Industrial machine management system and method
    2.
    发明授权
    Industrial machine management system and method 失效
    工业机器管理系统及方法

    公开(公告)号:US06957112B2

    公开(公告)日:2005-10-18

    申请号:US09988875

    申请日:2001-11-21

    摘要: A system for quickly and easily optimizing the parameters of an industrial machine or solving any trouble in industrial machine is provided. A factory (100) and vendor (200) are connected through a data communication network (300). A management apparatus (120) selectively gives the operation right of an industrial machine (110) to a factory-side operation apparatus (130) or a vendor-side operation apparatus (210) arranged at a remote site. The operation apparatus having the given operation right can operate the industrial machine (110) and obtain information representing the operation condition of the industrial machine.

    摘要翻译: 提供了一种用于快速,轻松地优化工业机器的参数或解决工业机器中的任何故障的系统。 工厂(100)和供应商(200)通过数据通信网络(300)连接。 管理装置(120)选择性地将工业机器(110)的操作权力提供给布置在远程站点的出厂侧操作装置(130)或供应商侧操作装置(210)。 具有给定操作权限的操作装置可以操作工业机器(110)并获得表示工业机器的操作状态的信息。

    Exposure apparatus, method of manufacturing semiconductor devices and plant therefor
    3.
    发明授权
    Exposure apparatus, method of manufacturing semiconductor devices and plant therefor 失效
    曝光装置,半导体装置的制造方法及其制造方法

    公开(公告)号:US06795161B2

    公开(公告)日:2004-09-21

    申请号:US09811419

    申请日:2001-03-20

    IPC分类号: G03B2752

    CPC分类号: G03F7/70883

    摘要: An exposure apparatus having an illuminating optics unit for irradiating a reticle, on which a predetermined pattern has been formed, with exposing light emitted from an exposure light source, a reticle stage on which the reticle is placed, a projection optics unit for projecting the predetermined pattern of the reticle onto a substrate, and a substrate stage on which the substrate is placed. The apparatus includes at least one chamber for internally accommodating the illuminating optics unit, the reticle stage, the projection optics unit and the substrate stage, a first pressure control device for making a value of pressure inside the at least one chamber higher than a value of pressure outside the at least one chamber, and a first correction device for correcting optical characteristics of the projection optics unit, by performing at least one of (i) moving an adjustment unit for adjusting the optical characteristics of the projection optics unit and (ii) shifting a wavelength of the exposing light, in accordance with the value of the pressure inside the at least one chamber.

    摘要翻译: 一种曝光装置,具有照射光学单元,用于对已经形成预定图案的掩模版进行曝光,曝光从曝光光源发射的光,其上放置有掩模版的标线片台,投影光学单元, 掩模版到基板上的图案,以及放置基板的基板台。 该装置包括用于内部容纳照明光学单元,标线片台,投影光学单元和基板台的至少一个室,用于使至少一个室内的压力值高于第一压力控制装置的值的第一压力控制装置 以及第一校正装置,用于通过执行(i)移动用于调整投影光学单元的光学特性的调节单元和(ii)至少一个腔室的光学特性的调整单元中的至少一个来校正投影光学单元的光学特性; 根据至少一个室内的压力值移动曝光光的波长。

    Flow passage device and method of transporting liquid using the same
    5.
    发明授权
    Flow passage device and method of transporting liquid using the same 有权
    流路装置及使用其的输送液体的方法

    公开(公告)号:US09592509B2

    公开(公告)日:2017-03-14

    申请号:US13985524

    申请日:2012-01-25

    申请人: Masaya Ogura

    发明人: Masaya Ogura

    IPC分类号: B01L3/00 G01N35/08 G01N27/447

    摘要: A flow passage device is provided, with which a liquid is easily introduced and introduction of air bubbles into a flow passage along with a liquid when the liquid is introduced into the flow passage can be decreased.A flow passage device according to the present invention includes a flow passage through which a fluid flows in a direction different from a vertical direction, an introducing space that has a supply port opening toward the vertical direction and introduces a liquid into the flow passage, and a buffering space that connects the flow passage to the introducing space. The buffering space allows a gas-liquid interface to be formed due to surface tension. A direction in which the gas-liquid interface faces is different from the vertical direction.

    摘要翻译: 根据本发明的流道装置包括流体沿垂直方向不同流动的流道,具有朝向垂直方向开口的供给口并将液体引入流路的引入空间,以及 将流路连接到引入空间的缓冲空间。 缓冲空间允许由于表面张力而形成气 - 液界面。 气液界面面向的方向与垂直方向不同。

    TESTING ELEMENT, TESTING APPARATUS, AND TESTING SYSTEM
    6.
    发明申请
    TESTING ELEMENT, TESTING APPARATUS, AND TESTING SYSTEM 有权
    测试元件,测试设备和测试系统

    公开(公告)号:US20140052400A1

    公开(公告)日:2014-02-20

    申请号:US14113171

    申请日:2012-04-06

    申请人: Masaya Ogura

    发明人: Masaya Ogura

    IPC分类号: G01D18/00

    摘要: Conventional laboratory tests require calibration before each test. This results in the need for a reagent for calibration before each test. Additionally, calibration takes a long time, and the total TAT (Turn Around Time) of a testing system increases. The testing system thus suffers from the difficulty of improving the testing efficiency. This invention, which has been made to solve the problem, provides a testing element for performing a laboratory test, wherein the testing element includes an information recording section at the surface of and/or inside the testing element, and the information recording section stores information on a characteristic of the testing element.

    摘要翻译: 常规实验室测试需要在每次测试之前进行校准。 这导致在每次测试之前需要用于校准的试剂。 此外,校准需要很长时间,测试系统的总TAT(转向时间)增加。 因此,测试系统难以提高测试效率。 为了解决这个问题而做出的本发明提供了一种用于执行实验室测试的测试元件,其中测试元件包括在测试元件的表面和/或内部的信息记录部分,并且信息记录部分存储信息 根据测试元件的特性。

    FLOW PASSAGE DEVICE AND METHOD OF TRANSPORTING LIQUID USING THE SAME
    7.
    发明申请
    FLOW PASSAGE DEVICE AND METHOD OF TRANSPORTING LIQUID USING THE SAME 有权
    流动通道装置和使用该液体的液体的运输方法

    公开(公告)号:US20130319534A1

    公开(公告)日:2013-12-05

    申请号:US13985524

    申请日:2012-01-25

    申请人: Masaya Ogura

    发明人: Masaya Ogura

    IPC分类号: B01L3/00

    摘要: A flow passage device is provided, with which a liquid is easily introduced and introduction of air bubbles into a flow passage along with a liquid when the liquid is introduced into the flow passage can be decreased.A flow passage device according to the present invention includes a flow passage through which a fluid flows in a direction different from a vertical direction, an introducing space that has a supply port opening toward the vertical direction and introduces a liquid into the flow passage, and a buffering space that connects the flow passage to the introducing space. The buffering space allows a gas-liquid interface to be formed due to surface tension. A direction in which the gas-liquid interface faces is different from the vertical direction.

    摘要翻译: 提供一种流路装置,通过该流路装置,液体容易引入,并且当液体被引入流路时,可以将气泡与液体一起引入流道中。 根据本发明的流道装置包括流体沿垂直方向不同流动的流道,具有朝向垂直方向开口的供给口并将液体引入流路的引入空间,以及 将流路连接到引入空间的缓冲空间。 缓冲空间允许由于表面张力而形成气 - 液界面。 气液界面面向的方向与垂直方向不同。

    Remote maintenance system
    10.
    发明授权
    Remote maintenance system 失效
    远程维护系统

    公开(公告)号:US07062343B2

    公开(公告)日:2006-06-13

    申请号:US11117455

    申请日:2005-04-29

    IPC分类号: G06F19/00

    摘要: Factories (102–104) have host computers (107) for monitoring industrial equipment (106). Each host computer (107) is connected to a management host computer (108) on a vendor (101) side through the internet (105). The host computer (107) on the factory side detects occurrence of a trouble of the industrial equipment (106) and notifies the vendor side of status information representing a trouble state. In response to this, the host computer (108) on the vendor side notifies the factory side of response information representing a countermeasure against the trouble state.

    摘要翻译: 工厂(102-104)拥有监控工业设备的主机(107)(106)。 每个主计算机(107)通过互联网(105)连接到供应商(101)侧的管理主机计算机(108)。 工厂侧的主计算机(107)检测工业设备(106)的故障的发生,并通知供应商侧表示故障状态的状态信息。 响应于此,供应方侧的主计算机(108)向工厂通知代表针对故障状态的对策的响应信息。