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1.发明申请公开(公告)号：US20070014656A1
公开(公告)日：2007-01-18
申请号：US11480313
申请日：2006-06-29
申请人： Randy Harris , Daniel Woodruff , Paul Wirth , David Mattson , James Erickson
发明人： Randy Harris , Daniel Woodruff , Paul Wirth , David Mattson , James Erickson
IPC分类号： B66C23/00
CPC分类号： H01L21/67742 , H01L21/68707
摘要： End-effectors and associated control and guidance systems and methods are disclosed. A transfer device in one embodiment includes a base unit, an arm carried by the base unit and movable relative to the base unit, and an end-effector carried by the arm and rotatable relative to the arm. The end-effector includes two grippers, at least one being movable toward and away from the other between a grip position and a release position. A transmission is coupled between a motor and the movable gripper to receive an input force from the motor and apply an output force to the gripper that increases as the gripper moves to the grip position.
摘要翻译： 公开了终端效应器和相关的控制和引导系统和方法。 在一个实施例中的传送装置包括基座单元，由基座单元承载并可相对于基座单元运动的臂，以及由臂承载并可相对于臂旋转的端部执行器。 末端执行器包括两个夹持器，至少一个可在夹持位置和释放位置之间朝向和远离另一个移动。 传动装置联接在电动机和可动夹具之间以接收来自电动机的输入力，并且向夹具施加输出力，该夹持器随着夹持器移动到把手位置而增加。
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2.发明申请Integrated tool with interchangeable wet processing components for processing microfeature workpieces and automated calibration systems 有权集成工具，可互换的湿加工部件，用于加工微型工件和自动校准系统公开(公告)号：US20050034809A1
公开(公告)日：2005-02-17
申请号：US10861240
申请日：2004-06-03
申请人： Daniel Woodruff , Jeffry Davis , Randy Harris , David Mattson , James Erickson , Matthew Egloff
发明人： Daniel Woodruff , Jeffry Davis , Randy Harris , David Mattson , James Erickson , Matthew Egloff
IPC分类号： B24B20060101 , C12N15/31 , C23F1/00 , H01L21/00
CPC分类号： H01L21/6719
摘要： An integrated tool and automatic calibration systems that enable wet chemical processing chambers, lift-rotate units and other hardware to be quickly interchanged without having to recalibrate the transport system or other components to the replacement items. These tools are expected to reduce the down time associated with repairing or maintaining processing chambers and/or lift-rotate units so that the tools can maintain a high throughput. Several aspects of these tools are particularly useful for applications that have stringent performance requirements because components are more likely to require maintenance more frequently, and reducing the down time associated with maintaining such components will significantly enhance the integrated tool.
摘要翻译： 集成的工具和自动校准系统，使湿化学处理室，提升 - 旋转单元和其他硬件能够快速互换，而无需重新校准运输系统或其他组件到更换项目。 预计这些工具可以减少与修理或维护处理室和/或提升旋转单元相关联的停机时间，从而使工具能够保持高通量。 这些工具的几个方面对于具有严格性能要求的应用程序特别有用，因为组件更有可能需要更频繁的维护，并且减少与维护这些组件相关联的停机时间将显着增强集成工具。
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公开(公告)号：US20070104559A1
公开(公告)日：2007-05-10
申请号：US11635848
申请日：2006-12-08
IPC分类号： B65H1/00
CPC分类号： H01L21/67259 , H01L21/68707 , Y10S294/907
摘要： End-effectors may be used to grasp microelectronic workpieces for handling by automated transport devices. One such end-effector includes a plurality of end-effectors and a detector adapted to detect engagement of the edge of the workpiece by at least one of the abutments. An alternative end-effector includes at least three abutments, at least one of which is resiliently connected to an actuator for movement between a retracted position and a deployed position wherein it engages a workpiece.
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4.发明申请Integrated tool with automated calibration system and interchangeable wet processing components for processing microfeature workpieces 失效具有自动校准系统的集成工具和可互换的湿加工部件，用于加工微型工件公开(公告)号：US20050109088A1
公开(公告)日：2005-05-26
申请号：US10860385
申请日：2004-06-03
申请人： Daniel Woodruff , David Mattson , James Erickson , Matthew Egloff
发明人： Daniel Woodruff , David Mattson , James Erickson , Matthew Egloff
CPC分类号： H01L21/6723 , B01D61/425 , C25D17/00 , H01L21/67005 , H01L21/6719 , H01L21/67742 , H01L21/68707
摘要： An integrated tool and automatic calibration systems that enable wet chemical processing chambers, lift-rotate units and other hardware to be quickly interchanged without having to recalibrate the transport system or other components to the replacement items. These tools are expected to reduce the down time associated with repairing or maintaining processing chambers and/or lift-rotate units so that the tools can maintain a high throughput. Several aspects of these tools are particularly useful for applications that have stringent performance requirements because components are more likely to require maintenance more frequently, and reducing the down time associated with maintaining such components will significantly enhance the integrated tool.
摘要翻译： 集成的工具和自动校准系统，使湿化学处理室，提升 - 旋转单元和其他硬件能够快速互换，而无需重新校准运输系统或其他组件到更换项目。 预计这些工具可以减少与修理或维护处理室和/或提升旋转单元相关联的停机时间，从而使工具能够保持高通量。 这些工具的几个方面对于具有严格性能要求的应用程序特别有用，因为组件更有可能需要更频繁的维护，并且减少与维护这些组件相关联的停机时间将显着增强集成工具。
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5.发明申请Paddles and enclosures for enhancing mass transfer during processing of microfeature workpieces 有权用于在微型工件加工过程中增强传质的鞍座和外壳公开(公告)号：US20050006241A1
公开(公告)日：2005-01-13
申请号：US10734098
申请日：2003-12-11
IPC分类号： C25D5/00
CPC分类号： C25D5/006 , C25D5/08 , C25D17/001 , C25D17/008 , C25D17/10 , C25D17/12 , C25D21/10 , C25D21/12 , H01L21/6723
摘要： Paddles and enclosures for processing microfeature workpieces are disclosed. A paddle device having multiple paddles is positioned in an enclosure to reciprocate back and forth along a generally linear path. The clearances between the paddles, the workpiece and the walls of the chamber are relatively small to increase the flow agitation at the surface of the workpiece and enhance the mass transfer process occurring there. The paddles are shaped to reduce or eliminate electrical shadowing effects created at the surface of the workpiece during electrochemical processing. Paddles on the same paddle device may have different shapes to reduce the likelihood for creating three-dimensional effects in the flow field proximate to the surface of the workpiece. The reciprocation stroke of the paddles may shift to further reduce shadowing.
摘要翻译： 公开了用于处理微特征工件的鞍座和外壳。 具有多个桨叶的桨装置定位在外壳中，沿着大致线性的路径往复运动。 桨叶，工件和室壁之间的间隙相对较小，以增加工件表面的流动搅拌并增强在那里发生的传质过程。 桨叶的形状可减少或消除在电化学处理期间在工件表面产生的电阴影效应。 相同桨装置上的桨叶可以具有不同的形状，以减少在靠近工件表面的流场中产生三维效应的可能性。 桨叶的往复行程可能会转移以进一步减少阴影。
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6.发明授权Processing apparatus including a reactor for electrochemically etching a microelectronic workpiece 失效包括用于电化学蚀刻微电子工件的反应器的处理装置公开(公告)号：US06773559B2
公开(公告)日：2004-08-10
申请号：US09782216
申请日：2001-02-13
IPC分类号： C25D1700
CPC分类号： H01L21/67086 , C25D5/08 , C25D7/123 , C25D17/001 , C25D17/007 , C25D21/10 , H01L21/67005 , H01L21/67023 , H01L21/67057 , H01L21/6723
摘要： Although there are several inventions disclosed herein, the present application is directed to a reactor for electrochemically processing a microelectronic workpiece. The reactor comprises a movable electrode assembly that is disposed for movement along a motion path. The motion path includes at least a portion thereof over which the electrode assembly is positioned for processing at least one surface of the microelectronic workpiece. A cleaning electrode is located along the motion path of the movable electrode assembly. In one embodiment, a programmable controller is connected to direct the movable electrode assembly to move to the cleaning electrode during a cleaning cycle. At that time, the programmable controller connects the movable electrode assembly as an anode and the cleaning electrode as a cathode for cleaning of the movable electrode assembly. The cleaning electrode may be disposed along a position of the motion path that is beyond the range of motion required to process the microelectronic workpiece so that the programmable controller may be programmed to conduct a cleaning cycle while a microelectronic workpiece is present in the reactor for processing.
摘要翻译： 虽然本文公开了几个发明，但是本申请涉及用于电化学处理微电子工件的反应器。 反应器包括可移动电极组件，其被设置为沿着运动路径移动。 运动路径至少包括一部分，电极组件定位在该部分上用于处理微电子工件的至少一个表面。 沿着可动电极组件的运动路径设置清洁电极。 在一个实施例中，连接可编程控制器以在清洁循环期间引导可移动电极组件移动到清洁电极。 此时，可编程控制器将作为阳极的可动电极组件和作为用于清洁可动电极组件的阴极的清洁电极连接起来。 清洁电极可以沿着运动路径的位置设置，该位置超出处理微电子工件所需的运动范围，使得可编程控制器可以被编程以在微电子工件存在于反应器中进行清洁循环以进行处理 。
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7.发明授权Processing apparatus including a reactor for electrochemically etching microelectronic workpiece 失效包括用于电化学蚀刻微电子工件的反应器的处理装置公开(公告)号：US07524406B2
公开(公告)日：2009-04-28
申请号：US10745190
申请日：2003-12-23
CPC分类号： H01L21/67086 , C25D5/08 , C25D7/123 , C25D17/001 , C25D17/007 , C25D21/10 , H01L21/67005 , H01L21/67023 , H01L21/67057 , H01L21/6723
摘要： Although there are several inventions disclosed herein, the present application is directed to a reactor for electrochemically processing a microelectronic workpiece. The reactor comprises a movable electrode assembly that is disposed for movement along a motion path. The motion path includes at least a portion thereof over which the electrode assembly is positioned for processing at least one surface of the microelectronic workpiece. A cleaning electrode is located along the motion path of the movable electrode assembly. In one embodiment, a programmable controller is connected to direct the movable electrode assembly to move to the cleaning electrode during a cleaning cycle. At that time, the programmable controller connects the movable electrode assembly as an anode and the cleaning electrode as a cathode for cleaning of the movable electrode assembly. The cleaning electrode may be disposed along a position of the motion path that is beyond the range of motion required to process the microelectronic workpiece so that the programmable controller may be programmed to conduct a cleaning cycle while a microelectronic workpiece is present in the reactor for processing.
摘要翻译： 虽然本文公开了几个发明，但是本申请涉及用于电化学处理微电子工件的反应器。 反应器包括可移动电极组件，其被设置为沿着运动路径移动。 运动路径至少包括一部分，电极组件定位在该部分上用于处理微电子工件的至少一个表面。 沿着可动电极组件的运动路径设置清洁电极。 在一个实施例中，连接可编程控制器以在清洁循环期间引导可移动电极组件移动到清洁电极。 此时，可编程控制器将作为阳极的可动电极组件和作为用于清洁可动电极组件的阴极的清洁电极连接起来。 清洁电极可以沿着运动路径的位置设置，该位置超出处理微电子工件所需的运动范围，使得可编程控制器可以被编程以在微电子工件存在于反应器中进行清洁循环以进行处理 。
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8.发明申请Reactors having multiple electrodes and/or enclosed reciprocating paddles, and associated methods 有权具有多个电极和/或封闭的往复式桨的反应器及相关方法公开(公告)号：US20050000817A1
公开(公告)日：2005-01-06
申请号：US10734100
申请日：2003-12-11
IPC分类号： C25D5/00
CPC分类号： C25D5/006 , C25D5/08 , C25D17/001 , C25D17/008 , C25D17/10 , C25D17/12 , C25D21/10 , C25D21/12 , H01L21/6723
摘要： Reactors having multiple electrodes and/or enclosed reciprocating paddles are disclosed. The reactor can include multiple electrodes spaced apart from a process location to provide virtual electrodes proximate to the process location for transferring material to or from the workpiece. A magnet may be positioned proximate to the process plane to orient magnetically sensitive material deposited on the workpiece. The electrodes may be removable from the reactor without passing them through the magnet to reduce interference between the electrodes and the magnet. The workpiece may be carried by a rotatable workpiece support to orient the workpiece for processing. At least one of the electrodes can operate as a current thief to reduce terminal effects at the periphery of the workpiece. An electric field control element positioned between the electrodes and the workpiece circumferentially varies the effect of the thieving electrode current to account for effects created by elongated paddles as they oscillate proximate to the workpiece.
摘要翻译： 公开了具有多个电极和/或封闭的往复式叶片的反应器。 反应器可以包括与处理位置间隔开的多个电极，以提供靠近处理位置的虚拟电极，用于将材料转移到工件或从工件传送材料。 可以将磁体定位成靠近处理平面以定向沉积在工件上的感应敏感材料。 电极可以从反应器中移除，而不会使它们通过磁体，以减少电极和磁体之间的干扰。 工件可以由可旋转的工件支撑件承载以使工件定向以进行加工。 电极中的至少一个可以作为电流窃贼工作，以减少在工件周边处的终端效应。 定位在电极和工件之间的电场控制元件周向地改变了窃电电极电流的影响，以解决细长桨叶在靠近工件振荡时产生的效应。
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9.发明申请Sharps container for "no-touch," sequential safe storage of used pen needles 有权Sharps容器为“无触摸”，顺序安全存放用过的笔针公开(公告)号：US20050269226A1
公开(公告)日：2005-12-08
申请号：US10862835
申请日：2004-06-07
申请人： Thomas Erickson , James Erickson , Timothy Bachman
发明人： Thomas Erickson , James Erickson , Timothy Bachman
CPC分类号： A61M5/3205 , B65D85/24
摘要： A sharps container for safe storage of used pen needles comprises a housing within which is rotatably mounted a used pen needle receiving and ejecting means. Used pen needles are inserted into the receiving means. The receiving and ejecting means is rotated; during the rotation, cam follower means connected to the ejecting means engages cam means within the housing to cause the ejection of the used pen needle into the housing.
摘要翻译： 用于安全储存用过的笔针的锐器容器包括一个外壳，可旋转地安装一个使用过的笔针接收和排出装置。 使用的笔针插入接收装置。 接收和弹出装置旋转; 在旋转期间，连接到排出装置的凸轮从动装置与壳体内的凸轮装置接合以使所用的笔针弹出到壳体中。
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公开(公告)号：US20050209356A1
公开(公告)日：2005-09-22
申请号：US10803071
申请日：2004-03-16
申请人： James Erickson
发明人： James Erickson
IPC分类号： C08L15/00 , C08L53/00 , C09J115/00 , C09J153/02
CPC分类号： C09J115/00 , C08C19/02 , C08C19/06 , C08L15/00 , C08L2205/02 , C08L2666/02 , C09J153/025
摘要： UV curable adhesives are provided that comprise epoxidized monohydroxylated polydiene polymers, hydrogenated hydroxylated polydiene polymers, and selectively hydrogenated starblock copolymers. The adhesive formulations provide both excellent room temperature properties of tack and peel and excellent holding power at temperatures as high as 95° C.
摘要翻译： 提供了包含环氧化的单羟基化聚二烯烃聚合物，氢化羟基化聚二烯烃聚合物和选择性氢化星形嵌段共聚物的UV可固化粘合剂。 粘合剂配方在高达95℃的温度下提供粘合和剥离的优异的室温性能和优异的保持力。
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