Epitaxial wafer manufacturing apparatus and manufacturing method
    2.
    发明授权
    Epitaxial wafer manufacturing apparatus and manufacturing method 失效
    外延晶片制造装置及其制造方法

    公开(公告)号:US08591993B2

    公开(公告)日:2013-11-26

    申请号:US12409387

    申请日:2009-03-23

    IPC分类号: C23C16/00 C30B35/00

    摘要: An epitaxial wafer manufacturing apparatus including: a chamber; a gas introduction port provided in the chamber and configured to introduce a reaction gas into the chamber; a gas exhaust port provided in the chamber and configured to exhaust the reaction gas from inside the chamber; a rotating unit provided inside the chamber; a wafer holder provided in an upper portion of the rotating unit and configured to hold a wafer; and an annular flow-regulating wall being spaced from the rotating unit and the wafer holder, the annular flow-regulating surrounding the upper portion of the rotating unit and a upper portion of the wafer holder, and the annular flow-regulating expanding downward. The flow-regulating wall has an upper end being located above the wafer holder. The upper end has a smaller inner diameter than an outer periphery of the wafer holder. The flow-regulating wall has a lower end being located below an upper surface of the rotating unit. The lower end has a larger inner diameter than an outer periphery of the rotating unit.

    摘要翻译: 一种外延晶片制造装置,包括:腔室; 气体导入口,设置在所述室中并且构造成将反应气体引入所述室中; 气体排出口,设置在所述室中并且构造成从所述室内部排出所述反应气体; 设置在所述室内的旋转单元; 晶片保持器,设置在所述旋转单元的上部并且被配置为保持晶片; 以及与所述旋转单元和所述晶片保持器间隔开的环形流量调节壁,围绕所述旋转单元的上部的所述环形流动调节器和所述晶片保持器的上部,并且所述环形流量调节向下扩展。 流动调节壁具有位于晶片保持器上方的上端。 上端具有比晶片保持器的外周更小的内径。 流动调节壁的下端位于旋转单元的上表面下方。 下端具有比旋转单元的外周更大的内径。

    EPITAXIAL WAFER MANUFACTURING APPARATUS AND MANUFACTURING METHOD
    3.
    发明申请
    EPITAXIAL WAFER MANUFACTURING APPARATUS AND MANUFACTURING METHOD 失效
    外延式制造设备和制造方法

    公开(公告)号:US20090238971A1

    公开(公告)日:2009-09-24

    申请号:US12409387

    申请日:2009-03-23

    摘要: An epitaxial wafer manufacturing apparatus including: a chamber; a gas introduction port provided in the chamber and configured to introduce a reaction gas into the chamber; a gas exhaust port provided in the chamber and configured to exhaust the reaction gas from inside the chamber; a rotating unit provided inside the chamber; a wafer holder provided in an upper portion of the rotating unit and configured to hold a wafer; and an annular flow-regulating wall being spaced from the rotating unit and the wafer holder, the annular flow-regulating surrounding the upper portion of the rotating unit and a upper portion of the wafer holder, and the annular flow-regulating expanding downward. The flow-regulating wall has an upper end being located above the wafer holder. The upper end has a smaller inner diameter than an outer periphery of the wafer holder. The flow-regulating wall has a lower end being located below an upper surface of the rotating unit. The lower end has a larger inner diameter than an outer periphery of the rotating unit.

    摘要翻译: 一种外延晶片制造装置,包括:腔室; 气体导入口,设置在所述室中并且构造成将反应气体引入所述室中; 气体排出口,设置在所述室中并且构造成从所述室内部排出所述反应气体; 设置在所述室内的旋转单元; 晶片保持器,设置在所述旋转单元的上部并且被配置为保持晶片; 以及与所述旋转单元和所述晶片保持器间隔开的环形流量调节壁,围绕所述旋转单元的上部的所述环形流动调节器和所述晶片保持器的上部,并且所述环形流量调节向下扩展。 流动调节壁具有位于晶片保持器上方的上端。 上端具有比晶片保持器的外周更小的内径。 流动调节壁的下端位于旋转单元的上表面下方。 下端具有比旋转单元的外周更大的内径。

    LIQUID CRYSTAL DISPLAY PANEL AND METHOD FOR MANUFACTURING SAME, AND LIQUID CRYSTAL DISPLAY DEVICE
    4.
    发明申请
    LIQUID CRYSTAL DISPLAY PANEL AND METHOD FOR MANUFACTURING SAME, AND LIQUID CRYSTAL DISPLAY DEVICE 失效
    液晶显示面板及其制造方法及液晶显示装置

    公开(公告)号:US20080291385A1

    公开(公告)日:2008-11-27

    申请号:US12123861

    申请日:2008-05-20

    IPC分类号: G02F1/1339

    CPC分类号: G02F1/13394

    摘要: A liquid crystal display panel includes: a pair of substrates; a cylindrical spacer configured to hold a gap between the pair of substrates, and a liquid crystal which fills the gap. The cylindrical spacer includes a first support portion having a first support surface and a second support portion having a second support surface. The first support portion is provided inside the second support surface so that the first support surface is projected from the second support surface. The second support portion is provided on a major surface of one of the substrates the second support surface from the major surface.

    摘要翻译: 液晶显示面板包括:一对基板; 被配置为保持所述一对基板之间的间隙的圆柱形间隔件和填充所述间隙的液晶。 圆柱形间隔件包括具有第一支撑表面的第一支撑部分和具有第二支撑表面的第二支撑部分。 第一支撑部分设置在第二支撑表面内部,使得第一支撑表面从第二支撑表面突出。 第二支撑部分在主要表面的第二支撑表面的一个基板的主表面上提供。

    Liquid crystal display panel and method for manufacturing same, and liquid crystal display device
    5.
    发明授权
    Liquid crystal display panel and method for manufacturing same, and liquid crystal display device 失效
    液晶显示面板及其制造方法以及液晶显示装置

    公开(公告)号:US08284372B2

    公开(公告)日:2012-10-09

    申请号:US12123861

    申请日:2008-05-20

    IPC分类号: G02F1/1339

    CPC分类号: G02F1/13394

    摘要: A liquid crystal display panel includes: a pair of substrates; a cylindrical spacer configured to hold a gap between the pair of substrates, and a liquid crystal which fills the gap. The cylindrical spacer includes a first support portion having a first support surface and a second support portion having a second support surface. The first support portion is provided inside the second support surface so that the first support surface is projected from the second support surface. The second support portion is provided on a major surface of one of the substrates the second support surface from the major surface.

    摘要翻译: 液晶显示面板包括:一对基板; 被配置为保持所述一对基板之间的间隙的圆柱形间隔件和填充所述间隙的液晶。 圆柱形间隔件包括具有第一支撑表面的第一支撑部分和具有第二支撑表面的第二支撑部分。 第一支撑部分设置在第二支撑表面内部,使得第一支撑表面从第二支撑表面突出。 第二支撑部分在主要表面的第二支撑表面的一个基板的主表面上提供。