Semiconductor constructions, methods of patterning photoresist, and methods of forming semiconductor constructions
    1.
    发明申请
    Semiconductor constructions, methods of patterning photoresist, and methods of forming semiconductor constructions 有权
    半导体结构,图案化光刻胶的方法以及形成半导体结构的方法

    公开(公告)号:US20070178711A1

    公开(公告)日:2007-08-02

    申请号:US11341201

    申请日:2006-01-27

    IPC分类号: H01L21/31

    摘要: The invention includes semiconductor constructions containing optically saturable absorption layers. An optically saturable absorption layer can be between photoresist and a topography, with the topography having two or more surfaces of differing reflectivity relative to one another. The invention also includes methods of patterning photoresist in which a saturable absorption layer is provided between the photoresist and a topography with surfaces of differing reflectivity, and in which the differences in reflectivity are utilized to enhance the accuracy with which an image is photolithographically formed in the photoresist.

    摘要翻译: 本发明包括含光学可饱和吸收层的半导体结构。 光可饱和吸收层可以在光致抗蚀剂和形貌之间,其中形貌具有两个或更多个相对于彼此具有不同反射率的表面。 本发明还包括图案化光刻胶的方法,其中在光致抗蚀剂和具有不同反射率的表面之间设置饱和吸收层的光刻胶,并且其中反射率的差异被用于增强图像在光刻胶中形成的精度 光刻胶。

    Annular gate and technique for fabricating an annular gate
    3.
    发明申请
    Annular gate and technique for fabricating an annular gate 有权
    环形门和制造环形门的技术

    公开(公告)号:US20060118846A1

    公开(公告)日:2006-06-08

    申请号:US11010951

    申请日:2005-08-04

    IPC分类号: H01L29/94

    摘要: A memory structure having a vertically oriented access transistor with an annular gate region and a method for fabricating the structure. More specifically, a transistor is fabricated such that the channel of the transistor extends outward with respect to the surface of the substrate. An annular gate is fabricated around the vertical channel such that it partially or completely surrounds the channel. A buried annular bitline may also be implemented. After the vertically oriented transistor is fabricated with the annular gate, a storage device may be fabricated over the transistor to provide a memory cell.

    摘要翻译: 具有具有环形栅极区域的垂直取向的存取晶体管的存储器结构和用于制造该结构的方法。 更具体地,制造晶体管,使得晶体管的沟道相对于衬底的表面向外延伸。 围绕垂直通道制造环形门,使得其部分地或完全地围绕通道。 还可以实现埋置的环形位线。 在用环形栅极制造垂直取向的晶体管之后,可以在晶体管上制造存储器件以提供存储器单元。