在图形对应关系存储部分中的登记图案数据的组合,并输出出口的相关连接状态作为检查结果。

    Method and apparatus for extracting a contour of an image
    8.
    发明授权
    Method and apparatus for extracting a contour of an image 失效
    用于提取图像轮廓的方法和装置

    公开(公告)号:US5379350A

    公开(公告)日:1995-01-03

    申请号:US19374

    申请日:1993-02-18

    IPC分类号: G06T7/60 G06T5/00 G06K9/48

    CPC分类号: G06T7/0085

    摘要: The present invention provides an improved technique for extracting contours in an image without waiting for processing of all the scanning lines in the image. Run-data on two boundary scanning lines, each representing the boundary coordinates at which the image changes, are stored in a run-data buffer. A contour extraction unit compares two sets of the run-data with one another to extract segment vectors and detect a set of closed-loop vectors defining a contour of a image area. Three registers in a working buffer store specific data representing the relationship between a starting point and a terminal point of each vector sequence and are used in detecting closed-loop vectors. A vector data memory stores vector data including coordinate values of start and end points of closed-loop vectors. The contour extraction unit detects a vector sequence which has a starting point identical with a terminal point as a function of the data registered in the working buffer to identify the vector sequence as a closed-loop.

    摘要翻译: 本发明提供了一种用于提取图像中的轮廓的改进技术,而不等待图像中的所有扫描线的处理。 两个边界扫描线上的运行数据,每个表示图像改变的边界坐标,都存储在运行数据缓冲区中。 轮廓提取单元将两组运行数据彼此进行比较以提取段向量并检测定义图像区域的轮廓的一组闭环向量。 工作缓冲器中的三个寄存器存储表示每个向量序列的起始点和终点之间关系的特定数据,并用于检测闭环向量。 矢量数据存储器存储包括闭环矢量的开始点和结束点的坐标值的矢量数据。 轮廓提取单元根据登记在工作缓冲器中的数据来检测具有与终点相同的起始点的向量序列,以将向量序列识别为闭环。

    Apparatus for controlling speed of internal combustion engine
    9.
    发明授权
    Apparatus for controlling speed of internal combustion engine 失效
    用于控制内燃机转速的装置

    公开(公告)号:US5269271A

    公开(公告)日:1993-12-14

    申请号:US896389

    申请日:1992-06-10

    摘要: A speed control apparatus for an engine which is equipped with an air quantity control device for controlling an intake air quantity to the engine when being in an idling state and a speed control device for determining a control amount of the air quantity control device on the basis of the actual engine idle speed. For controlling the engine idle speed, the apparatus comprises a state variable outputting section for outputting the actual engine idle speed, the control amount of the air quantity control device and an ignition timing control amount of an igniter of the engine as state variables representing an internal state of a dynamic model of the engine, a speed deviation accumulating section for accumulating a deviation between the target speed and the actual engine idle speed, and an ignition timing deviation accumulating section for accumulating a deviation between a target ignition timing and the actual ignition timing. The control amount of the air quantity control device and the ignition timing control amount are calculated on the basis of optimal feedback gains of an air system and an ignition system predetermined on the basis of the dynamic model, the state variables, the speed deviation accumulated value and the ignition timing deviation accumulated value. This arrangement can simultaneously control the air quantity and the ignition timing without using an observer to easily control the engine idle speed to the target speed.

    摘要翻译: 一种用于发动机的速度控制装置,其配备有用于在处于怠速状态时控制发动机的进气量的空气量控制装置和用于基于空气量控制装置的控制量确定的速度控制装置 的实际发动机怠速。 为了控制发动机怠速,该装置包括状态变量输出部分,用于输出实际的发动机怠速转速,空气量控制装置的控制量和发动机的点火器的点火正时控制量,作为表示内部的状态变量 发动机的动态模型的状态,用于累积目标速度与实际发动机怠速之间的偏差的速度偏差累加部,以及用于累积目标点火正时与实际点火正时之间的偏差的点火正时偏差累加部 。 空气量控制装置的控制量和点火正时控制量是基于基于动态模型,状态变量,速度偏差累积值预定的空气系统和点火系统的最佳反馈增益来计算的 和点火正时偏差累计值。 这种布置可以同时控制空气量和点火正时,而不用观察者容易地将发动机怠速控制到目标速度。

    Automatic pre-programming system for TV receivers
    10.
    发明授权
    Automatic pre-programming system for TV receivers 失效
    电视接收机的自动预编程系统

    公开(公告)号:US4236182A

    公开(公告)日:1980-11-25

    申请号:US900199

    申请日:1978-04-26

    IPC分类号: H03J5/02 H03J7/28 H04N5/44

    CPC分类号: H03J7/28 H03J5/0263

    摘要: An automatic tuning scheme for use in TV receivers includes a start/stop circuit which creates a search start signal and a search stop signal upon the receipt of a search start instruction and a detected incoming signal, respectively, a tuning voltage generator which generates a gradually varying tuning voltage under control of the search start signal and search stop signal, and a memory circuit for storing the tuning voltage from the generator when desired. The tuning voltage stored in the memory circuit is supplied to a tuner including a well known voltage-sensitive capacitance diode.

    摘要翻译: 一种用于TV接收机的自动调谐方案,包括:启动/停止电路,分别在接收到搜索开始指令和检测到的输入信号时产生搜索开始信号和搜索停止信号;调谐电压发生器,逐渐产生 在搜索开始信号和搜索停止信号的控制下改变调谐电压,以及存储电路,用于在需要时存储来自发生器的调谐电压。 存储在存储器电路中的调谐电压被提供给包括公知的电压敏感电容二极管的调谐器。