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公开(公告)号：US08796654B2
公开(公告)日：2014-08-05
申请号：US13056293
申请日：2008-07-31
申请人： Masahiro Ohta , Noriaki Oyabu , Kenjiro Kimura , Shinichiro Ido , Kei Kobayashi , Hirofumi Yamada , Kazumi Matsushige
发明人： Masahiro Ohta , Noriaki Oyabu , Kenjiro Kimura , Shinichiro Ido , Kei Kobayashi , Hirofumi Yamada , Kazumi Matsushige
IPC分类号： G01N21/86 , G01V8/00 , G01N35/10 , G01Q10/06 , H01J37/20 , H01J37/26 , H01J37/28 , B82Y35/00
CPC分类号： G01N35/1011 , B82Y35/00 , G01Q10/065 , H01J37/20 , H01J37/265 , H01J37/28 , H01J2237/20228
摘要： A probe needle is successively moved to a plurality of measurement points set in a measurement region on a sample so as to measure a z-displacement amount. An excitation control unit feedback-controls a piezoelectric element so that a vibration amplitude of a cantilever is constant in accordance with the detection output by a displacement detection unit. Moreover, a vertical displacement control unit feedback-controls a vertical position scan unit so as to obtain a constant distance between the probe needle and the sample according to a frequency shift by a frequency detection unit. When changes of outputs of two feedback loops at a certain measurement point are both within a predetermined range, a main control unit issues an instruction to a horizontal position control unit to rapidly move to the next measurement point. As a result, it is possible to adaptively decide such a measurement time that both of the two feedback controls at respective measurement points are established. This eliminates an unnecessary measurement time, which in turn reduces the time required for creating one convex/concave image as compared to the conventional technique and improves the throughput.
摘要翻译： 将探针连续地移动到设置在样本上的测量区域中的多个测量点，以测量z位移量。 激励控制单元根据位移检测单元的检测输出反馈控制压电元件，使得悬臂的振动振幅恒定。 此外，垂直位移控制单元反馈控制垂直位置扫描单元，以便通过频率检测单元根据频移获得探针和样本之间的恒定距离。 当在某个测量点处的两个反馈回路的输出的变化都在预定范围内时，主控制单元向水平位置控制单元发出指令以快速移动到下一个测量点。 结果，可以自适应地确定建立各测量点的两个反馈控制两者的测量时间。 这消除了不必要的测量时间，这又减少了与传统技术相比创建一个凸/凹图像所需的时间并且提高了吞吐量。
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公开(公告)号：US20110261352A1
公开(公告)日：2011-10-27
申请号：US13056293
申请日：2008-07-31
申请人： Masahiro Ohta , Noriaki Oyabu , Kenjiro Kimura , Shinichiro Ido , Kei Kobayashi , Hirofumi Yamada , Kazumi Matsushige
发明人： Masahiro Ohta , Noriaki Oyabu , Kenjiro Kimura , Shinichiro Ido , Kei Kobayashi , Hirofumi Yamada , Kazumi Matsushige
IPC分类号： G01N21/01
CPC分类号： G01N35/1011 , B82Y35/00 , G01Q10/065 , H01J37/20 , H01J37/265 , H01J37/28 , H01J2237/20228
摘要： A probe needle is successively moved to a plurality of measurement points set in a measurement region on a sample so as to measure a z-displacement amount. An excitation control unit feedback-controls a piezoelectric element so that a vibration amplitude of a cantilever is constant in accordance with the detection output by a displacement detection unit. Moreover, a vertical displacement control unit feedback-controls a vertical position scan unit so as to obtain a constant distance between the probe needle and the sample according to a frequency shift by a frequency detection unit. When changes of outputs of two feedback loops at a certain measurement point are both within a predetermined range, a main control unit issues an instruction to a horizontal position control unit to rapidly move to the next measurement point. As a result, it is possible to adaptively decide such a measurement time that both of the two feedback controls at respective measurement points are established. This eliminates an unnecessary measurement time, which in turn reduces the time required for creating one convex/concave image as compared to the conventional technique and improves the throughput.
摘要翻译： 将探针连续地移动到设置在样本上的测量区域中的多个测量点，以测量z位移量。 激励控制单元根据位移检测单元的检测输出反馈控制压电元件，使得悬臂的振动振幅恒定。 此外，垂直位移控制单元反馈控制垂直位置扫描单元，以便通过频率检测单元根据频移获得探针和样本之间的恒定距离。 当在某个测量点处的两个反馈回路的输出的变化都在预定范围内时，主控制单元向水平位置控制单元发出指令以快速移动到下一个测量点。 结果，可以自适应地确定建立各测量点的两个反馈控制两者的测量时间。 这消除了不必要的测量时间，这又减少了与传统技术相比创建一个凸/凹图像所需的时间并且提高了吞吐量。
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公开(公告)号：US08536862B2
公开(公告)日：2013-09-17
申请号：US12594050
申请日：2008-03-28
申请人： Kenjiro Kimura , Kei Kobayashi , Hirofumi Yamada , Kazumi Matsushige , Takashi Horiuchi , Nobuo Satoh , Akifumi Nakai
发明人： Kenjiro Kimura , Kei Kobayashi , Hirofumi Yamada , Kazumi Matsushige , Takashi Horiuchi , Nobuo Satoh , Akifumi Nakai
IPC分类号： G01R33/02
CPC分类号： G01R33/10 , G01Q30/04 , G01Q60/50 , G01R33/0206 , G01R33/0385
摘要： Above a sample (9) having magnetic domains, a distribution of magnetic force in a measurement plane (91) is obtained as a magnetic force image using a MFM, an auxiliary magnetic force image is obtained by performing measurement in a measurement plane (92) away from the measurement plane (91) by a distance d, and a difference between them is divided by the distance d to obtain a magnetic force gradient image. The magnetic force image and the auxiliary magnetic force image are Fourier transformed and substituted into a three-dimensional field obtaining equation derived from a general solution of the Laplace equation, and the three-dimensional field indicating the magnetic force is obtained. A state of the magnetic domains at the surface (93) of the sample (9) can be obtained with high accuracy by obtaining the three-dimensional field.
摘要翻译： 在具有磁畴的样品（9）之上，通过使用MFM获得测量平面（91）中的磁力分布作为磁力图像，通过在测量平面（92）中进行测量来获得辅助磁力图像， 离开测量平面（91）距离d，并且将它们之间的差除以距离d以获得磁力梯度图像。 将磁力图像和辅助磁力图像进行傅立叶变换并代入由拉普拉斯方程的一般解导出的三维场获得方程式，得到表示磁力的三维场。 通过获得三维场，可以高精度地获得样品（9）的表面（93）处的磁畴的状态。
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公开(公告)号：US20100219819A1
公开(公告)日：2010-09-02
申请号：US12594050
申请日：2008-03-28
申请人： Kenjiro Kimura , Kei Kobayashi , Hirofumi Yamada , Kazumi Matsushige , Takashi Horiuchi , Nobuo Satoh , Akifumi Nakai
发明人： Kenjiro Kimura , Kei Kobayashi , Hirofumi Yamada , Kazumi Matsushige , Takashi Horiuchi , Nobuo Satoh , Akifumi Nakai
CPC分类号： G01R33/10 , G01Q30/04 , G01Q60/50 , G01R33/0206 , G01R33/0385
摘要： Above the sample (9) having magnetic domains, a distribution of magnetic force in a measurement plane (91) is obtained as a magnetic force image with use of a MFM, an auxiliary magnetic force image is obtained by performing measurement in a measurement plane (92) away from the measurement plane (91) by a minute distance d, and a difference between them is divided by the minute distance d to obtain a magnetic force gradient image. The magnetic force image and the auxiliary magnetic force image are Fourier transformed and substituted into a three-dimensional field obtaining equation derived from a general solution of the Laplace equation, and the three-dimensional field indicating the magnetic force is obtained with high accuracy. A state of the magnetic domains at the surface (93) of the sample (9) can be obtained with high accuracy by obtaining the three-dimensional field. The three-dimensional field obtaining method using the three-dimensional field obtaining equation can be used for various fields of magnetic, electric, temperature and gravity potential and so on satisfying the Laplace equation. The obtaining of the three-dimensional field can be extended to obtaining of an n-dimensional field having high-dimension.
摘要翻译： 在具有磁畴的样品（9）上方，通过使用MFM获得在测量平面（91）中的磁力分布作为磁力图像，通过在测量平面中进行测量获得辅助磁力图像（ 92）远离测量平面（91）微小的距离d，并且它们之间的差除以微小距离d以获得磁力梯度图像。 将磁力图像和辅助磁力图像进行傅里叶变换并代入由拉普拉斯方程的一般解导出的三维场获得方程，并且以高精度获得表示磁力的三维场。 通过获得三维场，可以高精度地获得样品（9）的表面（93）处的磁畴的状态。 使用三维场获得方程的三维场获取方法可以用于满足拉普拉斯方程的磁，电，温度和重力等各种领域。 可以将三维场的获得扩展到获得具有高维度的n维场。
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公开(公告)号：US20090127473A1
公开(公告)日：2009-05-21
申请号：US11920420
申请日：2005-11-18
CPC分类号： H01J37/3175 , B82Y10/00 , B82Y40/00 , H01J37/073 , H01J37/3174 , H01J2237/06333 , H01J2237/06358 , H01J2237/31779 , H01J2237/31794
摘要： An electron beam irradiation device of the present invention includes: a projector 8 for generating a two-dimensional light pattern 13; a microchannel plate 11 for (i) generating an electron beam array based on the light pattern 13 having entered, (ii) amplifying the electron beam array, and (iii) emitting the electron beam array as an amplified electron beam array 14; and an electron beam lens section 12 for converging the amplified electron beam array 14. This electron beam irradiation device is capable of manufacturing a semiconductor device whose performance is improved through a finer processing by means of irradiation using an electron beam. Further, the electron beam irradiation device allows cost reduction, because the device allows collective irradiation using a two dimensional pattern.
摘要翻译： 本发明的电子束照射装置包括：用于产生二维光图案13的投影仪8; 微通道板11，用于（i）基于已经进入的光图案13产生电子束阵列，（ii）放大电子束阵列，和（iii）发射电子束阵列作为放大的电子束阵列14; 以及用于会聚放大电子束阵列14的电子束透镜部分12.该电子束照射装置能够通过使用电子束的照射通过更精细的处理来制造其性能得到改善的半导体器件。 此外，电子束照射装置允许成本降低，因为该装置允许使用二维图案的集体照射。
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公开(公告)号：US07829863B2
公开(公告)日：2010-11-09
申请号：US11920420
申请日：2005-11-18
IPC分类号： G21K1/08
CPC分类号： H01J37/3175 , B82Y10/00 , B82Y40/00 , H01J37/073 , H01J37/3174 , H01J2237/06333 , H01J2237/06358 , H01J2237/31779 , H01J2237/31794
摘要： An electron beam irradiation device of the present invention includes: a projector 8 for generating a two-dimensional light pattern 13; a microchannel plate 11 for (i) generating an electron beam array based on the light pattern 13 having entered, (ii) amplifying the electron beam array, and (iii) emitting the electron beam array as an amplified electron beam array 14; and an electron beam lens section 12 for converging the amplified electron beam array 14. This electron beam irradiation device is capable of manufacturing a semiconductor device whose performance is improved through a finer processing by means of irradiation using an electron beam. Further, the electron beam irradiation device allows cost reduction, because the device allows collective irradiation using a two dimensional pattern.
摘要翻译： 本发明的电子束照射装置包括：用于产生二维光图案13的投影仪8; 微通道板11，用于（i）基于已经进入的光图案13产生电子束阵列，（ii）放大电子束阵列，和（iii）发射电子束阵列作为放大的电子束阵列14; 以及用于会聚放大的电子束阵列14的电子束透镜部分12.该电子束照射装置能够通过使用电子束的照射通过更精细的处理来制造其性能得到改善的半导体器件。 此外，电子束照射装置允许成本降低，因为该装置允许使用二维图案的集体照射。
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公开(公告)号：US20110062964A1
公开(公告)日：2011-03-17
申请号：US12991309
申请日：2009-04-30
IPC分类号： G01R27/32
CPC分类号： G01Q10/06 , G01Q10/065
摘要： A method for measuring surface properties according to the present invention includes the steps of: with distance control feedback applied so that a desired physical quantity to be measured that is attributed to an interaction between a probe and a sample is actually measured while changing a measured distance between the probe and the sample in accordance with a relationship between the desired physical quantity and the measured distance, (i) setting a set value, corresponding to the desired physical quantity, which serves to change the measured distance; and (ii) recording, for each set value thus set, a relationship between the measured distance changed by the set value set in the step (i) and a physical quantity measured with the probe and the sample placed at that measured distance. This allows precise and quick measurement of a physical quantity even in a region where the probe and the sample are very close to each other, while avoiding a collision between them.
摘要翻译： 根据本发明的用于测量表面性质的方法包括以下步骤：应用距离控制反馈，使得实际测量归因于探针和样品之间的相互作用的待测量的待测物理量，同时改变测量距离 根据所需物理量与测量距离之间的关系在探针和样本之间，（i）设置对应于期望物理量的设定值，其用于改变测量的距离; 以及（ii）对于如此设定的每个设定值，记录测量距离变化了步骤（i）中设定的设定值与用探头测量的物理量与放置在该测量距离处的样品之间的关系。 即使在探针和样品彼此非常接近的区域中，也能够精确而快速地测量物理量，同时避免它们之间的碰撞。
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公开(公告)号：US20060121203A1
公开(公告)日：2006-06-08
申请号：US10527712
申请日：2003-09-11
申请人： Kuniko Kimura , Kei Kobayashi , Hirofumi Yamada , Toshihisa Horiuchi , Kenji Ishida , Kazumi Matsushige
发明人： Kuniko Kimura , Kei Kobayashi , Hirofumi Yamada , Toshihisa Horiuchi , Kenji Ishida , Kazumi Matsushige
IPC分类号： B05D1/36
CPC分类号： B01J19/0013 , B01J19/1887 , B82B3/00 , G01Q80/00
摘要： A totally new method for manufacturing a thin film wherein only an arbitrary small region is structurally controlled. The structure of a film is controlled by applying a force to the entire film or an arbitrary region of the film using a part having a sharp tip during the film-forming process or after finishing the film formation. At this time, the temperature of the film is set at the glass transition point of the amorphous region or higher. An atomic force microscope can be used as an apparatus for realizing this manufacturing method.
摘要翻译： 一种全新的制造薄膜的方法，其中只有结构上控制任意的小区域。 通过在成膜过程中或在成膜完成之后，使用具有尖锐尖端的部分在膜的整个膜或任意区域上施加力来控制膜的结构。 此时，将膜的温度设定在非晶区域的玻璃化转变点以上。 原子力显微镜可以用作实现该制造方法的装置。
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公开(公告)号：US06823724B1
公开(公告)日：2004-11-30
申请号：US10396735
申请日：2003-03-25
IPC分类号： G01B528
CPC分类号： G01Q60/30 , Y10S977/85 , Y10S977/852
摘要： A method of detecting the distribution of values of a physical property such as the dopant concentration of a semiconductor without being adversely affected by stray capacitance is offered. A scanning probe microscope capable of implementing this method is also offered. The method starts with applying an AC voltage of angular frequency &ohgr; between a probe and a sample from a fixed oscillator. The output from the oscillator is supplied to a piezoelectric device that drives the cantilever. The cantilever produces a deflection signal corresponding to forces corresponding to interactions between the probe and sample. A signal regarding the amplitude is extracted from the deflection signal. This signal is fed back to a means for controlling the distance between the probe and sample and supplied to a display device. As a result, an image of the surface topography of the sample is obtained. A harmonic component having a frequency higher than the triple or more of the angular frequency &ohgr; and contained in the cantilever deflection signal is extracted by a lock-in amplifier. As a result, information representing an image of differential capacitance (∂C/∂V) is obtained.
摘要翻译： 提供了不受杂散电容不利影响的检测诸如半导体的掺杂剂浓度的物理性质的值分布的方法。 还提供了能够实现该方法的扫描探针显微镜。 该方法开始于在来自固定振荡器的探针和样本之间施加角频率ω的交流电压。 来自振荡器的输出被提供给驱动悬臂的压电装置。 悬臂产生对应于对应于探针和样品之间的相互作用的力的偏转信号。 从偏转信号中提取关于振幅的信号。 该信号被反馈到用于控制探针和样品之间的距离并提供给显示装置的装置。 结果，获得样品的表面形貌的图像。 通过锁定放大器提取具有高于角频率ω3的三倍以上并且包含在悬臂偏转信号中的频率的谐波分量。 结果，获得表示差分电容图像（∂C/∂V）的信息。
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公开(公告)号：US20080119008A1
公开(公告)日：2008-05-22
申请号：US11661316
申请日：2005-08-30
申请人： Yuji Miyato , Kei Kobayashi , Hirofumi Yamada , Kazumi Matsushige
发明人： Yuji Miyato , Kei Kobayashi , Hirofumi Yamada , Kazumi Matsushige
IPC分类号： H01L51/40
CPC分类号： H01L51/0049 , B81C1/00031 , B81C2201/0149 , B81C2201/0198 , B82Y10/00 , B82Y30/00 , H01L29/0665 , H01L29/0673 , H01L51/0048 , H01L51/0575
摘要： A molecular device of the present invention is arranged so that a self-organizing monomolecular layer is formed on an oxide layer made of an oxide of a substrate by being chemically bonded with the surface of the oxide layer, and nano structures are formed on the monomolecular film. With this arrangement, the present invention provides a molecular device which causes less interaction between the substrate and nanostructures arranged on the substrate, thereby realizing easier control of orientation of nano structures on the substrate. The present invention also provides a manufacturing method of the molecular device.
摘要翻译： 本发明的分子装置被配置成通过与氧化物层的表面化学键合而在由氧化物的氧化物构成的氧化物层上形成自组织单分子层，并且在单分子层上形成纳米结构 电影。 通过这种布置，本发明提供了一种分子器件，其在衬底和布置在衬底上的纳米结构之间引起较少的相互作用，从而实现了更容易地控制衬底上的纳米结构的取向。 本发明还提供了分子装置的制造方法。
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