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    Capacitive pressure transducer having reduced output error
    3.
    发明授权
    Capacitive pressure transducer having reduced output error 失效
    电容式压力传感器具有降低的输出误差

    公开(公告)号：US06223603B1

    公开(公告)日：2001-05-01

    申请号：US09314059

    申请日：1999-05-18

    申请人： E. Martin McKinnon

    发明人： E. Martin McKinnon

    IPC分类号： G01L912

    CPC分类号： G01L9/0075

    摘要： A fluid pressure sensor (10) includes a capacitive pressure sensing element (12) having a thin, relatively flexible ceramic diaphragm (14) mounted in closely spaced apart relation to a rigid ceramic substrate (16) by a glass annulus (18) mounted in a housing (28) having a port (28a) for fluid whose pressure is to be sensed by being received on an outer face (12a) of the diaphragm. An electronic circuit (36) is mounted in a chamber (20a) formed between a connector (20) and an outer face (12b) of the substrate. An electrically conductive coating (14b) is placed on the outer face (12a) of the diaphragm and an annular electrically conductive gasket (30) is disposed between the diaphragm and the bottom floor (28c) of the housing surrounding a fluid inlet (28a) in order to effect an electrical path between the conductive layer on the diaphragm and the housing. An O-ring (32) of polymer compatible with the fluid being sensed is disposed within the annulus of the conductive gasket to serve as a fluid barrier in selected applications. In other applications, particularly those in which the pressure of the sensed fluid is low, the conductive gasket serves both as an electrically conductive member and as a fluid seal with the O-ring being eliminated.

    摘要翻译： 流体压力传感器（10）包括电容式压力感测元件（12），其具有薄的相对柔性的陶瓷隔膜（14），所述薄膜相对柔性的陶瓷隔膜（14）通过玻璃环（18）以刚性陶瓷基板（16）以紧密间隔的关系安装在 壳体（28）具有用于流体的端口（28a），其压力将被接收在隔膜的外表面（12a）上。 电子电路（36）安装在形成在基板的连接器（20）和外表面（12b）之间的室（20a）中。 导电涂层（14b）被放置在隔膜的外表面（12a）上，并且环形导电垫圈（30）设置在隔膜和围绕流体入口（28a）的壳体的底板（28c）之间， 以便实现隔膜上的导电层和壳体之间的电路径。 与被感测的流体相容的聚合物的O形环（32）设置在导电垫片的环形空间内，以在选定的应用中用作流体屏障。 在其他应用中，特别是其中检测到的流体的压力低的导电垫片既用作导电构件也用作消除O形环的流体密封件。