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    Method and Apparatus for Laser Machining
    3.
    发明申请
    Method and Apparatus for Laser Machining 有权
    激光加工方法与装置

    公开(公告)号：US20110115129A1

    公开(公告)日：2011-05-19

    申请号：US13003450

    申请日：2009-07-09

    申请人： Marcus Straw ,  Amin Samsavar ,  Milos Toth ,  Mark Utlaut

    发明人： Marcus Straw ,  Amin Samsavar ,  Milos Toth ,  Mark Utlaut

    IPC分类号： B29C35/08 ,  B23K26/36

    CPC分类号： B23K26/03 ,  B23K26/0622 ,  B23K26/0853 ,  B23K26/14 ,  B23K26/1423 ,  B23K26/348 ,  H01J2237/2813

    摘要： A charged particle beam and a laser beam are used together to micromachine a substrate. A first beam alters the state of a region of the work piece, and the second beam removes material whose state was altered. In one embodiment, an ion beam can create photon absorbing defects to lower the local ablation threshold, allowing the laser beam to remove material in a region defined by the ion beam. The combination of laser beam and charged particle beam allows the creation of features similar in size to the charged particle beam spot size, at milling rates greater than charged particle processing because of the increased energy provided by the laser beam.

    摘要翻译： 带电粒子束和激光束一起用于微机械衬底。 第一光束改变工件的区域的状态，第二光束去除状态被改变的材料。 在一个实施例中，离子束可以产生光子吸收缺陷以降低局部消融阈值，允许激光束去除由离子束限定的区域中的材料。 激光束和带电粒子束的组合允​​许在大小与带电粒子束点尺寸相似的特征的情况下产生大于带电粒子处理的铣削速率，因为激光束提供的能量增加。

    GAS-ASSISTED LASER ABLATION
    4.
    发明申请
    GAS-ASSISTED LASER ABLATION 有权
    气体辅助激光消除

    公开(公告)号：US20110031655A1

    公开(公告)日：2011-02-10

    申请号：US12828243

    申请日：2010-06-30

    申请人： Milos Toth ,  Marcus Straw

    发明人： Milos Toth ,  Marcus Straw

    IPC分类号： B29C35/08

    CPC分类号： B29C35/08 ,  B23K26/0624 ,  B23K26/12 ,  B23K26/126 ,  B23K26/127 ,  B23K26/16 ,  B23K26/36 ,  B41M5/24

    摘要： An improved method for laser processing that prevents material redeposition during laser ablation but allows material to be removed at a high rate. In a preferred embodiment, laser ablation is performed in a chamber filled with high pressure precursor (etchant) gas so that sample particles ejected during laser ablation will react with the precursor gas in the gas atmosphere of the sample chamber. When the ejected particles collide with precursor gas particles, the precursor is dissociated, forming a reactive component that binds the ablated material. In turn, the reaction between the reactive dissociation by-product and the ablated material forms a new, volatile compound that can be pumped away in a gaseous state rather than redepositing onto the sample.

    摘要翻译： 一种改进的激光加工方法，可防止激光烧蚀过程中的材料再沉积，但可以高速率去除材料。 在优选实施例中，在填充有高压前体（蚀刻剂）气体的室中进行激光烧蚀，使得在激光烧蚀期间喷射的样品颗粒将与样品室的气体气氛中的前体气体反应。 当喷射的颗粒与前体气体颗粒碰撞时，前体解离，形成结合烧蚀材料的反应性组分。 反过来，反应性离解副产物与消融材料之间的反应形成一种新的挥发性化合物，其可以以气态泵送而不是重新沉积在样品上。

    Method for laser machining a sample having a crystalline structure
    7.
    发明授权
    Method for laser machining a sample having a crystalline structure 有权
    用于激光加工具有晶体结构的样品的方法

    公开(公告)号：US08853592B2

    公开(公告)日：2014-10-07

    申请号：US13003450

    申请日：2009-07-09

    申请人： Marcus Straw ,  Amin Samsavar ,  Milos Toth ,  Mark Utlaut

    发明人： Marcus Straw ,  Amin Samsavar ,  Milos Toth ,  Mark Utlaut

    IPC分类号： B23K26/40 ,  B23K26/14 ,  B23K26/08 ,  B23K26/06 ,  B23K26/03

    CPC分类号： B23K26/03 ,  B23K26/0622 ,  B23K26/0853 ,  B23K26/14 ,  B23K26/1423 ,  B23K26/348 ,  H01J2237/2813

    摘要： A charged particle beam and a laser beam are used together to micromachine a substrate. A first beam alters the state of a region of the work piece, and the second beam removes material whose state was altered. In one embodiment, an ion beam can create photon absorbing defects to lower the local ablation threshold, allowing the laser beam to remove material in a region defined by the ion beam. The combination of laser beam and charged particle beam allows the creation of features similar in size to the charged particle beam spot size, at milling rates greater than charged particle processing because of the increased energy provided by the laser beam.

    摘要翻译： 带电粒子束和激光束一起用于微机械衬底。 第一光束改变工件的区域的状态，第二光束去除状态被改变的材料。 在一个实施例中，离子束可以产生光子吸收缺陷以降低局部消融阈值，允许激光束去除由离子束限定的区域中的材料。 激光束和带电粒子束的组合允​​许在大小与带电粒子束点尺寸相似的特征的情况下产生大于带电粒子处理的铣削速率，因为激光束提供的能量增加。

    Automated method for coincident alignment of a laser beam and a charged particle beam
    8.
    发明授权
    Automated method for coincident alignment of a laser beam and a charged particle beam 有权
    用于激光束和带电粒子束的重合对准的自动方法

    公开(公告)号：US08766213B2

    公开(公告)日：2014-07-01

    申请号：US13607329

    申请日：2012-09-07

    申请人： Marcus Straw ,  Mark Emerson

    发明人： Marcus Straw ,  Mark Emerson

    IPC分类号： H01J37/00

    CPC分类号： H01J37/3045 ,  G21K5/00 ,  G21K5/08 ,  H01J37/226 ,  H01J37/228 ,  H01J37/3056 ,  H01J2237/1501 ,  H01J2237/28

    摘要： A method and apparatus for aligning a laser beam coincident with a charged particle beam. The invention described provides a method for aligning the laser beam through the center of an objective lens and ultimately targeting the eucentric point of a multi-beam system. The apparatus takes advantage of components of the laser beam alignment system being positioned within and outside of the vacuum chamber of the charged particle system.

    摘要翻译： 用于对准与带电粒子束一致的激光束的方法和装置。 所描述的本发明提供了一种通过物镜的中心对准激光束并最终瞄准多光束系统的中心点的方法。 该装置利用激光束对准系统的部件位于带电粒子系统的真空室内和外部。

    Gas-assisted laser ablation
    9.
    发明授权
    Gas-assisted laser ablation 有权
    气体辅助激光烧蚀

    公开(公告)号：US08524139B2

    公开(公告)日：2013-09-03

    申请号：US12828243

    申请日：2010-06-30

    申请人： Milos Toth ,  Marcus Straw

    发明人： Milos Toth ,  Marcus Straw

    IPC分类号： B29C35/08

    CPC分类号： B29C35/08 ,  B23K26/0624 ,  B23K26/12 ,  B23K26/126 ,  B23K26/127 ,  B23K26/16 ,  B23K26/36 ,  B41M5/24

    摘要： An improved method for laser processing that prevents material redeposition during laser ablation but allows material to be removed at a high rate. In a preferred embodiment, laser ablation is performed in a chamber filled with high pressure precursor (etchant) gas so that sample particles ejected during laser ablation will react with the precursor gas in the gas atmosphere of the sample chamber. When the ejected particles collide with precursor gas particles, the precursor is dissociated, forming a reactive component that binds the ablated material. In turn, the reaction between the reactive dissociation by-product and the ablated material forms a new, volatile compound that can be pumped away in a gaseous state rather than redepositing onto the sample.

    摘要翻译： 一种改进的激光加工方法，可防止激光烧蚀过程中的材料再沉积，但可以高速率去除材料。 在优选实施例中，在填充有高压前体（蚀刻剂）气体的室中进行激光烧蚀，使得在激光烧蚀期间喷射的样品颗粒将与样品室的气体气氛中的前体气体反应。 当喷射的颗粒与前体气体颗粒碰撞时，前体解离，形成结合烧蚀材料的反应性组分。 反过来，反应性离解副产物与消融材料之间的反应形成一种新的挥发性化合物，其可以以气态泵送而不是重新沉积在样品上。